共查询到16条相似文献,搜索用时 93 毫秒
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严格耦合波法计算闪耀光栅衍射效率 总被引:2,自引:0,他引:2
针对一般标量近似算法精度不高的问题,提出采用S矩阵的严格耦合波的方法计算光栅衍射效率.通过建立完整的闪耀光栅理论模型,对各分层电磁场进行傅里叶级数展开,采用散射矩阵方法求解各谐波系数,完成衍射效率计算.该方法已应用到红外光栅TE和TM 2种模式衍射效率的计算.分析了散射矩阵解决数值运算不稳定的原因,通过与标量近似计算方法进行比较,说明红外光栅衍射偏振特性. 相似文献
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基于标量衍射理论讨论了软X射线自支撑闪耀透射光栅的特性并设计了光栅的结构参数. 采用全息光刻和湿法腐蚀技术, 成功制作了周期1 μm、占空比0.1---0.2、高宽比约100、栅线厚度10 μm、 有效面积比为65%的自支撑闪耀透射光栅. 单元尺寸为15mm× 15mm的硅绝缘体上含有四个5 mm× 5 mm的自支撑闪耀透射光栅窗口. 在国家同步辐射实验室检测了该光栅在5---50 nm波长范围内的衍射效率. 波长扫描测量结果表明, 闪耀效应明显地发生在类似镜面的光栅侧壁镜面反射方向上, 闪耀级次位置及其特征与标量理论预测的一致. 衍射效率的实测结果基本与理论模拟符合, 只是因光栅结构上的缺陷致使衍射效率偏低, 峰值只有理论值的38---49%. 实验结果证明了闪耀透射光栅的概念和湿法制作工艺的可行性. 相似文献
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将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。 相似文献
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亚波长介质光栅的闪耀特性分析 总被引:1,自引:1,他引:0
采用严格耦合波理论与矩阵LU分解法,求解了亚波长矩形介质光栅的衍射场,给出了TE和TM偏振波的耦合波方程组及其矩阵形式.通过数值计算分析了TE和TM偏振波的入射角、刻槽深度、入射波长等参量对+1级衍射波衍射效率的影响.结果表明,当Λ=0.5λ0,θ=55°,d=0.38λ0,λ=10.6 μm时可以实现对TE偏振波+1级的闪耀,衍射效率达到近90%,同时具有较宽广的角度适应范围. 相似文献
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基于对体光栅衍射效率的计算分析,本文直接地、精细地讨论了体光栅的功率守恒问题.结果指出:弱耦合前提假定下的双波耦合波二阶理论,不能严格地满足能量平衡准则. 相似文献
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采用模态法研究了共振域光栅分束器及闪耀光栅等光学器件的设计原理及逆向设计方法,给出了-1级非偏振闪耀光栅的典型设计示例。研究表明,自准直角入射时,光束在光栅内传输将激发产生离散模,通过调节离散模透过光栅传输时的累积相位差,可对衍射光进行调控,实现偏振(非偏振)分束、偏振(非偏振)闪耀等功能。采用严格耦合波法对基于模态法逆向设计的-1级非偏振石英闪耀光栅的几何参数进行验证,计算结果显示两者非常吻合,证明了该方法的正确性。 相似文献
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《中国光学快报(英文版)》2017,(3)
An optical sensor is designed to support the Fano effect based on a compound resonant waveguide grating(CRWG).The transmission spectra of the CRWG are investigated by utilizing a theoretical method that combines the temporal coupled mode theory with the eigenmode information of the grating structure.The theoretical results,which are observed to agree closely with those acquired by rigorous coupled-wave analysis,show that the linewidth of the transmission spectrum decreases upon increasing the distance between the grating strips,and the central resonance frequency decreases as the refractive index of the analyte increases.Here,the proposed CRWG structures will find potential uses in optical sensing. 相似文献
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The period interaction on diffraction of the blazed transmission gratings is analyzed with a modified extended scalar theory. For one certain period, the lights reflected from the neighboring structures can be refracted by the grating facets and form two extra fields on the bottom facet of blazed transmission gratings. The effects of this period interaction versus several diffraction orders for a fixed fabrication error of blazed transmission gratings with intermediate structures are discussed for both TE and TM polarizations. The results have been compared with those obtained with finite-difference time-domain method. 相似文献
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The energy density distribution of the diffracted ultraviolet field from a phase mask used for fiber Bragg grating fabrication is efficiently analyzed at short-to-intermediate distances by application of a thin phase screen model and the angular spectrum decomposition method. A direct comparison with the results obtained from a rigorous coupled-wave model shows good agreement. 相似文献
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Jorge Francés Sergio Bleda Sergi Gallego Cristian Neipp Andrés Márquez Inmaculada Pascual Augusto Beléndez 《Physics letters. A》2013,377(34-36):2245-2250
A set of simplified and rigorous electromagnetic vector theories is used for analyzing the transmittance characteristics of diffraction phase gratings. The scalar diffraction theory and the effective medium theory are validated with the exact results obtained via the rigorous coupled-wave theory and the finite-difference time-domain method. The effects of surface profile parameters and also the angle of incidence is demonstrated to be a limiting factor in the accuracy of these theories. Therefore, the error of both simplified theories is also analyzed in non-paraxial domain with the intention of establishing a specific range of validity for both simplified theories. 相似文献