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光学自由曲面的检测方法 总被引:3,自引:0,他引:3
针对自由曲面光学元件离轴像差小,应用广泛,但检测难度大,加工精度不够高等特点,对现行的自由曲面光学检测方法进行了分析。提出了在自由曲面光学元件的不同加工阶段宜采用不同的检测手段,根据加工的步骤依次采用三坐标机、轮廓仪、光学干涉测量等方法为好。介绍了子孔径拼接技术的发展,叙述了利用计算全息(CGH)和反射光栅摄影测量法检测光学自由曲面等两种有着良好发展前景的方法。最后,给出了利用CGH检测三次位相板的实例。 相似文献
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针对自由曲面光学元件离轴像差小,应用广泛,但检测难度大,加工精度不够高等特点,对现行的自由曲面光学检测方法进行了分析。提出了在自由曲面光学元件的不同加工阶段宜采用不同的检测手段,根据加工的步骤依次采用三坐标机、轮廓仪、光学干涉测量等方法为好。介绍了子孔径拼接技术的发展,叙述了利用计算全息(CGH)和反射光栅摄影测量法检测光学自由曲面等两种有着良好发展前景的方法。最后,给出了利用CGH检测三次位相板的实例。 相似文献
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针对飞秒激光远距离成丝系统所产生的像差,基于光学自由曲面较强的像差补偿能力,提出了在飞秒激光成丝系统中使用透射式自由曲面相位板补偿系统像差的方法。首先,在光学设计软件中对实际系统像差特性进行了仿真建模。然后,对透射式自由曲面相位板进行了优化设计,优化后系统的像差得到了有效补偿,飞秒激光光斑质量得到了改善。最后,对优化设计后的自由曲面相位板进行了公差分析,并利用加工后的透射式自由曲面相位板开展了实验研究。结果表明,飞秒激光聚焦系统引入光学自由曲面相位板后,聚焦光斑形状规则,在聚焦位置处光斑的均方根(RMS)半径小于0.5 mm,飞秒激光成丝系统的像差得到了有效补偿,远距离飞秒激光的成丝强度得到了有效提高。 相似文献
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对于梯度变化较大的光学自由曲面,采用模式化方法对光学面整体重构,其重构精度受到限制,无法满足要求,而且曲面局部特性无法精确表征。针对以上问题提出了基于Zernike多项式和径向基函数的自由曲面重构方法,提高自由曲面的重构精度。将整个自由曲面分解为多个圆形子区域,在各个圆形子域中采用Zernike多项式作为基函数进行曲面局部拟合,然后利用径向基函数形成整个自由曲面。通过数值实验对5种不同类型的曲面进行重构分析,实验结果表明,自由曲面重构精度优于纳米量级,验证了所提重构方法的适应性和高精度,在现代光学系统制造和检测中具有一定的应用前景,同时对自由曲面重构中的一些关键问题进行了讨论分析。 相似文献
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Subwavelength optical element such as guided-mode resonance filter has gained much interest recently due to its properties and applications. It is very hard to fabricate an ideal guided-mode resonance filter with the same parameters as the designed one. The reason is that the resonance wavelength of guided-mode resonance filter is susceptible to the fabrication errors of its parameters, such as the period, the groove depth, the thickness of a guided-wave layer, and the refraction indexes of materials, etc. In this article, a method to accurately control the period of subwavelength planar holographic grating which was used as a sub-layer of the guided mode resonance filter is investigated. Results show that utilizing a convex lens placed in the exposure position can cause the adjusting of the period of subwavelength planar grating more convenient in the holographic optical path during the fabrication process. Accuracy controlling the period of grating which was used as the sub-layer of guided-mode resonance filter has great significance in the fabrication of guided-mode resonance filter. 相似文献
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F. Zernike 《Optics Communications》1974,12(4):379-381
Since the apparent refractive index of an optical waveguide depends on its thickness, elements with varying index are relatively easy to fabricate. A method used to make an almost aberration free lens is presented. 相似文献
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为了同时对长焦透镜的面形和焦距进行高精度检测,提出在Zygo干涉仪的球面光路中加入一个二元衍射元件作为检测件的计算全息法。 首先对计算全息法检测长焦透镜的面形和焦距进行了理论推导,并给出焦距误差公式。在Zemax中使用在平面基底上制作的二元衍射元件对一个长焦透镜的面形和焦距进行了模拟检测,其中对该长焦透镜面形的干涉检测PV值为0.0034λ,对焦距的检测精度为-0.11%。最后详细分析了两类误差对检测结果的影响,其中光学元件的位置误差影响不超过0.1λ;二元衍射元件的制造误差影响约0.01λ,在具体制造过程中,其径向位置误差和台阶误差可分别在2 μm和5 nm之内。在综合考虑各项误差的情况下,该方法的检测精度仍然可控制在2λ/25之内。 相似文献
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Subwavelength beam manipulation via multiple-metal slits coupled by disk-shaped nanocavity 下载免费PDF全文
A novel plasmonic structure consisting of three nano-scaled slits coupled by nano-disk-shaped nanocavities is pro- posed to produce subwavelength focusing and beam bending at optical frequencies. The incident light passes through the metal slits in the form of surface plasmon polaritons (SPPs) ,and then scatters into radiation fields. Numerical simulations using finite-difference time-domain (FDTD) method show that the transmitted fields through the design example can gener- ate light focusing and deflection by altering the refractive index of the coupled nanocavity. The simulation results indicate that the focal spot is beyond the diffraction limit. Light impinges on the surface at an angle to the optical axis will add an extra planar phase front that interferes with the asymmetric phase front of the plasmonic lens, leading to a larger bending angle off the axial direction. The advantages of the proposed plasmonic lens are smaller device size and ease of fabrication. Such geometries offer the potential to be controlled by using nano-positior!i0g systems for applications in dynamic beam shaping and scanning on the nanoscale. 相似文献
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质子注入型面发射激光器相干耦合阵列能够实现同相模式的激射,但是由于制作过程中的工艺不均匀性引起单元间存在相位差,影响光束的质量。本文通过设计分离电极结构,使每个单元注入的电流得到分别的控制,实现了3单元三角排列阵列高光束质量同相耦合模式的激射。阵列远场发散角仅为3.4°,大约有25.6%的全部能量聚集在中心光斑。激射光谱的线宽为0.24 nm,边模抑制比为27 dB。该方法能够有效提高相干耦合阵列的光束质量,弥补制作工艺中引入的单元不均匀性,提高器件的可靠性和实用性。质子注入方法简单、成本低,能够成为制作高光束质量相干耦合阵列的一个重要方法。 相似文献
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Aberration invariant optical/digital incoherent systems 总被引:1,自引:0,他引:1
We have developed a fundamental technique for control of important known and unknown lens aberrations. Control of lens aberrations through traditional means is very difficult in high-performance optical systems. Minimizing aberrations caused by deterministic design errors as well as statistical fabrication errors has often led to costly systems and fabrication techniques. By employing a special-purpose optical phase mask and digital signal processing we can form imaging systems that are invariant, or substantially insensitive, to a number of important lens aberrations. 相似文献
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Batch Assembly Micro-Ball Lens Array for Si-Based Optical Coupling Platform in Free Space 总被引:1,自引:0,他引:1
The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer which can improve the appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of a self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purposes. The structure of optical coupling platform is able to improve the distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5 dB with wavelength 635 nm in singlemode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded onto a flat-topped mesa that adjoins to the v-groove. The corner compensation offers a method to fabricate the flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.This paper was originally presented at the 2001 International Conference (2nd Joint OSJ-SPIE Conference) on Optical Engineering for Sensing and Nanotechnology, ICOSN 2001 which was held June 6-8, 2001 at the Pacifico-Yokohama Conference Center, Yokohama, Japan. 相似文献
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电场作用下的变焦非球面液滴微透镜 总被引:5,自引:1,他引:4
提出了一种制作变焦非球面液滴微透镜并在线检测其光学性能的新方法。在实时进行光学检测的条件下,选择光固化材料,利用电场作用操控液滴透镜的面形实现变焦,在检测到较好的透镜面形和聚焦状态时,采用紫外光固化技术使液滴透镜固化,可制作具有良好光学成像和聚焦性能的非球面微透镜。研制了紫外光固化非球面液滴微透镜制作平台及在线检测系统,实验观察并讨论了液滴透镜面形和聚焦光斑随电场作用的变化规律,成功实现了液滴透镜的变焦,并获得了良好的非球面面形和聚焦光斑,证明了用此方法制作高成像性能的非球面微透镜的可行性。 相似文献
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渐进多焦点眼镜片能够同时满足视远与视近的需求,其应用日益广泛.本文介绍了渐进多焦点镜片的设计与评价方法,在此基础上通过对镜片面形方程及球面度方程求解偏微分,构建了渐进多焦点镜片光焦度分布与面形误差的关系模型.根据国家标准规定的镜片有效区域实际屈光度与名义值差值小于0.1 D的要求,对加光度为2.0D(6.0D8.0D)的渐进面面形误差进行了实例分析.应用给定的面形误差结果进行实验加工的镜片,经分析后实验输出的光焦度变化符合所设定的国家标准要求的范围,进一步验证了面形误差与光焦度分布关系模型的正确性,为渐进多焦点镜片加工的面形控制精度提供理论依据. 相似文献