Ф1300mm非球面反射镜的加工与检测

介绍一块Ф1300mmULE材料非球面反射镜的加工与检测方法。采用非球面超声铣磨、机器人研抛等多个工序组合加工技术完成了非球面反射镜的加工。在非球面检测中,采用大口径三坐标测量的方法进行了研磨阶段的面形检测,通过Z向滤波的方法对面形拟合过程中的噪点误差进行了处理,将研磨阶段的面形精度提高至5μm PV值。在干涉仪测量阶段,采用气囊支撑方法对反射镜的重力误差进行了卸载,通过非线性误差矫正的方法去除了零位补偿检测所带来的非线性误差,反射镜的最终精度达到0.016λRMS。试验结果表明,大口径非球面反射镜各项技术指标均满足设计要求,所用工艺方法适用于加工更大口径的非球面反射镜及其他类型的大口径非球面光学元件。     

纤维光学 其他

TN25 2006032348光纤端面研磨加工的表面质量=Surface quality in end-face lapping of optical fiber[刊,中]/刘德福(中南大学机电工程学院.湖南,长沙(410083)) ,段吉安…∥机械工程学报.—2006 ,42(2) .—187-195选用粒度为0 .5 ~6 .0μm金刚石磨料砂纸,在KE-OFP-12型光纤连接器研磨机上对光纤端面进行研磨,发现光纤研磨加工存在脆性断裂、半脆性半延性和延性等三种材料去除模式,且材料去除模式主要由磨料粒度控制,磨料粒度为3μm时,为其脆延转换的临界点,并从理论上对其进行了分析。试验证明以延性去除得到的光纤表面粗糙度远低于以…     

超声滚压中的空化现象*

在超声滚压加工中引入切削液后可能会产生空化现象,由此产生的微射流和冲击波对超声表面强化将有积极作用。为研究超声滚压加工中空化现象是否存在及空化效应在超声滚压中的作用,本文首先分析了超声滚压中的空化阈值,然后进行了染色法试验和超声滚压后试样氧元素能谱分析,最后通过超声滚压加工对比试验研究了空化效应对加工后材料表面粗糙度和显微硬度的影响。研究发现,超声滚压加工中的声压幅值远大于空化阈值,满足空化存在的必要条件;超声滚压中发生了明显的卡纸染色现象,引入切削液后工件超声滚压加工表面氧元素含量显著提高,表明超声滚压中发生了空化现象。超声滚压加工中的空化效应能进一步降低工件表面粗糙度和提高表面显微硬度,有利于提高工件表面强化质量。本研究为空化效应在超声滚压中的积极利用提供了依据。     

微型轴承内滚道超声辅助超精研磨系统的设计研究*

为了提高5G基站中微型轴承的精度和使用寿命,基于微型轴承外套圈结构特征提出一种超声振动辅助研磨轴承外圈滚道的加工工艺。通过坐标变换及运动合成,获得了振动研磨轴承外圈滚道的工作面轨迹特点,阐明了振动高效研磨的本质特征;之后,分别采用等效电路法和有限分析法,建立了振动系统的等效电路图与频率方程,分析了该系统模型的固有模态与谐响应特性;最后,通过对自行研制的超声辅助研磨系统分别进行振动特性测试和加工效果测试。结果表明,加工系统振动频率相对设计频率的误差率为10‰,超声振幅为12.95μm,加工轴承滚道的粗糙度和轮廓度较传统研磨加工分别降低了27.17%和24.1%。     

超声研磨抛光机

最近国外生产出各种规格型号的超声研磨抛光机.主要用于注塑模、压铸模和冲压模等模具表面的研磨处理和镜面抛光.特别是去除电火花加工所形成的硬化层,研磨模具上的肋、缝、锥形孔和其它各种形状孔的表面,很简易而快捷. 对非铁磁材料和超硬金属都能有效地将粗糙表面研磨成镜面.手持工具重轻、省力省时,即使长时间工     

超光滑加工精磨过程中损伤层与余量匹配的研究

对超光滑加工散粒研磨工序中采用的三级精磨法,进行了实验研究,通过改进差分化学刻蚀实验测出各级损伤层的厚度,利用损伤层厚度对加工余量匹配进行了优化。研究表明损伤层厚度与砂粒的粒径和压载之积成线性关系,与研磨时长无关;实验测得W28、W10、W5号磨料在实验条件下研磨加工产生的损伤层厚度分别为12.4μm、8.2μm、5.8μm;并根据损伤层厚度提出了加工余量的匹配建议方案。损伤层的相关研究为超光滑加工中提高生产效率以及减少麻点产生几率的研究提供了参考。     

双图案非均匀耦合固结磨盘的设计及实验研究

针对传统固结磨盘因其表面沟槽形式单一而难以保证蓝宝石等硬脆性材料加工质量的问题,提出了一种螺旋-同心圆双图案非均匀耦合结构的新型固结磨盘(DPP)设计,并进行了实验研究。DPP采用螺旋槽作为排屑槽,降低了磨盘表面的堵塞程度,以保证加工表面获得低粗糙度,延长工具使用寿命;采用同心圆槽调整磨盘表面磨粒分布,提高了磨盘对工件材料的去除均匀性,以保证加工表面获得更高的平坦度。基于该设计原理,制备了用于蓝宝石加工的新型磨盘,并与传统网格槽型盘(GGP)进行对比。实验结果表明:采用DPP加工时工件表面的凹坑划痕数量更少,约为GGP的35%;研磨后磨盘表面堵塞程度更低,约为GGP的30%。虽然,采用DPP加工时工件材料去除率较GGP低14%,但是材料去除厚度非均匀性为0.0494,比GGP低32%,表面粗糙度为129.4μm,比GGP低16.2%。因此,采用DPP加工时工件材料去除分布更均匀,工件表面质量更好。实验结果证明:DPP不仅可以获得更好的工件表面质量,还可以延长磨盘的使用寿命,可满足对高质量表面、大规模生产蓝宝石等脆硬材料的精密研磨加工需求。     

窄脉宽激光诱导背向选择性去除金属薄膜制备微电路(特邀)EI北大核心CSCD

为了在透明基板上制备出导电性能良好的微电路,研究了窄脉宽激光正向和背向选择性去除金属薄膜制备的微结构形貌特征,开展了纳秒激光选择性去除Cu薄膜(厚度为150 nm)的实验和温度场仿真研究,揭示了正、背面去除的烧蚀机理和材料的喷射机制。实验结果表明,当激光脉冲能量为0.270~0.542μJ,扫描速度为2 mm/s时,激光诱导背向去除金属薄膜在加工质量方面优于正向加工,其去除几何精度高,轮廓边缘平整,几乎没有溅射。采用优化后的纳秒激光加工工艺参数,激光脉冲能量为0.403μJ,扫描速度2 mm/s,扫描线间距为3μm,制备出均匀分布的铜阵列图案。在相同参数下对玻璃基板上的铜薄膜背向选择性去除,得到具有良好导电性和粘附性的微电路。     

碟形超声变幅杆的设计

优化超声变幅杆的形状结构可有效地提高水域声场分布和空化区域,提升对水域超声空化效果。通过模拟分析发现传统超声变幅杆在水域中具有声场分布均匀性差、变幅杆端部声压高等特征,不利于声波在水域中传播。基于此,提出并优化设计了一种具有碟形结构的变幅杆,位于变幅杆的最大振幅处的碟形结构,有更大的振动位移;模拟表明其水域声场和声压均衡度显著优于传统变幅杆,铝箔空化腐蚀实验进一步证实了其水域中的声压分布均匀性。同时,实验通过铝箔的空化腐蚀、KI剂量测定及工件表面油渍去除对比了传统变幅杆和碟形变幅杆,分析表明碟形变幅杆所在水域中有较大的空化腐蚀区域,腐蚀速率明显提升,声化学反应速率提高,油渍去除程度增强,说明了设计的碟形变幅杆能够促进空化泡的产生,增加水域空化区域。     

超声空化去毛刺的理论分析及数值仿真

随着制造业的不断发展,对产品的加工精度要求愈来愈高,然而微小毛刺的去除仍然是十分困难的。毛刺虽小但危害巨大。因此,有效去除毛刺已成为加工中不可或缺的工序。而超声波去毛刺法可以有效快速的去除复杂零件的微小毛刺,具有很高的实用价值。尽管超声波的相关理论日趋完善,但是超声去毛刺机理以及空化产生的高压对毛刺的影响缺乏一些理论参考。此文阐述了超声波去毛刺的基本原理,利用有限元软件ABAQUS对单个空化泡在毛刺上的溃灭过程进行数值仿真,证明了超声波去毛刺的可行性,通过实验验证,超声波能够有效的去除毛刺。其研究结果为进一步研究超声波去毛刺的理论提供了参考。     

Damage characteristics and surface description of near-wall materials subjected to ultrasonic cavitation

For the analysis of ultrasonic cavitation erosion on the surface of materials, the ultrasonic cavitation erosion experiments for AlCu4Mg1 and Ti6Al4V were carried out, and the changes of surface topography, surface roughness, and Vickers hardness were explored. Cavitation pits gradually expand and deepen with the increase of experiment time, and Ti6Al4V is more difficult to erode by cavitation than AlCu4Mg1. After experiments, the cavitation damage characteristics such as the single pit, the rainbow ring area, the fisheye pit, and some small pits were observed, which can be considered to be induced by a single micro-jet impact, ablation effect caused by the high temperature, micro-jet impingement with a sharp angle, and multibeam micro-jets coupling impact or negative pressure in the local area produced by micro-jet impact, respectively. The surface roughness and Vickers hardness of the material increase slowly after rapid growth at different points in time as the experiment time increases. With the increase of the ultrasonic amplitude, both of them first increase and then decrease after the ultrasonic amplitude is greater than 10.8 μm. The increases in surface roughness and Vickers hardness tend to decrease as the viscosity coefficient increases. Ultrasonic cavitation can cause submicron surface roughness and increase surface hardness by 20.36%, so it can be used as a surface treatment method.     

减小薄板玻璃工件研磨变形的研究

针对薄板玻璃刚度差，在研磨中易产生变形这一特点，探讨了减小其变形的不同方法。我们用传统的上盘法粘结固定工件进行加工，工件在下盘前面形精度较好，能满足要求（在２５ｍｍ×２５ｍｍ面积上的平面度为０．０５μｍ），但在下盘后产生的变形使其面形精度下降，在２５ｍｍ×２５ｍｍ面积上的平面度为０．２μｍ，已不能满足要求。采用真空吸附法国固定工件，消除了工件在粘结过程中由于温度变化产生的变形，而且在研磨过程中又设法减小对工件施加的压力，从而减小了工件在研磨过程中产生的变形，使加工后的工件面形与加工过程中的面形接近，这就保证了工件的面形精度。     

Improved biofilm removal using cavitation from a dental ultrasonic scaler vibrating in carbonated water

The use of cavitation for improving biofilm cleaning is of great interest. There is no system at present that removes the biofilm from medical implants effectively and specifically from dental implants. Cavitation generated by a vibrating dental ultrasonic scaler tip can clean biomaterials such as dental implants. However, the cleaning process must be significantly accelerated for clinical applications. In this study we investigated whether the cavitation could be increased, by operating the scaler in carbonated water with different CO₂ concentrations. The cavitation around an ultrasonic scaler tip was recorded with high speed imaging. Image analysis was used to calculate the area of cavitation. Bacterial biofilm was grown on surfaces and its removal was imaged with a high speed camera using the ultrasonic scaler in still and carbonated water. Cavitation increases significantly with increasing carbonation. Cavitation also started earlier around the tips when they were in carbonated water compared to non-carbonated water. Significantly more biofilm was removed when the scaler was operated in carbonated water. Our results suggest that using carbonated water could significantly increase and accelerate cavitation around ultrasonic scalers in a clinical situation and thus improve biofilm removal from dental implants and other biomaterials.     

Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate

The sapphire substrates are polished by traditional chemical mechanical polishing (CMP) and ultrasonic flexural vibration (UFV) assisted CMP (UFV-CMP) respectively with different pressures. UFV-CMP combines the functions of traditional CMP and ultrasonic machining (USM) and has special characteristics, which is that ultrasonic vibrations of the rotating polishing head are in both horizontal and vertical directions. The material removal rates (MRRs) and the polished surface morphology of CMP and UFV-CMP are compared. The MRR of UFV-CMP is two times larger than that of traditional CMP. The surface roughness (root mean square, RMS) of the polished sapphire substrate of UFV-CMP is 0.83 Å measured by the atomic force microscopy (AFM), which is much better than 2.12 Å obtained using the traditional CMP. And the surface flatness of UFV-CMP is 0.12 μm, which is also better than 0.23 μm of the traditional CMP. The results show that UFV-CMP is able to improve the MRR and finished surface quality of the sapphire substrates greatly. The material removal and surface polishing mechanisms of sapphire in UFV-CMP are discussed too.     

MnO2/CeO2 for catalytic ultrasonic degradation of methyl orange

Catalytic ultrasonic degradation of aqueous methyl orange was studied in this paper. Heterogeneous catalyst MnO₂/CeO₂ was prepared by impregnation of manganese oxide on cerium oxide. Morphology and specific surface area of MnO₂/CeO₂ catalyst were characterized and its composition was determined. Results showed big differences between fresh and used catalyst. The removal efficiency of methyl orange by MnO₂/CeO₂ catalytic ultrasonic process was investigated. Results showed that ultrasonic process could remove 3.5% of methyl orange while catalytic ultrasonic process could remove 85% of methyl orange in 10 min. The effects of free radical scavengers were studied to determine the role of hydroxyl free radical in catalytic ultrasonic process. Results showed that methyl orange degradation efficiency declined after adding free radical scavengers, illustrating that hydroxyl free radical played an important role in degrading methyl orange. Theoretic analysis showed that the resonance size of cavitation bubbles was comparable with the size of catalyst particles. Thus, catalyst particles might act as cavitation nucleus and enhance ultrasonic cavitation effects. Measurement of H₂O₂ concentration in catalytic ultrasonic process confirmed this hypothesis. Effects of pre-adsorption on catalytic ultrasonic process were examined. Pre-adsorption significantly improved methyl orange removal. The potential explanation was that methyl orange molecules adsorbed on catalysts could enter cavitation bubbles and undergo stronger cavitation.     

Numerical study of the synergistic effect of cavitation and micro-abrasive particles

In ultrasonic-assisted machining, the synergistic effect of the cavitation effect and micro-abrasive particles plays a crucial role. Studies have focused on the investigation of the micro-abrasive particles, cavitation micro-jets, and cavitation shock waves either individually or in pairs. To investigate the synergy of shock waves and micro-jets generated by cavitation with micro-abrasive particles in ultrasonic-assisted machining, the continuous control equations of a cavitation bubble, shock wave, micro-jet, and micro-abrasive particle influenced by the dimensionless amount (R/R₀), a particle size-velocity–pressure model of the micro-abrasive particle was established. The effects of ultrasonic frequency, sound pressure amplitude, and changes in particle size on micro-abrasive particle velocity and pressure were numerically simulated. At an ultrasonic frequency of 20 kHz and ultrasonic sound pressure of 0.1125 MPa, a smooth spherical SiO₂ micro-abrasive particle (size = 5 µm) was obtained, with a maximum velocity of 190.3–209.4 m/s and pressure of 79.69–89.41 MPa. The results show that in the range of 5–50 μm, smaller particle sizes of the micro-abrasive particles led to greater velocity and pressure. The shock waves, micro-jets, and micro-abrasive particles were all positively affected by the dimensionless amount (R/R₀) of cavitation bubble collapse, the larger the dimensionless quantity, the faster their velocity and the higher their pressure.     

Surface behavior during abrasive grain action in the glass lapping process

In this study the surface behavior during its contact with the abrasive grain in the glass lapping process was studied using practical simulation which is the scratch test and the real contact between glass surfaces and α-alumina abrasive grains during lapping process. Formations and dimensions of the produced scratches were investigated to explain the grain action on the surface and the glass material removal rate. It has been found that humid environment created by the use of the slurry of loose abrasives causes more significant damages than the dry one. The use of slurry produces higher glass material removal rate in this environment and proves its utility in the lapping process. The shape of abrasive grains influences the nature of their action. Indeed, the worn grains produce scratches and chippings less than the sharp grains. During lapping, the number of scratches and theirs dimensions depend on the contact time and the abrasive grain size. It was concluded that the glass material removal rate during lapping depends on the cumulative actions of individual grains which produce scratches and chippings.     

超声空化现象影响因素的实验研究

超声空化在许多不同的学科和工业生产中有着广泛的应用。超声空化的应用与声场的分布及空化的机理密切相关,精准地反映空化场和空化机理是超声空化技术实际应用的关键。该文通过分析采集的声信号和金属箔膜空蚀法对空化区域随液位发生变化的现象进行研究,并利用Matlab对金属箔膜空蚀程度量化。实验发现,超声波会在液面与实验箱体底部形成驻波场。在某一液体温度下,随着液位高度的变化,超声空化现象的出现具有周期性。并且,在同一液位下,当超声功率改变时,空化区域强度分布情况随之改变。小功率时各空化区域空化强度分布均匀,当功率增大到一定时,会出现空化屏蔽现象。该研究为超声清洗设备的改良提供了借鉴,对进一步认识和利用超声空化效应具有重要意义。     

Study on a novel omnidirectional ultrasonic cavitation removal system for Microcystis aeruginosa

Microcystis aeruginosa, as a typical alga, produces microcystin with strong liver toxicity, seriously endangering the liver health of human and animals. Inhibiting the bloom of the Microcystis aeruginosa in lakes becomes a significant and meaningful work. Ultrasonic cavitation is currently considered to be the most environmentally friendly and effective method for the removal of Microcystis aeruginosa. However, the commercialized ultrasonic algae removal systems require multi-Langevin transducers to achieve omnidirectional ultrasonic irradiation due to the single irradiation direction of the Langevin transducer, resulting in the complex design and high energy consumption. To achieve a low-cost, simple structure, and high-efficiency algae removal system, a novel omnidirectional ultrasonic cavitation removal system for Microcystis aeruginosa is proposed. The proposed system is major composed of a novel omnidirectional ultrasonic transducer, which generates the omnidirectional ultrasonic irradiation by its shaking-head motion coupled by two orthogonal bending vibration modes. Modal simulation, sound field simulation, and cavitation bubble radius simulation are first carried out to optimize the geometric sizes of the proposed transducer and verify the correctness of the omnidirectional ultrasonic irradiation principle. Then the vibration characteristics of the transducer prototype are measured by vibration tests and impedance tests. Finally, the feasibility and effectiveness of the proposed omnidirectional ultrasonic removal system for Microcystis aeruginosa are evaluated through the algae removal experiments. The experimental results exhibit that the algal cells damaged by ultrasonic irradiation from the proposed system do not have the ability to self-repair. In addition, the algal removal rates reached 55.41% and 72.97% after 30 min of ultrasonic treatment when the corresponding ultrasonic densities are 0.014 W/mL and 0.021 W/mL, respectively. The proposed omnidirectional ultrasonic algae removal system significantly simplifies the configuration and reduces energy consumption, presenting the potential promise of algae removal and environmental protection.     

超声振动珩磨作用下空化泡动力学及影响参数

为了合理利用超声振动珩磨作用下的空化效应,以磨削区单个空化泡为研究对象,考虑珩磨头合成扰动速度和珩磨压力的作用建立了磨削区空化泡的动力学模型。数值模拟了空化泡初始半径,珩磨压力,液体静压力和超声声压幅值对磨削区空化效应的影响。研究表明考虑超声振动珩磨作用时,空化泡膨胀的幅值会受到抑制,其溃灭时间也会缩短,而且较容易出现稳态空化。珩磨压力和液体静压力对磨削区空化主要起抑制作用,超声波声压幅值在一定范围内能够促进磨削区空化效果的提升。本文的研究为进一步理解超声振动珩磨的空化机理提供了理论支持。