弯曲旋转超声电机接触界面锥形角的分析与实验

要提高弯曲旋转超声电机电能转换为机械能的效率,就必须尽量减小其定子与转子之间的相对滑移。并且要使马达定转子之间的摩擦接触界面与接触点的振动轨迹相垂直。先论证了一种数学方法去推算这种弯曲旋转超声电机接触界面的锥角计算公式。然后以压电管超声电机为例,研制了一些外径5mm、内径4mm、长15mm但接触界面锥角不同的样机,通过实验证明马达定转子之间的摩擦接触界面与接触点的振动轨迹相垂直时马达转动效果最好。计算结果与实验结果非常吻合,证明了锥角计算公式的正确性。     

柱状弯曲超声波电机的定转子接触方式和力传递模型

柱状弯曲超声波电机在相机的镜头调焦、电动窗帘以及各种MEMS的微驱动等领域具有广泛的应用前景。本文针对柱状弯曲超声波电机,理论和实验提示了定、转子的单点和双点接触方式,提出了临界预紧力概念,给出了这两种方式下的定、转子间的力接触传递关系,进而给出了电机的机械特性和工作效率计算式,结合研制的电机样机进行分析,验证了本模型的准确性,并分析了电机性能与预紧力的关系。研制的φ14 mm的电机样机,实现堵转转矩达0.11 Nm,空转转速为300 r/min左右。     

1mm压电柱式超声微电机的研制

介绍了一种超声波微电机的设计研制工作。这种基于压电柱弯曲振动模态的超声波微电机,其直径仅有1 mm细,长约5 mm,重量仅有36 mg。它是采用压电柱作为定子,在压电柱的表面均匀分割出四个电极,进行极化和施加驱动电压。详细介绍了极化方式的选择,电极间隔的优化设计以及对原型样机的性能测试。实验表明,该电机能承受350Vpp的驱动电压,获得1800 rpm的转速和4 μNm的堵转力炬。此外,这种电机具有明显的微型化优势,根据现有工艺还可使电机直径减小到0.5 mm左右。     

圆筒型行波非接触超声马达的激励原理研究

提出了一种圆筒型行波非接触超声马达,以圆筒型振子为定子,矩形板压电陶瓷粘贴在圆筒振子的外表面作为激励源以产生周向行波。研究了激励圆筒振子产生周向行波的原理,分别给出了激励点间在空间和时间上的关系,为有效设计和激励定子提供了理论依据。同时对驱动电源与激励点的连接方法进行了研究。最后根据理论分析,设计了马达样机进行实验,取得了良好的转速输出。     

行波型超声电机定子的共振与反共振特性的研究

针对行波型超声电机定子在共振和反共振点附近表现的不同特性,以压电陶瓷材料大功率驱动下的理论分析和电学分析为基础,通过对实验现象的描述和分析,确立了以频率、机械谐振品质因数、机电耦合系数和相对振动效果等参数作为定量和定性分析定子共振和反共振的性能指标。在实验研究中,以激光测振为直接实验手段,设计了相关实施方案,对行波型超声电机定子在不同驱动方式下表现出的共振和反共振特性进行了分析和对比研究。研究结果表明,行波型超声电机定子在反共振点附近的综合性能要优于共振点附近的性能,实验结果可为行波型超声电机工作状态以及驱动方式的选择提供依据和指导。     

行波超声马达定子和转子接触状态实验研究

提出了一种直接测量行波超声马达定子和转子接触状态的方法—电接触法。利用这种方法研究了接触预压力和定子激励电压(定子振幅)对定子和转子接触状态的影响。借助于自制的超声马达摩擦特性模拟实验装置,测量了超声马达堵转力矩和空载转速随接触预压力和定子激励电压的变化。提出用相对接触长度描述定子和转子的接触特性,建市了超声马达特性与定子和转子相对接触长度的联系。此外,还利用现有的行波超声马达定子和转子接触理论模型,计算了给定工作条件下接触区长度,并与实验结果进行了比较。研究结果可为行波超声马达的设计提供理论指导。     

对超声振动刀具系统的进一步探讨——兼答复鲍善惠等同志

鲍善惠等同志的“关于超声振动切削刀具的激振问题”一文(为说明方便,以下简称鲍文),对弯曲振动杆在纵向振子激发下的振动模式进行了分析和论述,提出了许多有价值的见解.     

弛豫铁电单晶/压电陶瓷混合激励换能器EI北大核心CSCD

为了降低纵向换能器尺寸并提高发射带宽和发送电压响应,研究了一种弛豫铁电单晶/压电陶瓷混合激励换能器,换能器由[011]方向极化PIN-PMN-PT单晶和PZT-4压电陶瓷混合激励,利用多模态振动耦合的原理,通过单晶的32模式振动,可以灵活调整两种振子之间的驱动能力和刚度分配。首先通过四端网络法得到了换能器等效电路并计算了其谐振频率,然后利用有限元方法对换能器进行了仿真优化,最后制作了试验样机并进行了测试分析。换能器样机外径86 mm、长度80 mm,工作频带13~38 kHz,最大发送电压响应为144.9 dB,带内发送电压响应起伏小于6 dB,具有良好的宽带、小尺寸工作性能。     

阶梯圆环压电超声换能器径向振动性能的理论研究*

提出了一种阶梯圆环径向振动压电超声换能器,根据力电类比原理建立了阶梯圆环及阶梯圆环换能器的径向振动等效电路,推导了阶梯圆环的径向共振频率方程和位移放大系数,在此基础上进一步推导了换能器的径向共振和反共振频率方程。通过理论推导和有限元仿真模拟分析了阶梯圆环压电超声换能器的径向振动性能。结果表明,增大阶梯圆环中内外环的径向厚度之比K1或减小轴向厚度之比K2,阶梯圆环的一阶径向共振频率减小,二阶径向共振频率增大;在二阶径向共振模式下,K1、K2值在一定范围内阶梯圆环可实现由内向外的径向位移振幅放大;随着压电陶瓷圆环的内半径增大,阶梯圆环压电超声换能器的一阶、二阶径向共振和反共振频率减小,二阶径向共振下的有效机电转换系数趋于零;增大阶梯圆环内环的外半径,换能器的一阶径向共振和反共振频率减小,二阶径向共振和反共振频率先增大后减小,理论推导与仿真模拟结果符合良好。本文研究结果为阶梯圆环压电超声换能器的工程应用提供理论参考。     

弯曲振动模式压电超声微马达研究

对一种圆柱状结构、基于弯曲振动模式的压电超声微马达作了一些结构改进性探索和实验研究,并采用有限元方法对其振动模式进行了分析．已研制的直径为15mm、长25mm的微马达样机,显示出非常高的角分辨率（0．01°）、低速（30r／min～70r／min）和大的力矩（0．055N.m）特性,已在激光多维精密控制系统中获得成功的应用．     

An electric contact method to measure contact state between stator and rotor in a traveling wave ultrasonic motor

Performances of ultrasonic motor (USM) depend considerably on contact state between stator and rotor. To measure the contact state in a traveling wave ultrasonic motor (TWUSM), a special test method is necessary. This paper develops a new method named electric contact method to measure contact state of stator and rotor in traveling wave type USM. The effects of pre-load and exciting voltage (amplitude) of stator on contact state between stator and rotor are studied with this method. By a simulating tester of friction properties of TWUSM, the variations of stalling torque and no-load speed against the pre-load and the exciting voltage have been measured. The relative contact length that describes the contact characteristic of stator and rotor is proposed. The relation between the properties of TWUSM and the contact state of stator and rotor are presented. Additionally, according to a theoretical contact model of stator and rotor in TWUSM, the contact lengths at given conditions are calculated and compared with the experimental results.     

A cylindrical standing wave ultrasonic motor using bending vibration transducer

A cylindrical standing wave ultrasonic motor using bending vibration transducer was proposed in this paper. The proposed stator contains a cylinder and a bending vibration transducer. The two combining sites between the cylinder and the transducer locate at the adjacent wave loops of bending vibration of the transducer and have a distance that equal to the half wave length of bending standing wave excited in the cylinder. Thus, the bending mode of the cylinder can be excited by the bending vibration of the transducer. Two circular cone type rotors are pressed in contact to the end rims of the teeth, and the preload between the rotors and stator is accomplished by a spring and nut system. The working principle of the proposed motor was analyzed. The motion trajectories of teeth were deduced. The stator was designed and analyzed with FEM. A prototype motor was fabricated and measured. Typical output of the prototype is no-load speed of 165 rpm and maximum torque of 0.45 N m at an exciting voltage of 200 V_rms.     

A new standing-wave-type linear ultrasonic motor based on in-plane modes

This paper presents a new standing-wave-type linear ultrasonic motor using combination of the first longitudinal and the second bending modes. Two piezoelectric plates in combination with a metal thin plate are used to construct the stator. The superior point of the stator is its isosceles triangular structure part of the stator, which can amplify the displacement in horizontal direction of the stator in perpendicular direction when the stator is operated in the first longitudinal mode. The influence of the base angle θ of the triangular structure part on the amplitude of the driving foot has been analyzed by numerical analysis. Four prototype stators with different angles θ have been fabricated and the experimental investigation of these stators has validated the numerical simulation. The overall dimensions of the prototype stators are no more than 40 mm (length) × 20 mm (width) × 5 mm (thickness). Driven by an AC signal with the driving frequency of 53.3 kHz, the no-load speed and the maximal thrust of the prototype motor using the stator with base angle 20° were 98 mm/s and 3.2 N, respectively. The effective elliptical motion trajectory of the contact point of the stator can be achieved by the isosceles triangular structure part using only two PZTs, and thus it makes the motor low cost in fabrication, simple in structure and easy to realize miniaturization.     

Modeling and experimental analysis of the linear ultrasonic motor with in-plane bending and longitudinal mode

A novel linear ultrasonic motor based on in-plane longitudinal and bending mode vibration is presented in this paper. The stator of the motor is composed of a metal plate and eight piezoelectric ceramic patches. There are four long holes in the plate, designed for consideration of the longitudinal and bending mode coupling. The corresponding model is developed to optimize the mechanical and electrical coupling of the stator, which causes an ellipse motion at the contact tip of the stator when the composite vibrations with longitudinal and bending are excited. Its harmonic and transient responses are simulated and inspected. A prototype based on the model is fabricated and used to conduct experiments. Results show that the amplitude of the stator’s contact tips is significantly increased, which helps to amplify the driving force and speed of the motor. It is therefore feasible to implement effective linear movement using the developed prototype.     

Contact mode and force transferring model of cylindrical ultrasonic motor with bending vibration mode

Cylindrical Ultrasonic Motor （CUSM） can be widely used in many fields such as zoom and focus system of cameras, electric curtain and micro-driver of MEMS. This work concentrates on the single-point and the double-point contact modes between the stator and the rotor, which are proved by theory and experiment. There is a critical point of the pre-pressure. When the pre-pressure is below the critical point, the single-point model is suitable; otherwise the double-point model is appropriate. Then the force transferring model is analyzed, and expressions of mechanical characteristics and efficiency of the motor are put forward. Simulation results are confirmed by experimental ones, which shows that the model is well suited to guide design of the motor. Finally a Ф14 mm prototype was fabricated. Its maximum torque is 0.11 Nm, and the no-load speed is about 300 r/min.     

A cylindrical micro-ultrasonic motor (stator transducer size: 1.4 mm in diameter and 5.0 mm long)

Ultrasonic motors are suitable for a micro-actuator because of a direct drive, no brake and their simple construction. In order to fabricate micro-ultrasonic motors, a piezoelectric thin film is essential. In this study, a hydrothermal method was adopted to deposit a PZT thin film. The dimensions of the stator transducer were: outer diameter, 1.4 mm; inner diameter, 1.2 mm; and length, 5.0 mm. The resonance frequency of the stator transducer was 227 kHz, and the vibration amplitude was 58 nmp-p at an input voltage of 4.0 Vp-p. The maximum revolution speed was 680 rpm, and the maximum starting torque was 0.67 microNm. The experimental conditions were 20 Vp-p and 5.3 mN pre-load. The motor property versus scale was investigated using an equivalent circuit. The calculated results indicated that the output torque of the 100 microns diameter motor was 27 nNm.     

Elastic friction drive of surface acoustic wave motor

Importance of elastic deformation control to obtain large output force with a surface acoustic wave (SAW) motor is discussed in this paper. By adding pre-load to slider, stator and slider surfaces are deformed in a few tens nanometer. Appropriate deformation in normal direction against normal vibration displacement amplitude of SAW existed. By moderate deformation, the output force of the SAW motor was enlarged up to about 10 N and no-load speed was 0.7 m/s. To produce this performance, the transducer weight and slider size were only 4.2 g and 4 x 4 mm(2).By traveling wave propagation, surface particles of the SAW device move in elliptical motion. Due to the amplitude of the elliptical motion is 10 or 20 nm order, the contact condition of the slider is very critical. To control the contact condition, namely, the elastic deformation of the slider and stator surface in nanometer order, a lot of projections were fabricated on the slider surface. The projection diameter was 20 micro m. In static condition, the elastic deformation and stress were evaluated with the FEM analysis. From this calculation and the simulation result, it is consider that the wave crest is distorted, hence the elasticity has influence on the friction drive condition.Elastic deformation of the stator surface beneath the projection from the initial position were evaluated. In 4 x 4 mm(2) square area, the sliders had from 1089 to 23,409 projections. Depression was independent to the contact pressure. However, the output force depended on the depression although the projection density were different. From the view point of the output power of the motor, the proper depression was independent to the projection density. Around 25 nm depression, the output force and output power were maximized. This depression value was almost same as the vibration displacement amplitude of the stator transducer.     

Numerical analysis of the hybrid transducer ultrasonic motor: comparison of characteristics calculated by transmission-line and lumped-element models

In this paper, a hybrid transducer ultrasonic motor is numerically analyzed by using two equivalent electrical circuit models. A transmission-line model for the torsional vibration in the stator, which can model any torsional vibration mode and their combinations, was introduced and compared with a lumped-element model, which modeled the fundamental torsional resonance mode in the stator. The calculation result by using the transmission-line model demonstrated that the second harmonic torsional vibration increased either with the static spring force by which the rotor was pressed to the stator or with the load torque placed on the rotor. The difference in the calculated motor performance between the two models appeared when the second harmonic torsional vibration became large at a sufficient static spring force.     

Standing wave brass-PZT square tubular ultrasonic motor

This paper reports a standing wave brass-PZT tubular ultrasonic motor. The motor is composed of a brass square tube with two teeth on each tube end. Four PZT plates are attached to the outside walls of the brass tube. The motor requires only one driving signal to excite vibration in a single bending mode to generate reciprocating diagonal trajectories of teeth on the brass tube ends, which drive the motor to rotate. Bi-directional rotation is achieved by exciting different pairs of PZT plates to switch the bending vibration direction. Through using the brass-PZT tube structure, the motor can take high magnitude vibration to achieve a high output power in comparison to PZT tube based ultrasonic motors. Prototypes are fabricated and tested. The dimension of the brass-PZT tube is 3.975 mm × 3.975 mm × 16 mm. Measured performance is a no-load speed of >1000 RPM, a stall torque of 370 μNm and a maximum output power of 16 mW when a sinusoidal driving voltage of 50 V is applied. The working frequencies of the motor are 46,050 Hz (clockwise) and 46,200 Hz (counter-clockwise).     

A traveling wave ultrasonic motor of high torque

A traveling wave ultrasonic motor of high torque with a new configuration is proposed in this paper. In the new design, a part of the motor serves as the stator. The rotor is the vibrator consisting of a toothed metal ring with piezoelectric ceramic bonded, which generates ultrasonic vibration. The rotor is in contact with the shell of motor and is driven by the friction between the rotor and the stator. This configuration not only removes the rotor in a conventional type of traveling wave ultrasonic motor but also changes the interaction between the rotor and the stator of the motor so that it improves the output performance of the motor. Although an electric brush is added to the ultrasonic motor, it is easy to be fabricated because of the low speed of motor. The finite element method was used to compute the vibration modes of an ultrasonic motor with a diameter of 100mm to optimize the design of the motor. A 9th mode was chosen as the operation mode with a resonance frequency about 25 kHz. According to the design, a prototype was fabricated. Its performance was measured. The rotation speed-torque curves for various frequencies were obtained. The result shows that its stall torque is greater than 4 Nm within a range of 400 Hz. This ultrasonic motor was used to drive the window glass of a mobile car and the result was satisfactory. In the further the research on the friction material between the stator and the rotor is under way to improve the efficiency of the ultrasonic motor.