硅基混合表面等离子体纳米光波导及集成器件

总结并展望了硅基混合表面等离子体纳米光波导及集成器件方面的理论和实验研究工作。首先介绍了几种硅基混合表面等离子体纳米光波导结构,其尺寸可小至100 nm以下,而传播长度达100μm量级;其次介绍了基于硅基混合表面等离子体纳米光波导的功分器、偏振分束器和谐振器等集成器件,其尺寸为亚微米量级;最后探讨了硅基混合表面等离子体纳米光波导与硅纳米线光波导的耦合及对其进行增益补偿。     

316L不锈钢粉末光纤激光选区熔化特性

采用自行研制的光纤激光选区熔化快速成型设备,研究了选区激光熔化316L不锈钢粉末工艺参数、能量输入与样件致密度、表面形貌之间的关系以及微观组织特征。结果表明:扫描速度对成型效果影响最为显著;样件致密度随着激光能量密度提高有逐渐增大的趋势;能量密度作为选区激光熔化工艺的技术指标具有可操作性;表面形貌由激光功率与扫描速度比值所决定。深入探讨了能量输入、熔化凝固行为、激光功率与扫描速度比值与样件致密度、表面形貌的关系。结果表明:选区激光熔化凝固组织层内、层间熔合处为弧形,且为冶金结合,金相组织主要由柱状晶与等轴晶组成,层内靠近熔合线周围是柱状晶,而层间靠近熔合线附近主要是细小等轴晶,晶粒直径为1μm左右。     

MIG焊接熔池表面形状与熔滴热焓量分布的数学模型

综合考虑熔滴与熔池相互作用的物理过程,建立了描述熔池表面变形的数学模型和熔滴热焓量在熔池内部的分布模型.应用数值模拟技术分析了焊接工艺参数对熔池表面形状、熔滴热焓量分布区域、焊缝成形的相互影响规律,并进行了焊接工艺试验.     

光辐射吸收材料表面形貌与吸收率关系研究

光辐射吸收材料不同的表面形貌对入射光具有不同的多重反射吸收效果,对光辐射的吸收有较大的影响,合适的表面形貌可以提高光辐射有效吸收率.本文通过光线追迹的方法对V形表面、正弦表面、具有正态倾角(平均倾角)分布的表面以及具有正态高度分布的表面进行模拟, 分析了这四种表面对光辐射吸收率的提升效果及其入射角特性.通过倾角分布分析,得出不同表面形貌提升吸收率共同的必要条件,即倾角中心分布至少大于30°,并指出V形表面在正入射时对吸收率提升的优越性. 关键词： 光吸收材料 表面形貌 吸收率 表面倾角分布     

聚合物光波导的等离子体刻蚀工艺研究

等离子体干法刻蚀是聚合物光波导制备过程中一项关键工艺.利用感应耦合等离子体各向异性刻蚀工艺制备了聚合物脊形结构波导,研究了不同工艺参量(源功率、偏置功率、刻蚀腔室压强以及气体组分)对脊形波导刻蚀速率的影响.利用扫描电子显微镜对刻蚀后波导高度、侧壁垂直度及表面粗糙度进行分析,得到了高刻蚀速率和低粗糙度的优化工艺条件.实验...     

高性能SOI基GePIN波导光电探测器的制备及特性研究

本文报道了在SOI衬底上外延高质量单晶Ge薄膜并制备高性能不同尺寸Ge PIN波导光电探测器.通过采用原子力显微镜、X射线衍射、拉曼散射光谱表征外延Ge薄膜的表面形貌、晶体质量以及应变参数,结果显示外延Ge薄膜中存在约0.2%左右的张应变,且表面平整,粗糙度为1.12 nm.此外,通过暗电流、光响应度以及3 dB带宽的测试来研究波导探测器的性能,结果表明尺寸为4μm×20μm波导探测器在-1 V的反向偏压下暗电流密度低至75 mA/cm~2,在1.55μm波长处的响应度为0.58 A/W,在-2 V的反向偏压下的3 dB带宽为5.5 GHz.     

用平面映射边界条件的伽辽金法分析耦合脊形光波导

用平面射映边界条件的伽辽金法分析耦合脊形光波导的结果表明，耦合脊形光波导的耦合能力随脊高增加而减小，随波导间距增加呈指数衰减。给出了耦合脊形光波导所承载的偶、奇模电场分布，其结果与采用其它方法得出的结果吻合得较好，可以优化波导光电子器件的结构参数。另外，平面映射边界条件避免了非物理反射，待求矩阵小，计算效率高。     

角分辩的光散射轮廓及自仿射分形表面的粗糙指数的实验研究

建立了反射式随机表面的光散射特件实验测量系统,利用多幅平均及叠加连接的方法,得出入射角在45°～85°之间不同值时的光散射轮廓.结果表明,随着表面入射角的增加,光散射轮廓的半峰全宽逐渐减小.并且当入射角的增加到一定值时,光散射轮廓出现中央亮斑.由数学上的对称F降函数,推导出光散射轮廓的半峰全宽随散射光波矢的变化关系,从实验测得角分辩的的光散射轮廓中提取了自仿射分形随机表面的粗糙指数.与原子力显微镜测量得到的粗糙指数进行比较,两者符合得很好.     

扬子克拉通西部金刚石的表面形貌特征及其振动光谱研究

基于金刚石表面形貌的研究,有可能为反演金刚石的形成环境及为金刚石的合成工艺设计提供科学线索。采用光学显微镜、红外光谱、拉曼光谱对扬子克拉通西部的天然砂矿金刚石表面形貌与杂质氮、氢含量及有序度的关系研究结果表明,金刚石的表面形貌包括与晶体生长相关的微形貌、与晶体定向相关的熔蚀形貌、与晶体定向无关的熔蚀形貌及与应力形变相关的形貌等四大类;金刚石以IaAB型为主,氮含量介于22.90～752.40 μg·g-1之间,绝大部分样品的sp3杂化C-H键浓度含量高于sp2杂化C-H键,氢杂质的存在有利于A氮心向B氮心转变;sp3杂质C-H键的存在对金刚石表面出现的形貌类型可能不会造成实质性的影响,但极利于形成熔蚀坑;各种表面形貌的存在都会降低金刚石的表面有序度,但发育晕线者的表面有序度相对最高,而发育三角形生长片层者表面有序度最低。     

纳秒激光抛光钛合金Ti6Al4V作用机理的实验研究

对钛合金进行抛光可以优化表面质量、提高耐磨损性能和使用寿命。运用纳秒脉冲光纤激光器进行钛合金Ti6Al4V抛光实验,通过光学轮廓仪测量不同激光光束形状、脉冲能量密度、光斑重叠率、脉冲宽度下的钛合金Ti6Al4V工件表面粗糙度变化规律。结果表明:平顶光束能够达到的粗糙度更小,激光脉冲能量密度增大,凸起消融越多,工件表面粗糙度减小;光斑重叠率增大,粗糙度减小,重叠率过大,受热应力的影响,凝固后的表面变得不平滑,粗糙度增大;一定范围内的脉冲宽度的增加,凸起消融越多,粗糙度减小。研究结果对提高钛合金抛光效率,优化钛合金性能有促进作用。     

Estimation of electron density and temperature of semiconductor surfaces excited by ultra-short laser pulses

A simple technique, based on the interference principle, to obtain simultaneously the instantaneous electron density and temperature of ultra-short laser-excited semiconductor surface plasma is proposed and demonstrated. The interference of the incident laser and the surface plasmons forms nano-ripples on the surface. From the observed nano-ripple period, one can easily retrieve the density and temperature information. As a demonstration of the technique, the electron density and temperature are obtained for various band gap semiconductor materials based on the experimentally observed nano-ripples using 800 and 400 nm light in various ambient media and incident angles. The electron density estimated varied in the range of 2 $n_{\mathrm{c} }$ –10 $n_{\mathrm{c}}$ and the corresponding electron temperature in the range 10 $^{4}$ –10 $^{5}$ K, depending on the material band gap, the incident laser intensity, the ambient medium, the angle of incidence, and the laser wavelength. The information of the electron density and temperature is useful for choosing laser parameters (like fluence, wavelength, angle of incidence, ambient medium) and target materials (different band gap semiconductors) for obtaining a better size controllability of the nanostructure production. The information can also help one in obtaining essential plasma parameter inputs in the quest for understanding ultra-fast melting or understanding the pre-plasma conditions created by the pre-pulse of ultra-high intensity laser pulses.     

Processing of concretes with a high power CO2 laser

Laser material processing, being a non-contact process, minimizes many of the complexities involved in the decontamination and decommissioning of nuclear facilities. A high power laser beam incident on a concrete surface can produce spalling, glazing or vaporization, depending upon the laser power density and scan speed. This paper presents effect of various laser processing parameters on the efficiency of material removal by surface spalling and glazing. The size of laser beam at constant fluence or energy density had significantly different effect on the spalling process. In thick concrete block cutting the flow or removal of molten material limits the cutting depth. By employing repeated laser glazing followed by mechanical scrubbing process cutting of 150 mm thick concrete block was carried out. Gravitation force was utilized for molten materials to flow out while drilling holes on vertical concrete walls. The dependence of the incident laser beam angle on drilling time was experimentally studied.     

面曝光选区激光熔化成形形状精度研究

主要研究面曝光选区激光熔化单层成形时,激光光斑搭接率和电流对形状精度的影响。实验通过控制变量法研究搭接率、曝光时间、电流等工艺参数对激光光斑、熔道、圆环、尖角等成形形状精度的影响。实验结果表明:一定范围内,电流越大,激光光斑更均匀,成形一致性更好;搭接率38.4%能够获得最低的形状误差的熔道;搭接率一定,圆环成形误差随电流的增加而增加;尖角成形误差随着电流增加,呈现先增后减的趋势;搭接率为46.1%、38.4%时,零级衍射带来的形状误差降低。     

锥形空心银波导的聚焦特性

利用时域有限差分(FDTD)方法数值演示了一种能光学引导和聚焦激光的锥形空心银波导,数值模拟结果表明这种锥形空心银波导能把激光聚焦成一个极小的、直径只有1 μm、强度高度局域性的光斑.对锥形波导能光学引导和聚焦激光的物理机理作了分析和探索,并进一步探讨了激光倾斜入射、波导几何结构对锥形波导聚焦特性造成的影响,这些研究结果对于锥形光学的应用、快点火或产生高能带电粒子中锥靶结构的最佳设计具有重要的参考价值. 关键词： 锥形波导 聚焦特性 时域有限差分     

Investigation of sidewall roughness of the microgrooves manufactured with laser-induced etching technique

A novel laser etching technique utilizing an optical fiber as the laser beam guide is introduced. Depending upon whether a pulsed or a continuous wave (CW) laser is employed as the irradiation source, it was found that the etch depth and surface morphology of the grooves varied significantly. It was then demonstrated that deep microgrooves with smooth sidewalls can be obtained using a hybrid pulse and CW scanning process. The results of laser heating and chemical analyses revealed that sidewall roughness of the microgroove is mainly attributed to surface melting.     

考虑非傅立叶效应的固液相变分子动力学模拟

采用耦合双温度模型的分子动力学方法对飞秒激光照射金箔的固液相变过程进行了模拟研究,利用序参数法对固液原子进行判定从而确定了金箔发生相变时的固液界面位置和温度,对基于傅立叶定律的抛物线模型和考虑非傅立叶效应的双曲线模型模拟得到的结果进行对比分析,在此基础上采用耦合双曲线模型的分子动力学方法研究了激光能量密度和脉冲宽度对金箔相变过程的影响.结果表明,当激光作用于金箔时,金箔上表面首先熔化,固液界面随时间不断向金箔底部移动,并且在相同条件下,双曲线模型下的金箔熔化深度和固液界面温度均大于抛物线模型的结果.当考虑非傅里叶效应时,激光能量密度越大,固液界面温度越高,金箔熔化时间越短;激光脉冲宽度越小,固液界面温度越大,金箔熔化速度越快.     

Tunable high-energy ion source via oblique laser pulse incident on a double-layer target

The laser-driven acceleration of high quality proton beams from a double-layer target, comprised of a high-Z ion layer and a thin disk of hydrogen, is investigated with three-dimensional particle-in-cell simulations for an obliquely incident laser pulse. The proton beam energy reaches its maximum at a certain incidence angle, where it can be much greater than the energy at normal incidence. The proton beam propagates at some angle with respect to the target surface normal and with some tilt around the target surface, as determined by the proton energy and the incidence angle.     

Effects of processing parameters on structure of Ni-based WC composite coatings during laser induction hybrid rapid cladding

The relationships between the processing parameters (i.e. laser specific energy, powder density, preheated temperature of substrate and types of substrate) and the structure characteristics of Ni-based WC composite coatings during laser induction hybrid rapid cladding (LIHRC) were investigated systematically. The results show that laser specific energy, cladding height and contact angle have a linear relation with powder density, as can provide the predictions of laser processing parameters according to the geometrical characteristics of a single laser track (i.e. cladding height, cladding width). Moreover, dilution of composite coating increases with the increasing of laser specific energy and the preheated temperature of substrate, while reduces with the increasing of powder density. The types of substrate also have an important effect on dilution of composite coating, as has a strong dependence on the thermophysical properties of substrate (i.e. melting point, resistivity and permeability).     

纳秒脉冲激光诱导CCD探测器铝层金属液-固相变时间特性研究

从理论仿真计算方面开展了脉冲激光诱导CCD探测器铝层金属温升变化的液-固相变时间特性研究。通过傅里叶热传导方程计算仿真了纳秒激光诱导CCD探测器铝层金属材料的温升曲线,获得了铝层金属材料液-固相变起始时刻和液-固相变时间长度随激光脉冲峰值功率和激光入射角度的变化规律。理论计算结果表明,随着入射激光脉冲峰值功率增加,激光诱导CCD探测器铝层表面的最高温度逐渐升高,铝层材料的液-固相变起始时刻往后延迟,且液-固相变时间长度增加;随激光入射角度的增大,铝层表面的最高温度逐渐降低,液-固相变起始时刻不断前移,而液-固相变时间长度逐渐变短。研究结果表明,激光脉冲峰值功率密度和激光入射角对激光诱导CCD探测器的液-固相变时间特性有重要影响,对揭示纳秒激光诱导CCD探测器的热损伤机制有重要的理论意义。     

A keyhole volumetric model for weld pool analysis in Nd:YAG pulsed laser welding

This study presents a new model for analyzing the temperature distribution and weld pool shape in Nd:YAG pulsed laser welding. In the proposed approach, a surface flux heat transfer model is applied in the low laser energy intensity region of the weld, while a keyhole heat transfer model based on a volumetric heat source is applied in the high laser energy intensity region of the weld. The correlation between the intensity of the laser input energy and the geometric parameters of the volumetric heat source is derived experimentally. A series of MARC finite element simulations based on the proposed single pulse model are performed to investigate the shape and size of the weld pool given different laser energy intensities. A good agreement is observed between the simulation results and the experimental results obtained under equivalent single pulse welding conditions. Thus, the basic validity of the proposed model is confirmed.