SU-8 based planar metamaterials with fourfold symmetry as selective terahertz absorbers

We report on the absorption properties of polarization-insensitive transmissive and reflective metamaterial absorbers based on two planar aluminium periodic structures and SU-8 epoxy resist. These absorbers were investigated using numerical simulation and experimental methods in the terahertz range (below 2 THz). SU-8 is a very promising organic material for dielectric layers in planar metamaterials, because its application simplifies the process of fabricating these structures and significantly reduces the fabrication time. The experimental absorption of the metamaterial absorbers has narrowband characteristics that were consistent with the numerical simulations. Power flow analysis in the transmissive metamaterial unit cell shows that the absorption in the terahertz range occurs primarily in the SU-8 layer of the absorber.     

Direct removal of SU-8 using focused laser writing

SU-8 photoresist is an important material used in the development of micro-devices [1]. Cross-linked SU-8 structures have been known for their thermal stability and their strong resistance to standard solvent, acid and base. Due to the inert properties of this polymer, it is difficult to further modify or remove SU-8 once it is completely cured. We report an effective process to pattern cured SU-8 photoresist on glass using focused laser beam. Laser fabrication has been an important tool in various fields of research [2]. We made use of this laser cutting method to create interesting and useful two-dimensional SU-8 structures. The shapes and sizes of the structures created can be controlled by varying the power of the laser, angle of incident of the focused laser beam, the relative speed with which the laser beam traverse through the SU-8 film and the magnification of objective lens used. Besides two-dimensional structures, we can also create three-dimensional structures. In this case, we made use of a combination of controlled depth cutting and undercutting where focused laser beam is transmitted through the transparent substrate. Some possible applications of the laser patterned SU-8 film are also demonstrated in this work. PACS 42.62-b; 42.82.Cr; 79.60.Fr; 79.20.Ds; 78.66.-w     

Optimization of covalent antibody immobilization on macroporous silicon solid supports

In this paper, optimization of the protocol for covalent antibody immobilization on macroporous silicon solid supports of various porosities, which is recently being employed as a promising substrate for biosensors, has been reported. Covalent binding of antibody has been carried out by silanization and crosslinker attachment on the substrate. For maximum antibody immobilization on macroporous silicon, all the individual processes have been separately optimized for the first time in terms of treatment time, pH, concentration, incubation time and others with the help of optical density measurements. The optimum treatment of the surface after every step has been further reconfirmed by detailed EDX analysis, SEM measurements and contact angle measurements. It has been observed that the density of antibody binding increases with increasing porosity and for a 70% porosity macroporous sample it is almost three times more than that of planar silicon which is significantly higher than the previous comparative reports on planar silicon and macroporous silicon. The amount of properly oriented HIgG antibodies has been estimated by quantification of the alkaline phosphate conjugated protein A binding by optical density measurements.     

SU-8去胶工艺对电铸Ni材料力学性能的影响（英文）北大核心CSCD

SU-8负胶具有优异的力学性能、抗化学腐蚀性、热稳定性和生物兼容性,在MEMS工艺和器件中得到广泛应用。镍金属具有良好的力学性能和抗腐蚀性,因此常用来制作MEMS器件。在MEMS执行器中,弹性元件常采用电铸镍制作。SU-8经过经曝光显影后形成致密的交联网络结构是一种高分子聚合物,这种聚合物非常稳定,不溶于强酸强碱及常见的有机溶剂,尤其是在电铸金属结构后的SU-8胶的去除更为困难。目前的SU-8去胶技术,按去胶原理可分:机械物理去胶技术和氧化去胶技术。氧化去胶技术可以有效去除SU-8胶,但氧化去胶方法不同程度地损坏电铸金属,使其力学性能与去胶前相比发生显著的变化。因此需要研究去胶对Ni金属弹性模量的影响,从而为执行机构设计提供准确的基本数据。针对目前运用比较普遍的两种去除SU-8胶方式:微波等离子下游化学刻蚀和强碱熔盐浴,分别进行了去胶实验,对去胶前后的电铸Ni金属进行了弹性模量和硬度测试。实验结果表明,电铸镍的杨氏模量在经过微波等离子下游化学刻蚀后下降18%,而经过强碱熔盐浴后下降36%,但硬度下降不明显。     

聚合物自写入光波导的时域有限差分模拟

利用时域有限差分方法,对非线性光学聚合物SU-8环氧树脂在激光作用下,其折射率会升高的过程进行了数值模拟与分析,得到SU-8薄膜与激光作用一定时间之后,其内部折射率的分布。分别对表面是平面及表面带有微透镜的SU-8薄膜进行了模拟。结果表明,利用折射率升高引起的自聚焦效应,可以在SU-8薄膜内自写入波导;写入的波导以自聚焦焦点为分界点,分为锥形波导和柱形波导。写入的波导长度随着与激光作用时间的增加而增长;在与激光相同的作用时间里,表面带有微透镜的SU-8薄膜,与表面是平面的SU-8薄膜相比,锥形波导的旁瓣更收敛,写入的波导长度更长;在微透镜底面半径保持不变以及曝光时间一定时,微透镜冠高与底面半径比例为0.08时比比例为0.24时写入的波导长度要长12.2%,其中锥形波导部分要长19.2%。     

水溶液中蛋白质在聚合物表面共价及非共价吸附的控制(英文)

pacc:7320A Theadsorptionandcovalentimmobilization ofhumanimmunoglobulin(HIgG),lysozyme, α-chymotrypsin,andmyoglobinhavebeencom paredusingdifferentexperimentaltechniques:el lipsometry(ELM),X-rayphotoelectronspec troscopy(XPS),opticalfluorescenceandatom…     

Immobilization of immunoglobulin G in a highly oriented manner on a protein-A terminated multilayer system

In this study, we have fabricated a multilayer system consisting of 3-glycidoxypropyldimethylmethoxysilane (GPDS), poly(dimethylsiloxane) bis 3-aminopropyl terminated (PDMS) and protein-A on a silicon wafer surface for oriented immobilization of immunoglobilin G (IgG). The multilayer system with a different component in each layer was characterized by ellipsometry, contact-angle goniometer, X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) and fluorescence microscopy. The epoxy-terminated monolayer was formed by the chemisorption of GPDS molecules on the hydroxylated silicon surface. The PDMS film about 4.5 nm thick was produced on the GPDS-monolayer by the chemical reaction between the amine groups at the end of PDMS chain and the epoxy groups of GPDS molecules. By introducing the PDMS chains, the hydrophilic character of GPDS-monolayer decreased. Study of the time dependence of polymer grafting showed that the chemisorption of GPDS is fast, whereas at least 16 h is needed to generate the homogeneous PDMS layer. For immobilization of IgG molecules in a highly oriented manner, protein-A molecules were first chemically bound to an ultrathin (∼4.5 nm) PDMS reactive polymer layer and later used to capture IgG. It was shown that the existence of protein-A in the multilayer system has a strong influence on the binding properties of IgG not only in the efficiency of binding, but also in its specificity. In conclusion, the multilayer system with protein-A has the potential to be further developed into an efficient immunoassay protein chip.     

Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

In this paper, a systematic study has been performed for the etching of negative photoresist SU-8 2005 using inductively coupled plasma. The etching rate, vertical profile, surface and sidewall roughness of the waveguide were investigated as a function of the chamber pressure, the bias power, the antenna power, the ratio of flow rate of Ar to O₂, and the etching time. The etching parameters were studied in detail and optimized to minimize the surface roughness in etched areas. Ridge MZI waveguides with SU-8 2005 were fabricated under the optimized etching conditions, resulting in smooth and almost vertical patterns. The waveguides showed single-mode propagation at 1550 nm wavelength and low propagation loss of less than 1.565 dB/cm, which was similar to the waveguides fabricated by the wet-etching technique.     

Design, simulation and characterisation of integrated optics for a microfabricated flow cytometer

Flow cytometry is widely used for analyzing micro-particles such as cells and bacteria. Microfabricated flow cytometers promise reduced instrument size and cost with increased robustness and have application in medicine, life sciences and environmental metrology. Further miniaturisation and robustness can be achieved if integrated optics are used instead of traditional free space optics. We present designs simulation and experimental characterisation of integrated optics for a microfabricated cytometer made from SU-8 resin on a glass substrate. The optics constructed from combinations of optical fibres (positioned with microgrooves), waveguides, and microlenses enable analysis of scattered light and fluorescence from particles positioned near the centre of a microchannel using one dimensional sheath flow. Four different methods for directing the incident light onto the particles are examined and the optimum design discussed.     

Development of chemically modified glass surfaces for nucleic acid,protein and small molecule microarrays

Microarrays have become a widely used tool to investigate the living cell at different levels. DNA microarrays enable the expression analysis of thousand of genes simultaneously, while protein arrays investigate the properties and interactions of proteins with other proteins and with non-proteinaceous molecules. One crucial step in producing such microarrays is the permanent immobilization of samples on a solid surface. Our goal was to develop diverse linker systems capable of anchoring different biological samples, especially DNA and drug-like small molecules. We developed 6 different chemical surfaces having a 3-D-like linker system for biomolecule immobilization, and compared them to previously described immobilization strategies. The attachment chemistry utilizes the amino reactive properties of acrylic and epoxy functions. The capacity of the support was increased by creating a branching structure holding the reactive functions. The method of anchoring was investigated through a model reaction. From HPLC and mass spectrometry measurements we concluded that the covalent binding of DNA occurs through nucleobases. The tested systems offer the capability to permanently immobilize several biomolecular species in an array format.