两重外腔的自混合干涉及其信号分析

提出了具有两重外腔的自混合干涉。根据半导体激光器的自混合干涉理论，研究了两重外腔自混合干涉模型，及其信号的调制和解调方法。该方法用一个附加的参考反射镜在半导体激光器(LD)和目标间形成两重外腔，参考外腔用于补偿光学频率涨落引入的相位误差。用快速傅立叶变换相位探测技术(FFT)分析自混合干涉信号。运用这些方法，可提高相位测量精度，在微光机电系统、光学工程和其他工程应用上有潜在的实用价值。     

基于适度光反馈自混合干涉技术的振动测量

光反馈自混合干涉技术是一种新浮现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行振动的精密测量,提出了一种基于适度光反馈自混合干涉技术的振动测量方法。经对光反馈自混合干涉信号条纹分析,发现通过选定合适的光反馈水平及激光器线宽展宽因数,可以得到锯齿干涉条纹。这种干涉信号不仅包含振动幅度信息也包含振动方向信息。该振动测量方法利用锯齿干涉条纹的特点,首先通过条纹记数实现大范围振幅粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的线性表达式,从而实现位移的精测。仿真计算表明,该方法可以实现大量程高分辨力振动位移测量,在叠加20 dB的噪声下,振幅测量相对误差平均为0.5%。     

基于光反馈自混合干涉效应波形转折点的智能识别

对光反馈自混合干涉信号波形转折点的智能识别进行了理论分析和实验研究。首先经对光反馈自混合干涉信号特点的分析，发现其波形转折点可以作为外部物体运动位移实时测量的依据。通过对信号波形的逐步处理可以获得波形转折点的位置，以此为基准点可以实现位移的精测。实验测试结果同理论分析吻合较好。若系统进入较复杂状态，识别出的位置与其实际位置出现偏差，不再是单一值，可以对转折点位置的所有值取平均，从而得到其对应的精确位置。     

The study of laser self-mixing vibrometer employing different feedback regime using a VCSELS

Laser interferometry based on self-mixing effect widely used to measure displacement, velocity, vibration and distance due to compactness, non-contact, as well as low cost. An important use of the self-mixing effect inside a laser diode is in optical self-mixing vibrometer. We have experimentally investigated self-mixing interference produced by the feedback of light from a vibrated target into a vertical-cavity surface-emitting laser for sensing applications. In this paper, the self-mixing vibrometer employing different feedback regime is discussed and a theoretical analysis is also proposed. Numerical analysis focused on the distortion self-mixing waveform. Numerical analysis and experimental results show that mode-hop occurs when the laser self-mixing vibrometer employing at high feedback level.     

正弦相位调制自混合干涉微位移测量精度分析

为了提高自混合干涉仪的位移测量精度,提出将正弦相位调制技术引入自混合干涉中。相位调制由置于自混合干涉仪外腔中的电光晶体实现,相位解调由傅里叶分析的方法得到。对位移测量过程中各种可能的误差来源如电光晶体调制不稳定性、光在外腔中的二次反馈效应等对测量精度的影响进行了模拟分析,从理论上得到了这种新的信号处理方法可以达到纳米级的测量精度。实验上,用高精度的商用压电陶瓷标定的结果验证了这种正弦相位调制自混合干涉仪在普通实验室噪声环境中可以达到纳米级的位移测量精度。     

Quadrature demodulation technique for self-mixing interferometry displacement sensor

A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers.     

Displacement measurement method based on laser self-mixing interference in the presence of speckle

In order to achieve the accurate measurement of displacement, this Letter presents a self-mixing interference displacement measurement method suitable for the speckle effect. Because of the speckle effect, the amplitude of the self-mixing interference signal fluctuates greatly, which will affect the measurement accuracy of displacement. The ensemble empirical mode decomposition is used to process the interference signal, which can filter out high-frequency noise and low-frequency noise at the same time. The envelope of the self-mixing interference signal is extracted by Hilbert transform, and it is used to realize the normalization of the signal. Through a series of signal processing, the influence of speckle can be effectively reduced, and the self-mixing interference signal can be transformed into standard form. The displacement can be reconstructed by fringe counting and the interpolation method. The experimental results show that the method is successfully applied to the displacement measurement in the presence of speckle, which verifies the effectiveness and feasibility of the method.     

Self-mixing interferometry based on sinusoidal phase modulation and integrating-bucket method

In order to realize real-time displacement measurement with high resolution, sinusoidal phase modulation and integrating-bucket method are introduced in the self-mixing interference (SMI) system firstly. The phase of the laser beam is modulated by an electro-optic modulator (EOM) in the external cavity. Theoretical analysis, simulation results and error evaluation are presented. Experimentally, the micro-displacement of a high-precision commercial PZT is reconstructed and the reconstruction accuracy is on the order of nanometers for displacements of a few micrometers.     

Self-mixing interferometer based on temporal-carrier phase-shifting technique for micro-displacement reconstruction

A novel self-mixing interferometer based on temporal-carrier phase-shifting technique is presented. The phase of the laser beam is modulated with a triangular wave by an electro-optic modulator (EOM) in the external cavity. Phase demodulation of the interference signal is achieved by five-step Schwider-Hariharan algorithm combined with a special sampling technique. Theoretical analysis and simulation results are presented. Some errors of the technique have been discussed. Experimentally, the new interferometer is applied to measure the displacement of a high precision commercial PZT and a displacement measurement accuracy of λ/60 can be obtained.     

自混合干涉信号的位相调制

自混合干涉因其结构简单、紧凑、稳定且易准直等特点而被广泛应用于测量领域。从自混合干涉和电光晶体调制位相的基本原理出发,通过将电光晶体引入自混合干涉外腔调制,研究了自混合干涉测量中电光晶体的位相调制性能。实验证明,利用晶体的调制性能对自混合干涉信号进行位相调制,在很宽的频率范围内都能保证很高的调制精度,测量误差小,具有很好的应用前景。     

Micro-vibration measurement based on current modulation and secondary feedback self-mixing interference technology

Optical Review - The secondary feedback self-mixing interference (2FSMI) technology used to measure the micro-vibrations of objects is more accurate than the self-mixing interference (SMI)...     

基于经验模态分解的自混合干涉相位提取方法研究

为实现光反馈机理下激光自混合干涉信号相位的精确提取, 本文提出了一种基于经验模态分析(EMD)的方法.首先, 采用EMD算法对含噪的自混合干涉信号进行了降噪预处理, 提取有效的干涉信号.然后在对含有外腔物体运动信息的光反馈相位求解的过程中, 利用希尔伯特黄变换(HHT)原理实时提取每一时刻的瞬时相位, 将其去包裹处理后得到真实相位. 在弱、适度、强光反馈条件下, 分别对基于EMD的相位提取算法进行了仿真研究.最后, 搭建了基于自混合干涉效应的微位移测量实验平台, 进行实验研究.实验结果表明, 利用该方法可以实现对自混合干涉信号的相位提取, 最大误差小于1.6 rad.仿真和实验结果的一致性, 说明了EMD方法的有效性.     

Statistics of the self-mixing speckle interference in a laser diode and its application to the measurement of flow velocity

The statistical analysis of self-mixing speckles interference using Fabry-Perot cavity is described based on the theory of the speckle and the self-mixing interference in a laser diode. Speckle signal processing based on Fourier transform is presented in this paper. The linear dependence between the spectrum mean frequency and velocity of solution is given by simulation and proved by experiment. The experimental results show that this speckle signal processing can be used to measure velocity of target.     

Numerical simulation of phase modulation method used as high sensitive self-mixing vibrometry in vertical-cavity surface-emitting laser

The self-mixing interference technique is a compact sensing technique that has widely used for measuring vibrations. For purpose of increasing the accuracy of the vibration measurement system, a new phase modulation technique based on the self-mixing interferometer is presented. The phase modulation is obtained by varying the length of external cavity periodically. The vibration information of the external target is determined by the Fourier analysis method. Theoretical analysis and numerical simulations of phase modulation method used as high sensitive self-mixing vibrometry based on vertical-cavity surface-emitting laser are given in this paper.     

基于二次反馈激光自混合新型测距方法

在基于激光自混合干涉的理论上,提出了一种利用二次反馈激光自混合干涉的新型测距方法。利用三角波电流对半导体激光器进行调制,得到一次反馈自混合干涉信号。通过对信号分析可知,当半导体激光器被调制后,会产生一系列的模跳,模跳的数量与绝对距离成正比。通过计算在一个三角波电流调制周期内模跳的数量,就可以求出绝对距离。利用多重激光自混合的概念,提出该种新型测距方法。建立了距离测量系统,进行了实验验证。实验结果表明:由于步长分辨率精度的提高,测距精度明显提高。     

Influence of linewidth enhancement factor $$\alpha $$ on self-mixing interferometry in solid-state lasers

Optical Review - Up to now, laser self-mixing interferometry (SMI) has been widely applied to numerous scientific and industry fields. A easily negligible parameter, linewidth enhancement factor...     

基于DSP的激光自混合干涉测振仪信号采集与处理系统

结合三角波电流调制型激光自混合干涉技术,设计了基于DSP的数据采集与处理系统,完成了对来自光电探测器的干涉信号的采集与处理。该系统接口电路简单灵活,具有采样频率可由程序设置、采集速度和精度较高,并且可以实现6通道同步采样转换的特点。实验结果表明,该数据采集与处理系统完全能够满足高速交变激光自混合干涉信号的采集与处理在实时性和高精度方面的要求。     

基于相位凝固技术的激光反馈干涉术

针对激光反馈干涉术,提出基于相位凝固技术的调制解调方法,用以提高位移测量的分辨率,并设计了利用相位调制器进行调制的位移测量系统.利用调制器进行外腔相位调制,采集调制相位相对固定的干涉光信号,通过解调重构得到被测的位移信息.进行了信号调制、采样、重构技术的研究以及误差分析,并通过仿真验证了方法的可行性.结果表明,采用5点相位凝固采样技术,测量准确度可以达到λ/20.此方法可提高激光反馈干涉术的测量分辨率,实现信号实时采集处理,可用于位移的实时测量.     

Nanometer-scale displacement sensing using self-mixing interferometry with a correlation-based signal processing technique

A self-mixing interferometer is proposed to measure nanometre-scale optical path length changes in the interferometer’s external cavity. As light source, the developed technique uses a blue emitting GaN laser diode. An external reflector, a silicon mirror, driven by a piezo nanopositioner is used to produce an interference signal which is detected with the monitor photodiode of the laser diode. Changing the optical path length of the external cavity introduces a phase difference to the interference signal. This phase difference is detected using a signal processing algorithm based on Pearson’s correlation coefficient and cubic spline interpolation techniques. The results show that the average deviation between the measured and actual displacements of the silicon mirror is 3.1 nm in the 0–110 nm displacement range. Moreover, the measured displacements follow linearly the actual displacement of the silicon mirror. Finally, the paper considers the effects produced by the temperature and current stability of the laser diode as well as dispersion effects in the external cavity of the interferometer. These reduce the sensor’s measurement accuracy especially in long-term measurements.     

Absolute small-angle measurement based on optical feedback interferometry

We present a simple but effective method for small-angle measurement based on optical feedback interferometry （or laser self-mixing interferometry）. The absolute zero angle can be defined at the biggest fringe amplitude point, so this method can also achieve absolute angle measurement. In order to verify the method, we construct an angle measurement system. The Fourier-transform method is used to analysis the interference signal. Rotation angles are experimentally measured with a resolution of 10^-6 rad and a measurement range of approximately from -0.0007 to ＋0.0007 rad.