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激光全息光刻技术在微纳光子结构制备中的应用进展 总被引:1,自引:0,他引:1
微纳光子结构研究随着光子学、半导体物理学及微加工技术的发展而逐渐蓬勃开展,并在其结构、理论、制备技术等方面取得了系列进展。受限于目前的微加工技术水平,要成功制备大尺度、高质量的光子材料仍然存在着一定挑战。激光全息光刻技术作为一种简便快捷的微结构制作技术已经发展成为一种经济快速制作大面积微纳超材料及光子晶体模板的重要手段。介绍了激光全息光刻技术的原理,详细阐述了该技术在制作三维面心立方、木堆积结构、金刚石结构光子晶体以及光学周期类准晶、手性超材料、周期性缺陷结构等微纳光子结构中的应用研究进展。激光全息光刻技术成功制作微纳光子结构为光子材料在更多领域的广泛应用提供了基础和方法。 相似文献
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Using direct laser writing, we fabricate photoresist templates for 3D-2D-3D photonic crystal heterostructures for what we believe to be the first time. The optical properties of these structures are directly compared with the theoretical ideal, revealing good agreement and hence good sample quality. This provides an experimental starting point for the microfabrication and testing of broadband, 3D air-waveguide microcircuitry in photonic bandgap materials. 相似文献
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Applied electric field to fabricate colloidal crystals with the photonic band-gap in communication waveband 下载免费PDF全文
The macropore silica colloidal crystal templates were assembled
orderly in a capillary glass tube by an applied electric field
method to control silica deposition. In order to achieve the
photonic band gap (PBG) of colloidal crystal in optical
communication waveband, the diameter of silica microspheres is
selected by Bragg diffraction formula. An experiment was designed to
test the bandgap of the silica crystal templates. This paper
discusses the formation process and the close-packed fashion of the
silica colloidal crystal templates was discussed. The surface
morphology of the templates was also analyzed. The results showed
that the close-packed fashion of silica array templates was
face-centered cubic (FCC) structure. The agreement is very good between the
experimental data and the theoretical calculation. 相似文献
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S. Bayan U. Das D. Mohanta 《The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics》2011,61(2):463-468
Barbules of the peacock feather have been used as the
natural template for developing assemblies of zinc oxide (ZnO) nanospheres.
The different colored barbules consisting of various photonic crystals
(extracted from eye-pattern) were characterized in terms of the stop-bands
identified in the respective Reflectance spectra. The stop-bands of the
photonic crystals are found to get red-shifted after the loading of ZnO
nanospheres and was reasoned to the modification of photonic band gap. The
ZnO nanosphere decorated barbules show well defined photoluminescence
response with dominant defect related emission of ZnO. The artificially
grown inorganic structures on natural templates form a basis of new hybrid
system that can help in exploiting photonic band gap engineering and light
wave modulation with high selectivity. 相似文献
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V. V. Abramova A. S. Sinitskii N. A. Grigor’eva S. V. Grigor’ev D. V. Belov A. V. Petukhov A. A. Mistonov A. V. Vasil’eva Yu. D. Tret’yakov 《Journal of Experimental and Theoretical Physics》2009,109(1):29-34
The results of an ultrasmall-angle X-ray scattering study of iron(III) oxide inverse opal thin films are presented. The photonic crystals examined are shown to have fcc structure with amount of stacking faults varying among the samples. The method used in this study makes it possible to easily distinguish between samples with predominantly twinned fcc structure and nearly perfect fcc stacking. The difference observed between samples fabricated under identical conditions is attributed to random layer stacking in the self-assembled colloidal crystals used as templates for fabricating the inverse opals. The present method provides a versatile tool for analyzing photonic crystal structure in studies of inverse opals made of various materials, colloidal crystals, and three-dimensional photonic crystals of other types. 相似文献
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D. N. Sovyk V. G. Ralchenko D. A. Kurdyukov S. A. Grudinkin V. G. Golubev A. A. Khomich V. I. Konov 《Physics of the Solid State》2013,55(5):1120-1123
Opal samples consisting of diamond spheres have been synthesized by chemical deposition in microwave plasma from a CH4/H2 mixture using templates of silicon inverse opal. The optical investigations have confirmed that the periodic structures prepared are structurally perfect three-dimensional photonic crystals. 相似文献
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K.K. Seet V. Mizeikis S. Juodkazis H. Misawa 《Applied Physics A: Materials Science & Processing》2006,82(4):683-688
Three-dimensional photonic crystals consisting of periodic arrays of spiral columns were fabricated in a commercially available
photoresist (SU-8) by a direct laser writing technique. Tailoring the pre- and post-processing conditions for the photoresist
has enabled the recording of extended, self-supporting periodic structures with sub-diffraction resolution. Pronounced photonic
stop gaps were observed at wavelengths between 1.5 and 1.8 μm, close to the telecommunications region. These structures can
be used as accurate and robust templates for subsequent infiltration by materials with higher refractive index.
PACS 42.65.Re; 42.70.-a; 42.70.Qs 相似文献
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Micronanostructures prepared by two-photon photopolymerization are utilized as templates for electroless plating of metals, giving rise to an approach for fabricating complex-shaped metal micronanostructures that are so far not achievable by other means. We show that when the coated-layer thickness of a metal coating is larger than a critical value (around 20 nm for silver at 2-3 mum wavelength) associated with the metal's skin depth, the photonic crystals exhibit optical properties more comparable to a solid metal structure than to their polymer counterparts. 相似文献
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We have fabricated optically active ZnO inverse opals by infiltrating polystyrene (PS) opal templates using an electrodeposition process. Compared with bare ZnO films also prepared by electrodeposition, the three-dimensional (3D) ordered ZnO structure exhibits markedly enhanced photoluminescence. The effect of photonic band gap on PL spectra is also clearly observed from the ZnO inverse opal structure. 相似文献
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Charged colloidal suspensions have been used as experimental models for the study of crystal nucleation. Here we propose that the technique of template-assisted colloidal self-assembly can be used to visualize the effects of defect propagation in atomic crystal films produced using epitaxial growth. Templates with periodic line defects were used to grow [100]-oriented three-dimensional photonic crystals by means of the template-assisted colloidal self-assembly method, aided by capillary and gravitational forces. The defect propagation in the [100]-oriented photonic crystal was observed using scanning electron microscopy, both at the surface of the crystal and on cleaved facets. This method is useful in the understanding of defect propagation in the growth of colloidal films on templates - and the same approach may also prove useful for the understanding of atomic crystal growth on substrates with defects. Additionally, the deliberate incorporation of line defects may prove valuable as a way of introducing waveguide channels into three-dimensional photonic crystals. 相似文献
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通过溶剂蒸发对流自组装法制备SiO2三维有序胶体晶体模板,采用等离子体增强化学气相沉积法在200℃低温条件下填充高折射率材料Ge,获得了Ge反opal三维光子晶体.实现了低于GeH4热分解温度的低温填充.通过扫描电镜、X射线衍射仪和傅里叶变换显微红外光谱仪对Ge反opal的形貌、成分和光学性能进行了表征.结果表明:沉积得到无定型态Ge,退火后形成多晶Ge,Ge在SiO2微球空隙内填充致密均匀.Ge反opal的反射光谱有明显的光学反射峰,表现出光子带隙效应,其带隙中心波长为1650nm和2640nm,测试的光学性能与理论计算基本符合.采用SU-8光刻胶薄膜也进行了Ge沉积,证实了SU-8模板可以耐受这一沉积温度.低温沉积降低了Ge的填充温度,可以直接采用不耐高温的高分子材料作为初始模板,单次复型制备得到多种构型的完全带隙三维光子晶体. 相似文献
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A. Yu. Menshikova N. N. Shevchenko I. V. Bugakov A. V. Yakimansky A. V. Sel’kin 《Physics of the Solid State》2011,53(6):1155-1160
Three-dimensional periodic solid-state film structures with a face-centered cubic lattice and a high degree of perfection
have been prepared from monodisperse particles of styrene copolymers with methacrylic acid. It has been shown that these structures
can be successfully used not only as model objects for studying specific features of light propagation in photonic crystals
but also as templates for synthesizing inverse opal-like structures. The influence of the degree of hydrophilization of the
surface layer of polymer particles forming a polymer template and the template synthesis conditions on the quality of an inverse
opal-like TiO2-based structure has been analyzed. 相似文献
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高亮度白光LED用外延片的新进展 总被引:5,自引:0,他引:5
文章首先介绍了发光二极管(LED)的内量子效率、外量子效率的基本概念和提高量子效率的基本方法,接着对LED外延的结构和方法做了简要介绍.文章的第三和第四部分则着重介绍了提高内、外量子效率的外延方法,这些方法包括外延结构的优化,侧向外延生长,SiC和GaN衬底的生长,AIInGaN四元系有源区生长,非极性面、半极性面的外延,表面粗化结构生长,图形化二次外延结构.图形化蓝宝石衬底上的外延,提高载流子注入效率的结构和组分设计.文章的第五部分则介绍了基于可靠性和成本考虑的其他新型外延结构,第六部分介绍了提高LED可靠性的外延方法.最后得出结论:采用非极性面的GaN衬底,生长优化的LED结构,并结合光子晶体技术,可望取得突破性进展. 相似文献
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We demonstrate the controlled preparation of Er‐ and Eu‐doped GaP‐oxide porous composites. The fabrication procedure entails the use of porous semiconductor templates and the impregnation of rare earth ions from a rare earth salt solution in alcohol and thermal treatment. The composites exhibit strong green and red emission that comes from finely dispersed ErPO4 and EuPO4 oxide submicron phases in the composite. These materials may prove useful in future generations of optoelectronic and photonic devices. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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A status report on rapidly advancing femtosecond laser technology, three-dimensional (3D) microstructuring by multiphoton illumination technique, is given. Taking its origin from multiphoton microscopy, this technique is now becoming an important microfabrication tool. In our work we apply near-infrared Ti:sapphire femtosecond laser pulses (at 800/780 nm) for 3D material processing. When tightly focused into the volume of a photosensitive material (or photoresist), they initiate 2PP process by, for example, transferring liquid into the solid state. This allows the fabrication of any computer generated 3D structure by direct laser “recording” into the volume of photosensitive material. 2PP of photosensitive materials irradiated by femtosecond laser pulses is now considered as enabling technology for the fabrication of 3D photonic crystals and photonic crystal templates. In particular, 2PP allows one to introduce defects at any desired locations, which is crucial for the practical applications. Recently, we studied possible applications of 2PP technique in biomedicine. 2PP is a very interesting technique for the fabrication of drug delivery systems, scaffolds for tissue engineering, and medical implants. These and other biomedical applications of 2PP will be reviewed. 相似文献