Formation of TiO2 film with lower electrical resistance by aerosol beam and fiber laser irradiation

Titanium dioxide (TiO₂) is a functional ceramic with unique photoconductive and photocatalytic properties. In our previous study, a TiO₂ film was formed by aerosol beam irradiation. The films were darkened by femtosecond laser irradiation in air. Then electrical resistance of the darkened area on the film decreased. The heating process is also a useful method to vary the TiO₂ film property. Local heating can be performed by using a continuous wave (CW) fiber laser. In this study, the film was irradiated with a commercial CW fiber laser in vacuum. Laser irradiated area on the film was also darkened after CW fiber laser irradiation. The electrical resistance of the darkened area on the films was decreased as laser fluence was increased. Electrical resistance of the darkened area after CW fiber laser irradiation in vacuum was much smaller than that after femtosecond laser irradiation.     

Photoconductive properties of titanium dioxide film modified by femtosecond laser irradiation

Titanium dioxide (TiO₂) films were irradiated with a femtosecond laser to alter their photoconductive properties. The laser wavelength and pulse duration were 775 nm and 150 fs, respectively. The TiO₂ films irradiated with the femtosecond laser were darkened without changing the topography of the TiO₂ film surface. The electrical resistances of the films as a function of time were measured under visible-light illumination. The transient electrical resistances decreased as time was increased after turning on the light. There were two stages in the reduction process of the electrical resistance.     

Three-dimension direct writing TiO<Subscript>2</Subscript> crystalline patterns in Bi-free glass using femtosecond laser

Crystalline TiO₂ was induced three dimensionally inside Bi-free glass sample by an 800 nm, 250-kHz femtosecond laser irradiation. Micro-Raman spectra analysis indicated that the laser-induced crystals in the focal point of the laser beam were monophase TiO₂ rutile. Continuous crystalline lines were written through moving the focal point of the laser beam inside the glass. The results demonstrate that this technique is a convenient method to engrave three-dimensional patterns of crystals for fabricating integrated optical devices in transparent materials.     

Deposition of Au/TiO2 film by pulsed laser

Au nanoparticles, which were photoreduced by a Nd:YAG laser in HAuCl₄ solution containing TiO₂ colloid and accompanied by the TiO₂ particles, were deposited on the substrate surface. The film consisting of Au/TiO₂ particles was characterized by the absorption spectra, scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis. The adhesion between the film and substrate was evaluated by using adhesive tape test. It was found that the presence of TiO₂ dramatically enhanced the adhesion strength between the film and the substrate, as well as the deposition rate of film. The mechanism for the deposition of Au/TiO₂ film was also discussed.     

Femtosecond laser direct writing of TiO2 crystalline patterns in glass

Crystalline TiO₂ was induced three dimensionally inside a glass sample by 800-nm, 250-kHz femtosecond laser irradiation. Micro-Raman spectra and X-ray diffraction analysis indicated that the laser-induced crystals were monophase TiO₂ rutile. A periodic structure consisting of TiO₂ rutile crystalline lines was inscribed in the glass sample by continuously moving the focal point of the laser beam. This technique may be useful for fabricating integrated optical devices in glasses.     

激光分子束外延BaTiO3薄膜最顶层表面原子平面与薄膜生长机理

用激光分子束外延技术在SrTiO₃(001)衬底上外延生长了高质量的BaTiO_{3< /sub>薄膜,薄膜的生长过程由反射式高能电子衍射仪(RHEED)原位实时监测,表明薄膜具有 二维层状生长模式.薄膜的晶体结构和表面形貌分别由X射线衍射和原子力显微镜表征,显示 该薄膜为完全c轴取向四方相晶体结构,其表面具有原子尺度光滑性.采用角分辨X射线光电 子谱技术(ARXPS),研究了BaTiO3薄膜表面最顶层原子种类和排列状况.结果表 明,BaTiO3 关键词： 激光分子束外延 3薄膜')" href="#">氧化物BaTiO3薄膜 最顶层表面 角分辨X射线光电子谱}     

Microfabrication of gold dots in SiO2/TiO2 glass films by two-photon absorption

Photogeneration of Au nanoparticles in SiO₂/TiO₂ glass films was carried out by two-photon absorption with a femtosecond pulse laser. Exquisite microdot-arrays of Au with micrometer spatial resolution were achieved by scanning of the focused laser beam. These structures were constructed in SiO₂/TiO₂ glass films by a sol–gel method. The sol–gel method demonstrated that Au dots microarray are fabricated at any position by two-photon absorption in the glass. The results show the utility of a two-photon absorption technique in the fabrication of complicated patterns with metal particles.     

Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser

We present a novel technique to fabricate deeply embedded microelectrodes in LiNbO₃ using femtosecond pulsed laser ablation and selective electroless plating. The fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of LiNbO₃ by femtosecond laser ablation; (2) formation of AgNO₃ films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modification of the inner surfaces; and (4) electroless copper plating. The void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. The dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside LiNbO₃ crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices.     

Preparation of transparent conductive TiO2:Nb thin films by pulsed laser deposition

This study investigated the optical and electrical properties of Nb-doped TiO₂ thin films prepared by pulsed laser deposition (PLD). The PLD conditions were optimized to fabricate Nb-doped TiO₂ thin films with an improved electrical conductivity and crystalline structure. XRD analyses revealed that the deposition at room temperature in 0.92 Pa O₂ was suitable to produce anatase-type TiO₂. A Nb-doped TiO₂ thin film attained a resistivity as low as 6.7 × 10⁻⁴ Ω cm after annealing at 350 °C in vacuum (<10⁻⁵ Pa), thereby maintaining the transmittance as high as 60% in the UV-vis region.     

The dispersion study of TiO2 nanoparticles surface modified through plasma polymerization

In this study, the surface of TiO₂ nanoparticles was modified through plasma polymerization, which is a dry coating method at room temperature. The surface morphology of TiO₂ nanoparticles was characterized by high-resolution transmission electron microscope (HRTEM). The dispersion behavior of TiO₂ nanoparticles in water and ethyl glycol was investigated by laser size distribution and ultraviolet–visible absorption spectrum. TiO₂ nanoparticles were coated with a thin film through plasma polymerization, which prevents the agglomeration and improves the dispersion behavior of TiO₂ nanoparticles.     

Effect of polarization on femtosecond laser pulses structuring silicon surface

Arrays of conical-like spikes can be formed on silicon surface after irradiated with femtosecond laser pulses in ambient of SF₆ or N₂. In this article, we report our observations on how the shape of the spikes formed on silicon surface varies with the polarization of laser beam. The experimental results show that, with circular polarized laser irradiation, the shape of the spikes is conical; however, with linearly polarized laser irradiation, the spikes show elliptic conical shape, and the long-axes are perpendicular to the direction of the polarization of laser beam. The asymmetric shape of spikes produced by linearly polarized laser beam can be explained by considering the polarization dependence of Fresnel-refraction.     

CO2 laser-induced crystallization of sol–gel-derived indium tin oxide films

Indium tin oxide (ITO) thin films prepared by the sol–gel method have been deposited by the dip-coating process on silica substrates. CO₂ laser is used for annealing treatments. The electrical resistivity of sol–gel-derived ITO thin films decreased following crystallization after exposure to CO₂ laser beam. The topological and electrical properties of the irradiated surfaces have been demonstrated to be strongly related to the coating solution and to the laser processing parameters. Optimal results have been obtained for 5 dip-coating layers film from 0.4 mol/l solution irradiated by 0.6 W/m² laser power density. In this case, homogeneous and optically transparent traces were obtained with a measured sheet resistance of 1.46×10² Ω/□.     

Analyses of surface coloration on TiO2 film irradiated with excimer laser

TiO₂ film of around 850 nm in thickness was deposited on a soda-lime glass by PVD sputtering and irradiated using one pulse of krypton-fluorine (KrF) excimer laser (wavelength of 248 nm and pulse duration of 25 ns) with varying fluence. The color of the irradiated area became darker with increasing laser fluence. Irradiated surfaces were characterized using optical microscopy, scanning electron microscopy, Raman spectroscopy and atomic force microscopy. Surface undergoes thermal annealing at low laser fluence of 400 and 590 mJ/cm². Microcracks at medium laser fluence of 1000 mJ/cm² are attributed to surface melting and solidification. Hydrodynamic ablation is proposed to explain the formation of micropores and networks at higher laser fluence of 1100 and 1200 mJ/cm². The darkening effect is explained in terms of trapping of light in the surface defects formed rather than anatase to rutile phase transformation as reported by others. Controlled darkening of TiO₂ film might be used for adjustable filters.     

Raman study of phase transformation of TiO2 rutile single crystal irradiated by infrared femtosecond laser

Titanium dioxide (TiO₂) rutile single crystal was irradiated by infrared femtosecond (fs) laser pulses with repetition rate of 250 kHz and phase transformation of rutile TiO₂ was observed. Micro-Raman spectra show that the intensity of E_g Raman vibrating mode of rutile phase increases and that of A_1g Raman vibrating mode decreases apparently within the ablation crater after fs laser irradiation. With increasing of irradiation time, the Raman vibrating modes of anatase phase emerged. Rutile phase of TiO₂ single crystal is partly transformed into anatase phase. The anatase phase content transformed from rutile phase increased to a constant with increasing of fs pulse laser irradiation time. The study indicates the more stable rutile phase is transformed into anatase phase by the high pressure produced by fs pulse laser irradiation.     

Enhanced magnetization and ferrimagnetic behavior of normal spinel ZnFe2O4 thin film irradiated with femtosecond laser

We report on spatially selective change of magnetism from paramagnetic to ferrimagnetic-like behaviors in normal spinel ZnFe₂O₄ thin film under irradiation with 780 nm femtosecond laser pulses. The distribution of Zn²⁺ and Fe³⁺ ions in the irradiated region on the film surface becomes disordered because of local heating to high temperatures, and the metastable phase of ZnFe₂O₄ is frozen in by the rapid quenching after irradiation, resulting in the formation of the ferrimagnetic phase. The ferrimagnetic phase reverts to the paramagnetic state by annealing at 800°C. The present technique is useful for two-dimensional patterning of magnetic thin films.     

Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses

Fabrication of surface relief-type gratings in transparent dielectrics, which are hard to machine, has been achieved by a holographic technique using two infrared femtosecond (fs) pulses from a mode-locked Ti:sapphire laser. The present method can be applied for a variety of transparent dielectrics, Al₂O₃ (sapphire), TiO₂, ZrO₂, LiNbO₃, SiC, ZnO, CdF₂, MgO, CaF₂ crystals, and SiO₂ glass. It is found that the grating formation is due primarily to laser ablation processes. Planar surface relief gratings can be fabricated by colliding two fs laser pulses on the surface of substrates which move at a constant speed, synchronized with the laser repetition rate. Received: 1 March 2000 / Published online: 7 June 2000     

A comparative study of gadolinium gallium garnet growth by femtosecond and nanosecond pulsed laser deposition

The growth of epitaxial Nd:Gd₃Ga₅O₁₂ (GGG) on Y₃Al₅O₁₂ (YAG) by femtosecond pulsed laser deposition is reported. We have used a Ti:sapphire laser at a wavelength of 800 nm and pulse length of 130 fs, operating at a repetition rate of 1 kHz. The film properties have been studied systematically as a function of the deposition parameters of laser fluence, spot-size, oxygen pressure, target-substrate distance and temperature. Scanning electron microscopy, atomic force microscopy and X-ray diffractometry were used to characterise the surface structure and crystallinity of the films. X-ray diffraction analysis shows that epitaxial growth has occurred. A comparison between the ion velocities produced by nanosecond and femtosecond laser ablation of the GGG target material has been investigated by the Langmuir probe technique. The results indicate a large difference in the plasma characteristics between femtosecond and nanosecond ablation, with ion velocities up to eight times faster observed in the femtosecond case.     

Effect of surface fluorination on the photocatalytic and photo-induced hydrophilic properties of porous TiO2 films

Porous surface-fluorinated TiO₂ (F-TiO₂) films were prepared through PEG modified sol-gel method and surface fluorination. The as-prepared films were characterized with XRD, FTIR, AFM, XPS and UV-vis DRS. The effects of surface fluorination on the photocatalytic activity and hydrophilicity of porous TiO₂ film were studied by photocatalytic degradation of rhodamine B (RhB) as well as water contact angle (CA) on porous TiO₂ film. The results showed that the surface fluorination increased the adsorption of RhB on the porous TiO₂ film and enhanced the photocatalytic degradation of RhB. The concentration and pH of NaF solutions affected much the photocatalytic activity of porous TiO₂ film. Porous F-TiO₂ film prepared in 40 mM NaF solution at pH 4.0 showed the highest photocatalytic activity. Because of its porous structure, the porous F-TiO₂ film had original water CA of 22.7°, which is much smaller than that of normal F-TiO₂ film. Under UV light irradiation, the water CA of porous F-TiO₂ film decreased to 5.1° in 90 min.     

Phase control of iron silicides using femtosecond laser irradiation

Phase control of Fe–Si amorphous thin film in micro area is demonstrated using femtosecond laser irradiation. A femtosecond laser beam with a high repetition rate over 200 kHz and tightly focused through an objective lens promotes both crystallization and phase transformation from an amorphous phase into crystalline β-FeSi₂, α-FeSi₂, or ε-FeSi phases. Formation of each crystalline phase is possible by changing the pulse energy or the scanning speed of the incident laser beam.     

Pulsed laser deposition of semiconducting crystalline double-doped barium titanate thin films on nickel substrates

We synthesized by pulsed laser deposition (Ba,Sr,Y)TiO₃ and (Ba,Pb,Y)TiO₃ thin films on mechanically polished nickel substrates.The synthesized thin films were analyzed for: crystalline structure by X-ray diffractometry, morphology and surface topography by atomic force microscopy, optical and scanning electron microscopy, and elemental composition by energy dispersive X-ray spectroscopy and electrical properties by electrical measurements.We have shown that film properties were determined by the dopants, target composition, and deposition parameters (oxygen pressure, substrate temperature and incident laser fluence). All films exhibited a semiconducting behavior, as proved by the decrease of electrical resistance with heating temperature.