Grating couplers for thick SOI rib waveguides

The use of grating couplers in high index contrast waveguides like silicon on insulator (SOI) offers several advantages over other coupling approaches, including better alignment tolerances and allowing for wafer-scale testing. The grating couplers were developed for nanometric SOI waveguides (Si-wires), and recently also for micrometric rib waveguides. In this paper we review our work in fiber-to-chip grating couplers for thick SOI rib waveguides, where a coupling efficiency of ?2.2?dB was demonstrated experimentally. We also discuss the use of grating couplers to improve optical throughput (étendue) of a planar waveguide Fourier-Transform (FT) spectrometer implemented in thick rib waveguides.     

硅基脊型波导器件过渡区损耗及偏振效应

在绝缘层上的硅材料上制作了四种具有不同输入输出结构的星形耦合器并进行了测试,对脊形波导与平板波导相互过渡时过渡区的损耗问题进行了研究和讨论,计算得到在所使用的材料参量下利用锥形结构可以得到1dB左右的最小损耗,这一损耗是由于脊型波导与平板波导间的模式失配造成的。以文献中的实验数据为出发点,分析了脊形波导的偏振问题,并通过对脊型波导器件层厚度、脊高、脊宽进行优化设计,得到了不同偏振模式的有效折射率差仅为10^-5量级的单模脊型波导结构,这样的偏振效应在器件设计中可以忽略。     

离散谱折射率法分析深刻蚀、单模GaAs/GaAlAs脊形光波导

本文采用离散谱折射率法对深蚀刻、GaAs/GaAlAs多层脊形光波导模式特性进行了具体分析和设计,获得了较大截面、低损耗的单模脊形光波导.利用这种横向具有最大折射率差的深蚀刻脊形光波导不但可以提高多模干涉(MMI)型器件的性能,而且在设计和制作弯曲波导、分支结构时,具有结构紧凑、易于集成等优点.     

梯形截面脊波导的特性分析

提出了用有效折射率法结合转移矩阵理论对梯形截面脊波导进行数值分析的新方法。对梯形截面脊波导中模式传播常数和模式间耦合系数的分析表明,梯形截面脊波导与稍宽的矩形截面脊波导行为相同。这一结论有利于简化梯形截面脊波导的设计,提高实际器件的精度。     

An Extension of the Effective Index Method to Analyze Leakage Losses in Rib Type Waveguides

An extension of the effective index method is proposed as a tool to investigate leakage losses in two-dimensional waveguides. The above method, referred to as the Extended Effective Index Method (EEIM), utilizes the Transfer Matrix Technique (TMT) for the calculation of the complex propagation constants. The results show that the EEIM can be applied to conventional rib leaky waveguides as well as to rib ARROW leaky waveguides. The results for rib ARROW waveguides show excellent agreement when compared to those obtained with Finite Element Method.     

梯形截面多量子阱脊形波导模式特性

本文根据多量子阱双折射率的性质,运用有效折射率法和WKB法对具有梯形截面多量子阱脊形波导的模式特性作了分析,导出了E_mn^x模和E_mn^y模的本征值方程.     

Determination of electrical parameters of ZnO/Si heterojunction device fabricated by RF magnetron sputtering

Optical and Quantum Electronics - A single mode condition for silica–titania rib waveguides is proposed in this work. It is applicable to rib waveguides having rib height sufficiently small...     

用平面映射边界条件的伽辽金法分析耦合脊形光波导

用平面射映边界条件的伽辽金法分析耦合脊形光波导的结果表明，耦合脊形光波导的耦合能力随脊高增加而减小，随波导间距增加呈指数衰减。给出了耦合脊形光波导所承载的偶、奇模电场分布，其结果与采用其它方法得出的结果吻合得较好，可以优化波导光电子器件的结构参数。另外，平面映射边界条件避免了非物理反射，待求矩阵小，计算效率高。     

Dispersion parameters and nonlinear optical properties of silicon nitride rib waveguides

Silicon nitride rib waveguides are numerically studied by use of a full-vectorial mode solver program based on finite difference method. Dispersion parameters, up to the third-order, are computed for waveguides of heights 0.8 μm, 0.9 μm, and 1 μm. Like silicon-on-insulator waveguides, silicon nitride rib waveguides allow us to tailor dispersion parameters at telecom wavelengths. Deeply-etched silicon nitride rib waveguides of height up to 1.5 μm are investigated for correct geometries to achieve polarization independence. The computations lead to a minimum etch depth which can be written as linear function of the waveguide height. Etch-depth and waveguide height dependencies of the nonlinear refractive index coefficient of the silicon nitride are studied. It is shown that third-order optical nonlinearities in silicon nitride rib waveguides can be enhanced by suitable choices of waveguide parameters.     

基于变量变换伽辽金法光波导半矢量分析

基于变量变换伽辽金法(VTGM),建立了半矢量分析光波导本征值问题的数理模型;获得了矩形光波导、脊形光波导的本征模的模场分布及归一化传播常数,计算结果和已发表的结果非常接近.半矢量VTGM采用平面映射边界条件,避免了边界截断,又能反映模场的偏振特性,是一种较为理想的光子器件分析方法.     

Geometry Parameter Optimization of Large Cross-Sectional S-Shaped Bent Rib Waveguides for Silicon Based Optical Switches

By using a genetic algorithm, geometry parameters of large cross-sectional S-bend rib waveguides are optimized aiming at the least total loss when the propagation loss is considered. Optimized results axe presented as an example of S-bend rib waveguides based on silicon-on-insulator （SOI） 4 × 4 optical switches. The value of 2 dB/cm is given to the propagation loss according to the experimental results. The simulation results indicate that the total loss drops from 1.0002rib down to 0.4375dB without considering a lateral offset. If the offset is adopted, the total loss reduces from 0.5463dB to 0.2365dB. In addition, the effect of the rib height ratio on the loss is analysed, and the optimal ratio is obtained to be 0.55.     

硅光波导的束传播法设计及制备

报道用束传播法模拟设计、指导硅大断面单模脊形光波导的制备工艺，应用傅里叶变换法计算了硅光波导中导模的传播常数，对实际研制成功的ＳＩＭＯＸ及Ｓｉ／ＧｅｘＳｉ１－ｘ／Ｓｉ单模脊形光波导，比较了其性能差异并给予理论解释。     

Polarization conversion at the discontinuities in semiconductor opto-electronic systems

The origin of unexpected polarization conversion at the junctions between two semiconductor rib waveguides is demonstrated by using full-vectorial numerical approaches.     

Si_（1－x）Ge_x／Si脊形波导X型分支器的研制

采用分子束外延方法制作低损耗Ｓｉ１－ｘＧｅ／Ｓｉ异质结脊形光波导,在Ｘ型交叉波导上实现了Ｓｉ１－ｘＧｅｘ／Ｓｉ光分支器的功能．设计中采用了ＳｉＧｅ大截面脊形波导的单模条件和交叉波导传输特性分析的结果．Ｘ型光分支器的实现为进一步研制Ｓｉ１－ｘＧｅｘ／Ｓｉ光开关和光电调制器积累了经验．     

Single-mode rib polymer waveguides and electro-optic polymer waveguide switches

Mode-matching and effective index methods are used to analyze single-mode operation of optical rib polymer waveguides. Their single-mode waveguiding conditions are determined. Single-mode rib waveguides fabricated from guest–host polyetherketone are presented. The estimated propagation loss of straight rib-waveguides is 0.7 dB/cm at 1.55 μm. Furthermore, by using the mode field-transfer matrix method, 2×2 and 4×4 polymer Mach–Zehnder interference switch operating at 1.55 μm wavelength has been designed based on optical multi-mode interference.     

矩形截面多量子阱脊形波导模式特性

本文根据多量子阱双折射率的性质,运用有效折射率法分析了矩形截面多量子阱脊形波导E_mn^x模和模E_mn^y的模式特性。     

Numerical analysis of a rib optical waveguide with trapezoidal cross section

Dispersion relations and field distributions in rib optical waveguides with several sizes of trapezoidal cross sections are investigated by using a new highly accurate numerical method, which is based on the Rayleigh principle and on the least-squares method.     

Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter

A star coupler-based beam splitter for rib waveguides is reported. A design method is presented and applied in the case of silicon-on-insulator rib waveguides. Experimental results are in good agreement with simulations. Excess loss lower than 1 dB is experimentally obtained for star coupler lengths from 0.5 to 1 μm. Output balance is better than 1 dB, which is the measurement accuracy, and broadband transmission is obtained over 90 nm.     

硅衬底上锗硅合金光波导设计及工艺的优化考虑

报道用射频加热化学气相沉积法制备Ｓｉ／ＧｅＳｉ／Ｓｉ大断面单模脊形光波导中设计和工艺的进一步完善，ＧｅＳｉ合金层中Ｇｅ的含量Ｘ要满足脊形光波导是单模，光波导的数值，孔径接近单模光纤值，脊高小于临界厚度值等，计算表明兼顾上述三项要求应取ｘ＝１～３％，脊的高与宽受大断面及单模的制约。Ｓｉ的晶体结构使脊的二个腐蚀侧壁是斜坡，为此起始脊宽取５～６μｍ为宜；腐蚀液，抛光液的选取人保证脊则壁及波导面端的优良镜     

锗硅合金脊形光波导的优化分析与设计

根据脊形光波导的基本设计要求，分析了锗硅合金脊形波导的结构参数对其光传播特性的影响，并优化设计了结构参数，其合理性得到了实验验证。