Gd靶激光等离子体6.7nm光源的实验研究

本文对Gd靶激光等离子体极紫外光源进行了实验研究, 在 6.7 nm附近获得了较强的辐射, 并研究了6.7 nm 附近光辐射随打靶激光功率密度变化的规律以及收集角度对极紫外辐射的影响. 同时, 对平面Gd靶激光等离子光源的离子碎屑角分布进行了测量, 发现从靶面的法线到沿着靶面平行方向上Gd离子数量依次减少. 进一步研究结果表明采用0.9 T外加磁场的条件下可取得较好的Gd 离子碎屑阻挡效果.     

Fe and Fe+2%Si targets as ion sources via UV laser ablation plasma

In the last years the ion component of a laser-produced plasma has been considered and studied as an object to provide high-density ion sources, which can be applied in many fields such as laser-induced implantation. In this work a KrF laser beam of 10⁸ W/cm² irradiance was focused onto single-crystalline Fe and single-crystalline Fe with 2% of Si targets and the characteristics of both free expanding laser-produced plasmas were compared. The time-of-flight (TOF) method was applied to determine the ion charge yield at various laser fluences and the ion angular spread. The analyses of TOF spectra showed a synergetic effect of the silicon admixture in target material on the Fe ions production. Besides, this admixture was also responsible of the increasing of the plasma temperature which corresponds in turn to the increasing of the average kinetic energy of the particles as well as of the more collimated ion distribution.     

Retrieval of currents of multiply charged ions emitted from laser-produced carbon plasma

The emission of ions from laser-produced carbon plasmas is investigated by a deconvolution of ion collector signals. The deconvolution is based on the use of Kelly and Dreyfus function expressing the time-resolved ion current to recover hidden peaks in an ion collector signal. The parameters of recovered C ^q+ (1?≤?q?≤?6) currents make possible the quantification of properties of laser-produced plasmas. The drift and peak velocities of C ^q+ ions, the abundance of ions and the plasma temperature are presented in the dependence on focused laser beam energy. The carbon plasma was generated employing either single 9-ns pulses of second harmonics (532 nm) of Nd:YAG laser or pulses repeated at a stable repetition rate of 30 Hz.     

Ion and X-ray techniques used for study of laser-produced plasmas

This review article describes apparatus for ion and X-ray diagnostics, which were used in experimental studies of laser-produced plasmas performed by the IPPLM's team in collaboration with other researchers at IPPLM and PALS Research Centre in Prague (the Czech Republic). The investigations of expanding laser-produced plasma properties in dependence on laser beam parameters were done by means of ion diagnostics devices: ion collectors (ICs), cylindrical ion energy analyzer (IEA) and the mass spectrograph of the Thomson type. At IPPLM, different types of detectors have been developed for measurement of X-ray emission. Properties of laser-produced beams of ions and X-ray radiation were analysed in the cooperative experiments performed with the use of a high-energy iodine laser PALS at the PALS Research Centre ASCR in the Czech Republic and the low-energy repetitive laser at IPPLM.     

Laser pumping of ions in a cooler buncher

Optical experiments at the IGISOL isotope separator facility, Jyväskylä, have for many years benefited from the introduction of an ion beam cooler. The device, a gas-filled RF quadrupole, reduces the emittance and longitudinal energy spread of the ion beam. Very recently, use has been made of the axial confinement of slowly travelling ions at the end of the cooler to redistribute the electronic populations through efficient laser excitation. Such a technique has proved beneficial to laser spectroscopic measurements and is a precursor to using the method to polarize the ion beam.     

Modification of semiconductor materials using laser-produced ion streams additionally accelerated in the electric fields

The laser-produced ion stream may be attractive for direct ultra-low-energy ion implantation in thin layer of semiconductor for modification of electrical and optical properties of semiconductor devices. Application of electrostatic fields for acceleration and formation of laser-generated ion stream enables to control the ion stream parameters in broad energy and current density ranges. It also permits to remove the useless laser-produced ions from the ion stream designed for implantation.For acceleration of ions produced with the use of a low fluence repetitive laser system (Nd:glass: 2 Hz, pulse duration: 3.5 ns, pulse energy:∼0.5 J, power density: 10¹⁰ W/cm²) in IPPLM the special electrostatic system has been prepared. The laser-produced ions passing through the diaphragm (a ring-shaped slit in the HV box) have been accelerated in the system of electrodes. The accelerating voltage up to 40 kV, the distance of the diaphragm from the target, the diaphragm diameter and the gap width were changed for choosing the desired parameters (namely the energy band of the implanted ions) of the ion stream. The characteristics of laser-produced Ge ion streams were determined with the use of precise ion diagnostic methods, namely: electrostatic ion energy analyser and various ion collectors. The laser-produced and post-accelerated Ge ions have been used for implantation into semiconductor materials for nanocrystal fabrication. The characteristics of implanted samples were measured using AES.     

Bunch length measurement at Tsinghua Thomson scattering X-ray source

The length of electron beam from a photocathode RF gun is determined by a spectrometer, according to the relative energy spread induced by the bunch length during the acceleration in a linac. For a photocathode RF gun, different laser injected phase and beam charge are studied. The compression is changed for the different laser phases, as from 10° to 30°, and the bunch length is lengthened due to the strong longitudinal space charge force, caused by the increased charge.     

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas

For the next-generation beyond extreme ultraviolet lithography(EUVL) sources, gadolinium(Gd) plasma with emission wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper,a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions(such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy) are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.     

CSR纵向束团压缩腔研究

针对兰州重离子加速器冷却储存环的发展目标,为了满足高能量密度（涉及重离子驱动惯性约束核聚变新能源）等物理研究的需要, 使用三维电磁场计算程序MAFIA研究了一种新型的适用于CSR的纵向束团压缩腔。 此纵向束团压缩腔采用高磁导率软磁合金材料进行加载,相比于铁氧体加载的高频腔, 可以得到高的电场梯度。以250 MeV/u的238U72+离子为例进行了模拟计算, 得出了此纵向束团压缩腔的工作频率为1.15 MHz, 峰值工作电压为80 kV, 由两个1/4波长同轴谐振腔组成, 每个谐振腔峰值工作电压为40 kV,能够满足在CSR上进行纵向束团压缩的要求。 The scheme of longitudinal bunch compression cavity for the Cooling Storage Ring(CSR) is an important issue. Plasma physics experiments require high density heavy ion beam and short pulsed bunch, which can be produced by non adiabatic compression of bunch implemented by a fast compression with 90° rotation in the longitudinal phase space. The phase space rotation in fast compression is initiated by a fast jump of the RF voltage amplitude. For this purpose, the CSR longitudinal bunch compression cavity, loaded with FINEMET FT 1M is studied and simulated with MAFIA code. In this paper, the CSR longitudinal bunch compression cavity is simulated and the initial bunch length of 238U72+ with 250 MeV/u will be compressed from 200 ns to 50 ns. The construction and RF properties of the CSR longitudinal bunch compression cavity are simulated and calculated also with MAFIA code. The operation frequency of the cavity is 1.15 MHz with peak voltage of 80kV, and the cavity can be used to compress heavy ions in the CSR.     

Dynamics of femtosecond laser-produced plasma ions

We investigated the ion laser-produced plasma plume generated during ultrafast laser ablation of copper and silicon targets in high vacuum. The ablation plasma was induced by ≈50 fs, 800 nm Ti:Sa laser pulses irradiating the target surface at an angle of 45°. An ion probe was used to investigate the time-of-flight profiles of the emitted ions in a laser fluence range from the ablation threshold up to ≈10 J/cm². The angular distribution of the ion flux and average velocity of the produced ions were studied by moving the ion probe on a circle around the ablation spot. The angular distribution of the ion flux is well described by an adiabatic and isentropic model of expansion of a plume produced by laser ablation of solid targets. The angular distribution of the ion flux narrows as the laser pulse fluence increases. Moreover, the ion average velocity reaches values of several tens of km/s, evidencing the presence of ions with kinetic energy of several hundred eV. Finally, the ion flux energy is confined in a narrow angular region around the target normal.     

Off line ion source terminal

The off-line ion source (OLIS) terminal provides beams from stable isotopes to ISAC (see Fig. 1) experiments as well as for accelerator commissioning and for pilot beams for radioactive beam experiments. The OLIS terminal (see Fig. 2) is equipped with a microwave driven cusp source for single and double charge ions, a surface ion source for low energy spread alkali beams, and a multi-charge ion source.     

A Simple Ion Source for Monoenergetic Multiply Charged Ion Beams

A small and inexpensive electron beam ion source for multiply charged ions of noble gases is described. One of its essential characteristics is the low energy spread of the extracted ion beam, which depends on the charge state q of the ions and amounts to ∽q × 50 meV. The total ion current containing ionic states up to q = 6 is in the order of 10 nA. The design, construction and important parameters of the ion source are described.     

小型法拉第筒电荷收集器

本文给出了用于测量激光等离子体特性的法拉弟筒电荷收集器的设计。用它获得了激光等离子体发射的离子的速度、动能以及占所吸收的能量比例等信息。     

Laser ablation loading of a radiofrequency ion trap

The production of ions via laser ablation for the loading of radiofrequency (RF) ion traps is investigated using a nitrogen laser with a maximum pulse energy of 0.17?mJ and a peak intensity of about 250?MW/cm². A?time-of-flight mass spectrometer is used to measure the ion yield and the distribution of the charge states. Singly charged ions of elements that are presently considered for the use in optical clocks or quantum logic applications could be produced from metallic samples at a rate of the order of magnitude 10⁵ ions per pulse. A linear Paul trap was loaded with Th⁺ ions produced by laser ablation. An overall ion production and trapping efficiency of 10^?7 to 10^?6 was attained. For ions injected individually, a dependence of the capture probability on the phase of the RF field has been predicted. In the experiment this was not observed, presumably because of collective effects within the ablation plume.     

Experimental results of DPIS with a new RFQ

We have developed a new heavy ion production system which uses a combination of an RFQ and a laser ion source. Induced plasma by a laser shot is delivered to the RFQ without an extraction electrode. We named this new idea ‘direct plasma injection scheme (DPIS)’. In 2004, a new RFQ was built for demonstrating the capability of the DPIS. After a few months of commissioning period, we could obtain more than 60 mA of carbon beam from the RFQ. This new scheme could be applied to cancer therapy facilities and high energy nuclear physics accelerator complexes.     

Emission characteristics of debris from CO<Subscript>2</Subscript> and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source

We describe a comparative study of the emission characteristics of debris from CO₂ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a CO₂ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the CO₂ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the CO₂ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the CO₂ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the CO₂ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of 10⁶. PACS  52.38.DX; 52.38.Ph; 52.38.Mf     

Ion source with electron ionization for a portable mass spectrometer

An ion source with electron ionization is considered. The charged-particle flow at the exit from this source has a cross section of ∼0.1 × 0.1 mm, an angle spread of 2° × 2°, a relative energy spread of <0.5%, and an energy range of 0.5–3.0 keV. This ion source is intended for systems where an ion beam is focused in two mutually perpendicular directions. The ion source design makes it possible to ionize a sample locally (in a volume of ∼10 mm³), where the concentration of the particles under study exceeds the concentration averaged over the volume of the vacuum chamber of the mass spectrometer by two to three orders of magnitude. The ion-optical properties of the source are numerically simulated, and the optimum parameters of the source are chosen. Examples of the application of the ion source are given for the mass-spectrometric determination of metal salts in aqueous solutions and of gases and volatile compounds in samples in various phase states.     

超强激光与固体气体复合靶作用产生高能氦离子

激光氦离子源产生的MeV能量的氦离子因有望用于聚变反应堆材料辐照损伤的模拟研究而得到关注.目前激光驱动氦离子源的主要方案是采用相对论激光与氦气射流作用加速高能氦离子,但这种方案在实验上难以产生具有前向性和准单能性、数MeV能量、高产额的氦离子束,而这些氦离子束特性是材料辐照损伤研究中十分关注的.不同于上述激光氦离子产生方法,我们提出了一种利用超强激光与固体-气体复合靶作用产生氦离子的新方法.利用这种方法,在实验上,采用功率密度5×10~(18)W/cm~2的皮秒脉宽的激光脉冲与铜-氦气复合靶作用,产生了前向发射的2.7 MeV的准单能氦离子束,能量超过0.5 MeV的氦离子产额约为10~(13)/sr.二维粒子模拟显示,氦离子在靶背鞘场加速和类无碰撞冲击波加速两种加速机理共同作用下得到加速.同时粒子模拟还显示氦离子截止能量与超热电子温度成正比.     

利用气泡探测器测量激光快中子

在利用超强激光驱动中子源的研究和应用研究中,中子源的产额及其角分布至关重要.我们在星光Ⅲ号激光装置上采用气泡探测器对强激光驱动的中子源的产额及其角分布进行了测量.利用超强皮秒激光与碳氘薄膜靶相互作用产生高能氘离子束撞击次级碳氘靶,通过氘-氘核反应产生准单能快中子.实验发现中子束的发射具有一定的方向性,在入射氘离子的传输方向上中子束具有更高的强度,测量得到的中子束最大强度为5.13×10⁷ n/sr.利用实验测量的氘离子能谱和角分布对中子束角分布进行了理论计算,结果与实验测量基本一致.     

Transverse characteristics of short-pulse laser-produced ion beams: a study of the acceleration dynamics

We report on first measurements of the transverse characteristics of laser-produced energetic ion beams in direct comparison to results for laser accelerated proton beams. The experiments show the same low emittance for ion beams as already found for protons. Additionally, we demonstrate that the divergence is influenced by the charge over mass ratio of the accelerated species. From these observations we deduced scaling laws for the divergence of ions as well as the temporal evolution of the ion source size.