Characteristics of laser-produced Ge ion fluxes used for modification of semiconductor materials

This paper describes the laser generation of Ge ion fluxes and their application to the modification of semiconductor materials by ion implantation. The Ge ions were produced by ablating solid targets using the PALS high-power iodine laser system at the PALS Research Centre in Prague, operating at its third harmonic frequency (438 nm wavelength) and producing 0.4 ns pulses with energy up to 0.25 kJ (intensity≤10¹⁵ W/cm²). The goal of these investigations was optimisation of the implantation of low and medium energy laser-generated Ge ion fluxes and they were carried out as part of the project PALS000929. Recently, a new repetitive pulse laser system at IPPLM in Warsaw, with a wavelength of 1.06 μm, energy of ～0.8 J in a 3.5 ns-pulse, repetition rate of up to 10 Hz, and intensity on target of up to 10¹¹ W/cm², has also been employed to produce Ge ions by irradiating solid targets. The laser-generated ions were investigated with diagnostics based on the time-of-flight method: various ion collectors and an electrostatic ion-energy analyzer. The Ge ion fluxes were implanted into Si and SiO₂ substrates located at distances of 10–30 cm from the target. The SiO₂ films were prepared on single crystal Si substrates and were implanted with Ge ions with different properties. The properties of the Ge-implanted layers, in particular, the depth distributions of implanted Ge ions, were characterised using Rutherford backscattering and other material surface diagnostic methods.     

Modification of semiconductor materials using laser-produced ion streams additionally accelerated in the electric fields

The laser-produced ion stream may be attractive for direct ultra-low-energy ion implantation in thin layer of semiconductor for modification of electrical and optical properties of semiconductor devices. Application of electrostatic fields for acceleration and formation of laser-generated ion stream enables to control the ion stream parameters in broad energy and current density ranges. It also permits to remove the useless laser-produced ions from the ion stream designed for implantation.For acceleration of ions produced with the use of a low fluence repetitive laser system (Nd:glass: 2 Hz, pulse duration: 3.5 ns, pulse energy:∼0.5 J, power density: 10¹⁰ W/cm²) in IPPLM the special electrostatic system has been prepared. The laser-produced ions passing through the diaphragm (a ring-shaped slit in the HV box) have been accelerated in the system of electrodes. The accelerating voltage up to 40 kV, the distance of the diaphragm from the target, the diaphragm diameter and the gap width were changed for choosing the desired parameters (namely the energy band of the implanted ions) of the ion stream. The characteristics of laser-produced Ge ion streams were determined with the use of precise ion diagnostic methods, namely: electrostatic ion energy analyser and various ion collectors. The laser-produced and post-accelerated Ge ions have been used for implantation into semiconductor materials for nanocrystal fabrication. The characteristics of implanted samples were measured using AES.     

A contribution to the characterization of laser-hardened steel surfaces

The article deals with the possibility to characterize the laser heat-treatment of steel surface by means of X-ray diffraction and microhardness measurements. For tensometric analysis the X-ray one-tilt method with no reference substance was used. It is shown that hardened surface layers of the carbon steel are affected by compressions reaching in the middle of the laser beam track up to ≈ 350 MPa. The microhardness increased by as much as 350 %. Presented at the 6th Joint Seminar “Development of Materials Science in Research and Education”, Karlštejn, Czech Republic, 17–19 September 1996. This research is a part of the research project supported by Grant Agency of the Czech Republic (Grant No. 106/95/0080).     

2.5-MeV neutron source controlled by high-intensity pulsed laser generating plasma

A laptop neutron source suited for the most demanding field or laboratory applications is presented. It is based on laser ablation of CD₂ primary targets, plasma acceleration of the D⁺ ions, and their irradiation of secondary CD₂ targets. The deuterium–deuterium (D-D) fusion reaction is induced in the secondary target, according to the values of fusion cross-section versus deuteron energy, which show a significant probability also at relatively low ion energies. The experiments were completed in the PALS laboratory, Prague, detecting monoenergetic neutrons at 2.45 MeV with an emission flux of about 10⁹ neutrons per laser shot. Other experiments demonstrating the possibility to induce D-D events were performed at IPPLM, Warsaw, and at INFN-LNS, Catania, where the deuterons were accelerated at about 4 MeV and 50 keV, respectively. In the last case, a low laser intensity and a post-ion acceleration system were employed. A special interaction chamber, under vacuum, is proposed to develop a new source of monochromatic neutrons or thermalized distribution of neutrons     

Statistical investigations of the beam stability of the double-pass amplified zinc soft X-ray laser at 21.2 nm

At the Prague asterix laser system (PALS) of the Academy of Sciences of the Czech Republic the 1-TW asterix iodine laser is used as a pump source for soft X-ray laser experiments. The prepulse technique was applied which is known to enhance the X-ray laser output at the J=0-1 transition dramatically. Since Zn slab targets were used the laser wavelength was 21.2 nm. A prepulse beam having 1.6 J was preceding the main pulse by 10 ns. The main and the prepulse beam are focused by two different optical systems separately. Implementing a half-cavity set-up for double-pass amplification using a Mo/Si multilayer mirror the X-ray laser output was 10 times stronger than at single pass amplification in a 3-cm long plasma. Double-pass amplification was observed to be most efficient when the pump pulse duration was at least 120 ps longer than the round trip time in the half-cavity. Under this fundamental condition the X-ray laser reached saturation in the double-pass regime containing 4 mJ energy what is proved to be enough for applications. In this contribution the X-ray laser features like divergence in two dimensions, the beam quality (symmetry), the pointing angle and the time-integrated output energy are investigated over more than 100 shots. To characterize the stability of the X-ray laser the shot distribution, the mean value and the standard deviation for these parameters are evaluated. For 18 shots in a series -- achieved during one single day -- the corresponding values are given and detailed chi-squared tests characterize the Zn X-ray laser as a robust tool suitable for applications. At PALS soft X-ray laser beam time can be reserved for external research groups.Received: 16 April 2003, Published online: 5 August 2003PACS: 42.55.Vc X- and -ray lasers - 42.60.Da Resonators, cavities, amplifiers, arrays, and rings - 42.60.Jf Beam characteristics: profile, intensity, and power; spatial pattern formation     

Conformational properties of poly(p-Phenylene vinylene)

We investigate the quasiparticle conformational defects (excitons, polarons and bioplarons) in the phenylene vinylene oligomers. The conformations are determined by means of the minimization of the total Hartree-Fock energy calculated at 3–21G level. The infrared vibrational transitions are calculated and the types of vibrations are assigned. The theoretical spectra are in good agreement with the experimental vibrational spectrum of poly(p-phenylene vinylene). Presented at the Czech-Israeli-German Symposium “Dynamical Processes in Condensed Molecular Systems”, Prague, Czech Republic, 26–30 May 1997. The quantum mechanical calculations were performed on the following computers: Power Challenge XL at Prague Supercomputing Centre, Charles University, IBM Power 2 at Supercomputing Centre of the Czech Technical University and Power Challenge XL at Supercomputing Centre Brno. The work is supported by Projects No. 202/94/0453 and 202/97/1016 of the Grant Agency of the Czech Republic and by Project No. 155/96 of the Grant Agency of the Charles University.     

Research activities at the PALS research infrastructure

The Prague Asterix Laser System (PALS) Research Infrastructure (RI) in Prague, one of only four kJ-class laser facilities in EU, has been offering its beam time to European researchers for already 14 years, since 2004 in the framework of the LASERLAB-Europe consortium. Till June 2014, the PALS RI has provided 4313 experimental days for a total of 41 projects with 303 international users from 42 different research institutions. Its principal experimental facility is a terawatt sub-ns iodine laser (1315?nm) with an optional plasma-based zinc XUV laser (21.2?nm), and an auxiliary Ti:Sapphire fs laser (1?J, 70?fs) exploited for femtosecond plasma probing and experiments with synchronised femtosecond and sub-nanosecond laser pulses at mean laser intensities of up to 30?PW/cm². The lasers are equipped with several target facilities and rich sets of instruments for both active and passive plasma diagnostics. The PALS main research areas include development and applications of secondary laser sources of high-energy ions and both coherent and non-coherent high-intensity XUV radiation, laboratory astrophysical and inertial fusion-relevant studies. In this paper, the main results having been achieved at PALS in the framework of LASERLAB-EUROPE international access activities during the last four years are highlighted.     

The generation of fast particles in plasmas created by laser pulses with different wavelengths

By means of spatially resolved high-resolution X-ray spectroscopy, we have investigated the generation of fast ions at various laser installations with different flux densities and laser wavelengths. It is demonstrated that the fast ion generation in laser-produced plasma can be achieved for a very low level of the averaged laser intensity on the target. The time-of-flight mass spectrometry ion diagnostics and X-ray spectrographs give very close results for the energy distribution of the thermal ion component. For higher energies, however, we found significant differences: the spatially resolved high-resolution spectrographs expose the presence of suprathermal ions, while the time-of-flight method does not. Suprathermal ion energies E _ion plotted as a function of the qλ² parameter show a large scatter far above the experimental errors. The cause of these large scatters is attributed to a strong nonuniformity of the laser intensity distribution in the focal spot. The analysis by means of hydrodynamics and spectral simulations show that the X-ray emission spectrum is a complex convolution from different parts of the plasma with strongly different electron density and temperature. It is shown that the highly resolved Li-like satellite spectrum near Heαcontains significant distortions even for very low hot electron fractions. Non-Maxwellian spectroscopy allows determination of both the hot electron fraction and the bulk electron temperature.     

极化X光谱诊断铝激光等离子体的电子密度

为了准确诊断激光等离子体的电子密度,提出了一种基于极化光谱的类氦共振线与互组合线相对强度比诊断电子密度的方法.该法考虑了激光等离子体发射的X射线存在极化的特性,用极化光谱理论对测量的类氦共振线和互组合线光谱相对强度比进行精密校正,再推导等离子体的电子密度.在2×10 J激光装置上进行了实验,使用极化PET（002）晶体谱仪测量了Al类氦离子光谱,利用光谱的极化特性推出Al等离子体的电子密度约为1.5×1020 cm－3.结果表明极化X光谱推导等离子体电子密度方法适合激光高温高密等离子体诊断.     

The ALP-PALS project: optimal coupling for laser propulsion

Ablative laser propulsion (ALP) could revolutionize space travel by reducing the 30:1 propellant/payload ratio needed for near-earth orbit 50-fold. Experiments to date have demonstrated the necessary efficiency, coupling coefficient, and specific impulse for application, but were performed at pulse energies and spot sizes much smaller than required and at wavelengths not usable in the atmosphere. Prior experiments have also not simultaneously measured the properties of the ions produced or of the ablated surface, properties that would allow full understanding of the propulsion properties in terms of ion characteristics.

The first realistic measurements of laser propulsion parameters are proposed using PALS (Prague Asterix Laser System), the important parameters of which (pulse energy (～ 1 kJ), pulse length (400 ps), beam diameter (～ 29 cm), and flat beam profile) equal those required for application. The PALS wavelength is a little short (1.3 μ m vs.>1.5 μ m) but is closer than any other laser available and PALS’ 2ω/3ω capability should allow extrapolation to application values. The PALS’ proven infrastructure for measuring laser-driven ion properties means that only a ballistic pendulum for measuring momentum transfer will have to be added.     

金激光等离子体冕区电离态特性研究

 提出一种测量金激光等离子体电荷态分布与平均电离度的X射线光谱学诊断方法。该方法基于稳态碰撞-辐射近似，考虑电子离子直接碰撞激发与双电子复合两种激发态布居方式，建立了金M带5f-3d跃迁组辐射总强度与离子态分布的耦合方程。根据实验测量的金平面靶激光等离子体冕区辐射的5f-3d跃迁线系的强度分布，诊断得到了金激光等离子体的电荷态分布与平均电离度。此外，还分析了电子温度、电子密度以及双电子复合过程对电荷态分布及平均电离度诊断的影响，并将实验诊断结果与辐射流体力学理论模拟结果及离化平衡动力学计算结果进行了对比分析。结果表明：实验诊断结果与基于CRE近似的离化平衡动力学计算结果近似；当电子温度高于1.5 keV时，双电子复合过程对电离度的诊断结果影响较小。     

X-ray spectrometry of laser-produced aluminum plasmas

X-ray lines and continuum emission from a laser-produced aluminum plasma have been studied. The electron temperature variations during the laser pulse (30 ns) were deduced from time-dependent measurements of intensities of resonance lines (2.5 ns time-resolution). Comparison is made with electron temperature values deduced from ion emission measurements.     

Gd靶激光等离子体6.7nm光源的实验研究

本文对Gd靶激光等离子体极紫外光源进行了实验研究, 在 6.7 nm附近获得了较强的辐射, 并研究了6.7 nm 附近光辐射随打靶激光功率密度变化的规律以及收集角度对极紫外辐射的影响. 同时, 对平面Gd靶激光等离子光源的离子碎屑角分布进行了测量, 发现从靶面的法线到沿着靶面平行方向上Gd离子数量依次减少. 进一步研究结果表明采用0.9 T外加磁场的条件下可取得较好的Gd 离子碎屑阻挡效果.     

Study of the ion composition of an expanding magnesium plasma produced by a CO2 laser

The evolution of the ion composition of a laser plasma during its expansion over a large distance is studied. The plasma is produced by a TIR CO₂ laser with a pulse energy up to 100 J and duration of ～20 ns. X-ray diagnostics with the use of a spectrograph and X-ray PIN diodes was applied to study the plasma near the target surface. At large distances from the target surface, time-of-flight neutral-particle diagnostics with the use of an electrostatic analyzer and ion collector was applied. Calculations performed with the GIDRA-1 code agree well with experimental data.     

X-Rays emission by high-intensity pulsed lasers irradiating thin foils at PALS laboratory

X-rays and forward ion emission from laser-generated plasma in the Target Normal Sheath Acceleration regime of different targets with 10-μm thickness, irradiated at Prague Asterix Laser System (PALS) laboratory at about 10¹⁶ W/cm² intensity, employing a 1,315 nm-wavelength laser with a 300-ps pulse duration, are investigated. The photon and ion emissions were mainly measured using Silicon Carbide (SiC) detectors in time-of-flight configuration and X-ray streak camera imaging. The results show that the maximum proton acceleration value and the X-ray emission yield growth are proportional to the atomic number of the irradiated targets. The X-ray emission is not isotropic, with energies increasing from 1 keV for light atomic targets to about 2.5 keV for heavy atomic targets. The laser focal position significantly influences the X-ray emission from light and heavy irradiated targets, indicating the possible induction of self-focusing effects when the laser beam is focalized in front of the light target surface and of electron density enhancement for focalization inside the target.     

Iodine laser production of highly charged Ta ions

The results of systematic studies of multiply charged Ta ion production with the fundamental frequency of an iodine laser (=1.315m), and its 2nd (0.657m) and 3rd (0.438m) harmonics are summarized and discussed. Short laser pulse (350 ps) and a focus spot diameter of 100m allowed for the laser power densities in the range of 5×10¹³–1.5×10¹⁵ W/cm². Corpuscular diagnostics were based on time-of-flight methods; two types of ion collectors and a cylindrical electrostatic ion energy analyzer were used. The Ta ions with charge state up to 55+ were registered in the distance of 210 cm; the maximum amplitude of the signal of a high energy ion group was found to belong to the ions with the charge state around 43+, depending on the laser power density. The ion energy distribution was measured for all three wavelengths, however, in a different energy range; the maximum registered ion energy was 8.8 MeV. The occurrence of highly charged ions in the far expansion zone is discussed in view of the mechanism of charge distribution freezing during two-temperature isothermal plasma expansion.The work was performed in a partial fulfillment of the research grant project No. A1010525 sponsored by the Academy of Sciences of the Czech Republic and grant project No. 202/95/0039 sponsored by the Grant Agency of the Czech Republic.     

等离子体喷射X光时空分辨测量

在“神光”强激光装置上对０．５３μｍ激光产生的等离子体喷射进行了Ｘ光时空分辨诊断。首次利用多针孔阵列成像技术结合软Ｘ光扫描相机观察激光加热区和Ｘ光加热区等离子体的运动，获得了初级和次级等离子体膨胀速度等结果．     

等电子谱线法测量Mg/Al等离子体电子温度空间分布

 在“星光Ⅱ”激光装置上对Mg/Al混合材料埋点靶进行三倍频激光打靶实验,用空间分辨晶体谱仪测量靶材料发射的X光光谱,获取了示踪离子谱线实验数据。采用多组态Dirac-Fock方法计算所需原子参数,并在局域热动平衡条件下建立了双示踪离子谱线强度比随电子温度的变化关系。在此基础上由双示踪元素等电子谱线法确定了Mg/Al混合材料埋点靶激光等离子体电子温度空间分布。     

双示踪元素X射线能谱诊断激光等离子体电子温度

在“星光Ⅱ”激光装置上对Mg/Al混合材料平面靶和Mg/Al示踪层金盘靶进行三倍频激光打靶实验,用平面晶体谱仪测量靶材料发射的X射线能谱,获取了示踪离子谱线实验数据.采用多组态Dirac-Fock方法计算所需原子参数,并在局域热动平衡条件下建立了双示踪离子谱线强度比随电子温度变化关系.在此基础上由双示踪元素等电子谱线法确定了Mg/Al混合材料平面靶及金盘靶激光等离子体的电子温度 关键词： 电子温度 激光等离子体 X射线能谱     

Beam properties of fully optimized,table-top,coherent source at 30 nm

We present results on development and experimental implementation of a 1-kHz, coherent extreme ultraviolet (XUV) radia- tion source based on high-order harmonic generation of the femtosecond, near-infrared laser pulses produced by the titanium-doped sapphire laser system (35 fs, 1.2 mJ, 810 nm) at the Institute of Physics AS CR / PALS Centre. The source comprises a low-density static gas cell filled with a conversion medium, typically argon. The comprehensive optimization of the XUV harmonic source has been performed with respect to major parameters such as gas pressure in the cell, cell length, position of the focus of the driving laser field with respect to the gas cell position, size of the driving near-infrared laser beam, chirp of the femtosecond pulse, and the focal length of the lens deployed in the experimental setup. Harmonic spectra were recorded using an XUV transmission grating spectrometer developed specifically for this purpose. Detailed characterization of the XUV source has been performed including measurement of the XUV beam profile, M² parameter of the beam, absolute energy, and spatial coherence.