Laser plasma plume kinetic spectroscopy of the nitrogen and carbon species

The formation and decay of carbon and nitrogen atoms, CN radicals and C₂ molecules were monitored using spatial‐ and time‐resolved emission spectroscopy in a plasma plume formed during laser ablation of a graphite target in nitrogen atmosphere. A simple exponential model was used to explain the effect of the individual chemical reactions and plasma dynamics on the measured kinetic characteristics. The succession of emissions C → N → CN was observed in the time‐resolved spectra, supporting the suggestion that the CN radical is formed mainly by the direct reaction C + N → CN or C₂ + N₂ → 2CN. The formation of CN radical was enhanced by the additional generation of atomic nitrogen through the RF discharge. (© 2003 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Carbon nitride films by RF plasma assisted PLD: Spectroscopic and electronic analysis

Carbon nitride (CNx) thin films have been grown on Si 〈1 0 0〉 by 193 nm ArF ns pulsed laser ablation of a pure graphite target in a low pressure atmosphere of a RF generated N₂ plasma and compared with samples grown by PLD in pure nitrogen atmosphere. Composition, structure and bonding of the deposited materials have been evaluated by X-ray photoelectron spectroscopy (XPS), and Raman scattering. Significant chemical and micro-structural changes have been registered, associated to different nitrogen incorporation in the two types of films analyzed. The intensity of the reactive activated species is, indeed, increased by the presence of the bias confined RF plasma, as compared to the bare nitrogen atmosphere, thus resulting in a different nitrogen uptake in the growing films. The process has been also investigated by some preliminary optical emission studies of the carbon plume expanding in the nitrogen atmosphere. Optical emission spectroscopy reveals the presence of many excited species like C⁺ ions, C atoms, C₂, N₂; and CN radicals, and N₂⁺ molecular ions, whose relative intensity appears to be increased in the presence of the RF plasma. The films were also characterised for electrical properties by the “four-probe-test method” determining sheet resistivity and correlating surface conductivity with chemical composition.     

Carbon-plasma produced in vacuum by 532 nm-3 ns laser pulses ablation

A study of VIS laser ablation of graphite, in vacuum, by using 3 ns Nd:YAG laser radiation is reported. Nanosecond pulsed ablation gives an emission mass spectrum attributable to C_n neutral and charged particles. Mass quadrupole spectroscopy, associated to electrostatic ion deflection, allows estimation of the velocity distributions of several of these emitting species within the plume as a function of the incident laser fluence. Time gated plume imaging and microscopy measurements have been used to study the plasma composition and the deposition of thin carbon films. The multi-component structure of the plume emission is rationalized in terms of charge state, ions temperature and neutrals temperature. A special regard is given to the ion acceleration process occurring inside the plasma due to the high electrical field generated in the non-equilibrium plasma conditions. The use of nanosecond laser pulses, at fluences below 10 J/cm², produces interesting C-atomic emission effects, as a high ablation yield, a high fractional ionization of the plasma and presence of nanostructures deposited on near substrates.     

Optical emission diagnostics of laser-induced plasma for diamond-like film deposition

Optical emission from a laser-induced plasma plume is recorded during KrF excimer laser ablation of graphite in a gas mixture of Ar and H₂ (3%) for deposition of diamond-like thin films. At sub-GW/cm² laser intensities the spectrum is dominated by the bands of C₂ and CN. From the band intensities, the vibrational temperatures of both radicals are calculated to be 12–15×10³ K, and their concentrations are estimated to be 5×10¹⁴ cm^–3 and 2×10¹⁴ cm^–3, respectively.     

Laser-ionization mass-spectrometric studies on laser ablation of a nitrogen-rich polymer at 532 nm and 1064 nm

Laser-ionization Time-Of-Flight (TOF) mass-spectrometric studies have been carried out on the 532 nm and 1064 nm laser ablation products from a nitrogen-rich polymer. The polymer used had an elemental composition of C_6.0N_8.9H_3.4 and consisted of C=N, C-N, and N-H chemical bonds. The TOF mass spectra observed were composed of various peaks (150 amu) depending on the ablation laser wavelength. The primary peaks were assigned to C⁺, CN⁺, CHnN⁺ ₂ (n=1–3) and C₂H₂N⁺ ₃ for 532 nm ablation, and C⁺, C⁺ ₃, HCN⁺, HCCN⁺, CH₂NH⁺, HNCN⁺, H₃NCN⁺, and C₄H₄N⁺ ₇ for 1064 nm ablation. The flight velocity distributions with peak velocities ranging from 8.6×10³ cm/s to 3.8×10⁴ cm/s were measured for these products. The distinct velocity distributions observed between small and large products indicate the presence of two origins in the fragment ejection process from the polymer for both 532 nm and 1064 nm ablation. Furthermore, we suggest an importance of the translational energy of the fragments for the product generation in the laser plume.     

Examination of photoproducts in the ablation plume of doped PMMA

Optical emission and laser-induced fluorescence spectroscopies (OES and LIF) are employed to examine the plume ejected into vacuum upon UV pulsed laser ablation (248 nm, 20 ns, and 266 nm, 5 ns) of poly(methyl methacrylate) PMMA films doped with photostable compounds naphthalene (NapH) and phenanthrene (PhenH), and their photolabile iodide derivatives iodonaphthalene (NapI) and iodophenanthrene (PhenI). Spontaneous emissions observed in the irradiation of NapI and PhenI sensitised films can be assigned to excited products resulting from photodissociation of the dopants and to excited C₂, CH, and CN radicals. The presence in the plume of ground state products is revealed by LIF upon excitation at 266 nm. Measurements of the dependence of the spontaneous and LIF emissions on distance to the surface, ablation fluence, and flight velocities of species are discussed with reference to the mechanistic implications derived from the measurements. PACS 52.38.Mf; 61.82.Pv; 82.50     

Nanosecond and femtosecond ablation of La0.6Ca0.4CoO3: a comparison between plume dynamics and composition of the films

Thin films of La_0.6Ca_0.4CoO₃ were grown by pulsed laser ablation with nanosecond and femtosecond pulses. The films deposited with femtosecond pulses (248 nm, 500 fs pulse duration) exhibit a higher surface roughness and deficiency in the cobalt content compared to the films deposited with nanosecond pulses (248 nm, 20 ns pulse duration). The origin of these pronounced differences between the films grown by ns and fs ablation has been studied in detail by time-resolved optical emission spectroscopy and imaging. The plumes generated by nanosecond and femtosecond ablation were analyzed in vacuum and in a background pressure of 60 Pa of oxygen. The ns-induced plume in vacuum exhibits a spherical shape, while for femtosecond ablation the plume is more elongated along the expansion direction, but with similar velocities for ns and fs laser ablation. In the case of ablation in the background gas similar velocities of the plume species are observed for fs and ns laser ablation. The different film compositions are therefore not related to different kinetic energies and different distributions of various species in the plasma plume which has been identified as the origin of the deficiency of species for other materials.     

Plasma characterization and room temperature growth of carbon nanotubes and nano-onions by excimer laser ablation

The deposition of carbon nanotubes and carbon nano-onions at room temperature using excimer laser radiation to ablate mixed graphite-metal targets is described. Our deposition conditions are in contrast to other investigations on the pulsed laser deposition of carbon nanotubes that have employed high temperatures and high pressures. We find that the formation of these carbon nanostructures is dependent on the ambient gas employed during ablation. In the presence of O₂ gas, carbon nanotubes and nano-onions are produced, while inert atmospheres such as Ar yield amorphous carbon. High-resolution, in situ, time-resolved emission spectroscopy has been used to track the evolution of species (C₂, C₃, Ni/Co) in the ablation plume. Spectral fits on low and high-resolution spectra reveal that the vibrational-rotational temperatures for C₂ produced in O₂ remain at ∼5000 K for nearly 20 μs but drop rapidly in Ar. Details of the formation of carbon nanotubes and nano-onions, and in situ time-resolved optical emission spectroscopy are described.     

Theoretical study on the interaction of heptafluoro-iso-butyronitrile decomposition products with Al (1 1 1)

Seeking environmentally friendly gas-insulated medium has become a research hotspot in recent years. At present, C₃F₇CN (Heptafluoro-iso-butyronitrile) is considered to be a potential SF₆ environment-friendly alternative gas and some achievements have been made in the study of its insulation and decomposition characteristics, but there are few reports on the compatibility between its characteristic decomposition products and materials. The investigation of compatibility between gas-insulated medium and material is an important part of evaluating its comprehensive performance. In this paper, we investigated the interaction between C₂F₅CN, CF₃CN, COF₂ and CF₄ with the aluminium widely used in electrical equipment. It was found that the interaction between C₂F₅CN, CF₃CN and Al (1 1 1) surface is strong. There are obvious charge transfer and electron orbital overlap between the C atom, N atom in CN group and Al (1 1 1). The interaction between COF₂, CF₄ and Al (1 1 1) surface is weak and van der Waal’s forces play the major role. Relevant results reveal the characteristics of C₃F₇CN decomposition products and provide theoretical guidance for evaluating the material compatibility between C₃F₇CN decomposition products and aluminium.     

The microwave spectra of cyanamide: Conclusions from a transitions

Microwave spectra have been observed for the species NH₂CN, NHDCN, ND₂CN, ¹⁵NH₂CN, NH₂C¹⁵N, ¹⁵ND₂CN and ND₂C¹⁵N. The nonplanar nature of the molecule is confirmed and the following structural parameters obtained N₁N₂ = 2.506 ± 0.002 Å, N₁C = 1.346 ± 0.005 Å, CN₂ = 1.160 ± 0.005 Å, N₁H = 1.001 ± 0.015 Å, HN?₁H = 113°31′ ± 2°, out of plane angle (see text) = 37°58′ ± 1°. (N₁ is the amino nitrogen atom and N₂ that the cyanide group.)     

Infrared laser spectroscopy of the CN free radical in a methane-nitrogen-hydrogen plasma

Many Pand R-branch lines of the fundamental bands of the ¹²C¹⁴N and ¹³C¹⁴N radicals in their ground (²Σ⁺) electronic state have been measured at high resolution by diode laser absorption spectroscopy. The radicals were generated in a 2.45 GHz planar microwave plasma in methane with varying proportions of N₂ and H₂. From a fit to the spectra the origins of the fundamental bands of the two isotopomers were determined to be 2042.42104(84) cm^?1 and 2000.084 70(30) cm^?1. The main product detected in the plasma by diode laser spectroscopy is HCN, with concentrations about three orders of magnitude higher than CN.     

Dynamics of single-wall carbon nanotube synthesis by laser vaporization

The key spatial and temporal scales for single-wall carbon nanotube (SWNT) synthesis by laser vaporization at high temperatures are investigated with laser-induced luminescence imaging and spectroscopy. Graphite/(Ni, Co) targets are ablated under typical synthesis conditions with a Nd:YAG laser at 1000 °C in a 2-in. quartz tube reactor in flowing 500-Torr Ar. The plume of ejected material is followed for several seconds after ablation using combined imaging and spectroscopy of Co atoms, C₂ and C₃ molecules, and clusters. The ablation plume expands in stages during the first 200 7s after ablation and displays a self-focusing behavior. Interaction of the plume with the background gas forms a vortex ring which segregates and confines the vaporized material within a ~1-cm³ volume for several seconds. Using time-resolved spectroscopy and spectroscopic imaging, the time for conversion of atomic and molecular species to clusters was measured for both carbon (200 7s) and cobalt (2 ms) at 1000 °C. This rapid conversion of carbon to nanoparticles, combined with transmission electron microscopy analysis of the collected deposits, indicate that nanotube growth occurs over several seconds in a plume of mixed nanoparticles. By adjusting the time spent by the plume within the high-temperature zone using these in situ diagnostics, single-walled nanotubes of controlled (~100 nm) length were grown and the first estimate of a growth rate on single laser shots (0.2 7m/s) was obtained.     

使用发射光谱对H2稀释情况下的感应耦合H2/C4F8等离子体中碳氟基团的研究

在射频输入功率为400W，气压为0.8Pa的条件下，使用光强标定的发射光谱方法研究了感应耦合H₂/C₄F₈等离子体中CF, CF₂, H和F基团的相对密度随流量比R=H₂/(H₂+C₄F₈)的变化情况，而HF基团相对密度的变化由四级质谱仪探测得到。结果表明等离子体活性先随着R的增加而升高，然后随着R的进一步增加而下降。在流量比从0逐渐上升到0.625的过程中，CF和CF₂基团的相对密度不断降低。实验中测得的CF基团的相对密度[CF]与理论计算得到的[CF]有很好的一致性说明了电子与CF2基团的碰撞反应是CF基团产生的主要原因。文中还讨论了HF基团。     

Pulsed laser ablation of SiC in a nitrogen atmosphere: formation of CN

Optical emission lines from the plasma generated by a laser ablation process have been investigated to gather information on the nature of the chemical species present. In particular, the experiments were carried out during the laser ablation of a ceramic sintered SiC target, both in vacuum and in presence of controlled nitrogen atmosphere. Time integrated and spatially resolved emission spectra are dominated by the atomic emission lines from silicon and carbon species, either neutral, or singly ionized. When the ablation process was carried out in a nitrogen gas background direct evidence of the formation of the CN molecular specie was found. Fast photography imaging of the expanding plume revealed the formation of a shock wave at nitrogen pressure above 13.3 Pa, with the consequent heating of the shocked region and enhancement of the kinetics of ionization and excitation. Since the C₂ specie was absent, a CN formation mechanism involving atomic carbon and nitrogen in the presence of a shock wave is suggested. PACS 52.38.Mf; 52.50.Jm, 47.40.-x     

Theory of coherent phenomena and fundamentals in nuclear resonant scattering

Muonic X-ray cascades in B, C, N, O and Ne following muonic atom formation in B₂H₆, CH₄, C₂H₆, C₄H₁₀, N₂, O₂ and Ne were investigated. The densities of the different target gases were low enough to prevent any contact of the atom or molecule on which the formation takes place with surrounding atoms or molecules during the cascade. Molecular effects of the capturing molecule are clearly seen. The observed transition yields could be reproduced by variation of only two parameters in a cascade calculation: the number of initially available electrons and the muon angular momentum distribution at the starting point of the calculation. By varying the number of electrons, the molecular effects could be described. This revised version was published online in August 2006 with corrections to the Cover Date.     

Observation and spatial distribution of C3 in a DC arcjet plasma during diamond deposition using laser-induced fluorescence

3 radical in the plume of an arcjet plasma during diamond film chemical vapor deposition. C₃, identified using laser-induced fluorescence, is distributed in a shell surrounding the diamond-depositing core of the arcjet plasma plume. Received: 13 June 1996/Revised version: 5 September 1996     

Mass and kinetic energy distribution of the species generated by laser ablation of La<Subscript>0.6</Subscript>Ca<Subscript>0.4</Subscript>MnO<Subscript>3</Subscript>

The mass distributions of the species generated by laser ablation from a La_0.6Ca_0.4MnO₃ target using laser irradiation wavelengths of 193 nm, 266 nm and 308 nm have been investigated with and without a synchronized gas pulse of N₂O. The kinetic energies of the species are measured using an electrostatic deflection energy analyzer, while the mass distributions of the species were analyzed with a quadrupole mass filter. In vacuum (pressure 10⁻⁷ mbar), the ablation plume consists of metal atoms and ions such as La, Ca, Mn, O, LaO, as well as multiatomic species, e.g. LaMnO⁺. The LaO⁺ diatomic species are by far the most intense diatomic species in the plume, while CaO and MnO are only detected in small amounts. The interaction of a reactive N₂O gas pulse with the ablation plume leads to an increase in plume reactivity, which is desired when thin manganite films are grown, in order to incorporate the necessary amount of oxygen into the film. The N₂O gas pulse appears to have a significant influence on the oxidation of the Mn species in the plume, and on the creation of negative ions, such as LaO⁻,O⁻ and O₂⁻.     

Double-pulse laser ablation applied to reactive PLD method for synthesis of carbon nitride film: A second laser shot delay

Carbon nitride films were deposited using ablation of graphite target by second harmonic radiation of Nd:YAG laser in nitrogen atmosphere. To produce high hardness films, the deposited particles should have sufficient kinetic energy to provide their efficient diffusion on a substrate surface for formation of crystal structure. However, a shock wave is arisen in ambient gas as a consequence of laser plasma explosive formation. This shock wave reflected from the substrate interacts with plume particles produced by the first laser pulse and decreases their kinetic energy. This results in decrease of film crystallinity. To improve film quality, two successive laser pulses was proposed to be used. At adjusting time delay, the particles induced by the second pulse wilt serve as a piston, which will push forward both stopped particles ablated by the first pulse and arisen from chemical reactions in ambient gas. An X-ray photoelectron spectroscopy (XPS) analysis of deposited films has shown an increase of content of sp ³ carbon atoms corresponding to crystalline phase, if double-pulse configuration is employed. The luminescence of excited C₂ and CN molecules in laser plume at different distances from the target was studied to optimize the delay between laser pulses.     

Gas pressure effects on the structure of CNx thin films deposited by laser ablation

Carbon nitride thin films with different nitrogen concentration have been deposited at different N₂ and N₂/Ar mixed partial pressures. Time-integrated optical emission spectroscopy measurements have been performed to gather information on the nature of the chemical species present in the plasma. Both the CN and C₂ molecular species have been observed. Fast photography imaging of the expanding plume revealed the change of the dynamics from a free expansion at low pressure to a shock wave formation followed then by the plume stopping upon increasing the gas pressure values. Raman and XPS spectroscopy measurements performed on the deposited thin films revealed that the films, structure strongly depends on the dynamics of the expansion plasma regime rather than on the partial pressure at which the deposition takes place.