Optical emission diagnostics of laser-induced plasma for diamond-like film deposition |
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| Authors: | X Chen J Mazumder A Purohit |
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| Institution: | (1) Laser-Aided Materials Processing Laboratory, Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, 61801 Urbana, IL, USA;(2) Engineering Physics Division, Argonne National Laboratory, 60439 Argonne, IL, USA |
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| Abstract: | Optical emission from a laser-induced plasma plume is recorded during KrF excimer laser ablation of graphite in a gas mixture of Ar and H2 (3%) for deposition of diamond-like thin films. At sub-GW/cm2 laser intensities the spectrum is dominated by the bands of C2 and CN. From the band intensities, the vibrational temperatures of both radicals are calculated to be 12–15×103 K, and their concentrations are estimated to be 5×1014 cm–3 and 2×1014 cm–3, respectively. |
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| Keywords: | 81 60 Z 81 15 Z 33 52 |
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