Structural analysis of AlGaAs quantum wires on vicinal (110)GaAs by transmission electron microscopy and energy dispersive X-ray spectroscopy

Giant step structures consisting of coherently aligned multi-atomic steps were naturally formed during the molecular beam epitaxy growth of Al_0.5Ga_0.5As/GaAs superlattices (SLs) on vicinal (110)GaAs surfaces misoriented 6° toward (111)A. The growth of AlAs/Al_xGa_1−xAs/AlAs quantum wells (QWs) on the giant step structures realized Al_x0Ga_1−x0As (x₀<x) quantum wires (QWRs). We studied the giant step structures and the QWRs by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDX). TEM observations revealed that the QWRs were formed at the step edges. The cross sections of the QWRs were as small as 10 nm×20 nm and the lateral distances between them were about 0.15 μm. We clarified the roles of the SLs to form the coherent giant step structures. From EDX analysis, it was estimated that the AlAs composition in the Al_0.5Ga_0.5As layers varied from 0.5 (terrace) to 0.41 (step edge). In the AlAs/Al_xGa_1−xAs/AlAs QWs, the AlAs compositional modulation and the confinement by the AlAs barriers led to the embedded Al_x0Ga_1−x0As regions. These results supported the existence of the Al_x0Ga_1−x0As QWRs on the giant step structures.     

Heavily carbon-doped p-type InGaAs by MOMBE

Carbon-doped In_xGa_1−xAs layers (x=0−0.96) were grown by metalorganic molecular beam epitaxy (MOMBE) using trimethylgallium (TMG), solid arsenic (As₄) and solid indium (In) as sources of Ga, As and In, respectively. The carrier concentration is strongly affected by growth temperature and indium beam flux. Heavy p-type doping is obtained for smaller In compositions. The hole concentration decreases with the indium composition from 0 to 0.8, and then the conductivity type changes from p to n at x=0.8. Hole concentrations of 1.0×10¹⁹ and 1.2×10¹⁸ cm^-3 are obtained for x=0.3 and 0.54, respectively. These values are significantly higher than those reported on carbon-doped In_xGa_1−xAs by MBE. Preliminary results on carbon-doped GaAs/In_xGa_1−xAs strained layer superlattices are also discussed.     

Chemical beam epitaxy of AlGaAs and AlInAs using trimethylamine alane precursor

Al_xGa_1−xAs and Al_xIn_1−xAs alloys were grown on GaAs and InP, respectively, by chemical beam epitaxy, using trimethylamine alane (TMAA) as the source of aluminium. TMAA could be used properly only after some problems had been solved. Low carbon and oxygen concentrations were obtained in both alloys, leading to residual hole concentrations of 2 × 10¹⁶ cm^-3 in Al_0.3Ga_0.7As. The abruptness of the AlGaAs/GaAs interface proved the absence of TMAA memory effect. The control of Al_xIn_1−xAs solid composition was more difficult than for Ga_xIn_1−xAs, but was less sensitive to growth temperature. Photoluminescence intensities of Al_0.3Ga_0.7As and Al_0.48In_0.52As grown at 510°C were similar to those of MBE grown materials.     

The growth of InGaAsP by CBE for SCH quantum well lasers operating at 1.55 and 1.4 μm

InGaAsP has been grown by CBE at compositions of 1.1, 1.2 and 1.4 μm for the development of MQW-SCH lasers. The observed incorporation coefficients for TMI and TEG show strong temperature sensitivity while the phosphorus and arsenic incorporation behavior is constant over the substrate temperature range explored, 530 to 580°C setpoint. For higher substrate temperatures the growth rate increases with the largest growth rates occurring for the 1.4 μm quaternary. Low temperature photoluminescence indicates the possibility of compositional grading or clustering for the 1.1 μm material and also for the 1.2 μm material grown at the lowest substrate temperature. The final laser structure was grown with the InP cladding regions grown at 580°C with the inner cladding and active regions grown at 555°C. Using this approach we have successfully grown MQW-SCH lasers with the composition of the active In_xGa_1−xAs ranging from x=0.33 to x=0.73. Threshold current densities as low as 689 A/cm² have been measured for an 800 μm×90 μm broad area device with x=0.68.     

Phase diagram calculation for epitaxial growth of GaInAs on InP considering the surface, interfacial and strain energies

In order to know the effects of the surface, interfacial and strain energies on the calculation of the phase diagram, these energies were calculated for the Ga_xIn_1−xAs/InP structure and the Ga–In–As ternary phase diagram for the epitaxial growth of GaInAs on (1 1 1) InP was determined. The layer-thickness dependence of the liquidus temperature and solidus composition was determined. It was found that the liquidus and solidus phases were strongly influenced by these energies when the layer thickness was thinner than about 0.06 μm. The consideration of the effects of the surface, interfacial and strain energies is effective to explain the peculiar behavior of the experimental results near the lattice-matched composition (x=0.47), which is called the latching effect.     

Indium content determination related with structural and optical properties of InGaN layers

We studied the structural and optical properties of a set of nominally undoped epitaxial single layers of In_xGa_1−xN (0<x0.2) grown by MOCVD on top of GaN/Al₂O₃ substrates. A comparison of composition values obtained for thin (tens of nanometers) and thick (≈0.5 μm) layers by different analytical methods was performed. It is shown that the indium mole fraction determined by X-ray diffraction, measuring only one lattice parameter strongly depend on the assumptions made about strain, usually full relaxation or pseudomorphic growth. The results attained under such approximations are compared with the value of indium content derived from Rutherford backscattering spectrometry (RBS). It is shown that significant inaccuracies may arise when strain in In_xGa_1−xN/GaN heterostructures is not properly taken into account. Interpretation of these findings, together with the different criteria used to define the optical bandgap of In_xGa_1−xN layers, may explain the wide dispersion of bowing parameters found in the literature. Our results indicate a linear, E_g(x)=3.42−3.86x eV (x0.2), “anomalous” dependence of the optical bandgap at room temperature with In content for In_xGa_1−xN single layers.     

Heavily carbon-doped p-type (In)GaAs grown by gas-source molecular beam epitaxy using diiodomethane

Heavily carbon-doped p-type In_xGa_1−xAs (0≤x<0.49) was successfully grown by gas-source molecular beam epitaxy using diiodomethane (CH₂I₂), triethylindium (TEIn), triethylgallium (TEGa) and AsH₃. Hole concentrations as high as 2.1×10²⁰ cm⁻³ were achieved in GaAs at an electrical activation efficiency of 100%. For In_xGa_1−xAs, both the hole and the atomic carbon concentrations gradually decreased as the InAs mole fraction, x, increased from 0.41 to 0.49. Hole concentrations of 5.1×10¹⁸ and 1.5×10¹⁹ cm⁻³ for x = 0.49 and x = 0.41, respectively, were obtained by a preliminary experiment. After post-growth annealing (500°C, 5 min under As₄ pressure), the hole concentration increased to 6.2×10¹⁸ cm⁻³ for x = 0.49, probably due to the activation of hydrogen-passivated carbon accepters.     

Structure and optical properties of self-assembled InAs/GaAs quantum dots with In0.15Ga0.85As underlying layer

A high density of 1.02×10¹¹ cm⁻² of InAs islands with In_0.15Ga_0.85As underlying layer has been achieved on GaAs (1 0 0) substrate by solid source molecular beam epitaxy. Atomic force microscopy and PL spectra show the size evolution of InAs islands. A 1.3 μm photoluminescence (PL) from InAs islands with In_0.15Ga_0.85As underlying layer and InGaAs strain-reduced layer has been obtained. Our results provide important information for optimizing the epitaxial structures of 1.3 μm wavelength quantum dots devices.     

Impedance spectroscopy analysis of AlGaN/GaN HFET structures

For HFET application a series of samples with 30 nm Al_xGa_1−xN (x=0.02–0.4) layers deposited at 1040°C onto optimised 2 μm thick undoped GaN buffers were fabricated. The Al_xGa_1−xN/GaN heterostructures were grown on c-plane sapphire in an atmospheric pressure, single wafer, vertical flow MOVPE system. Electrical properties of the Al_xGa_1−xN/GaN heterostructures and thick undoped GaN layers were evaluated by impedance spectroscopy method performed in the range of 80 Hz–10 MHz with an HP 4192A impedance meter using a mercury probe. The carrier concentration distribution through the layer thickness and the sheet carrier concentration were evaluated. A non-destructive, characterisation technique for verification of device heterostucture quality from the measured C–V and G–V versus frequency characteristics of the heterostructure is proposed.     

Peculiarities of liquid phase epitaxy in GaInPAs/InP lattice-matched heterostructures

The temperature phase stability of Ga_xIn_1−xP_yAs_1−y solid solution has been analyzed. A simple solution theory with the temperature-independent interaction parameters in solid and liquid phases has been used. The absence of miscibility gaps for all the compositions of the solid solution, lattice-matched to InP at a growth temperature of 640°C, has been demonstrated both theoretically and experimentally. The influence of the elastic deformations on the Ga_xIn_1−xP_yAs_1−y (λ_g = 1.4 μm) solid solution parameters has been observed assuming the model of the layer coherent conjugation in heterostructures.     

Calculation of composition variation of In1−vGavAs ternary crystals for diffusion and electromigration limited growth from a temperature graded solution with source material

A theoretical model was proposed to calculate composition variation of III-V ternary crystals during growth. In this model, for the first time, phase equilibrium between crystal and growth solution is maintained together with constancy between the transported and incorporated mass or solute atoms at the crystal/solution interface at the same time. This model can be applied to the calculation of the diffusion and electromigration limited growth in a temperature-graded solution with source material such as the source-current-controlled (SCC) growth method. The composition variation of In_1−vGa_vAs crystals grown by diffusion and electromigration was calculated by this model. Incorporation of two kinds of solute elements, Ga and As, into crystals through the crystal/solution interface was considered on the basis of the laws of the phase equilibrium and the constancy of mass. In comparison of the experimental results with the calculated ones, it is found that in the In-Ga-As solution the diffusion coefficient of Ga, D_Ga, is about two times as large as that of As, D_As, and μ_Ga is larger than μ_As. The calculated results of the composition variation show that the composition uniformity in In_1−vGa_vAs crystals can be largely improved by controlling the growth parameters such as temperature gradient in the solution, solution length, existence of source material, and electric field.     

AlGaN photodetectors grown on Si(1 1 1) by molecular beam epitaxy

The fabrication and characterisation of Al_xGa_1−xN (0x0.35) photodetectors grown on Si(1 1 1) by molecular beam epitaxy are described. For low Al contents (<10%), photoconductors show high responsivities (10A/W), a non-linear dependence on optical power and persistent photoconductivity (PPC). For higher Al contents the PPC decreases and the photocurrent becomes linear with optical power. Schottky photodiodes present zero-bias responsivities from 12 to 5 mA/W (x=0−0.35), a UV/visible contrast higher than 10³, and a time response of 20 ns, in the same order of magnitude as for devices on sapphire substrate. GaN-based p–n ultraviolet photodiodes on Si(1 1 1) are reported for the first time.     

Effect of Yb content on purity and crystal growth of Ba2NaNb5O15

Growth by the micro-pulling-down technique (μ-PD) of homogeneous and crack-free fiber single crystals with composition Ba₂Na_1−xYb_xNb₅O₁₅ (0<x<0.08) is reported. The effect of Yb³⁺ addition to barium sodium niobate (BNN, x=0), having the tungsten bronze-type structure, was examined by room temperature X-ray powder diffraction and differential thermal analysis coupled to thermogravimetry. In the region of the monophased field the structure is tetragonal from x=0.02 to 0.16. Volume change is mainly by variation of the a-axis length. Addition of Yb³⁺ to BNN could be effective for the production of high optical quality, crack-free, bulk crystals by the Czochralski technique.     

Study on the Ce substitution effects of BiFeO3 films on ITO/glass substrates

Ce substituted Bi_1−xCe_xFeO₃ (BCFO) films with x=0–0.15 were deposited on indium tin oxide (ITO)/glass substrates by sol–gel process annealed at 500 °C. Rhombohedral phase was confirmed by XRD study and no impure phases were observed till x=0.15. Substantially enhanced ferroelectricity was observed at room temperature due to the substitution of Ce. In the films with x=0.05 and 0.10, the double remnant polarization are 75.5 and 57.7 μC/cm² at an applied field 860 kV/cm. Moreover, the breakdown field was enhanced in the films with Ce substitution.     

Formation mechanism of InxGa1−xAs bridge layers on patterned GaAs substrates

The formation mechanism of In_xGa_1−xAs (x=0.06) bridge layers on patterned GaAs (1 1 1)B substrates using liquid-phase epitaxy has been investigated. For this (i) the effect of density gradient in the solution on the formation of bridge layer and (ii) growth of bridge layer on 1 1 0 line-seed-substrates were studied. The convection induced by destabilizing density gradient in the solution led to an increase of lateral growth rate of the InGaAs bridge layers on a substrate mounted on the upper portion of the solution. However, it did not have any significant effect on the formation of the bridge layers. The formation of bridge layer on 1 1 0 line-seed-substrate took place only for the {1 1 1}B growth fronts, which indicated that “Berg effect” is responsible for the formation of bridge layers.     

InxGa1−xAs/GaAs quantum wire structures grown on GaAs (100) patterned substrates with [001] ridges

In_xGa_1−xAs/GaAs (x = 0.12-0.23) quantum well (QW) structures were grown by molecular beam epitaxy (MBE) on [001] ridges with various widths (1.1-12 μm) of patterned GaAs (100) substrate. The smallest lateral width of the InGaAs/GaAs quantum wire (QWR) structures was estimated to be about 0.1 μm by high-resolution scanning electron microscope (SEM). The In contents of the grown InGaAs/GaAs QWs on the ridges were studied as a function of ridge top width (ridge width of the MBE grown layer) by cathodoluminescence (CL) measurements at 78 K. Compared to the InGaAs QW grown on a flat substrate, the In content of the InGaAs/GaAs QW on the ridge increases from 0.22 to 0.23 when the ridge top width decreases to about 2.9 μm, but it decreases steeply from 0.23 down to 0.12 with a further decrease of the ridge width from 2.9 to 0.05 μm. A simulation of MBE growth of InGaAs on the [001] ridges shows that this reduced In content for narrow ridges is due to a large migration of Ga atoms to the (100) ridge top region from {110} side facets.     

Preferential migration of indium atoms on the (411)A plane in InGaAs grown on GaAs channeled substrates by molecular beam epitaxy

Lateral profiles of In content in a 1.5 μm thick In_xGa_1−xAs (x 0.2) layer grown on GaAs channeled substrates (CSs) with (411)A side-slopes by molecular beam epitaxy (MBE) have been investigated with the use of energy dispersive X-ray spectroscopy (EDX). The observed profiles of the In content suggested that In atoms migrate preferentially in the [1 ] direction on the (411)A plane during MBE growth. This preferential migration of In atoms along [1 ] on the (411)A plane was confirmed by comparing observed lateral profiles of In content in InGaAs layers grown on GaAs CSs and simulated In profiles which are calculated by taking into account of an additional one-way flow of In atoms along [1 ].     

New aluminium precursors for MOMBE (CBE): a comparative study

Recently different new Al precursors have been developed to improve the electrical and optical quality of AlGaAs layers grown by MOMBE (CBE), since AlGaAs layers still suffer from the high incorporation of oxygen and carbon. Three approaches are introduced and results obtained from Al_xGa_1−xAs layers (0 < x ≤ 1) are discussed. APAH, a double ring structure molecule, was found to yield AlGaAs layers with high contents of carbon and nitrogen. The use of an Alane-adduct decreases impurity concentrations and improves optical properties. However, TIBAl is superior and provides highest PL response together with carrier concentrations below p = 10¹⁶ cm^-3. Even though the concept of coordinative saturation is promising, results achieved by TIBAl showed that trialkyls could also be well suited for AlGaAs, assuming that they are properly synthesized.     

Surfactant-mediated molecular-beam epitaxy of III-V strained-layer heterostructures

In this review we first present the two classes of non-reactive and reactive surfactants effective during homoepitaxy and heteroepitaxy, respectively. We then describe and analyse the results obtained by "true" surfactant-mediated molecular-beam epitaxy (SM-MBE) of Ga_1−xIn_xAs layers on GaAs substrates. Then, the data obtained by using In as a "virtual" surfactant during SM-MBE of InAs layers on Al_xGa_0.48−xIn_0.52As/InP and GaAs substrates are presented. We finally provide evidence that the growth mode influences the resulting defect microstructure in (partially) relaxed layers.     

Growth and properties of (Pb0.90La0.10)TiO3 thick films prepared by RF magnetron sputtering with a PbO buffer layer

The (Pb_0.90La_0.10)TiO₃ [PLT] thick films (3.0 μm) with a PbO buffer layer were deposited on the Pt(1 1 1)/Ti/SiO₂/Si(1 0 0) substrates by RF magnetron sputtering method. The PLT thick films comprise five periodicities, the layer thicknesses of (Pb_0.90La_0.10)TiO₃ and PbO in one periodicity are fixed. The PbO buffer layer improves the phase purity and electrical properties of the PLT thick films. The microstructure and electrical properties of the PLT thick films with a PbO buffer layer were studied. The PLT thick films with a PbO buffer layer possess good electrical properties with the remnant polarization (P_r=2.40 μC cm⁻²), coercive field (E_c=18.2 kV cm⁻¹), dielectric constant (ε_r=139) and dielectric loss (tan δ=0.0206) at 1 kHz, and pyroelectric coefficient (9.20×10⁻⁹ C cm⁻² K⁻¹). The result shows the PLT thick film with a PbO buffer layer is a good candidate for pyroelectric detector.