Ge覆盖层诱导晶化多晶Si薄膜的晶化特性研究

采用电子束蒸发技术在衬底温度为180℃条件下生长具有Ge覆盖层的非晶Si薄膜,并于500℃、600℃、700℃真空退火5h.采用Raman散射、X射线衍射(XRD)、全自动数字式显微镜等对所制备薄膜的晶化特性进行研究.结果表明,Ge覆盖层具有诱导非晶Si薄膜晶化的作用,且随着退火温度的升高a-Si薄膜晶化越显著.具有Ge覆盖层非晶薄膜经500℃退火5h沿Si(400)方向开始晶化,对应晶粒尺寸约为4.9 nm.将退火温度升高到700℃时,非晶硅薄膜几乎全部晶化,晶化多晶Si薄膜在Si(400)方向表现出很强的择优取向特性,晶粒尺寸高达23.3μm.与相同条件下制备的无Ge覆盖层的非晶Si薄膜相比,晶化温度降低了300℃.     

电场辅助铝诱导晶化非晶硅薄膜

以氢气稀释的硅烷和氢气为反应气体,利用PECVD法先在玻璃衬底上生长非晶硅薄膜,然后利用磁控溅射法在非晶硅薄膜上镀制铝膜,最后将镀有铝膜的非晶硅薄膜样品置于快速热处理炉中,在外加电场辅助条件下,在氮气气氛下对薄膜样品进行退火制备多晶硅薄膜.本论文研究了不同外加电场强度和退火时间对非晶硅薄膜晶化的影响.利用XRD、SEM和Raman等测试方法对薄膜样品的晶相结构、表面形貌和晶化程度进行了表征.实验结果表明,在外加横向电场辅助铝诱导晶化的条件下,非晶硅薄膜在500 ℃低温下成功地转化成多晶硅薄膜,并且随着横向电场强度的增大以及退火时间的延长,薄膜的晶化程度增强,晶粒尺寸增大.     

温度对快速热退火制备多晶硅薄膜结构与电学性能的影响

采用快速热退火方法对热丝CVD沉积的非晶硅薄膜进行了晶化处理.利用傅里叶红外光谱研究了非晶硅薄膜脱氢处理前后Si-Hx含量的变化;用X射线衍射(XRD),拉曼(Raman)光谱和扫描电子显微镜研究了硅薄膜的结构性能与退火温度的关系;利用电导率测试研究了硅薄膜的电学性能对退火温度的依赖性.研究发现,脱氢处理可以有效的抑制快速热退火引起的硅薄膜中微裂纹的出现.随着退火温度由700℃升高至1100℃,硅薄膜的结晶性逐渐升高,在1100℃下快速热退火15 s制备的多晶硅薄膜的晶化率高达96.7;.同时,硼掺杂硅薄膜的电导率也由700℃退火的1.39×10-6 S·cm-1提高至1100℃退火的16.41 S·cm-1,增大了7个数量级.     

退火时间对铝诱导非晶硅薄膜晶化过程的影响

基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了Al/ Si…Al/ Si/ glass周期性结构的薄膜.采用真空退火炉对Al/ Si多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了不同退火时间下Al/ Si多层薄膜截面形貌的变化规律,并结合扩散过程探讨了退火时间对铝诱导非晶硅薄膜晶化过程的影响机理.研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,在退火过程的初期,晶态硅薄膜的生长主要来源于因Al的存在而形成的硅初始品核数量增加的贡献.随退火时间的延长,晶态硅薄膜的生长主要是依靠临界浓度线已推进区域中未参与形核的硅原子扩散至初始品核位置并进行外延生长来实现的.经500℃退火1 h后,Al/ Si薄膜的截面形貌巾出现了沿Si(111)晶面生长的栾品组织.     

用快速光热退火制备多晶硅薄膜的研究

用等离子体增强型化学气相沉积先得到非晶硅(a-Si:H)薄膜,再用卤钨灯照射的方法对其进行快速光热退火(RPTA),得到了多晶硅薄膜.然后,进行XRD衍射谱、暗电导率和拉曼光谱等的测量.结果发现,a-Si:H薄膜在RPTA退火中,退火温度在750℃以上,晶化时间需要2min,退火温度在650℃以下,晶化时间则需要2.5h;晶化后,晶粒的优先取向是(111)晶向;退火温度850℃时,得到的晶粒最大,暗电导率也最大;退火温度越高,晶化程度越好;退火时间越长,晶粒尺寸越大;光子激励在RPTA退火中起着重要作用.     

多晶硅薄膜结晶团晶化机理的研究

本文用PECVD法在石英玻璃上沉积非晶硅薄膜,然后用快速光退火和传统电阻炉退火方法晶化生长多晶硅薄膜,用拉曼光谱仪、XRD和场发射扫描电镜观察分析薄膜,发现在制备的多晶硅薄膜表面存在结晶团现象,并对这一现象的晶化机理进行了分析.     

单晶硅外延生长晶化硅薄膜的研究

采用P型单晶硅片为衬底,并经混合酸溶液腐蚀抛光、清洗后,利用射频磁控溅射镀膜系统在其表面制备非晶硅薄膜;再结合快速光热退火工艺,于N2气氛下480℃退火30 min,得到晶化硅薄膜;利用光学金相显微镜、XRD衍射仪和拉曼散射光谱(Raman)仪对单晶硅衬底和晶化硅薄膜进行结构和性能表征.研究了混合酸溶液对单晶硅表面腐蚀效果、籽晶诱导外延生长晶化硅薄膜的物相结构和薄膜带隙.结果表明:采用混合酸溶液腐蚀后得到表面平整、光滑的单晶硅衬底;非晶硅薄膜经过快速退火后受籽晶诱导生成晶化硅薄膜,其晶相沿单晶硅衬底取向择优生长;随着非晶硅薄膜厚度从80 nm增加到280 nm,晶化后硅薄膜的表面粗糙度逐渐减小,晶化率从90.0;逐渐降低到37.0;;晶粒尺寸从6.65 nm逐渐减小到1.71 nm;带隙从1.18 eV逐渐升高到1.52 eV.     

利用快速热退火法制备多晶硅薄膜

为了制备优质的多晶硅薄膜,该论文研究了非晶硅薄膜的快速热退火(RTA)技术.先利用PECVD设备沉积非晶硅薄膜,然后把其放入快速热退火炉中进行退火.退火前后的薄膜利用X射线衍射(XRD)仪、Raman光谱仪及扫描电子显微镜(SEM)测试其晶体结构及表面形貌,利用电导率测试设备测试其暗电导率.研究表明退火温度、退火时间以及沉积时的衬底温度对非晶硅薄膜的晶化都有很大的影响.     

铝层厚度对铝诱导非晶硅薄膜晶化过程的影响

基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了Al/Si/…Al/Si/glass周期性结构的薄膜.采用真空退火炉对Al/Si多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了退火前、后Al/Si多层薄膜截面形貌的变化规律,并结合扩散过程探讨了铝层厚度对铝诱导非晶硅薄膜晶化过程的本质影响机理.研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,随退火过程的进行,Al、Si原子会沿Al/si层间界面进行互扩散运动且在Si层中达到临界浓度Cs的Al原子所在区域整体呈线形平行于Al/Si界面逐渐向铝原子扩散距离增大的方向推进;随着Al层厚度的增加,Al在Si层中达到临界浓度Cs的区域整体向前推进速度加快,已扩散区域产生硅初始晶核的数量也随之增大;随Al/Si层厚比的增大,虽因铝诱导而晶化的硅薄膜均为多晶态,但非晶硅薄膜在晶化过程中的生长晶面数量增多,同时硅晶粒的尺寸有所减小.     

脉冲退火法制备多晶硅薄膜的研究

用射频等离子体化学气相沉积(RF-PECVD)法在普通玻璃衬底上低温制备了μc-Si:H薄膜.采用快速光热退火炉(RTP),分别用低温(＜650℃)和中温(＜750℃)脉冲法(PRTP)对薄膜进行了退火处理.用拉曼光谱和扫描电子显微镜(SEM)研究了不同条件下退火薄膜散射谱的特征和表面形貌.结果显示,脉冲退火法晶化的薄膜,晶化率达到了53;,部分颗粒团簇的尺寸已达到200nm左右.用声子限域理论和表面尺寸效应对薄膜频谱的"红移"和"蓝移"现象进行了分析.     

Crystal structures of the cis and trans isomers of a tetrathia[3.3.3.3]cyclophane

Both the cis and trans isomers of 3,11,18,26-tetrathiatricyclo[26.2.2.1^5,9.2^13,16.1^20,24] hexatriaconta-5,7,9,20,22,24-hexene have been prepared and structurally characterized. Each of these centrosymmetric tetrathia dimers includes two cyclohexane rings in chair conformations with either 1,4-cis or 1,4-trans bonding and two meta-substituted benzene rings. The cis isomer packs into the monoclinic space group P2₁/a with a = 10.485(3)Å, b = 10.3956(18)Å, c = 14.1343(10)Å, = 105.200(13)°, Z = 2 and refined to an R factor of 0.046. The trans isomer crystallizes in the monoclinic space group P2₁/c with a = 10.7217(12)Å, b = 5.6797(7)Å, c = 25.415(5)Å, = 96.001(12)°, Z = 2 and refined to an R factor of 0.043. In the cis structure each benzene ring faces a cyclohexane ring while in the trans structure the cyclohexane rings face one another.     

CsI-LiCl共晶材料的坩埚下降法生长与闪烁性能研究

本文采用坩埚下降法,在真空密封的石英坩埚中成功生长出CsI-LiCl与CsI-LiCl:Na共晶闪烁体。通过扫描电子显微镜(SEM)观察晶体微结构表明该共晶中LiCl相与CsI相存在周期性的层状排列,CsI相的厚度在5 μm左右。共晶样品的X射线激发发射谱显示在CsI-LiCl和CsI-LiCl:Na共晶样品存在缺陷发光,在CsI-LiCl样品中还观察到了纯CsI的自陷激子(STE)发光。CsI-LiCl样品在α粒子激发下的多道能谱中观察到明显的全能峰,这一结果证明CsI-LiCl共晶可用于热中子探测的潜力。     

静电纺丝法制备CeO2微纳米纤维及其除氟性能

以聚丙烯腈(PAN)为载体,六水合硝酸铈[Ce(NO₃)₃·6H₂O]为原料,采用静电纺丝法制备了Ce(NO₃)₃/PAN纤维,在空气中热处理得到CeO₂微纳米纤维,通过XRD、BET和SEM对CeO₂微纳米纤维进行表征。采用静态吸附实验探讨了CeO₂微纳米纤维去除水溶液中氟离子的性能,考察了溶液pH值、初始氟离子浓度及共存阴离子等对吸附性能的影响。结果表明,pH=3时,CeO₂微纳米纤维对F^-的吸附性能最佳,CeO₂吸附量随着F^-浓度的增大呈上升趋势。CeO₂微纳米纤维对F^-的吸附等温线遵循Langmuir模型,二级动力学模型能很好地描述CeO₂微纳米纤维对F^-的吸附过程。CeO₂微纳米纤维的除氟性能优良,可为其实际应用提供理论参考。     

电沉积法制备ZnO纳米棒阵列及其发光特性

本文以掺F的SnO2导电玻璃为基板,以硝酸锌水溶液为电解液,采用三电极恒电位体系电沉积制备ZnO纳米棒阵列,系统考察了硝酸锌浓度和沉积电位等工艺参数对ZnO纳米棒阵列的微观形貌及其发光性能的影响规律.结果表明,硝酸锌浓度和沉积电位对纳米棒阵列的形貌有显著影响,控制适宜的工艺条件可以制备出直径分布均匀、结晶性好且纯度高的六方纤锌矿ZnO纳米棒阵列.荧光光谱分析表明,电沉积制备出的ZnO纳米棒阵列在385 nm附近有一个强荧光发射峰,且发光性能稳定、对纳米棒阵列微观形貌的细微变化不敏感,使其在发光二极管和激光器等领域具有广阔的应用前景.     

Triethyl ammonium salt of O,O′-bis(p-tolyl)dithiophosphate, [Et3NH]+[(4-MeC6H4O)2PS2]−

Triethyl ammonium Salt of O,O′-bis(p-tolyl)dithiophosphate and O,O′-bis(m-tolyl)dithiophosphate have been obtained by reaction of p- and m-cresol, respectively with P₂S₅ in toluene and have been characterized by elemental analysis, IR, ¹H and ³¹P NMR spectroscopy. The molecular structure of O,O′-bis(p-tolyl)dithiophosphate has been determined. Crystal data: [Et₃NH]⁺[(4-MeC₆H₄O)₂PS₂]⁻: Monoclinic, P2₁/c, a=15.2441(9) ?, b=10.415(2) ?, c=3.9726(9) ?, β=91.709(7)°, V=2217.5(1) ?⁻³, Z=4.Supplementary materials Additional material available from the Cambridge Crystallographic Data Centre (CCDC no. 600927 for [Et₃NH]⁺[(4-MeC₆H₄O)₂PS₂]⁻ comprises the final atomic coordinates for all atoms, thermal parameters, and a complete listing of bond distances and angles. Copies of this information may be obtained free of charge on application to The Director, 12 Union Road, Cambridge CB2 2EZ, UK (fax: +44-1223-336033; email: deposit@ccdc.cam.ac.uk or www:http://www.ccdc.cam.ac.uk).     

Phase Properties of Hexanedioldiacrylate/E7 Blends

Abstract

Equilibrium phase diagrams of uncured and UV-cured difunctional hexanedioldiacrylate and the eutectic mixture of low molecular weight liquid crystals E7 are established by polarized optical microscopy and differential scanning calorimetry. Data are analyzed using the Maier-Saupe model of nematic order. In the case of the uncured system the Flory-Huggins free energy of isotropic mixing is applied while for the cured system, the Flory-Rehner elastic free energy model is used. A good correlation between experimental and theoretical phase diagrams is found in both systems.     

C–H...O,C–H...π and π–π stacking interactions in 3-(2,4-dimethylphenyloxymethyl)-3,4-dihydroisocoumarin

3-(2,4-Dimethylphenyloxymethyl)-3,4-dihydroisocoumarin (C₁₈H₁₈O₃) was prepared by the alkylation of o-lithio N-methyl benzamide with 2-(2,4-dimethylphenoxy)methyl oxirane, followed by alkaline hydrolysis. The compound crystallizes in the orthorhombic space group Pbca with unit cell parameters : a = 8.239(2) Å, b = 14.918(5) Å, c = 24.831(9) Å, Z = 8. The crystal structure was solved by direct methods and refined to R = 0.0514 for 1564 observed reflections. The heterocyclic ring adopts a distorted half-chair conformation. Molecules are connected by π–π interactions between phenyl rings of the isocoumarin nucleus forming dimers. Dimers are connected via C–H...O hydrogen bonds forming chains. Further intermolecular C–H...π hydrogen bonds link the dimer chains to form supramolecular structure.     

Crystal structure of Zn4Na(OH)6SO4Cl·6H2O

The structure of Zn₄Na(OH)₆SO₄Cl·6H₂O, a secondary mineral from Hettstedt, Germany, was determined by single-crystal X-ray diffraction. The crystals are hexagonal,a=8.413(8),c=13.095(24) Å, space group $P\bar 3$ , Z=2. The structure was refined to R=0.0554 and R_w=0.0903 for 970 reflections with I≥3σ(I). The structure can be described as zinc hydroxide layers perpendicular toc, from which sulfates and chlorides extend. The layers are held together by a system of hydrogen bonds involving hexaaquo Na⁺ ions which occupy the interlayer space.     

A new method for the investigation of orientation relationships in meteoritic plessite

The orientation relationship (OR) between the bcc and fcc phase in the plessite microstructure of the iron meteorites Watson, Agpalilik and Gibeon has been analysed in a scanning electron microscope using electron back‐scattered diffraction (EBSD). A very strong OR exists, independently on the analysed plessite type and the observed spreading of single orientation data. The agreement between the experimental orientation distribution and existing models varies for each meteorite. The black plessite in the Agpalilik corresponds to the Nishiyama‐Wassermann model whereas the duplex plessite of the Gibeon meteorite shows an OR close to the Kurdjumov‐Sachs model. The Watson meteorite is strongly deformed so that a general OR is difficult to determine due to the blurred experimental orientation distribution. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Synthesis and Crystal Structure of 5-[2-(6-bromonaphthalenyloxymethyl)]-3-(4-morpholinomethyl)-1,3,4-oxadiazole-2(3<Emphasis Type="Italic">H</Emphasis>)-thione

Abstract  The title compound, C₁₈H₁₈BrN₃O₃S, a derivative of 1,3,4-oxadiazole, crystallizes in the triclinic space group P-1 with unit cell parameters a = 6.8731(3), b = 8.9994(4), c = 15.7099(6) ?, α = 92.779(3)°, β = 130.575(3)°, γ = 107.868(4)°, Z = 2. The dihedral angle between the mean planes of the planar naphthyl and morpholine (chair) rings with the planar oxadiazol ring is 50.1(8) and 76.8(6)°, respectively. The planar naphthyl ring is twisted 52.2(5)° with the mean plane of the morpholine ring. A group of four intermolecular close contacts are observed between a bromine atom and hydrogen atoms from the closely packed naphthyl, morpholine and oxy–methyl groups in the unit cell. These molecular interactions in concert with an additional series of π–π stacking interactions that occur between the center of gravity of the two 6-membered rings of the naphthalene group influence the twist angles of each of these three groups. A MOPAC AM1 calculation of the conformation energy of the crystal structure [226.0128(9) kcal] compared to that of the minimum energy structure after geometry optimization [29.9744(1) kcal] reveals a significantly reduced value. The twist angles of the three groups above also change after the AM1 calculation giving support to the influence of both intermolecular C–H···Br short-range interactions and Cg π–π stacking interactions on these angles which therefore play a role in stabilizing crystal packing. Graphical Abstract  Crystal structure of 5-{[(6-bromonaphthalen-2-yl)oxy]methyl}-3-(morpholin-4-ylmethyl)-1,3,4-oxadiazole-2(3H)-thione, C₁₈H₁₈BrN₃O₃S, is reported and its geometric and packing parameters described and compared to a MOPAC computational calculation. Electronic supplementary material  The online version of this article (doi:) contains supplementary material, which is available to authorized users.