Surface plasmon scattering on polymer-bimetal layer covered fused silica gratings generated by laser induced backside wet etching

Large amplitude fused silica gratings are prepared by combining the UV laser induced backside wet etching technique (LIBWE) and the two-beam interference method. The periodic patterning of fused silica surfaces is realized by s-polarized fourth harmonic beams of a Nd:YAG laser, applying saturated solution of naphthalene in methyl-methacrylate as liquid absorber. Atomic force microscopy is utilized to analyze how the modulation amplitude of the grating can be controlled by the fluence and number of laser pulses. Three types of plasmonic structures are prepared by a bottom-up method, post-evaporating the fused silica gratings by gold-silver bimetal layers, spin-coating the metal structures by thin polycarbonate films, and irradiating the multilayers by UV laser. The effect of the bimetal and polymer-coated bimetal gratings on the surface plasmon resonance is investigated in a modified Kretschmann arrangement allowing polar and azimuthal angle scans. It is demonstrated experimentally that scattering on rotated gratings results in additional minima on the resonance curves of plasmons excited by second harmonic beam of a continuous Nd:YAG laser. The azimuthal angle dependence proves that these additional minima originate from back-scattering. The analogous reflectivity minima were obtained by scattering matrix method calculations realized taking modulation depths measured on bimetal gratings into account.     

Comparative study of sub-micrometer polymeric structures: Dot-arrays, linear and crossed gratings generated by UV laser based two-beam interference, as surfaces for SPR and AFM based bio-sensing

Two-dimensional gratings are generated on poly-carbonate films spin-coated onto thin gold-silver bimetallic layers by two-beam interference method. Sub-micrometer periodic polymer dots and stripes are produced illuminating the poly-carbonate surface by p- and s-polarized beams of a frequency quadrupled Nd:YAG laser, and crossed gratings are generated by rotating the substrates between two sequential treatments. It is shown by pulsed force mode atomic force microscopy that the mean value of the adhesion is enhanced on the dot-arrays and on the crossed gratings. The grating-coupling on the two-dimensional structures results in double peaks on the angle dependent resonance curves of the surface plasmons excited by frequency doubled Nd:YAG laser. The comparison of the resonance curves proves that a surface profile ensuring minimal undirected scattering is required to optimize the grating-coupling, in addition to the minimal modulation amplitude, and to the optimal azimuthal orientation. The secondary minima are the narrowest in presence of linear gratings on multi-layers having optimized composition, and on crossed structures consisting of appropriately oriented polymer stripes. The large coupling efficiency and adhesion result in high detection sensitivity on the crossed gratings. Bio-sensing is realized by monitoring the rotated-crossed grating-coupled surface plasmon resonance curves, and detecting the chemical heterogeneity by tapping-mode atomic force microscopy. The interaction of Amyloid-β peptide, a pathogenetic factor in Alzheimer disease, with therapeutical molecules is demonstrated.     

激光烧蚀制备分布反馈式有机激光器件

采用激光烧蚀的方法结合激光全息技术,直接在高分子聚合物MEH-PPV薄膜表面烧蚀光栅结构,制备了分布反馈式有机激光器。这一方法具有工艺简单、光栅参数的可控性和重复性好等优点。器件MEH-PPV的膜厚是400 nm。利用波长为355 nm的Nd-YAG纳秒激光器进行单脉冲烧蚀,获得的光栅周期和光栅高度分别为370 nm和 100 nm。利用飞秒激光放大器作为泵浦源激射DFB激光器件,得到激射阈值约为182 μJ·cm^-2·pulse^-1,光谱的波峰约在609 nm处,半高宽为4.2 nm。通过改变两光束的夹角获得了周期为360, 370, 380, 390 nm的光栅,它们对应的激光波峰分别为602.91, 609.24, 613.26, 619.01 nm。     

Integrated self‐aligned conjugated polymer fiber laser devices

In this letter we present a fully integrated self‐aligned distributed feedback (DFB) fiber laser device, which was directly imprinted in the conjugated polymer poly[2‐methoxy‐5 (2‐ethyl‐hexyloxy)‐1,4‐phenylenevinylene] (MEH‐PPV) on the top of optical fibers by using the soft lithographic technique of “liquid imprinting”. For this process master gratings (360 and 380 nm) for the feedback structure were fabricated via e‐beam lithography, transferred to an elastomeric stamp and used to imprint the grating into the highly luminescent conjugated polymer. Such second order gratings were photo‐pumped with a frequency doubled Nd:YAG laser, the laser emission (around 640 nm, depending on the used grating) was directly coupled into the waveguide and detected via a CCD spectrometer at the end of the fiber. The threshold of the laser devices was found to be in the range of 4.3 mJ/cm² and exhibited a line width of approximately 2 nm. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Imprinted conjugated polymer DFB lasers optimized based on simulation results

In this study, we present distributed feedback structure lasers which were fabricated by imprinting a grating directly into a highly luminescent conjugated polymer. Based on the interplay between simulations and experimental results, we optimized some basic parameters, crucial for the effective behavior of the structure. On the base of these parameters, new grating structures were designed and fabricated by e-beam lithography and transferred to the polymer by the soft lithographic technique of “liquid imprinting”. Due to these improved grating structures, the devices showed stable, low threshold lasing under photo-excitation using a frequency doubled Nd:YAG laser. The obtained experimental results were again successfully modeled by simulating the electromagnetic modes within the structure, and, in addition, the grating response to an electromagnetic field as a function of the waveguide thickness and grating depth was monitored.     

Submicrometer grating fabrication in fused silica by interferometric laser-induced backside wet etching technique

Submicrometer period fused silica gratings were produced by two-beam interferometric laser-induced backside wet etching technique (TWIN LIBWE). The fourth harmonic of a Nd:YAG laser beam was spatially filtered in two steps, and the smoothened beam was split into two parts and interfered at incident angles of 60°, 30°, 14°, and 7.7°, respectively, on the backsides of fused silica plates that were in contact with a liquid absorber. The periods of the produced fused silica gratings were, respectively, 154 nm, 266 nm, 550 nm, and 990 nm. In the next step, TWIN-LIBWE setup was completed by using a coupling rectangular prism in order to reach immersion setup, which made possible to fabricate 104 nm period fused silica grating. This is the smallest laser-generated grating constant in fused silica at present. The morphology of the etched gratings was characterized by atomic force microscope. Important parameters (modulation depth, low-pass filtered waviness, quality factor) of the produced gratings were determined. Evolution of the grating parameters was also studied in the 990 nm case: the dependence of modulation depth, waviness, and quality factor on the number of laser pulses was investigated.     

大面积金纳米线光栅的制备

利用激光干涉光刻和金纳米颗粒胶体溶液制备了宽度在100 nm以下且总面积达到平方厘米量级的金纳米线光栅结构.制备过程中,首先在表面镀有厚度约为200 nm的铟锡氧化物薄膜的面积为1 cm×1 cm的玻璃基片表面旋涂光刻胶,然后利用紫外激光干涉光刻制备光刻胶纳米光栅结构.有效控制干涉光刻过程中的曝光量、显影时间,获得小占空比的光刻胶光栅.再以光刻胶纳米光栅作为模板,旋涂金纳米颗粒胶体溶液.充分利用金纳米颗粒胶体溶液在光刻胶表面浸润性差的特点,限制旋涂后留存在光刻胶光栅槽中金纳米颗粒的数量,从而达到限制金纳米线宽度的目的.最后在250℃将样品进行退火处理5 min.获得了周期为400 nm且占空比小于1:4的金纳米线光栅结构,其有效面积为1 cm².以波导共振模式与粒子等离子共振模式间耦合作用为特征的光谱学响应特性验证了波导耦合金属光子晶体的成功制备,为小传感体积新型生物传感器的开发提供了性能良好的金属光子晶体芯片.     

On the origin of light emission by tunnel junctions

Light emission of AlAl₂O₃-Ag structures prepared on periodic gratings was studied. It is shown that most of the observed light originates from the Ag-vacuum surface plasmons scattered by the periodic grating and surface roughness. Surface plasmons are directly excited by tunneling electrons.     

Electrode geometries for periodic poling of ferroelectric materials

We have realized novel electrode configurations for efficient periodic poling of ferroelectric crystals by applying a simple patterning method based on laser-induced material ablation. The new geometries were theoretically investigated and compared with conventional configurations. A systematic optimization of the patterning according to the ablated profile led to high-quality quasi-phase-matched structures in lithium niobate with a grating period of 20 mum . The periodically poled samples were characterized by use of third-order second-harmonic generation of a Nd:YAG laser.     

Fabrication of 50 nm period gratings with multilevel interference lithography

We have developed a multilevel interference lithography process to fabricate 50 nm period gratings using light with a 351.1 nm wavelength. In this process multiple grating levels patterned by interference lithography are overlaid and spatial-phase aligned to a common reference grating using interferometry. Each grating level is patterned with offset phase shifts and etched into a single layer to achieve spatial-frequency multiplication. The effect of the multilayer periodic structure on interference lithography is examined to optimize the fabrication process. This process presents a general scheme for overlaying periodic structures and can be used to fabricate more complex periodic structures.     

利用干涉光刻技术制备LED表面微纳结构

为了制备大面积周期性微纳米结构以提高LED的发光效率,建立了劳厄德(Lloyd)干涉光刻系统。简单分析了该干涉光刻系统的工作原理,并介绍了利用干涉曝光工艺制备一维光栅、二维点阵、孔阵列等纳米结构图形的具体实验过程。最后对纳米图形进行结构转移,制备出了金属纳米结构。实验结果表明:利用劳厄德干涉光刻系统,可以在20 mm×20 mm大小的ITO衬底上稳定制备出周期为450 nm的均匀光栅或二维点阵列图形结构,它们的占空比也是可以调节变化的。     

Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels

Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equispaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.To whom correspondence should be addressed     

Surface plasmon resonance spectroscopy on rotated sub-micrometer polymer gratings generated by UV-laser based two-beam interference

Two-beam interference method was applied to generate gratings having periods of 416 nm and 833 nm by the forth harmonic of a Nd:Yag laser on thin poly-carbonate films spin-coated onto silver layer-covered substrates. The dependence of the modulation depth on the fluence and number of laser pulses was investigated by atomic force microscopy. A secondary pattern appeared on very thin polymer layers thanks to the “p” polarized laser beam illumination induced self-organized processes. The conditions of the emergence of grating-coupling caused additional plasmon resonance peak were determined for the sub-micrometer periodic polymer gratings. Surface plasmon resonance measurements were performed in attenuated total reflection arrangement to determine the effect of the angle between the plasmon propagation direction and the polymer groves on the grating-coupling. The effect of the modulation depth on the grating-coupling caused additional resonance minimum was also analyzed. We found coupling phenomena according to our calculations, the differences between the measured and theoretically predicted resonance curves were explained by the scattering on the complex surface structure.     

Characterization of Nd Doped Films Prepared by Femtosecond Pulsed Laser DepositionSCIEI北大核心CSCD

Thin films of Nd : YAG and Nd : Glass were prepared on Si (100) substrate by pulsed laser deposition technology. The morphology of film surface and cross section, composition, absorption spectrum and photoluminescence (PL) spectra of films were investigated by scanning electron microscope (SEM), energy disperse spectroscopy (EDS), Fourier transform infrared spectrometer(FTIR), optical parametric oscillator(OPO) and grating spectrometer. The results show that both Nd : YAG films and Nd : Glass films grown on the substrates at room temperature are amorphous. Nd : YAG films grown by PLD contain Nd element with 0. 15 at. % stoichiometric proportion. The absorption spectrum of bulk Nd : YAG target rather than deposited films exhibit two absorption peaks at 750 and 808 nm. There are no evident peaks in the photoluminescence spectra curve of Nd : YAG films. However, the photoluminescence spectra of Nd : Glass films with two sharp peaks at the wavelength of 877 and 1 064 nm are observed. It indicates that Nd is doped into glass host as optically active Nd3+ ions when Nd : Glass films grow at room temperature. But for Nd : YAG films, Nd don't incorporate into YAG host as Nd3+ ions.     

飞秒脉冲激光沉积钕掺杂薄膜特性研究

采用脉冲激光沉积(PLD)技术在Si(100)衬底上生长了Nd∶YAG薄膜以及Nd∶Glass薄膜,利用扫描电子显微镜(SEM)、能谱仪(EDS)、傅里叶变换红外光谱仪(FTIR)、光学掺量振荡器(OPO)以及光栅光谱仪等测试装置分析了薄膜的表面和断面结构形貌、组成成分、光学吸收谱以及光致发光谱。结果表明：在室温衬底温度下生长的Nd∶YAG薄膜以及Nd∶Glass薄膜均呈无规则非定型结构,没有明显的取向性微晶生长;PLD生长的Nd∶YAG薄膜中存在0.15 at.%化学计量比的Nd元素;Nd∶YAG块体靶材在750和808 nm有两个明显的吸收峰,而薄膜没有明显的吸收峰;Nd∶YAG薄膜在808 nm波长泵浦光下没有明显的光致发光谱峰,而Nd∶Glass薄膜在877和1 064 nm波长处有明显的光致发光谱峰。说明在室温衬底温度下生长的Nd∶Glass薄膜中Nd元素以Nd3+光学活性离子形式掺杂进玻璃基质中,而Nd∶YAG薄膜中的Nd元素没有以Nd3+光学活性离子形式掺杂进YAG基质中。     

The three-dimensional photonic crystals coated by gold nanoparticles

We report on the fabrication of metallodielectric photonic crystals by means of interference lithography and subsequent coating by gold nanoparticles. The grating is realized in a SU-8 photoresist using a He-Cd laser of wavelength 442 nm. The use of the wavelength found within the photoresist low absorption band enables fabricating structures that are uniform in depth. Parameters of the photoresist exposure and development for obtaining a porous structure corresponding to an orthorhombic lattice are determined. Coating of photonic crystals by gold nanoparticles is realized by reduction of chloroauric acid by a number of reductants in a water solution. This research shows that the combination of interference lithography and chemical coating by metal is attractive for the fabrication of metallodielectric three-dimensionally periodic microstructures.     

Solution Lithography for Colloidal Crystal Patterning: Revisiting Flory–Huggins Interaction Parameters and Co-Nonsolvent Systems

For fundamental studies and practical applications, colloidal crystal patterns on substrates are typically fabricated through etching and conventional lithography. However, a wet-chemical based method is necessary for simplifying the procedure, preserving the substrate structure, and reproducibly fabricating the colloidal crystal patterns. The present study demonstrates that colloidal crystal patterns can be conveniently generated using thermodynamic relationships between a polymer colloid and surrounding solvents. Close-packed colloidal monolayers in good solvents that cause colloidal swelling spontaneously transform into non–close-packed crystal patterns when non-solvents that cause their shrinkage replace the good solvents. The colloid diameter in the close-packed monolayer decreases significantly when the polymer in the colloid is passing thermodynamic theta conditions (when Flory–Huggins interaction parameters increase to higher than ≈0.5). The close-packed monolayers also transform into the patterns in co-nonsolvent conditions. The “solution lithography” might be particularly useful for patterning colloids on curved microstructures and plastic/flexible films. The colloidal shapes in the patterns vary with the solvent pairs and substrates. The method does not require special facilities to reproducibly fabricate the patterns. The study further suggests methods simultaneously fixing the patterns. The patterns exhibit anti-reflection properties. Therefore, the solution lithography is applicable to optics, electronics, analytical science, and energy systems.     

Atomic force microscopical and surface plasmon resonance spectroscopical investigation of sub-micrometer metal gratings generated by UV laser-based two-beam interference in Au-Ag bimetallic layers

Metal films containing silver and gold layers having different thicknesses were evaporated on glass substrates. Two-beam interference technique was applied to irradiate the surfaces by the fourth harmonic of a pulsed mode Nd:YAG laser. The atomic force microscopical study showed that surface relief grating having a period of 900 nm corresponding to the interference pattern was developed on the metallic films. The modulation amplitude of the laser-induced gratings was increasable by enhancing the number of laser pulses at constant fluence, and a groove depth commensurable with the film thicknesses was generated at the average fluence of 39.5 mJ/cm² on bimetallic layers. The surface structure was more regular, and the modulation amplitude was larger in case of bimetallic films containing thicker gold layers. The threshold fluences of the phase transitions were determined by numerical temperature model calculations for different metal layer compositions, and a good agreement was found between the calculated and experimentally observed threshold values. The division of the metal stripes into droplets and the development of holes were explained by the melting of the entire metal layers and by the vaporization of silver at higher fluences. The angle-dependent surface plasmon resonance spectroscopy realized in Kretschmann arrangement proved that the laser-induced grating formation was accompanied by the change in the optical thickness and by the modification of the structure of the bimetallic films. Broad side wings appeared on the resonance curves caused by grating-coupling in case of appropriate rotation angle and sufficiently large modulation depth of the grating's grooves, according to our calculations. The coupling on deep gratings developed on bimetallic films containing the thinnest gold layer and on monometallic silver films resulted in separated secondary resonance minimum development. The periodic adherence of native streptavidin on the metallic gratings was detected by tapping mode AFM, and based on the shift of the secondary resonance peak.     

3333lp/mm X射线透射光栅的研制

针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术.首先利用电子束曝光和微电镀技术在镂空的薄膜上制备母光栅X射线掩模版,然后利用X射线曝光和微电镀技术小批量复制光栅.在国内首次完成了3333lp/mm X射线透射光栅的研制,栅线宽度为150nm,周期为300nm,金吸收体厚度为500nm.衍射效率标定的结果表明,该光栅的占空比合理、侧壁陡直,具有良好的色散特性,能够满足空间探测、同步辐射和变等离子诊断等多个领域的应用.     

Two-dimensional DFB laser fabricated on dye-doped hybrid zirconia film by soft lithography

A two-dimensional(2D) distributed feedback(DFB) structure is fabricated on dye-doped sol-gel derived hybrid zirconia films by soft lithography.The Q-switched Nd:YAG laser(λ = 532 nm) is used to pump these structures.The lasing emissions of the gain medium doped with Rhodamine 6G(Rh6G) in two perpendicular directions are shown,and the threshold pump energy is measured.