气体压强对纳秒激光诱导空气等离子体特性的影响

环境气体的压强对激光诱导等离子体特性有重要影响.基于发射光谱法开展了气体压强对纳秒激光诱导空气等离子体特性影响的研究,探讨了气体压强对空气等离子体发射光谱强度、电子温度和电子密度的影响.实验结果表明,在10-100 kPa空气压强条件下,空气等离子体发射光谱中的线状光谱和连续光谱依赖于气体压强变化,且原子谱线和离子谱线强度随气体压强的变化有明显差别.随着空气压强增大,激光击穿作用区域的空气密度增加,造成激光诱导击穿空气几率升高,从而等离子体辐射光谱强度增大.空气等离子体膨胀区域空气的约束作用,增加了等离子体内粒子间的碰撞几率以及能量交换几率,并且使离子-电子-原子的三体复合几率增加,因此造成原子谱线OⅠ777.2 nm与NⅠ821.6 nm谱线强度随着气体压强增大而增大,在80 kPa时谱线强度最高,随后谱线强度缓慢降低.而离子谱线N Ⅱ 500.5 nm谱线强度在40 kPa时达到最大值,气体压强大于40 kPa后,谱线强度随压强增加而逐渐降低.空气等离子体电子密度均随压强升高而增大,在80 kPa后增长速度变缓.等离子体电子温度在30 kPa时达到最大值,气体压强大于30 kPa后,等离子体电子温度逐渐降低.研究结果可为不同海拔高度的激光诱导空气等离子体特性的研究提供重要实验基础,为今后激光大气传输、大气组成分析提供重要的技术支持.     

环境气氛对高能量激光诱导等离子体辐射特性的影响

采用高能量钕玻璃激光器(～25 J)激发诱导金属等离子体,研究了环境气体及其压力对等离子体辐射特性的影响。实验结果表明,相同压强下,氩气中等离子体的谱线强度明显高于空气中等离子体的谱线强度;0.8×105Pa氩气条件下,光谱标钢等离子体的谱线强度达到了最大值;随着环境气压的增大,谱线自吸明显增强,当环境气压达到(0.8～0.93)×105Pa时,标样铝的AlⅠ308.22 nm和AlⅠ309.27 nm两条谱线产生了严重自蚀;另外,等离子体的激发温度也随环境气压的增大而增大,0.93×105Pa氩气条件下标钢等离子体的激发温度相对于0.43×105Pa时升高了近1 500 K。     

ICP等离子体鞘层附近区域发光光谱特性分析

为了独立控制鞘层附近区域离子密度和离子能最分布,采用光发射谱(OES)测量技术,对不同射频功率、放电气压和基底偏压下感应耦合等离子体鞘层附近区域辉光特性进行了研究.原子谱线和离子谱线特性分析表明,在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度.改变放电气压和射频功率,对得到的光谱特性分析表明,鞘层附近区域离子密度随射频功率的增大而线性增大,在低压下随气压的升高而增大.低激发电位原子谱线强度增加迅速,高激发电位原子谱线强度增加缓慢,而离子谱线强度增加很不明显.改变基底直流偏压,对得到的发射光谱强度变化分析表明,谱线强度随基底正偏压的增加而增大.随着基底负偏压的加入,谱线强度先减小而后增大;直流偏压为-30 V时,光谱强度最弱.快速离子和电子是引起Ar激发和电离过程的主要能量来源.     

缓冲气体对激光等离子体光谱特性影响的实验研究

准分子激光(波长:308 nm,脉宽:10 ns)诱导Al等离子体.详细研究了缓冲气体对激光等离子体光谱特性的影响,测量了不同延时下激光诱导Al等离子体的电子温度和不同缓冲气压下光谱线的Stark展宽并由此计算了等离子体的电子密度,最后根据电子碰撞激发理论对实验结果进行了讨论.     

激光诱导Al等离子体在背景气体中的流体现象

调Q-YAG脉冲激光（波长1.06μm,脉宽10ns,能量为250mJ/pu1se）烧蚀Al靶,用短焦距照相系统和光学多道分析仪（OMA）记录了等离子体在氩气背景气体及不同压强下所呈现的流体现象及其等离子体辐射的空间分辨光谱。实验发现,当背景气压为400Pa以下时,在靶面上存在一个明亮的发光球体,球体直径远大于激光烧蚀斑的大小,此球体向四周辐射等离子体光谱,只是在垂直靶面的方向辐射相对较强。在气压约为400Pa,等离子体辐射才以较为明显的羽状体形态向前喷散,且随气压增高,喷散的立体角变小。随着背景气压的继续升高,等离子体羽被压缩,成为一个明亮的发光小羽状体,当气压达20～30kPa,发光羽状体开始出现分解的迹象,在羽状体前端形成一个光球。气压继续升高,等离子体羽完全变成一串发光球。离开靶面越远,发光球的半径越大。用光学多道分析系统分析这些发光球的光谱特征,发现在靶面附近主要是Al等离子体的谱线,而较远的发光球,其主要谱线则来自背景气体。在气压为20kPa左右,等离子休羽呈现烧蚀点为明亮的白色亮点,而羽端为鲜艳绿色（氩的514nm）的彩色羽。     

纳秒脉冲激光诱导空气等离子体的近红外辐射特性

开展纳秒激光诱导空气等离子体近红外辐射特性的实验研究,对波长为532 nm的脉冲ns激光诱导产生的空气等离子体的近红外光谱进行测量.结果表明:空气等离子体的近红外辐射在光谱范围为1100-2400 nm内由连续谱和线状谱组成,光谱指认表明线谱主要来源于N,O原子的中性原子谱和氮分子的振动光谱.通过对连续谱的分析得知,黑体辐射是连续辐射的主要来源.空气中波长1128 nm附近的辐射,可能是N和O中性原子谱的贡献.保持真空腔内气压不变,改变腔内氮气和氧气气体组分含量,分析测得的红外光谱数据,可知混合气体中氧气和氮气含量变化只对波长为1128 nm附近的辐射有影响.利用二元线性回归分析对数据进行分析后得知,氧气对波长为1128 nm附近的辐射贡献较大.最后从电离难易的角度分析造成这一结果的原因.     

溴甲烷的等离子体发射光谱测量

利用脉冲射频空心阴极等离子体源激发含溴甲烷的工作气体产生等离子体,采用HR4000型高分辨力光谱仪测量了等离子体的发射光谱。通过光谱比较,在等离子体发射光谱图中得到了位于635.07,700.52 nm的溴原子的特征峰,并实验研究了工作气压和溴甲烷密度对溴原子特征峰强度的影响。实验结果表明:在相同的溴甲烷密度下,溴原子的特征峰强度随气压的升高而降低;在相同的气压条件下,溴原子的特征峰强度随溴甲烷密度的升高而升高;溴甲烷密度测量的精度高于1 g/m3。     

大气感耦射流等离子体加工中的电子温度及激发光谱研究

大气感耦射流等离子体加工作为新型超光滑表面加工技术,其高密度等离子体激发能力为充分激发反应气体,提高材料去除率提供了有力条件。利用发射光谱仪,对加工过程中大气感耦射流等离子体激发的400~1 000 nm范围内的光谱进行了测量。并利用峰值明显,能级差较大的谱线计算电子温度。由于测量的谱线强度是等离子体发射系数沿弧长方向的积分值,且感耦射流等离子体具有回转对称性,因此可利用阿贝尔变换求取光谱发射系数,进而通过玻尔兹曼图谱法计算电子温度。计算结果表明由于趋肤效应和旋流进气的双重作用,处于加工区域的温度分布呈现出双峰形;随着距离增大,双峰效应逐渐减弱,温度分布趋于平滑。研究也表明随着加工距离的增大,等离子体边缘逐渐偏离局部热力学平衡状态,玻尔兹曼图谱法计算电子温度的适用性降低,导致等离子体边缘的温度拟合优度值逐渐降低。进一步对通入反应气体CF₄后的等离子体光谱进行了研究,通入反应气体后的等离子体呈现鲜亮的蓝绿色,是由于激发反应气体后产生的位于400~650 nm范围的带状光谱所致,分析表明谱图中的带状光谱为双原子分子C₂谱带Swan Bands,而该双原子分子是感耦氩等离子体对碳源CF₄的充分激发产生。     

环境气体对激光诱导Al等离子体光谱的影响

调QNd:YAG脉冲激光(波长1.06μm,脉冲宽度10ns,能量42mj/pulse)烧蚀平面Al靶,在垂直靶面方向,利用光学多道分析系统(OMA),测量了激光诱导产生的等离子体发射光谱分别在环境气体为Air,N2和Ar,气压范围分别在10-2Torr,152Torr,304Torr,532Torr和760Torr下的空间分布。实验表明,随着环境气体压强的增大,光谱的空间分布被压缩,且谱线强度的峰值向靶面方向移动;在相同的气压下,Ar环境下产生的光谱强度明显大于在Air和N2环境下产生的光谱强度;在气压为152Torr的不同环境气体下,均发现光谱在离靶面很近的地方(约0.5mm～1.0mm)减小,甚至消失;在Ar环境气体下,谱线396.1nmAlⅠ的空间分布随着与靶面距离的增大,谱线位置向短波方向有约0.03nm(对应OMA探头的一个二极管阵列)的移动,而谱线394.4nmAlⅠ的移动不太明显。     

飞秒激光低压N2等离子体特性的实验研究

在低于一个标准大气压的条件下对飞秒激光产生的N₂等离子体光谱进行了实验研究.结果表明, 各种样品气压下的激光N₂等离子体光谱均表现为连续谱和线状谱的叠加.随着样品气压的降低, 连续谱和原子谱线的强度经历了由缓慢增强发展为缓慢降低再到迅速降低的过程, 而正一价离子谱线强度呈现逐步增强的特征.在气压低于0.3 atm (1 atm=101325 Pa)时, 出现了正二价态的离子谱线. 给出了低压N₂等离子体对于飞秒激光传输和能量吸收的物理特性, 并初步讨论了低压等离子体通道特性.这些结果有助于加深了解飞秒激光等离子体的特性和机理, 特别是给出了在实验上测量不同价态离子光谱的条件, 为今后的研究提供了有益的实验依据. 关键词： 飞秒激光 气压 等离子体光谱 激光传输     

强流脉冲离子束烧蚀等离子体向背景气体中喷发的数值研究

强流脉冲离子束辐照靶材产生烧蚀等离子体向背景气体中传播与向真空中传播不同，包括喷发等离子体与背景气体的相互作用.本文建立了该过程的二维气体动力学模型，计算了等离子体向压强范围从10^-6大气压到大气压背景气体中传播时的情况.结果表明，背景气体压强不同时，等离子体传播的现象也不相同.向真空中可以自由膨胀，向大气压中膨胀受限；当背景气压在千分之一大气压左右时，等离子体在背景气体中形成“雪犁”状，羽状等离子体出现快速和慢速传播分离现象.     

Plasma deposition of thin films utilizing the anodic vacuum arc

Anodic vacuum arcs operating with cold cathodes in the spot mode and hot evaporating anodes are investigated to explore their technical potential as a plasma deposition technique. This discharge provides a unique source of a highly ionized, metal vapor plasma by autogeneration of the working gas to evaporation of the anode. This gas-free and droplet-free metal vapor plasma expands into the ambient vacuum (10^-4 mbar) and produces thin metallic films at the surface of substrates. An analysis of Al and Cu plasmas at the position of a possible substrate for arc currents between 20 and 200 A leads to the following results: electron densities, 10¹⁵-10¹⁸/ m³; degree of ionization, 0.5-25%; directed ion energy, 5 eV; and electron temperatures, 0.2-1 eV. Metallic coatings generated with deposition rates between 0.1 and 100 nm/s show the following properties: purity, 99.9%; polycrystalline structure with grain sizes between a few and a few hundred nm, same mass density as the respective bulk material, electrical conductivity rather close to that of the bulk material, and excellent optical properties. The coatings show good adhesion, which can be enhanced by a plasma-supported pretreatment of the substrate surface and by an acceleration of the ions towards the substrate     

Experimental investigation of oscillatory structures in laser-blow-off plasma plume

Temporal evolution of the floating potential of the laser-blow-off plasma plume and its variation with experimental conditions is studied using a triple Langmuir probe. Findings indicate that oscillatory structures are formed in the trailing portion of the plume in vacuum and their amplitudes vary with axial distance, laser fluence and ambient gas pressure. Spectral analysis suggests that an acoustic wave of specific frequency and phase velocity propagates. The neutral density gradient in the laser-blow-off plasma plume and its equilibration might be responsible for the above phenomenon.     

Gd靶激光等离子体6.7nm光源的实验研究

本文对Gd靶激光等离子体极紫外光源进行了实验研究, 在 6.7 nm附近获得了较强的辐射, 并研究了6.7 nm 附近光辐射随打靶激光功率密度变化的规律以及收集角度对极紫外辐射的影响. 同时, 对平面Gd靶激光等离子光源的离子碎屑角分布进行了测量, 发现从靶面的法线到沿着靶面平行方向上Gd离子数量依次减少. 进一步研究结果表明采用0.9 T外加磁场的条件下可取得较好的Gd 离子碎屑阻挡效果.     

Experimental study of CF4 conical theta pinch plasmaexpanding into vacuum

Langmuir probe, photodiode, and optical multichannel analyzer (OMA) measurements have been made on a pulsed CF₄ conical theta-pinch plasma. A cloud of CF₄ was puffed into a conical theta-pinch coil, converted to plasma, and propelled into the vacuum region ahead of the expanding gas cloud. At a position 67 cm away from the conical theta-pinch coil, the plasma arrived in separate packets that were about 20 μs in duration. The average drift velocity of these packets corresponded to an energy of about 3 eV. The OMA measurements showed that the second packet contained neutral atomic fluorine as well as charged particles. The electron temperature and ion density in the second packet were 2.0 eV and 1.5×10¹³ cm^-3, respectively. The electron temperature and ion density in the wake plasma were 8.3 eV and 4×10¹¹ cm^-3 , respectively. This device can be used for plasma processing or as a laboratory test of numerical and analytical models of the expansion of plasma into vacuum     

Characteristics of a large gap uniform discharge excited by DC voltage at atmospheric pressure

A large-gap uniform discharge is ignited by a coaxial dielectric barrier discharge and burns between a needle anode and a plate cathode under a low sustaining voltage by feeding with flowing argon. The basic aspects of the large-gap uniform discharge are investigated by optical and spectroscopic methods. From the discharge images, it can be found that this discharge has similar regions with glow discharge at low pressure except a plasma plume region. Light emission signals from the discharge indicate that the plasma column is invariant with time, while there are some stochastic pulses in the plasma plume region. The optical emission spectra scanning from 300 nm to 800 nm are used to calculate the excited electron temperature and vibrational temperature of the large-gap uniform discharge. It has been found that the excited electron temperature almost keeps constant and the vibrational temperature increases with increasing discharge current.Both of them decreases with increasing gas flow rate.     

Temporal evolution of laser-ablated Co ions probed by time-of-flight mass spectrometry

A pulsed-field time-of-flight mass spectrometric (TOFMS) technique was used to investigate the expansion dynamics of the ionic species ejected from the visible (λ=532 nm) laser ablation of cobalt target at low laser fluence less than 1 J/cm². The temporal evolution of Co⁺ ions was studied by varying the delay time of the ion repelling pulse with respect to the laser irradiation, which provides significant information on the ablated plume characterization. The obtained TOF mass spectra were well fitted by shifted Maxwell–Boltzmann distributions on a stream velocity, commonly used to describe the measured velocity distributions. The TOF distribution of Co⁺ ions showed a bimodal distribution with fast and slow velocities. These velocities show a decreasing tendency with delay time, which is attributed to the gas collisions between the plume ejecta and to the related gas dynamics. The present results suggest that the in situ measurements of the most probable velocity of ablated ions along the normal to the solid target can be accomplished by the simple technique of a laser ablation/TOFMS.