A new method of exciting uniform discharges for high pressure lasers

A new type of TEA CO₂ laser is described, employing a short, high-voltage pulse to create a uniform discharge by field emission from a wire cathode. Marx generator pulses of 500 kV amplitude and 20 nsec duration were applied to the laser electrodes.     

Ferroelectric effect and equivalent polarization charge model of PbZr_(0.2)Ti_(0.8)O_3 on AlGaN/GaN MIS-HEMT

PbZr_(0.2)Ti_(0.8)O_3(PZT) gate insulator with the thickness of 30 nm is grown by pulsed laser deposition(PLD) in AlGa N/Ga N metal–insulator–semiconductor high electron mobility transistors(MIS-HEMTs). The ferroelectric effect of PZT Al Ga N/Ga N MIS-HEMT is demonstrated. The polarization charge in PZT varies with different gate voltages. The equivalent polarization charge model(EPCM) is proposed for calculating the polarization charge and the concentration of two-dimensional electron gas(2 DEG). The threshold voltage(Vth) and output current density(IDS) can also be obtained by the EPCM. The theoretical values are in good agreement with the experimental results and the model can provide a guide for the design of the PZT MIS-HEMT. The polarization charges of PZT can be modulated by different gate-voltage stresses and the Vthhas a regulation range of 4.0 V. The polarization charge changes after the stress of gate voltage for several seconds. When the gate voltage is stable or changes at high frequency, the output characteristics and the current collapse of the device remain stable.     

Production of single subnanosecond multi-line 10.6 μm laser pulses by fast optical gating

An electro-optic shutter, activated by a pulse generator switched with a laser triggered spark gap having a risetime of 120 psec, has been used to produce optical pulses of variable duration, as short as 600 psec, from the output of a uv photo-preionized CO₂ laser, which simultaneously oscillates on several rotational transitions.     

Migration of weakly bonded oxygen atoms in a-IGZO thin films and the positive shift of threshold voltage in TFTs

Amorphous indium-gallium-zinc oxide (a-IGZO) thin films are prepared by pulsed laser deposition and fabricated into thin-film transistor (TFT) devices. In-situ x-ray photoelectron spectroscopy (XPS) illustrates that weakly bonded oxygen (O) atoms exist in a-IGZO thin films deposited at high O₂ pressures, but these can be eliminated by vacuum annealing. The threshold voltage (V_th) of the a-IGZO TFTs is shifted under positive gate bias, and the V_th shift is positively related to the deposition pressure. A temperature variation experiment in the range of 20 K-300 K demonstrates that an activation energy of 144 meV is required for the V_th shift, which is close to the activation energy required for the migration of weakly bonded O atoms in a-IGZO thin films. Accordingly, the V_th shift is attributed to the acceptor-like states induced by the accumulation of weakly bonded O atoms at the a-IGZO/SiO₂ interface under positive gate bias. These results provide an insight into the mechanism responsible for the V_th shift of the a-IGZO TFTs and help in the production of reliable designs.     

激光诱导AlO自由基B2∑+–X2∑+跃迁光谱研究

基于激光诱导击穿光谱技术, 利用Nd:YAG脉冲激光激发Al₂O₃ (含量为99%)陶瓷片产生等离子体, 获得了AlO自由基B²∑⁺–X²∑⁺跃迁的33条发射谱线. 就AlO自由基光谱的时间演化规律和激光能量对谱线的影响规律进行了研究与分析. 结果表明, AlO自由基光谱出现在Al原子和Al离子光谱之后, 且持续时间较长. 当激光的脉冲能量由10 mJ起不断增加时, AlO自由基光谱强度逐渐减小, 且最大值出现时间随激光能量的增加而后移. 在此基础上, 进行了陶瓷等离子体在空气和氩气环境下的对比试验, 发现从Al₂O₃陶瓷片中激发所产生的AlO自由基必须有空气中O₂参与反应. 关键词： 激光诱导击穿光谱 AlO自由基 B²∑⁺–X²∑⁺跃迁光谱')" href="#">B²∑⁺–X²∑⁺跃迁光谱     

Beam quality of a high-power CO2 laser MOPA system

In this paper, the effects of amplification of diffraction-limited pulsed CO₂ laser radiation over several meters of amplification length on beam quality and pointing stability are documented. Millijoule pulses are amplified up to 3 J. Generation and amplification of the 10 μm wavelength pulses were performed in the discharge volume of an e-beam sustained CO₂ laser. Beam quality is measured according to the ISO/DIS 11146 standard in terms of the beam quality factor M². Fluence distributions were recorded with a beam analysing system of 100 μm spatial resolution. M² parameter values ranged up to 1.55 for amplified pulse energies of 3 J. The necessity of beam-quality restoring techniques is inferred for the multijoule pulse energy regime.     

超短脉冲激光烧蚀石墨产生的喷射物的时间分辨发射光谱研究

本文使用不同激光能流(18 J/cm²–115 J/cm²)和脉冲宽度(50 fs–4 ps)的超短脉冲激光在真空中(4×10^-4 Pa)烧蚀高定向热解石墨. 通过测量烧蚀喷射物的时间分辨发射光谱研究喷射物的超快时间演化. 在喷射物发射光谱中, 观察到了C₂基团的天鹅带光谱系统, 416 nm附近C₁₅基团的由电子能级¹Σ_u⁺ 和¹Σ_g⁺之间的振动跃迁产生的光谱峰以及连续谱. 50 fs, 115 J/cm²的脉冲激光烧蚀产生的喷射物的连续谱的强度衰减分为快速下降和慢速下降两个阶段(以20 ns时间延迟为分界). 这表明连续谱是由两种不同的组分贡献的. 快速下降阶段, 连续谱主要由碳等离子体通过韧致辐射产生; 慢速下降阶段, 连续谱主要由烧蚀后期产生的大颗粒碳簇的热辐射贡献. 实验结果还揭示了激光能流的提高, 会明显增加喷射物中碳等离子体和激发态C₂的含量, 但对质量稍大的C₁₅的影响较小; 此外, 50 fs脉冲激光烧蚀产生的连续谱的存在时间会随着激光能流的减小而增大, 这说明低能流更有利于在烧蚀后期产生碳簇. 脉宽主要影响喷射物连续谱的时间演化. 4 ps脉冲激光烧蚀产生的连续谱的整个时间演化过程明显慢于50 fs脉冲产生的连续谱.     

Cold-cathode, glow-discharge, electron-beam gun pumped short pulse CO2 lasers

A pulsed cold-cathode glow-discharge electron beam gun emitting an electron-beam of 150 keV energy and 45 cm² cross-sectional area has been used to pump a short pulse CO₂ laser. A fast discharge capacitor bank was used to help make the design simpler than that employed in liquid coaxial lines. The system developed is capable of producing a CO₂ laser pulse of 1 J for about 200 ns duration.     

激光分离卵磷脂混合物的实验研究

对于沸点相近并且分子自由程相差不大的物质,常规分离方法难以实现有效的分离,激光分离有效地弥补了常规分离方法的不足.用脉冲CO2激光器和连续CO2激光器对大豆卵磷脂混合物进行了激光分离实验,用高效液相色谱对激光辐照前后的样品进行了分析.经192.31 W/cm2的脉冲CO2激光辐照,卵磷脂的质量分数相对提高了26.7%,...     

Spectral and ion emission features of laser-produced Sn and SnO_2 plasmas

We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO_2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO_2 are irradiated with1.06 μm, 8 ns Nd:YAG laser pulses. Fast photography employing an intensified charge coupled device(ICCD), optical emission spectroscopy(OES), and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet(EUV) conversion efficiency(CE) than the Sn O2 plasma.However, the kinetic energies of Sn ions are relatively low compared with those of SnO_2. OES studies show that the Sn plasma parameters(electron temperature and density) are lower compared to those of the SnO_2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.     

Controlled wake field acceleration via laser pulse shaping

We consider the interaction of high-intensity laser pulses with underdense plasmas and address the problem of the excitation of strong and stable wake plasma waves with regular electric fields to provide effective acceleration of charged particles over appreciably long distances. It is known that a relativistically strong laser pulse longer than the wavelength of plasma waves, propagating in a plasma is subject to self-modulation. This may result in a nonstationary behavior of the produced plasma wake field/particle dephasing, and reduced net acceleration. In this paper we present the results of 1(2/2)-D and 2(1/2)-D particle in cell (PIC) simulations which demonstrate that regular wake electric fields may be obtained by a properly shaped laser pulse (sharp steepening of its leading front). These results are relevant to the design of the 100 MeV laser wake field electron acceleration experiment that uses a terawatt picosecond CO₂ laser and is under construction at the Brookhaven Accelerator Test Facility     

Stray-field imaging of quadrupolar nuclei of half integer spin in solids

A report is presented on the observation of Hahn echoes from the following quadrupolar nuclei of half integer spin (I) in polycrystalline solids in the large static magnetic field gradient (37.5 T/m) which exists in the fringe field of a superconducting solenoid: ⁷Li, ²³Na, ¹¹B, ⁶⁵Cu (I = 3/2); ²⁷Al (I = 5/2); ⁵¹V, ⁵⁹Co (I = 7/2); and ¹¹⁵In (I = 9/2). ²³Na echo-trains from NaCl (with non-selective excitation) and from Na₂SO₄ (with selective excitation) are compared quantitatively for two different RF pulse sequences: 90_x-(τ-90_y-τ-echo-)_n and 90_x-(τ-90_x-τ-echo-)_n. The signals obtained from RF pulses corresponding to non-selective 90 ° pulses were shown to be quantitative, whereas in the selective case smaller signals were obtained since only the central transition contributed. The loss of signal from this cause can be distinguished from small signals resulting from low density of nuclei by use of the second sequence. A ⁷Li image obtained from LiF in a cylindrical glass-vial is shown.     

A new design for a high-power, tail-free high repetition frequency single-mode CO2 laser

A new discharge design for pulsed CO2 lasers has been made with a series of short longitudinal synchronous discharges working at high pressure with large section. In this way, single-mode high-power (up to 40 kW at 100 ns) tail-free pulses have been obtained at intermediate repetition frequency (25 Hz) in a He-free mixture dominated by CO₂ (75–90% content). This laser is ideal for producing frequency mixing in non-linear crystals.     

CO_2激光光栅式扫描修复熔石英表面缺陷的实验研究与数值模拟

基于熔石英材料对波长为10.6μm的CO2激光具有强吸收作用这一特点,提出采用CO2激光光栅式多次扫描修复熔石英光学元件表面密集分布的划痕和抛光点等缺陷的方法.实验结果表明,在合理的扫描参数下,元件表面的划痕和抛光点等缺陷可被充分地消除.损伤阈值测试结果表明,表面划痕和抛光点等缺陷被完全消除的元件的损伤阈值可回复到或超过基底的损伤阈值.同时结合有限元软件Ansys的模拟结果分析了CO2激光扫描修复及消除元件表面划痕和抛光点等缺陷的过程.本文为消除元件表面划痕和抛光点等缺陷提供了非常有意义的参考.     

Efficient doubling and CW difference frequency mixing in the infrared using the chalcopyrite CdGeAs2

We have obtained fifteen percent average internal power conversion efficiency for second harmonic generation in CdGeAs₂ of radiation from a TEA CO₂ laser operating at 10.6 μm. This is the highest reported doubling efficiency for a CO₂ laser. We have also observed cw difference frequency mixing in CdGeAs₂ at wavelengths between 11.4 and 16.8 μm using grating-tuned CO and CO₂ lasers. The CdGeAs₂ crystals are significantly improved in size and optical quality over those previously available.     

Absorption coefficients of O3 at CO2 laser wavelengths

The O₃ absorption coefficients for the rotational lines P(12)–P(28) of the 9.4 μm emission band of the CO₂ laser are presented. Measurements were made in O₃–air dilute mixtures (20–600 ppm) at 25°C and a total pressure of 1013.25 h Pa using a frequency stabilized cw CO₂ laser and values have been determined with greater precision than in previously reported studies.     

Variation of the gas components of a TEA CO2 laser during its lifetime

An in situ mass-spectrometric sampling technique has been developed for lifetime studies of TEA CO₂ lasers. Using the new technique, an analysis of the gas components of a TEA CO₂ laser during its lifetime has been performed. The results show that the laser output pulse energy was strongly influenced by the oxygen concentration inside the device.     

脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究

采用波长13.5 nm的极紫外光作为曝光光源的极紫外光刻技术是最有潜力的下一代光刻技术之一, 它是半导体制造实现10 nm及以下节点的关键技术. 获得极紫外辐射的方法中, 激光等离子体光源凭借转换效率高、收集角度大、碎屑产量低等优点而被认为是最有前途的极紫外光源. 本文开展了脉冲TEA-CO₂激光和Nd:YAG激光辐照液滴锡靶产生极紫外辐射的实验, 对极紫外辐射的谱线结构以及辐射的时空分布特性进行了研究.实验发现: 与TEA-CO₂激光相比, 较高功率密度的Nd:YAG激光激发的极紫外辐射谱存在明显的蓝移; 并且激光等离子体光源可以认为是点状光源, 其极紫外辐射强度随空间角度变化近似满足Lambertian分布.     

Cutting and welding using a CO2 laser

Of all the types of lasers now available, the CO₂ laser is particularly suitable for materials working. It has a very high efficiency (15–20%) and a high out-put power (up to several kW). When the laser light is focused by means of a lens or a mirror, a c.w. power density of more than 10⁹ W cm^-2 can be attained. The laser need not be used in vacuum.

The CO₂ laser is a suitable cutting tool for numerous materials. These include metals such as titanium or steel; combustible materials such as paper, textiles and wood; and plastics. The CO₂ laser can also cut hard and brittle materials such as aluminum oxide and silicon carbide. If metals are cut in an oxidizing atmosphere, the cutting speed may be increased. The cutting width, however, is determined by the size of the laser spot. Another important field of application is the growth of single crystals.

Experiments are reported in which the CO₂ laser was used for welding steel, titanium, plastics, quartz, and glass. The advantages of the laser for this application are discussed. A comparative study of laser and electron beam techniques is included.     

滑动弧裂解CO2机理

建立了一维滑动弧裂解CO₂的反应机理模型. 利用对流冷却的特征频率计算横向气流对流引起的等离子体组分损失. 将等离子体密度和温度的数值模拟结果与文献中滑动电弧等离子体反应器的实验数据进行了对比,吻合较好. 模拟结果表明,滑动弧裂解CO₂会产生大量O和O₂等活性助燃粒子以及可燃的CO. 随着对流冷却特征频率的增加,放电过程中最大电子数密度和电子温度减小,CO₂转化率下降. 在整个CO₂裂解机制中e+CO₂→e+CO+O的贡献最大,准稳态中贡献率为90.63%,瞬态中贡献率为98.43%. 反应CO+O+M→CO₂+M对CO₂生成的贡献率最大. 在实际应用中,为提高CO₂转化率,可以通过增大放电电流,增大e+CO₂→e+CO+O的反应速率,同时选择合适的气体流量,避免过大的速度引起CO₂转化率下降.