Multimode interference devices for focusing in microfluidic channels

Low-cost, compact, automated optical microsystems for chemical analysis, such as microflow cytometers for identification of individual biological cells, require monolithically integrated microlenses for focusing in microfluidic channels, to enable high-resolution scattering and fluorescence measurements. The multimode interference device (MMI), which makes use of self-imaging in multimode waveguides, is shown to be a simple and effective alternative to the microlens for microflow cytometry. The MMIs have been designed, realized, and integrated with microfluidic channels in a silica-based glass waveguide material system. Focal spot sizes of 2.4 μm for MMIs have been measured at foci as far as 43.7 μm into the microfluidic channel.     

Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide

A mid-infrared (mid-IR)-focusing subwavelength grating (SWG) coupler and suspended membrane waveguide (SMW) on a silicon-on-insulator wafer are studied. For a transverse-electric mode uniform SWG, finite-difference time-domain simulation predicts 44.2% coupling efficiency with 1 dB bandwidth of about 220 nm and backreflection of 0.78% at 2.75 μm. Then the uniform SWG is curved to a focusing SWG using a phase-matching formula. The SMWs are analyzed by the finite element method and fabricated. An Er3+-Pr3+ co-doped mid-IR fiber laser is used for device characterization. The fabricated mid-IR SWG coupler has 24.7% coupling efficiency.     

Study on self-imaging properties for line-tapered multimode interference couplers

The line-tapered multimode interference (MMI) couplers have advantage of compact dimension compared with conventional straight MMI couplers and then are more suitable for integrated optical components. In this paper, the self-imaging properties including general self-image and overlapping-image properties for the line-tapered MMI couplers are discussed thoroughly. Based on the width equation we defined, compact equations for the positions, amplitudes, phases of general images and overlapping images are deduced. Three disciplines for general self-imaging and four disciplines for overlapping-imaging are summarized and discussed. In addition, the overlapping-image properties are further studied by matrix analytic method and an inductive reasoning method of constructing phase and intensity matrix is developed based on it. Finally, all the theoretical results are compared with simulations results obtained by the finite-difference beam propagation method (FD-BPM). Both theoretical and simulation results are shown in this paper and demonstrated to be coincided with each other to a great extent.     

一种多模干涉耦合器的性能模拟

为减小多模干涉（Multimode Interference ,MMI）耦合器件的尺寸,提出一种多模波导宽度为指数型变化的Taper结构.理论分析了多模波导长度与该Taper结构的参量之间的关系.与已被用于减小MMI器件尺寸的抛物线型Taper结构相比,该结构可进一步减小器件的尺寸.就几种波导结构参量下的MMI耦合器,利用宽角光束传播法进行了数值模拟.结果表明,指数型MMI耦合器的性能与抛物线型MMI耦合器的性能类似.指数型Taper结构可以用于MMI器件以减小该类器件的尺寸.     

Optimal design of multimode interference couplers using an improved self-imaging theory

Self-imaging theory is widely accepted as a good method in designing 1 × N multimode interference (MMI) couplers, but it is also true that self-imaging theory is not suitable for low-contrast structures. An improved self-imaging theory is proposed in this paper for the optimal design of low-contrast 1 × N MMI couplers. The average effective width of MMI waveguide and the average effective propagation constant of MMI waveguide are used as the basis to modify the conventional self-imaging theory. A direct calculation of the average effective width of low-contrast MMIs is presented. We use this approach in the optimal design of a 1 × 4 silica MMI coupler, and the results show that the improved self-imaging theory is more accurate than conventional self-imaging theory for low-contrast structures, the results also show that if the material parameters and the width of an MMI waveguide are fixed, the average effective width of the MMI waveguide will increase with the decrease of the height of the core layer.     

Multimode interference wavelength multi/demultiplexer for 1310 and 1550 nm operation based on BCB 4024-40 photodefinable polymer

A 1310 and 1550 nm coarse wavelength multi/demultiplexer based on benzocyclobutene (BCB 4024-40) polymer is demonstrated for the first time. The device is designed based on a combination of general interference and paired interference mechanisms of multimode interference (MMI). It is fabricated on BK7 glass substrate with a thin layer of SiO₂ as cover. A cost effective chemical etching technique is used in the fabrication process to take advantage of the photosensitive nature of the polymer. The device length was significantly reduced by adopting the restricted multimode interference scheme, lower beat length ratio and cascaded MMI couplers. The measured crosstalk at 1310 nm was 14.4 dB and at 1550 nm was 20.6 dB. The measured insertion loss is around 3.2-3.5 dB for both ports.     

Power splitting ratio couplers based on MMI structures with high bandwidth and large tolerance using silicon waveguides

We show that it is possible to obtain 2 × 2 couplers based on multimode interference (MMI) structures with nineteen new power-splitting ratios by cascading three or four MMI couplers. The other aim of this study is to use silicon waveguides, that are compatible with the existing CMOS (Complementary Metal-Oxide-Semiconductor) fabrication technology, for designing the proposed devices. The proposed MMI couplers with new power splitting ratios have simple geometries and low losses. These MMI couplers can offer valuable new possibilities for designing MMI waveguide-based photonic integrated circuits such as all-optical interconnects, microring resonators, clock distribution, Mach Zehnder Interferometer based on MMI couplers and other all-optical processing applications. The transfer matrix method (TMM) and modified effective index method (MEIM) along with the support of the 3D Beam Propagation Method (3D BPM) are used to optimize the proposed devices.     

Design and fabrication of a compact multimode interference splitter with silicon photonic nanowires

A compact multimode interference （MMI） splitter with silicon photonic nanowires on silicon-on-insulator （SOI） substrate is designed and fabricated. The footprint of the MMI section is only approximately 3×10 （μm）. The simulation results show that the device may have a low excess loss of 0.04 dB. The transmission loss of the silicon photonics wire is measured to be 0.73±0.3 dB/mm. The compact size and low transmission loss allow the device to be used in ultra-compact photonic integrated circuits. The device exhibits a good light splitting function. In a spectral range of 1549-1560 nm, the excess loss is 1.5 dB and the average imbalance between the two channels is 0.51 dB.     

Broadband 10 Gb/s operation of graphene electro‐absorption modulator on silicon

High performance integrated optical modulators are highly desired for future optical interconnects. The ultra‐high bandwidth and broadband operation potentially offered by graphene based electro‐absorption modulators has attracted a lot of attention in the photonics community recently. In this work, we theoretically evaluate the true potential of such modulators and illustrate this with experimental results for a silicon integrated graphene optical electro‐absorption modulator capable of broadband 10 Gb/s modulation speed. The measured results agree very well with theoretical predictions. A low insertion loss of 3.8 dB at 1580 nm and a low drive voltage of 2.5 V combined with broadband and athermal operation were obtained for a 50 μm‐length hybrid graphene‐Si device. The peak modulation efficiency of the device is 1.5 dB/V. This robust device is challenging best‐in‐class Si (Ge) modulators for future chip‐level optical interconnects.     

采用三维波束传输法的多模干涉耦合器成像位置的数值计算

多模干涉(MMI)耦合器需要精确定位成像位置,以便器件的设计制作。针对强限制和弱限制的三维多模波导干涉耦合器,采用三维交替方向隐式有限差分光束传输法(BPM),数值计算得出多模波导长度、输入波导和输出波导位置。首先通过对对称干涉多模干涉耦合器的数值分析求得多模干涉耦合器的等效宽度Weq及最低二阶模之间的拍长Lc,然后将这些参量结合光束传输法直接用于器件设计。计算显示该方法得到的成像位置和导模传输分析法(MPA)的理论预测比较接近,但Weq和Lc却是由光束传输法计算得到的,导模传输分析法理论只能在得到Weq和Lc的前提下才能得到成像位置。该方法直接针对三维波导进行,没有采用基于等效折射率方法的从三维波导到二维波导的简化处理,并且也没有采用导模传输分析法所采用的近似,保证了计算精度,对于实际多模干涉器件的设计制作可起参考作用。     

High‐efficiency single etch step apodized surface grating coupler using subwavelength structure

Grating couplers are key elements enabling the coupling of light between planar waveguide circuits and optical fibers. In this work, it is demonstrated using simulations and experiments that a high coupling efficiency can be achieved for an arbitrary buried oxide thickness by judicious adjustment of the grating radiation angle. The coupler strength is engineered by subwavelength structure, allowing straightforward apodization and single etch step fabrication. The design has been implemented using Fourier‐eigenmode expansion and finite difference time domain methods. The measured coupling loss of a continuously apodized grating is −2.16 dB with a 3 dB bandwidth of 64 nm, therefore opening promising prospects for low‐cost and high‐volume fabrication using 193 nm deep‐ultraviolet lithography. It is also shown by simulations that a coupling loss as low as −0.42 dB is predicted for a modified coupler structure with bottom mirror.     

Compact triplexer in two-dimensional hexagonal lattice photonic crystals

We design a compact triplexer based on two-dimensional (2D) hexagonal lattice photonic crystals (PCs).A folded directional coupler (FDC) is introduced in the triplexer beside the point-defect micro-cavities and line-defect waveguides.Because of the reflection feedback of the FDC,high channel drop efficiency can be realized and a compact size with the order of micrometers can be maintained.The proposed device is analyzed using the plane wave expansion method,and its transmission characteristics are calculated using the finite-difference time-domain method.The footprint of the triplexer is about 12× 9 μm,and its extinction ratios are less than –20 dB for 1310 nm,approximately –20 dB for 1490 nm,and under –40 dB for 1550 nm,making it a potentially essential device in future fiber-to-the-home networks.     

多模干涉马赫曾德尔光开关模型

根据N×N多模干涉耦合器的基本原理 ,确定了多模干涉耦合器的结构参数。通过分析多模干涉耦合器的输入光场与其映像间的相位关系 ,提出了模传输矩阵的分析方法 ,并用此方法分析了N×N普通干涉多模干涉耦合器、N×N相移器以及N×N普通干涉多模干涉马赫 曾德尔光开关 ,得到了它们的模场传输方程 ,分析了光开关在光场从任一输入端输入 ,从任一输出端输出时开关的驱动条件。用上面的方法分析了 4× 4光开关的结构及驱动条件     

平面光波导型单纤三向器的研究

利用光束传输法,分析设计了一种只由两个定向耦合器构成、能直接与单模光纤相耦合、易于集成的平面光波导（Planar Lightwave Circuit,PLC）型1.31/1.49/1.55 μm单纤三向器.该器件的输入输出弯曲波导和耦合区平行波导均采用光束传输法进行优化设计,并对器件的折射率进行了容差分析,获得了当两个定向耦合器的耦合长度分别为6 578 μm、3953 μm时,器件对各波长的隔离度均在47 dB以上,且插入损耗小于0.05 dB.     

1x2 Multimode interference couplers based on semiconductor hollow waveguides formed from omnidirectional reflectors

A 1x2 hollow multimode interference (MMI) coupler based on semiconductor hollow waveguides formed from omnidirectional reflectors (SHOW-ODR) is demonstrated. The device has a shorter coupling length than a conventional silicon-on-insulator MMI coupler. A 2 dB uniformity was achieved at operating wavelengths between 1520 and 1562 nm. The device exhibited a weak polarization dependence in the TE and TM modes.     

Novel BeZnO Based Self‐Powered Dual‐Color UV Photodetector Realized via a One‐Step Fabrication Method

In this work, we fabricated a novel BeZnO based dual‐color UV photodetector through a one‐step electron beam evaporation of asymmetric Ti/Au pair. A dual‐phase BeZnO alloy film with dual bandgap of ∼3.5 eV (∼355 nm) and ∼4.6 eV(∼270 nm) was artfully utilized as active layer to realize dual‐color response. This photodetector shows a noticeable photovoltaic characteristic and can be utilized as an excellent self‐powered device. The device exhibits two cut‐off response wavelengths at ∼275 nm and ∼360 nm under zero bias, which are corresponding to UVA and UVC region, respectively. According to the dynamic response spectra under UV radiation, the device presents excellent stability and reproducibility without external power supply. In addition, the device has an ultrafast response speed, with a rise time of ∼35 μs and a decay time of ∼880 μs. Finally, a physical model based on energy band theory is proposed to demonstrate that the self‐powered behavior is attributed to the asymmetric Schottky barrier heights caused by the hole‐trapping process occurred in electrode/BeZnO interface. To the best of our knowledge, this is the first report on BeZnO based self‐powered UV photodetector. Our findings demonstrate a novel and facile route to realize high performance self‐powered UV photodetectors for multipurposes.     

Apodized fully-etched surface grating coupler using subwavelength structure for standard silicon-on-insulator waveguide

We design and demonstrate the fully-etched apodized grating couplers based on the silicon-on-insulator (SOI) platform using subwavelength structure for both transverse electric (TE) and transverse magnetic (TM) modes operation. The subwavelength grating (SWG) is used to engineer the refractive index using second-order effective medium theory (EMT). The whole designing procedure is given in details, especially a feasible and programmable method is developed to precisely manipulate the coupling strength of each grating cycle. A perfect Gaussian output beam can be synthesized for the TE mode operation, achieving a field overlap up to 98.3% with the Gaussian fiber mode. The simulated peak coupling losses are ?4.63 and ?2.99 dB for the TE mode and the TM mode, respectively, which are comparable with conventional shallowly etched grating couplers, realizing a fabrication simplification without performance penalty. The measured peak coupling loss is ?7.6 dB for the TE mode coupler with a 1 dB bandwidth of 45 nm, and ?6.1 dB for the TM mode coupler with a 1 dB bandwidth of 34 nm.     

Two-dimensional overlapping-image multimode interference couplers

The overlapping-imaging effect of one-dimensional (1D) multimode interference (MMI) coupler is widened to study the two-dimensional (2D) MMI coupler. 2D overlapping-image MMI couplers permit uniform and nonuniform 2D power splitting. Analytical formulas are derived for the intensities and phases of the overlapping-images at the end of MMI section. The overlapping-imaging properties in 2D MMI couplers are also concluded. And the guided-mode propagation analysis method is used to confirm the analytical results.     

300 W侧面分布式抽运掺Yb全光纤放大器

采用角度磨抛的方式, 在纤芯/包层为20/400 μm双包层掺Yb光纤上制作了侧面抽运耦合器. 该耦合器对975 nm的半导体二极管抽运光的耦合效率最高可达97%, 对1080 nm信号光的泄漏比小于2%. 分析了侧面抽运耦合器的性能以及多个侧面抽运耦合器的级联分布对抽运耦合效率的影响; 同时, 在前向抽运和双向抽运方式下, 分析了级联耦合器的分布及信号光泄漏比对激光器整体效率的影响, 并进行了数值模拟. 采用自行研制的侧面抽运耦合器, 搭建了侧面耦合分布式抽运、掺Yb双包层全光纤主振荡功率放大器, 获得了波长为1080 nm、功率为303 W 的基模激光输出. 进一步增加抽运点个数, 提高抽运功率, 可获得更高的输出功率.     

Static optical cross phase modulation in active multimode interference couplers

The static performance of active multimode interference (MMI) couplers is analyzed in the presence of two different optical signals using a beam propagation method (BPM)-based simulation. To examine the feasibility of a novel all-optical switch based on active MMI; the simulation is mainly used to evaluate the amount of phase change resulting in the output of one optical signal by varying the intensity of the other at different injected carrier density. The simulation code is based on the finite difference (FD)-BPM and is including the distribution of photon density, carrier density, and refractive index.