单晶热释电探测器混合集成制造方法研究

在比较几种探测器集成制造方法的基础上,提出采用各向异性导电膜作为电信号互联的手段,实现热释电探测器与信号处理电路的混合集成,从而演示了一种兼容性良好的集成化多传感器制造方法.对单晶钽酸锂热释电探测器采取机械研磨减薄获得其薄膜,利用3M的5552R各向异性导电膜,实现了探测器与信号读出电路的互联.对探测器的测试表明:机械研磨减薄获得的钽酸锂薄膜表现出与晶体接近的热释电特性,探测器表现出良好的绝热性质和动态响应特性.     

Lead free KNN/P(VDF-TrFE) 0–3 pyroelectric composite films and its infrared sensor

(K_0.5Na_0.5)NbO₃ (KNN)/[P(VDF-TrFE)70:30] composite thick films with different KNN weight ratios have been fabricated and the effect of KNN mass content on the material structure and properties have been studied in this paper. Properties of the infrared sensor based KNN/[P(VDF-TrFE)70:30] composite thick film were also systematically studied. It was found that the sample containing 30 wt.% KNN show optimal properties for pyroelectric appliance and the highest pyroelectric coefficient was 63 μCm⁻² K⁻¹. Infrared sensors using 30 wt.% KNN-70 wt.%[P(VDF-TrFE)70:30] show highest detectivity (D¹ = 3.21 × 10⁸ cm Hz^1/2 W⁻¹) at 137.3 Hz, indicating it is an promising candidate in lead-free quick response infrared detectors.     

Low-temperature pyroelectricity

The current state of the set of problems associated with the study and application of the pyroelectric effect at low (T<30 K) temperatures is outlined. The reasons for the qualitatively different temperature dependences of the total pyroelectric coefficient γ^σ(T) in linear pyroelectrics and ferroelectrics are discussed. An analysis is given of the reasons why the theoretical temperature dependences obtained for the primary pyroelectric coefficient γ^ε(T) adequately describe the experimental γ^σ(T) dependences for all materials studied. In this connection, the correctness of determining the secondary pyroelectric coefficient γ^S(T) from the macroscopically measured coefficients of thermal expansion is considered. The potential of thermodynamically nonequilibrium polar media and low-temperature pyroelectric materials is substantiated. The review consists of the following sections: (1) an introduction; (2) the theory of low-temperature pyroelectricity; (3) experimental procedures; (4) discussion of the experimental data: (A) perfect single crystals, (B) the problem of the secondary pyroelectric coefficient, (C) imperfect single crystals; (5) pyroelectric materials for low-temperature applications; and (6) a conclusion.     

微型红外线传感技术的最新发展

综述了红外传感器技术的最新发展，由于应用了薄膜型红外探测器，衍射光学聚光镜和共振压电斩波器，红外传感器实现了微型化，在许多领域中获得了广泛的应用。     

Development of a small X-ray source using an ultraviolet laser and pyroelectric crystal

We investigate a miniaturized X-ray source using an ultraviolet (UV) laser and a pyroelectric crystal and discuss potential applications in medicine. The UV laser is the fourth harmonic of a Nd:YAG laser with a wavelength of 266 nm, repetition rate of 10 Hz, and pulse energy of 40 mJ. The pyroelectric crystal is a LiNbO₃ cylinder of diameter 10 mm and length 6 mm. The prototype X-ray source we fabricated is an aluminum parallelepiped of dimensions 3 × 3 × 5 cm. The X-ray count rate of the X-ray source is maximized at approximately 1,400 cps for UV laser irradiation of approximately 5 min. After 30 min of irradiation by the UV laser, the temperature of the pyroelectric crystal rose from 295 K to 312 K. The principles of X-ray generation ensure that X-ray sources using UV lasers and pyroelectric crystals offer ample opportunity for miniaturization. We believe the X-ray source developed in this work is suitable for medical applications, although further study is needed to address points such as increasing the X-ray count rate and adjusting the temperature of the pyroelectric crystal.     

Theoretical studies on the pyroelectric properties of two component composite ferroelectric thin film

Using a Ginzburg–Landau–Devonshire type model, the pyroelectric property and hysteresis loop are studied for a composite ferroelectric thin film that contains an insertion of a different type of ferroelectric material in parallel connection with the host ferroelectric film material. If these two types of ferroelectric materials are polarized along the same direction, there are two peaks occur in the pyroelectric coefficient vs temperature curve. If the two ferroelectric materials are polarized in opposite directions, one positive and one negative coefficient peaks occur in the temperature dependence of pyroelectric coefficient curve and the hysteresis loop appears to be a quasi-double loop. The effect of the external electric field on the pyroelectric coefficient is also investigated.     

Effect of electrode on dielectric susceptibility and pyroelectric properties of a ferroelectric thin film capacitor using landau-khalatnikov theory

The influence of electrodes on the dielectric susceptibility and pyroelectric properties of a ferroelectric thin film with surface transition layers has been investigated within the framework of Landau-Khalatnikov dynamic theory. The contribution of the electrodes is reflected by the depolarization field in the free-energy function. The large electrode effect implies the strong depolarization field in ferroelectric thin films. The results show that the electrode materials can greatly impact the dynamic dielectric and pyroelectric properties of a ferroelectric thin film.     

Fabrication and evaluation of a freestanding pyroelectric detector made from single-crystal LiNbO(3) film

We have packaged a rectangular 3 mm x 4 mm, 10-mum-thick Z-cut lithium niobate (LiNbO(3)) film produced by crystal ion slicing (CIS) and evaluated its performance as a pyroelectric optical detector. We justify the difficulty of preparing the film by showing that the freestanding detector has much greater sensitivity than the same detector bonded to a substrate. We compare the sensitivity of three CIS-film detectors with that of a detector based on a 230-mum-thick LiNbO(3) plate and describe the detectors' spatial uniformity and noise-equivalent power.     

On the heating modulation frequency dependence of the photopyroelectric signal in experiments for liquid thermal characterization

A pyroelectric sensor can be seen as a layered system consisted on a pyroelectric material sandwiched between two thin metal layers acting as electrical contacts for measurements of the voltage drop that can be induced by heating. This kind of sensor can be used as a detector of electromagnetic radiation but also for thermal characterization of materials using the photopyroelectric technique. In this work we perform a theoretical analysis based in the so-called thermal wave approach to show that, when this sensor is heated periodically by the absorption of intensity modulated light by one of the metalized surfaces, while the other metal surface is in contact with a liquid sample, the resulting pyroelectric voltage signal amplitude enhances respecting the one resulting from the bare sensor, for certain values of the modulation frequency. This contradicts the intuitively expectation based in the assumption that the sample provides a new channel for heat conduction, thereby decreasing the pyroelectric temperature. We will show that the back and forth propagation and the superposition of thermal waves through the metal coatings must be taken into account in order to explain the observed behavior. The proposed model was experimentally tested for water and glycerin samples, and using a polyvinylidene difluoride (PVDF) polymer film, with Ni–Cu metal electrodes, as a pyroelectric sensor.     

Carbon multi-walled nanotubes grown by HWCVD on a pyroelectric detector

Carbon multi-wall nanotubes (MWNTs) were grown on a lithium niobate (LiNbO₃) pyroelectric detector with a nickel film as the catalyst by hot-wire chemical vapor deposition (HWCVD). Two detectors are documented, each with slightly different deposition conditions. The absolute spectral responsivity of each device was measured from 600 nm to 1800 nm and indicates that the MWNT-coating absorptance is spectrally uniform, with variations of only a few percent. We also discuss growth of MWNTs on LiTaO₃ by CVD and the limitations presented by the Curie temperature of the pyroelectric material.     

红外薄膜热电探测器分析

本文用一维扩散模型推出了热电探测器响应率的表达式,并计算了悬空的和有底板的TGS热电探测器的响应率和NEP的数值(作为器件厚度和工作频率的函数)。根据数值计算的结果,分析了薄膜热电探测器的发展前景。本文认为:(i)必须用薄膜底板。底板和热电晶体的厚度最好都在0.1微米以下。底板宜选用比热和密度尽量小的材料。这样的薄膜器件,其低频NEP可能比10微米厚的悬空器件降低一个数量级。(ii)如底板厚度超过热扩散长度,薄膜器件响应率便下降,同时温度噪声上升,NEP上升。这样的薄膜器件,其低频性能将显著地不如10微米厚的悬空器件。     

Pyroelectric properties of CaCu3Ti4O12 thin films grown by pulsed laser deposition

A pyroelectric behavior was observed in CaCu₃Ti₄O₁₂ films and the pyroelectric coefficient was measured to be 1.35×10^?7 C/cm²?K for a film with thickness of 700 nm from 295 K to 340 K, larger than those of most pyroelectric materials. It was observed that the pyroelectric coefficient increased with the thickness of films from 300 to 700 nm. The origin of pyroelectric effect is proposed to depend on the distortion of the Ti–O octahedron due to the presence of Ti³⁺ ions. Comparing with the measurement result of an unpolarized film, our study strongly supports the interpretation of relaxor ferroelectric behavior in CaCu₃Ti₄O₁₂.     

The off-axis pyroelectric effect observed for lithium tetraborate

We find a pyroelectric current along the 〈110〉 direction of stoichiometric Li₂B₄O₇ so that the pyroelectric coefficient is nonzero but roughly 10⁻³ smaller than along the 〈001〉 direction of spontaneous polarization. Abrupt decreases in the pyroelectric coefficient along the 〈110〉 direction can be correlated with anomalies in the elastic stiffness contributing to concept that the pyroelectric coefficient is not simply a vector but has qualities of a tensor, as expected. The time dependent surface photovoltaic charging suggests that an inverse piezoelectric effect occurs at the (110) surface but not the (100) surface. Both effects along the 〈110〉 direction or at the (110) surface are distinct the conventional as a bulk pyroelectric effect.     

Induced pyroelectric effect in a planar field

The effect of an induced deformation and the influence of a planar electric field on the ground state of the ferroelectric Ba_0.7Sr_0.3O₃ thin films deposited on (001)-oriented cubic substrates have been investigated. The dependence of the pyroelectric coefficient on the electric field strength E _x in the film plane has been constructed for the values of the induced strain that correspond to different ground states of the film. In the regions where the film can operate in the mode of a dielectric bolometer, there is an electric field in which the pyroelectric coefficient reaches the extreme value. There is also a value of the induced strain at which the pyroelectric effect is most pronounced.     

High pyroelectric Ba0.65Sr0.35TiO3 thin films with Ba0.65Sr0.35RuO3 seeding-layer for monolithic ferroelectric bolometer

Ba_0.65Sr_0.35TiO₃ (BST) thin films were deposited by RF sputtering with a very thin Ba_0.65Sr_0.35RuO₃ (BSR) seeding-layer on Pt/Ti/SiO₂/Si substrate. The crystallization of BST thin films and the surface morphology of BSR seeding-layer were characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. XRD patterns show that the BSR seeding-layer affected the orientation of BST thin film, which is highly a-axis textured. It was also found that the BSR seeding-layer had a marked influence on the dielectric properties of BST thin films. Comparing with BST thin films directly deposited on Pt electrode, the dielectric relaxation can be suppressed and dielectric constant increased due to a possible reduction of interface oxygen vacancies at BST/BSR interface. Moreover, J–V measurement indicates that the leakage current density of BST thin films on BSR seeding-layer were greatly reduced compared with that of BST thin films directly on Pt electrodes. The pyroelectric coefficient of BST thin films with BSR seeding-layer is 7.57 × 10⁻⁷ C cm⁻² K⁻¹ at 6 V/μm at room temperature (RT). Our results reveal that high pyroelectric property of BST thin film could be achievable using BSR seeding-layer as a special buffer.     

Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO_x:H film

By using the plasma enhanced chemical vapor deposition(PECVD) technique, amorphous silicon oxide films containing nanocrystalline silicon grain(nc-Si O x:H) are deposited, and the bonding configurations and optical absorption properties of the films are investigated. The grain size can be well controlled by varying the hydrogen and oxygen content,and the largest size is obtained when the hydrogen dilution ratio R is 33. The results show that the crystallinity and the grain size of the film first increased and then decreased as R increased. The highest degree of crystallinity is obtained at R = 30.The analyses of bonding characteristics and light absorption characteristics show that the incorporation of hydrogen leads to an increase of overall bonding oxygen content in the film, and the film porosity first increases and then decreases. When R = 30, the film can be more compact, the optical absorption edge of the film is blue shifted, and the film has a lower activation energy.     

Influences of thin Ni layer on the electrical and absorption properties of PZT thin film pyroelectric IR sensors

A solid precursor was used to prepare ferroelectric lead zirconate titanate (PZT) 30/70 thin films using the sol–gel deposition method. To apply PZT thin films for uncooled pyroelectric IR sensors, a Ni layer was deposited onto the PZT thin films, serving both as a selective absorption layer and as the top electrode. The absorption properties of such Ni coated multi-layered pyroelectric sensors were studied in the visible and infrared wavelength ranges. The maximum absorption coefficient of this type of IR sensor was measured to be 0.8 at 0.633 μm and 0.7 at 4 μm wavelength, respectively. A striking asymmetric polarization hysteresis loop in these PZT thin films with Ni as the top electrode was observed as a direct consequence. This asymmetric polarization was attributed to cause the difference in the dynamic pyroelectric responses in these Ni/PZT/Pt films, poled either positively or negatively before the measurement.     

体吸收、边电极热电探测器的分析

本文用一维热扩散模型推出了体吸收、悬空型、边电极热电探测器响应率的表达式,并计算了SBN热电探测器的响应率和NEP与材料的吸收系数、器件厚度、工作频率以及前置放大器输入电容之间的关系。本文认为:1.体吸收、悬空型、边电极热电探测器具有最佳响应率厚度和最佳NEP厚度。两种最佳厚度可以根据本文导出的响应率公式和已知的噪声公式计算出来。2.在某些波段,如果能把材料的吸收系数提高到5×10⁴cm^-1以上,就可以研制性能优良的体吸收薄膜器件。     

Pyroelectric drive for light-induced charge transport in the photorefractive process

We calculate the influence of thermal patterns and pyroelectric fields on photorefractive holographic recording in terms of a one center charge transport model, taking into account diffusion, photovoltaic current and space charge limitation. At pulse laser intensities the pyroelectric effect can enhance the holographic sensitivity and the saturation value of refractive index changes significantly.     

Instability of the Kolmogorov flow in a soap film

We examine the instability of a soap film flow driven by a time-independent force that is spatially periodic in the direction perpendicular to the forcing (Kolmogorov flow). Linear stability analysis of an idealized model of this flow predicts a critical Reynolds number R(c) is approximately equal to the square root of 2. In our soap film experiment, we find a critical value R(c) is approximately equal to 70. This discrepancy can be ascribed to frictional effects from viscous coupling of gas to the film, which is neglected in the idealized model. The kinematic viscosity of the surrounding gas and the thickness of gas layers on each side of the soap film are varied in the experiments to better understand these frictional effects. Our observations indicate that flow in the soap film cannot be decoupled from flow in the surrounding gas.