Structure and magnetic anisotropy of Fe/Pt multilayers

A series of Fe/Pt multilayers prepared by magnetron sputtering have been studied by XRD, conversion electron Mössbauer spectroscopy (CEMS) and SQUID magnetometry. The samples with individual Fe thickness of 3 Å show orientation of the magnetic moment close to perpendicular to the film plane and Curie temperatures near 350 K. Interdiffusion at the interface is manifested in a distribution of hyperfine fields.     

多层膜［Co85Cr15/Pt］20的磁性、垂直磁记录特性和微结构的关系

采用磁控溅射法制备了性能优良的以Pt为缓冲层的［Co85₈₅Cr15_{15/Pt］2020 多层膜，研究了溅射气压对［Co8585Cr1515/Pt］2020多层膜微结构和磁性的 影响.研究结果表明，Ar溅射气压对［Co8585Cr1515/Pt］2020多层膜的微结构 、垂直磁各向异性和矫顽力有重要的影响 关键词： 溅射气压 多层膜 垂直磁各向异性 有效磁各向异性常数}     

Mössbauer studies of ultrathin Fe/Pt multilayers

Summary A series of ultrathin Fe/Pt multilayers, prepared by magnetron sputtering, were studied by CEMS and transmission MS. The Fe-layer thickness varied from 3 to 12.5 ? and that of Pt from 5 ? to 39 ?. The 3 ?/9 ? Pt sample displays magnetic hyperfine structure at RT, while the 3 Fe/19 Pt sample is paramagnetic at RT, demonstrating the effect of interlayer interaction. Both samples display out-of-plane magnetic anisotropy with 39° angle with respect to the vertical for the former and nearly 0° angle for the latter. The analysis of the spectra of samples with thickness larger than one monolayer of Fe is done with components assigned to individual Fe monolayers. In all these cases a component appears with a hyperfine field larger by ∼ 10% at RT and 17% at L.He than the corresponding values of α-Fe. This component is attributed to the first monolayer below the Fe/Pt interface in accordance with similar results in the Fe/Pd system and with theoretical predictions. Paper presented at ICAME-95, Rimini, 10–16, September 1995     

Magnetic Behaviour of Sm2Co7/Fe/Sm2 Co7, Nanocomposite Trilayers with Cr and Ti Additions

Trilayered Sm2Co7/Fe/Sm2Co7 spring exchange magnets are fabricated by dc magnetron sputtering on MgO substrates. Very thin layers （0.3-0.7 nm） of Cr and Ti are added at the interfaces of the two magnetic phases. The thickness of StucCo7 is kept at 20nm and Fe at 6nm while the thickness of Cr and Ti are varied as 0.3, 0.5, and 0.7nm. The base pressure of sputtering chamber is kept below 10^-7 Torr and Ar pressure at 3-8m Torr. The samples are characterized by x-ray diffraction （XRD） and SQUID magnetometer. We report improvement in exchange coupling of nonacomposite magnets by addition of thin layers of Cr at interfaces.     

Perpendicular anisotropy of Co3Pt deposited on the NiFeMo/Ru buffer

The multilayer of Ta/NiFeMo/Ru/Co₃Pt was sputter deposited on the Si (1 0 0) wafer. Using the NiFeMo buffer layer greatly enhanced the texture of Co₃Pt layer. The enhanced texture increased the perpendicular magnetic anisotropy of Co₃Pt. According to the VSM and XRD results, only the 5 nm of NiFeMo was good enough to produce the texture and perpendicular anisotropy in Co₃Pt layer. The perpendicular anisotropy was attributed to the existence of short-range-ordered HCP structure of Co₃Pt.     

Magnetic properties and microstructure of CoCr and CoCrTa thin films sputtered at high pressure on a PET substrate

Thin magnetic films (CoCr/Cr, CoCrTa/Cr and CoCrTa/Cr/SiO) are deposited by DC-magnetron sputtering on a PET substrate. The optimum sputter pressure, giving rise to the highest coercive force, is found to be around 50 mTorr. However, the deposition parameters influence the value of this optimum pressure. The addition of Ta to CoCr leads to phase segregation, resulting in CoCrTa films in which the magnetic interaction between the grains is more dipolar than in CoCr films. The magnetic interactions in CoCrTa films are less dependent on the sputter parameters than those in CoCr films. The evaporation of a seedlayer of, e.g. SiO prior to the deposition of the Cr underlayer increases the coercive force of the CoCrTa thin films, especially when the CoCrTa layer is thinner than 50 nm. This makes these films more suitable for high-density magnetic recording.     

Investigation of magnetic properties in 57Fe/Al multilayers

Fe/Al multilayer thin films prepared by ion beam sputtering, with an overall atomic concentration ratio of Fe/Al = 1:2 have been studied by x-ray diffraction spectroscopy (XRD), X-ray reflectivity (XRR) and D.C. Magnetization. These studies show the formation of Fe–Al intermetallic layers. Two magnetic regions and transition temperatures of 473 and 533 K are evident from magnetization studies. Conversion Electron Mössbauer Spectroscopy (CEMS) shows formation of off-stoichiometric Fe₃Al like phase and phases consisting of pure Fe and Fe-rich extended Fe–Al solutions.     

Layer magnetization canting in 57Fe/FeSi multilayer observed by synchrotron Mössbauer reflectometry

Synchrotron Mössbauer reflectometry and CEMS results on a [⁵⁷Fe(2.55 nm)/FeSi\break(1.57 nm)]₁₀ multilayer (ML) on a Zerodur substrate are reported. CEMS spectra are satisfactorily fitted by α‐Fe and an interface layer of random α‐(Fe, Si) alloy of 20% of the ⁵⁷Fe layer thickness on both sides of the individual Fe layers. Kerr loops show a fully compensated AF magnetic layer structure. Prompt X‐ray reflectivity curves show the structural ML Bragg peak and Kiessig oscillations corresponding to a bilayer period and total film thickness of 4.12 and 41.2 nm, respectively. Grazing incidence nuclear resonant Θ–2Θ scans and time spectra (E = 14.413 keV, λ = 0.0860 nm) were recorded in different external magnetic fields (0 < B^ext < 0.95 T) perpendicular to the scattering plane. The time integral delayed nuclear Θ–2Θ scans reveal the magnetic ML period doubling. With increasing transversal external magnetic field, the antiferromagnetic ML Bragg peak disappears due to Fe layer magnetization canting, the extent of which is calculated from the fit of the time spectra and the Θ–2Θ scans using an optical approach. In a weak external field the Fe layer magnetization directions are neither parallel with nor perpendicular to the external field. We suggest that the interlayer coupling in [Fe/FeSi]₁₀ varies with the distance from the substrate and the ML consists of two magnetically distinct regions, being of ferromagnetic character near substrate and antiferromagnetic closer to the surface.     

Effect of Xe ion irration of Fe/Sn bilayers

Films of Fe (20 nm) and Sn (40 nm) have been deposited by PVD onto Al supports and irradiated with 100 keV Xe ions at a dose of 5×10¹⁵ ions/cm². Scanning electron microscopy (SEM) shows that the irregular morphology of deposited Sn is considerably flattened by irradiation, which produces also a noticeable sputtering of Sn. Conversion electron Mössbauer spectroscopy (CEMS) reveals the formation at the interface of a variety of intermetallic phases which is enhanced by irradiation. These phases, seem to be insensible to prolonged (several months) room temperature aging. Their thermal stability under annealing at temperature up to 523 K has also been investigated.     

CEMS characterisation of Fe/high-κ oxide interfaces

The interfaces between Fe and different high-κ oxides are investigated by means of conversion electron Mössbauer spectroscopy (CEMS). Information on the magnetic ordering at the interface is obtained from the magnetic hyperfine splitting of the Mössbauer spectra. The reactivity of the Fe atoms at the interface (intermixing) is also estimated by CEMS. X-ray diffraction (XRD) and X-ray reflectivity (XRR) provide additional information on the intermixing and different phases present at the interface. CEM-spectra show the presence of both ferromagnetic and paramagnetic phases. CEMS and XRD results show that the Fe/HfO₂ and Fe/Al₂O₃ interfaces are the least reactive. The degree of intermixing between Fe and the high-κ oxide is determined by the oxide surface roughness.     

Effects of Interface Roughness on Interlayer Coupling in Fe/Cr/Fe Structure

Effect of interface roughness on antiferromagnetic coupling between Fe layers in a Fe/Cr/Fe trilayer, with Cr layer having a wedge form has been studied. All the samples have been deposited simultaneously on substrates having different roughness, thus it is being considered that there is no variation in the morphological features like grain size and grain texture of the films. Measurements have been done as a function of Cr spacer layer thickness and the peak value of antiferromagnetic coupling strength is compared among different trilayers, thus any influence of spacer layer thickness fluctuation from sample to sample has also been avoided. The samples are characterized by X-ray reflectivity (XRR) and magneto-optic Kerr effect (MOKE). XRR results show that the roughness of the substrate is not replicated at the successive interfaces. Antiferromagnetic coupling between Fe layers decreases with the increase of roughness of Fe/Cr/Fe interfaces.     

界面对Fe65Co35薄膜微结构和软磁性的影响

用不同的材料（Co₉₃Fe₇和Fe）作衬底层,利用磁控溅射法成功制备了Fe₆₅Co₃₅（主层）/衬底层结构的双层薄膜．通过X射线衍射和磁性测量发现,在不同的衬底上沉积的Fe₆₅Co₃₅薄膜的织构不同,并且（200）取向的Fe₆₅Co₃₅薄膜的面内各向异性和软磁性优于（110）取向的Fe₆₅Co_{35关键词： 65}Co₃₅薄膜')" href="#">Fe₆₅Co₃₅薄膜 衬底层 界面各向异性 软磁性     

Structure and magnetic properties of magnetron-sputtered [(Fe/Pt/Fe)/Au]n multilayer films

Using dc magnetron sputtering, Fe/Pt/Au multilayer films were prepared, and the effects of Au layer thickness and annealing temperature on structure and magnetic properties of the Fe/Pt/Au multilayer films were investigated. The as-deposited Fe/Pt/Au multilayer films have good periodic structure with composition modulation along the growth direction. The stress stored in the as-deposited films promoted the ordering of the films annealed at 400 °C. When the films were annealed at 500 °C, the thicker Au layer could restrain the order-disorder transformation region volume and lead to the decrease of the ordered volume fraction with Au layer thickness increasing.     

Ru-O/Ru hybrid type of underlayer for CoPtCr-SiO2 perpendicular recording media on flexible tape

Ru/CoPtCr-SiO₂ bilayer prepared at 4 and 26 mTorr of Ar gas pressure for the deposition of Ru and CoPtCr-SiO₂ layers, respectively, exhibits better magnetic properties suitable for perpendicular magnetic recording media when they are deposited at room temperature on a Pt seed layer prepared at 450 °C. The Ru-O seed layer fabricated by a reactive sputtering method improves the Ru (0 0 1) texture deposited on a Ru-O layer. The Ru-O/Ru hybrid type of underlayer causes the improvement of the c-axis orientation of CoPtCr crystallites in the CoPtCr-SiO₂ layer deposited on it. Fine granulation of magnetic grains in the CoPtCr-SiO₂ layer is also attained when they are deposited on the Aramid type of flexible tape substrates.     

Ag/Fe/Ag 纳米颗粒膜磁特性和微结构

"利用对靶磁控溅射法制备了一系列Ag/Fe/Ag纳米薄膜,沉积态样品Fe层厚度固定为35 nm,Ag层厚度为1、2、3、4、5 nm．随后对沉积态样品进行了退火处理,退火温度分别为200、300、400、500、600 ℃ , 退火30 min． 利用VSM测量了样品的磁特性, 利用SPM观察样品表面形貌和磁畴结构,并且利用XRD分析了样品的晶体结构．研究结果表明,沉积态样品随Ag层厚度的变化,垂直和平行膜面矫顽力均先增加后减小．当Ag层厚度为3 nm时,垂直膜面矫顽力最大约为260 Oe,样品颗粒分布均     

Magnetic and magnetooptical properties of Fe/Pt and Fe/Pt/Fe thin-film magnetic structures

Results of a study of magnetic and magnetooptical properties of Fe/Pt double-layer and Fe/Pt/Fe three-layer thin-film magnetic structures are presented. A strong effect of the Pt layer on magnetic properties of the studied samples was revealed. It was established that the saturation field of three-layer magnetic structures has an oscillating magnitude with varying Pt layer thickness, and the oscillation period is a function of the Fe layer thickness. The data obtained are explained by the presence of exchange interaction between the Fe layers via the Pt layer. A strong effect of Pt on spectral dependences of the equatorial Kerr effect in the thin-film structures under study is revealed.     

Structure of PtFe/Fe double-period multilayers investigated by X-ray diffraction, reflectivity, diffuse scattering and TEM

Double-period [(Pt 1.7 nm/Fe 0.9 nm)₅Fe(t_Fe2)]₈ and [(Pt 1.8 nm/Fe 0.6 nm)₅Fe(t_Fe2)]₈ multilayers with different thickness t_Fe2 (between 0.23 and 4.32 nm) of the additional Fe layers, prepared by combinatorial sputter deposition, show differences in the mosaic spread and the vertical interfacial roughness when deposited on native or thermally oxidised Si wafers. Simulations of the wide-angle X-ray scattering intensities revealed the presence of interdiffusion in the (Pt/Fe)₅ bilayers and systematic variations of the grain sizes, perpendicular to the film surface, as well as the rms variations of the two superlattice periods with the total film thickness. A comparison of ω-rocking scans shows an increase of the correlated vertical roughness of the (Pt/Fe)₅ multilayers with the total multilayer thickness.     

Properties of barium hexa-ferrite thin films dependent on sputtering pressure

M-type barium ferrite thin films were deposited onto sapphire (0 0 l) substrates by radio frequency magnetron sputtering. An ultra-thin layer about 20 nm was deposited and annealed before continuous deposition of the films up to 500 nm under different sputtering pressures: 0.2, 0.5, 0.8 and 1.0 Pa, respectively. It was found that the atomic ratios of Fe to Ba increased from 9.3 to 15.0 with the increase of the pressure. The films sputtered at all pressures have c-axis normal to the film plane by a four circle X-ray diffractometer, which is an improvement of the films directly sputtered on the substrate. Needle-like grains were formed on the surface of the films under higher sputter pressure with bubble domains, which is originated from high magnetocrystalline anisotropy of the film. Magnetic hysteresis loops recorded by vibrating sample magnetometer agree with them, where in-plane and out-of-plane loops of the samples prepared under high sputtering pressures are quite different, while they are almost identical of the samples under low pressures. The influence of the sputtering pressure was understood by that with the increase of the pressure, resputtering of the films was increased. Nucleation with c-axis normal to the film plane was deteriorated. Thus samples prepared under high pressure have more needle-like crystallites which have c-axis parallel to the film plane.     

The effect of thickness and annealing condition on the microstructure and magnetic properties of Fe/Pt multilayer thin films

[Fe(0.5 nm)/Pt(0.5 nm)]₄₀, [Fe(1 nm)/Pt(1.5 nm)]₂₀ and [Fe(3 nm)/Pt(3 nm)]₁₀ multilayer were prepared by DC magnetron sputtering. By conventional furnace annealing (CA) at 270–600 °C for various time, all of the films still remained the disordered structure with the soft magnetic phase. By rapid thermal annealing (RTA) at 500 °C for various time, we obtained the [Fe(1 nm)/Pt(1.5 nm)]₂₀ and [Fe(3 nm)/Pt(3 nm)]₁₀ films with L1₂ ordered FePt₃ phase which was almost ferromagnetic at room temperature. However, the [Fe(0.5 nm)/Pt(0.5 nm)]₄₀ films was still disordered state even under RTA. Compared with CA, RTA exposed an outstanding effect on accelerating the phase transition when the film thickness is over [Fe(0.5 nm)/Pt(0.5 nm)]₄₀.     

Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators

This study investigates high-performance ZnO piezoelectric films used for thin film bulk acoustic resonators (TFBAR). The ZnO piezoelectric film was deposited on a Pt/Ti electrode using an RF magnetron sputter by a two-step method at room temperature. The Pt/Ti electrode was deposited by a DC sputtering system, on which, ZnO piezoelectric films were deposited in one step and in two steps to minimize roughness in the first step and produce the preferred orientation in the second. Both field-emission scanning electron microscopy (FESEM) and atom force microscopy (AFM) revealed that ZnO piezoelectric film deposited by two-step sputtering exhibited favorable characteristics, such as a rigidly precise surface structure with surface roughness of 7.37 nm, even better than in one-step sputtering. Examining the ZnO thin film by X-ray diffraction (XRD) showed a much higher c-axis-preferring orientation than in one-step sputtering. The reflection coefficient of the resonator device was measured using an HP8720 network analyzer. The frequency response of the FBAR device exhibited a return loss of -25 dB at a resonant frequency of 2212 MHz with a high coupling coefficient of 6.7%. PACS 68.55.Jk; 43.35.Ns; 81.15.-z