Repeatability characteristics of laser percussion drilling of stainless-steel sheets

An analysis on the repeatability of a laser percussion drilling process is conducted using a flash lamp pumped Nd:YAG laser on 2 mm thick stainless-steel sheets. Laser drilling process is finding increasingly widespread application in the industry and has continually attracted new interests to the industry in recent years. However, the inherent problem of hole geometry repeatability associated with laser percussion drilling is likely to limit the extent of industrial applications of the process. The characteristic of melt ejection is found to be dependent on the parameter setting and is shown to have a significant influence on entrance hole geometry and hence repeatability. The relationship between the percentage standard deviation of entrance hole diameter and the operating parameters is established, and varies between 1.8% and 5.6% in the operating range under this study.     

The influence of temporal pulse train modulation during laser percussion drilling

The temporal pulse train modulation during laser percussion drilling was found to effect significant changes to the material ejection processes. In particular, distinct differences in the material ejection processes have been observed between a temporal pulse train shaping technique termed as sequential pulse delivery pattern control (SPDPC) and the normal delivery pattern (NDP), wherein the parameters of successive laser pulses were constant. Due to the reduced upward material removal fractions in SPDPC drilling, the spatter deposition area was reduced from approximately 6.7 to 2.7 mm². In addition, the melt layer thicknesses at the hole bottom were significantly increased from 11–61 to 18–369 μm. Such changes were identified as being due to the low laser pulse intensities before beam breakthrough associated with the SPDPC method. It was observed that the use of the linearly increasing SPDPC method increased the downward material removal fractions, from 20% to 28% observed in NDP drilling, to 34%–39%. Such an increase in the downward material ejection mechanism in SPDPC drilling was identified as being primarily due to the pointed blind-hole profile generated before the onset of beam breakthrough. The work has shown that modulating the entire pulse train in laser percussion drilling could control the material ejection processes. Furthermore, the fundamental elements of the SPDPC technique are given in terms of the rate of energy deposition and total pulse train energy.     

An investigation into melt flow dynamics during repetitive pulsed laser drilling of transparent media

This paper presents an investigation into the dynamics of repetitive pulsed laser drilling of a visually transparent media using a CO₂ laser source. This enabled the use of a high-speed imaging system for observing, in real time, the behaviour of the drilling process in the laser drilled cavity of 1.5 mm diameter holes of up to 18.5 mm in depth. The work revealed that the instantaneous drilling velocity within each laser pulse can vary considerably from the average drilling velocity as a result of the non-uniform temporal pulse shape and the oscillation of the melt ejection rate. During beam breakthrough, both upward and downward melt ejections were observed to occur inside the drilled hole for a short period of time, after which the material was ejected through the exit end of the holes. It has been shown in this work that the downward melt flow velocity increases with hole depth for a positively tapered hole (from 0.09 to 1.43 m/s) and decreases with hole depth for a negatively tapered hole geometry (from 0.4 to 0.1 m/s), as a result of the change in the assist gas velocity inside the drilled hole with respect to the hole taper geometry. The mechanisms of forming the positively and negatively tapered holes in the transparent media have been correlated with the hole geometry and melt flow velocity. The work has demonstrated a new method of studying the melt dynamics in laser drilling.     

Multi-performance characterization analysis of diameter and taper angle on alumina ceramic via using pulsed ultraviolet laser percussion drilling method

This paper presents the optimal conditions for the ultraviolet laser percussion drilling of alumina materials intended for use in heat sinks. The Taguchi method and grey relational analysis, along with the consideration of multiple quality characteristics, were applied for determining the optimal parameters. The entrance diameter and taper angle of the drilled hole were affected by the material processing parameters, including laser power, pulse duration, focal plane position, and number of pulses. The Taguchi method and grey relational analysis were used for assessing the effects of the operational parameters on multiple performance characteristics. Nine experiments based on an orthogonal array were performed. According to the results, the optimal process parameters were as follows: laser energy density, 3.82 J/cm²; focal plane position, 0.1 mm; number of pulses, 20 shots; and single pulse duration, 3 ms. Analysis of the grey relational grade revealed that the focal plane position was the most dominant parameter.     

Influence of microsupersonic gas jets on nanosecond laser percussion drilling

This paper reports on etching rates and hole quality for nanosecond laser percussion drilling of 200-μm thick 316L stainless steel performed with micro supersonic gas jets. The assist-gas jets were produced using nozzles of 200, 300 and 500 μm nominal throat diameters. Air and oxygen were used separately for the process gas in the drilling trials and the drilling performance was compared to drilling in ambient conditions. The highest etch rate of 1.2 μm per pulse was obtained in the ambient atmosphere condition, but this was reduced by about 50% with assist-air jets from the 200 μm nozzle. Increasing the jet diameter and/or using oxygen assist gas also decreased the etching rate and increased the hole diameter. The 200 μm nozzle using air-assist jets produced the least amount of recast and gave the best compromise for etching rate. A combination of plasma shielding and different gas dynamic conditions inside the holes and at the surface are correlated to the observations of different drilling rates and hole characteristics.     

A comprehensive study of the long pulse Nd:YAG laser drilling of multi-layer carbon fibre composites

The results of an extensive experimental study of the free running Nd:YAG laser drilling of a multi-layer carbon fibre composite, where adjacent layers have differently orientated fibres, are reported. For holes drilled with the laser operating in fixed-Q mode at 1064 nm, parallel sections of blind holes illustrating discontinuities in the hole size along a given section direction will be shown to occur at the interface between adjacent layers. An explanation for this effect is proposed. Detailed single pulse drilling characteristics will be presented illustrating the exit hole diameter as a function of pulse energy and material thickness. These characteristics illustrate a ‘stable' drilling regime in which the exit hole diameters are least sensitive to changes in pulse energy or material thickness and a less ‘stable' regime in which they are more strongly dependent on these parameters. Drilling characteristics will be given for two different beam qualities, illustrating the greater drilling depth and reduced hole size achievable with an improved beam quality. Finally holes drilled through a 2 mm thick sample of material with multiple pulses are considered. Size distribution curves for entrance and exit holes will be presented. The total energy required (number of pulses × pulse energy) to drill through 2 mm thick material will be reported as a function of pulse energy in stationary air and argon atmospheres and in a partial vacuum, illustrating a threshold energy which is dependent upon the drilling atmosphere. The threshold energies will be discussed with reference to plasma formation and the reactivity of the drilling atmosphere.     

钛合金纳秒激光打孔数值模拟和实验研究

为了描述纳秒激光对钛合金打孔过程中孔的形貌及温度场的变化规律,建立激光打孔的物理模型,利用ANSYS中APDL语言进行编程,对温度场进行仿真分析,并利用单元生死技术模拟孔形貌的变化过程。从有限元数值模拟和实验两方面综合分析比较了激光工艺参数(脉冲能量和脉冲数量)对打孔质量(孔深和孔径)的影响,系统论述了钛合金纳秒激光打孔的一般规律,以达到工艺参数优化,提高打孔质量的目的。     

Evolution of hole depth and shape in ultrashort pulse deep drilling in silicon

We report on the temporal evolution of the percussion drilling process in deep laser drilling. Ultrashort laser pulses at 1030 nm and a duration of 8 ps were used to machine silicon while simultaneously imaging the silhouette of the hole using an illumination wavelength above the band edge. We investigate the influence of the processing parameters fluence and pulse energy on the depth and shape of the hole demonstrating different phases of the drilling process. In the first phase, a tapered hole is formed with highly reproducible shape and depth. In the following, the evolution of the hole shape is irregular and imperfections like bulges, changes of the drilling direction and the formation of multiple hole ends occur. In the final phase, the maximum depth stays constant while the volume still increases due to enlargement of the hole diameter and the possible formation of multiple hole ends. Deviations from the ideal hole shape occur primarily in the lower part of the hole. Their extent can be reduced by increasing the amount of applied pulse energy. Moreover, the pulse energy is chiefly determining the maximum achievable hole depth, which is largely independent of the focusing conditions and corresponding fluence.     

Shadowgraphic imaging of material removal during laser drilling with a long pulse excimer laser

After the development of a novel XeCl excimer laser with a nearly diffraction-limited beam and 175 ns pulse length, research was done on different industrial applications of this laser. Hole drilling, one of these applications, was studied extensively. A better understanding of the drilling process is necessary to optimise the drilling efficiency and to control the quality of the holes. A shadowgraphic imaging technique was used for studying the removal of material from the hole and the absorption of the laser beam by this removed material. Images were made at successive times both during and after the laser pulse.In drilling of thin foils, it was shown that the material was ejected mainly after the laser pulse. A comparison of different materials showed that the drilling process should be optimised for each material independently. Furthermore, the plume was found to be not fully transparent for processing materials with a strong absorption line at or near the laser wavelength. The correlation between material and drilling speed suggests improved energy transfer and improved melt ejection for the materials with this absorption. PACS 42.62.Cf; 52.38.Dx; 52.38.Mf     

不同脉冲激光波形在打孔实验上的比较与分析

为了获得高质量小孔,克服单脉冲激光打孔的不足,设计了一种能够产生多脉冲激光波形的激光器电源.并在1mm厚的薄钢片上得到直径小于1mm的小孔.多脉冲打孔理论分析表明,多脉冲激光打孔不但减少了熔融物和等离子体的产生,而且降低了激光打孔对高能量的要求,获得的小孔质量优于单脉冲激光打孔.另外脉冲宽度和脉冲间距的选择对激光小孔加工质量起决定性作用,在加工高质量孔的时候,应该选用较短的激光脉冲宽度.实验表明,利用三脉冲激光输出波形打孔所获得的小孔质量要优于单脉冲激光打孔效果,有效脉冲平均能量为350mJ,宽度为100μs,脉冲间距为100μs.     

Dynamics of laser hole drilling with nanosecond periodically pulsed laser

Results are presented on the dynamics of the laser drilling process for a single hole using a periodically pulsed nanosecond laser with a repetition rate up to 60 kHz. The intensity dependence of drilling velocity was determined by measuring the delay time between the beginning of exposure and the moment when the hole opens. The hole collapse phenomenon was observed in our experiments. The competition process between material ejection and the flow of the liquid phase into the ejected area is supposed to be responsible for the hole collapse.     

Laser pulse optimization for practical laser drilling

Laser drilling is a common commercially developed technique for material processing. From the application viewpoint, it is the end product for a laser system, for instance a drilled hole, that matters. Laser pulse profile is the most important parameter controlling the laser hole drilling process. An efficient and practical method is therefore needed to develop a relationship between the pulse parameters and the depth of hole produced in a known material. In the present study, dimensionless groups are developed to optimize laser pulse parameters to give information on workpiece materials. Consequently, an optimal laser pulse for drilling an aluminum workpiece is predicted.     

Formation and Characteristics of Through Holes with Picosecond-Laser Helical Drilling on Alloy Material

Precision drilling can improve the microhole quality by yielding a reduced recast layer thickness and no heat-affected zone. We evaluate the quality of the helical drilled holes, e.g., the recast layer, microcracks, and circularity by scanning electron microscopy. We investigate the overlap rate of the laser beam and find its influence on the efficiency of through-hole machining. The microhole entrance, exit, and side walls are smooth, without an accumulation of spattering material and the formation of a recast layer and microcracks. Optimum parameters for drilling through holes on alloy material GH2132 are a thickness of 500 μm, a laser fluence of 3.06 · 10^?2 J/mm², a pulse repetition rate of 100 kHz, and a helical speed of 60 rev/s. The tapering phenomenon can be avoided by using a helical system with a rotating stage, and the hole circularity is fairly good. Picosecond laser helical drilling can be effective for manufacturing microholes with a high quality. The development of high-power picosecond laser would promote picosecond laser drilling with future industrial relevance.     

Femtosecond laser drilling of alumina ceramic substrates

In the paper, the result on femtosecond laser drilling of alumina ceramic substrate was reported. The effects of various laser parameters such as different focus position, traverse speed, drilling pattern, pausing time, etc. on the drilled hole quality in terms of surface finish, heat affected zone (HAZ), hole circularity, debris, microcracks were studied. The quality of laser-drilled holes on alumina ceramic substrates was evaluated with optical microscope, SEM/EDX, and X-ray μ-CT analysis. The optimum drilling conditions were identified. High-quality laser-drilled holes on alumina ceramic substrates were demonstrated. The developed process has potential application in manufacturing of alumina substrate based electronic devices.     

几种常见波段脉冲激光峰值功率综合测试技术研究

针对几种常见波段脉冲激光发射机所发出的脉冲激光波长、功率和宽度等特点，进行了激光峰值功率参数的综合测试技术研究。采用多波段光电探测和集成化组合式光学设计及先进的电路设计技术，并利用自行开发的信号通道和量程及采样频率可控的通用测试平台，对不同波长，选择了相应灵敏度高的探测器；对不同功率量程范围选择了合适的衰减片；并对宽度较窄的激光脉冲设计了合适的展宽放大和快速放电电路。实验结果表明：这项技术是实现多波段脉冲激光峰值功率综合测试的有效方法，具有良好的推广应用前景。     

Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects

Machining of microvias in 100?C50???m thick CMZ glass using an excimer laser (248?nm) was investigated. The effect of various laser process parameters: pulse energy, repetition rate, irradiation time were studied to optimise the microvia drilling process and a process window was identified. Through-hole drilling of 100???m diameter (entry hole) microvias was achieved at a fluence (energy density) as low as 2.3?J/cm² with an irradiation time of 30?C40?s at a repetition rate of 20?Hz, giving a taper angle between 22?C24^° relative to the vertical. However, by increasing the fluence to 4.5?J/cm², this reduced the machining time to 5?C10?s and taper angle to 14^°, giving an exit hole diameter of around 45?C50???m. With 50???m thick glass, it was possible to machine through-hole microvias with smaller entry hole diameters down to 40???m. Machined microvias were characterised to investigate debris, recast layer and microcrack formation. Debris and recast layer around the machined features was minimised by using a protective photoresist layer coating on the glass and through appropriate operating parameter selection. Microcracks along the sidewalls of the microvias could not be avoided, but their severity depended on the laser machining parameters used.     

Analysis of laser drilled deep holes in stainless steel by superposed pulsed Nd:YAG laser radiation

Deep drilling of through holes in stainless steel (1.4301, sample thicknesses 5, 8 and 10 mm) has been performed with the superposed radiation of two pulsed Nd:YAG lasers with pulse duration of 0.5 ms superposed by 17 ns pulses. The drilling efficiency is improved by the spatially and temporally superposed radiation of the two lasers. The enhanced drilling speed and the larger reproducibility of the drilling time are explained by a modified formation of closures in the hole during percussion drilling which are recorded by high-speed photography. The metallographic hole analysis exhibits high-temperature oxidation marks. The development of these marks is described by a ray tracing of the incident beam within the hole and the resulting intensity distribution at the hole wall.     

Controlled process for polymer micromachining using designed pulse trains of a UV solid state laser

A flexible workstation equipped with a solid state laser operating at 266 nm wavelength was used to machine holes in polyethylene terephthalate, polyimide and polycarbonate. An optical pulse picker was employed to reduce the high repetition rates of the laser, while a breakthrough sensor was used to avoid over-drilling of through holes. For each material, different repetition rates and designed pulse trains were tested to improve feature quality and process efficiency. Although the three polymers had very different reactions at this wavelength they all showed an improvement in feature quality with decreasing repetition rate due to a reduction in thermal effects. Up to 10 kHz the average depth per pulse remained unchanged and afterwards a slight increase was observed but this was accompanied by large uncertainties. Bursts of pulses at 40 kHz inserted inside the low repetition rate pulse train reduced the drilling time and the amount of debris redeposited without affecting the feature quality. It was found that a number of cleaning pulses after perforation eliminates the heat affected zone around exits. Holes with entrance diameters below 20 μm and exit diameters as small as 2 μm were obtained with high repeatability.     

High speed drilling by YAG laser

A high-quality laser beam has been obtained using a telescope inserted into a laser cavity. Based on this cavity structure, a high speed laser drilling machine, which produces ruby bearings using a single pulse, has been built. The drilling speed is 16 pieces s^-1 and the yield is 98.8% with a drilling diameter of 0.04–0.05 ± 0.005 mm, and bearing depth of 0.26–0.40 mm.     

YAG laser percussion drilling of a functional multi-layer thin plate

An Au-coated Fe–Ni alloy thin plate was laser drilled by a pulsed Nd:YAG laser. The influences of laser parameters on the diameter of perforation, the outer diameter of crater and the roundness of the perforation have been investigated by employing scanning electron microscopy. The diameter of perforation increases gradually with an increase in pulse width from 0.3 to 8 ms at the fixed average laser power and frequency, and increases with an increase in average laser power from 10 to 25 W at the fixed pulse width and frequency. Some craters are found around the perforations because of the heat affecting of laser beam to the non-irradiated zone. The diametric difference of the perforation between the incident and the effluent sides is very small under the shortest pulse width of 0.3 ms. Good roundness of the perforation can be achieved at either the lowest pulse width or the lowest laser power.