Femtosecond laser drilling of alumina ceramic substrates |
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Authors: | X C Wang H Y Zheng P L Chu J L Tan K M Teh T Liu Bryden C Y Ang G H Tay |
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Institution: | (1) Department of Mechanical Engineering, Curtin University of Technology, U1987, Perth, WA, 6845, Australia |
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Abstract: | In the paper, the result on femtosecond laser drilling of alumina ceramic substrate was reported. The effects of various laser
parameters such as different focus position, traverse speed, drilling pattern, pausing time, etc. on the drilled hole quality
in terms of surface finish, heat affected zone (HAZ), hole circularity, debris, microcracks were studied. The quality of laser-drilled
holes on alumina ceramic substrates was evaluated with optical microscope, SEM/EDX, and X-ray μ-CT analysis. The optimum drilling
conditions were identified. High-quality laser-drilled holes on alumina ceramic substrates were demonstrated. The developed
process has potential application in manufacturing of alumina substrate based electronic devices. |
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