三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置,以氩气作为工作气体,在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量,并对放电脉冲和放电功率进行了研究;利用发射光谱法对射流的等离子体参量进行了空间分辨测量,并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内,电流脉冲的个数和幅值呈现非对称的变化趋势;随着外加电压的增加,3种结构电极的放电功率从1.7 W逐渐增加到6.0 W;在相同的外加电压情况下,电极面积越小,等离子体射流的长度越长;3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间,并且随着气体流量的增加,各位置的电子激发温度总体上呈下降趋势,而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响;射流长度与电极面积有关;气体流量对电子激发温度和电子密度的空间分布起重要作用。     

Detailed comparison between probe density measurements of glow discharge in argon and in helium

In this article we shall look a bit more closely at some of the fundamental plasma parameters obtained by a cylindrical Langmuir probe within low-pressure electrical gas discharge plasma. The presented measurements were made in argon and in helium glow discharge plasmas. We are mainly concerned with the densities of the charged particles (electrons and ions) within the plasma and the effect of the discharge conditions upon them. The electron density is calculated from the electron current at the space potential and from the integration over the EEDF. The ion density is calculated by using the OML collisionless theory. The parameterization of Laframboise's numerical results is also used for the ion density calculation. In the range of our experimental conditions the results of plasma density, for both gases, tend to show that the ion densities measured with the OML and Laframboise theories exceeds the measured electron densities. The results also show that the plasma electron and ion densities increased with both discharge power and gas pressure.     

Behaviour of fully ionized seed plasma excited by microwave

Nonequilibrium plasmas with cesium metal vapor ionization in helium and argon gases at moderate pressures are excited with microwave power. The structures and behaviour of the seeded plasmas are experimentally examined, particularly under the condition of Full seed (cesium atoms) ionization. By cesium seeding, the minimum power sustaining the plasma is reduced markedly, and both a broad plasma observed in pure helium and unsteady filament-like plasmas in pure argon change to the steady and broad plasma locating close to the inner surface of a discharge tube, it is revealed from the electron temperature measurements that the plasma can be in the regime of full seed ionization for suitable microwave powers, where the electron density is kept almost constant. The thickness of the fully ionized seed (FIS) plasma decreases with increasing the mole fraction of cesium vapor, and is almost independent of noble gas pressure. The thickness almost coincides with the skin depth determined from the electrical conductivity almost uniform in the FIS plasma. These facts suggest that the FIS plasma will be easily produced and maintained as long as the microwave power is consumed to the electron heating     

Measurement of neutral gas temperature in inductively coupled plasmas

Dependence of the neutral gas temperature on the gas pressure and discharge power in an inductively coupled plasma source has been investigated using optical emission spectroscopy. Both nitrogen and argon plasmas have been studied separately. In the case of argon plasma, about 5% nitrogen was added to the total gas flow as an actinometer. The maximum temperature was found to be as high as 1850 K at 1 Torr working pressure and 600 W radiofrequency power. The temperature increases almost linearly with the logarithm of the gas pressure, but changes only slightly with the discharge power in the range of 100–600 W. In a nitrogen plasma, a sudden increase in the neutral gas temperature occurs when the gas pressure is increased at a given discharge power. This suggests a discharge-mode transition from the H-mode (high plasma density) to the E-mode (low plasma density). In the H-mode, the gas temperature is proportional to the logarithm of the gas pressure, as in the argon plasma. However, the gas temperature increases almost linearly with the discharge power, which is in contrast to the case of argon plasma. The electron density in the nitrogen plasma is about 10% of that in the argon plasma. This may explain the observation that the nitrogen neutral temperature is always lower than the argon neutral temperature under the same discharge power and gas pressure.     

流动氩气介质阻挡放电特性及振动温度研究

采用双水电极介质阻挡放电装置,在流动氩气中通过改变气隙间距、驱动电源频率和气体流量等研究放电电学特性和振动温度的变化。电学测量结果发现如果固定其他实验条件而只改变某一参数,小气隙间距放电的电流峰值和功率比大气隙间距的高。同样,增大驱动电源频率也能够使放电的电流峰值和功率增加,而增加气体流量使得放电电流峰值和功率减小。最后利用光谱学方法,通过对放电发射光谱中氮分子振动带系的分析,发现振动温度随着放电气隙间距、电源频率和气体流量的变化关系与放电的电流峰值和功率的变化关系基本一致。这些结果对流动气体中大气压介质阻挡放电的应用具有重要意义。     

Electrical characteristics of helicon wave plasmas

The external electrical characteristics of helicon wave plasmas have been studied over a wide range of magnetic fields, radio frequency (RF) power, frequencies, and Ar gas pressures. External parameters, such as antenna voltage, current, and phase shifts, and internal parameters, such as electron density, are measured. The equivalent discharge resistance, reactance, and power transfer efficiency are calculated through these measurements. The characteristics of helicon mode is compared with inductively coupled plasma (ICP) and low mode. The power efficiency of the helicon mode is better than that of other modes. Consequently, electron density of helicon mode is much higher than that of other modes. This means the existence of a mechanism where electrons are very efficiently accelerated by the electric field of the antenna in the helicon mode. The power efficiency of helicon mode is higher at lower RF frequency and at optimum gas pressure than that of other modes     

大气压氩直流微放电光谱研究

微空心阴极放电或微放电是一种能够实现高气压下放电的有效方法。利用不锈钢空心针作阴极,不锈钢网作阳极,进行了大气压氩直流微放电实验研究。测量了大气压氩微放电光谱,发现氩气的发 射谱线主要集中在690～860 nm范围,且全部为氩原子4p—4s的跃迁。实验研究了不同放电电流、气体压强、气体流量与谱线强度之间的关系,发现谱线强度随放电电流、气体流量增加均增加,而谱线强 度随压强变化呈现不同特征：谱线强度随压强的增加先增加后降低,在13.3 kPa时强度最大。此外,选用跃迁波长为763.51和772.42 nm的两条光谱线,利用发射谱线强度比值法测量了氩气微放电等离子 体的电子激发温度。结果显示,其电子激发温度处于2 000～2 800 K之间,且随放电电流的增加而增加,随气体压强和气体流量的增加而降低。     

大气压下绝缘毛细管内等离子体放电及其特性研究

在石英毛细管内利用两个边缘锋利的中空针型电极间的放电形成了63 cm长的大气压弧光等离子体.通过记录放电图片和测量电流-电压特征波形及伏安特性曲线的方法对管内等离子体从反常辉光状态过渡至超长弧光状态的过程做了细致的研究,发现管内等离子体在弧光状态下的电子密度不低于10¹⁴ cm^-3.另外,还进一步考察了两电极的间距和电源工作频率对放电伏安特性的影响以及通过发射光谱法测得的等离子体气体温度随外加电压的变化规律.当活性气体(氧气)按一定比例混合到氩等离子体中时,通过 关键词： 大气压等离子体 反常辉光放电 弧光放电 发射光谱     

Untersuchungen über die thermische Belastbarkeit und die Form von Düsen zur Führung von Hochstromplasmen

The electrical and thermal limitings of nozzle are calculated from electrical dates of argon arcs for guiding and constricting high current plasmas. The electrical field strength in nozzles resulted from the arc characteristics. Hence it follows the maximum nozzle length as a function of nozzle diameter and amperage. From the arc power converted in the nozzle the power density resulted at the nozzle wall. By use of known material functions of nozzle material the needed wall thicknes of nozzle and quantities and velocities of cooling water are calculable. The experimental verification of the results gives the following relation between the minimum nozzle diameter and amperage for argon arcs using the best nozzle cooling d [cm] = 10^?3 I [A]. With superposed gas flow values are riched up to d [cm] = 0,5 · 10^?3 I [A]. The attainable current density is 6 · 10³ A cm^?2 without superposed gas flow and 6 · 10⁴ A cm^?2 with superposed gas flow. New nozzle typs for plasma technological uses ensue from the results of investigations.     

Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge

In this paper, atmospheric pressure glow discharges (APGD) in argon generated in parallel plate dielectric barrier discharge system is investigated by means of electrical and optical measurements. Using a high voltage (0–20 kV) power supply operating at 10–30 kHz, homogeneous and steady APGD has been observed between the electrodes with gap spacing from 0.5 mm to 2 mm and with a dielectric barrier of thickness 2 mm while argon gas is fed at a controlled flow rate of 1 l/min. The electron temperature and electron density of the plasma are determined by means of optical emission spectroscopy. Our results show that the electron density of the discharge obtained is of the order of 10¹⁶ cm^???3 while the electron temperature is estimated to be 0.65 eV. The important result is that electron density determined from the line intensity ratio method and stark broadening method are in very good agreement. The Lissajous figure is used to estimate the energy deposited to the glow discharge. It is found that the energy deposited to the discharge is in the range of 20 to 25 μJ with a discharge voltage of 1.85 kV. The energy deposited to the discharge is observed to be higher at smaller gas spacing. The glow discharge plasma is tested to be effective in reducing the hydrophobicity of polyethylene film significantly.     

Emission characteristics and parameters of gas-discharge plasma in mixtures of heavy inert gases with chlorine

The ultraviolet (UV) radiation from longitudinal glow-discharge plasma in three- and four-component mixtures of argon, krypton, and xenon with chlorine has been investigated. The total radiation of Ar, Kr, and Xe monochlorides and chlorine molecules in the spectral range 170–310 nm has been optimized with respect to the composition and the pressure of gas mixtures, as well as the discharge current. The mean output power, the electric power of discharge, and the efficiency of a broadband low-pressure exciplex halogen lamp have been determined. Parameters of the glow discharge in Ar-Kr-Cl₂ and Kr-Xe-Cl₂ mixtures have been simulated numerically. The electron energy distribution functions have been determined through the solution of the Boltzmann kinetic equation. These functions have been used to calculate the plasma parameters, namely, electron transfer characteristics, specific losses of discharge power for electronic processes, and ionization and attachment coefficients.     

A Calculation of the Electron Temperature of Complex Plasma of Noble Gases Mixture in CCRF Discharge

In this paper the results of studying of the electron temperature of buffer and complex plasmas in mixtures of noble gases (helium + argon) in capacitively coupled radiofrequency (CCRF) discharge are presented. The optical properties of dusty plasma in argon, helium and their mixtures have been studied using optical diagnostic methods. Based on spectral lines of plasma forming gases, the dependence of the electron temperature on gas pressure and discharge power has been determined. The axial distribution of electron temperature in the interelectrode gap has been measured. Measurements have been made using an RF compensated electric probe. The comparison of the experimental results shows that admixture of a small amount of argon to helium leads to a decrease in the electron temperature of buffer plasma. The presence of dust particles in the plasma causes an increase in the electron temperature. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Computational Model of Thermal‐Fluid Flow in a Radio‐Frequency Plasma Torch

The paper aims to clarify the modelling results concerning the heat transfer and fluid flow in a radio‐frequency plasma torch with argon at atmospheric pressure. Fluid numerical simulation requires the coupling of magnetohydrodynamics (MHD) and thermal phenomena. This model combines Navier–Stokes equations with the Maxwell's equations for compressible fluid and electromagnetic phenomena successively. A numerical formulation based on the finite element method is used. In this study, fluid flow and temperature equations are simultaneously solved (direct method, instead of using the indirect method) using a finite elements method (FEM) for optically thin argon plasmas under the assumptions of local thermodynamic equilibrium (LTE) and laminar flow. Appropriate boundary conditions are given, and nonlinear parameters such as the thermal and electrical conductivity of the gas and input power used in the simulation are detailed. We have found that the source of power is located on the torch wall in this type of inductive discharge. The center can be heated by conduction and convection via electromagnetic phenomena (power loss and Lorentz force). (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Power Consideration for Pulsed Discharges in Potassium Seeded Argon

Minimization of energy consumed in plasma generation is critical for applications, in which a large volume of plasmas is needed. We suggest that a high electron density atmospheric pressure plasmas can be generated by pulsed discharges in potassium seeded argon at an elevated temperature with a very small power input. The ionization efficiency and power budget of pulsed discharges in such plasmas are analytically studied. The results show that ionization efficiency of argon, especially at small reduced electric field E/N （the ratio of the electric field to the gas number density）, is improved effectively in the presence of small amount of potassium additives. Power input of pulsed discharge to sustain a prescribed average level of ionization in potassium seeded argon is three orders of magnitude lower than that in pure argon. Further, unlike in pure argon, it is found that very short high-voltage pulses with very high repetition rates are unnecessary in potassium seeded argon. A pulse with lOOns of pulse duration, 5kHz of repetition rate, and 2Td （1 Td = 1 × 10^-21 Vm^2） of E/N is enough to sustain an electron density of 10^19 m^-3 in 1 arm 1500K Ar＋0.1% K mixture, with a very small power input of about 0.08 × 10^4 W/m^3.     

大气压微等离子体射流电子密度研究

采用微空心阴极放电装置,利用光学方法和电学方法研究了大气压流动Ar和N₂混合气体中产生的微等离子体射流特性。研究发现,随着电源输入功率增大到一定数值,微空心阴极装置中两个电极间气体发生击穿,通过击穿气隙气体的流动会沿着气流方向产生最大为4 mm的等离子体射流。放电电流为准连续的脉冲放电形式,其中放电电流脉冲宽度约为0.1 μs。分别利用爱因斯坦方程和等离子体发射光谱中谱线的Stark展宽方法计算了电子密度。结果发现,2种计算方法得出的微等离子体射流的电子密度均在1015·cm-3的量级。研究还发现,功率对微等离子体射流电子密度影响不大。利用气体击穿理论,对以上结论进行了定性分析。     

On the Role of Capacitance Determination Accuracy for the Electrical Characterization of Pulsed Driven Dielectric Barrier Discharges

A dielectric barrier discharge (DBD) of coaxial geometry has been investigated. The discharge cell was filled by 100 mbar of argon and driven by positive square voltage pulses with a rise time of 20 ns and 75 ns. The internal discharge characteristics such as the discharge current, the gas gap voltage, the instantaneous power and energy have been determined from measured current and voltage waveforms. The peculiarities of the experimental evaluation of the discharge parameters are discussed in detail. Special attention is paid to the accurate experimental determination of the key capacitance values of the DBD, namely the capacitance of the reactor cell C_cell and the capacitance of the dielectric barriers C_d. The influence of the capacitance value accuracy on precision of electrical characterization is demonstrated and it is shown that a small uncertainty in the C_d value leads to large errors in the evaluation of the gas gap voltage. Nevertheless, the obtained accuracy of the capacitance values allows the reliable comparison of the electrical DBD parameters. These are sensitive to the mode of discharge excitation. The shortening of the voltage rise time leads to the increase of the total and instantaneous energy as well as the peak power dissipated into the discharge. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

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The generation and control of microwave electron cyclotron resonance (ECR) plasma cathode electron beam is studied experimentally. A complete set of discharge, electron beam extraction, focusing and measuring system was set up. The characteristics and performance of microwave ECR plasmas as electron beam extraction source were studied by measuring the current of water cooling target and the beam spot size on the target. Experimental results indicated that both microwave input power and accelerating voltage are conducive to improving electron beam current. The influence of gas pressure on the electron beam current was complex. With the increase of gas pressure, the electron beam current is characterized by decreasing first and then increasing. The extracted electron current of microwave ECR plasma cathode can reach 75mA at gas pressure of 7×10⁻⁴Pa, and the energy of the electron beam can reach 9keV. The energy utilization can reach 0.6. By adjusting the current of the focusing coil, the diameter of electron beam spot is reduced from 20mm to 13mm and the electron beam current keeps the value unchanged.     

微波电子回旋共振等离子体阴极电子束的实验研究

介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果，该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸，实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明：微波输入功率越高、引出电压越高，引出电子束流强越大；工作气压对电子束流强的影响较复杂，随气压增加呈现出先降低后升高的特点；在7×10⁻⁴Pa 的极低气压下电子束流强可达75mA，引出电压9kV；能量利用率可达0.6；调整聚焦线圈的驱动电流，电子束的束斑直径从20mm 减小到13mm，电子束流强未有明显变化。     

流动氩气放电系统中条纹斑图形成的实验研究

采用双水电极介质阻挡放电装置, 在大气压下流动氩气中产生了稳定的条纹斑图, 并采用拍照和电学方法对其产生机理进行了研究. 研究发现, 条纹斑图仅出现在外加电压较低的情况下, 在较高电压下放电会过渡到均匀模式. 低电压下的条纹斑图是由于放电丝沿着气流方向定向移动形成的, 该定向移动速度几乎与电压无关, 主要由气体流量决定. 分析发现放电空间中活性粒子的记忆效应对条纹斑图的形成起决定作用. 电学测量发现放电电流和放电的气隙起始电压都随着气流的增加而减小, 本文对这一现象进行了定性解释. 本文结果对斑图动力学研究和介质阻挡放电的工业应用都具有很重要的意义.     

HT-7托卡马克等离子体密度调制实验中的逃逸电子行为

在HT-7托卡马克的等离子体密度调制实验中,通过对欧姆和低杂波电流驱动两种放电条件下等离子体逃逸电子辐射行为的研究,验证了非准稳态等离子体中逃逸电子的产生机制,研究了欧姆和低杂波电流驱动两种放电条件下的大量充气对等离子体整体约束性能的影响。研究结果发现:放电过程中额外的大量工作气体的充入使等离子体偏离了准稳态,逃逸电子初级产生机制和次级产生机制准稳态的假设条件被打破,这时候需要利用非准稳态条件下修正后的逃逸电子归一化阈值速度来解释逃逸电子的辐射行为; 同时也发现放电过程中额外的大量工作气体的充入将使等离子体的整体约束性能变差。