离子注入法形成的LiTaO3平板光波导的特性分析

用能量为２．８ＭｅＶ、剂量为１．４×１０１６ｉｏｎ／ｃｍ２的Ｈｅ＋在室温（３００Ｋ）下注入到晶体材料ＬｉＴａＯ３中，形成了离子注入平板光波导。用棱镜耦合法观察和测量了ＬｉＴａＯ３波导导模的分布，并对退火前后的ＬｉＴａＯ３波导的折射率分布进行了计算和比较。利用背散射／沟道技术分析了由于Ｈｅ＋的注入而引起的波导表面的损伤。     

离子注入结合离子交换技术制备KTiOPO4光波导特性研究

用离子注入结合离子交换技术形成了 KTiOPO₄ 平面光波导,研究了离子注入对离子交换波导结构的影响.使用棱镜耦合法测量了波导特性,结果显示形成了表面折射率升高的多模波导,通过背散射技术研究了离子交换后的 Rb 离子分布.实验表明,注入离子导致样品晶格损伤,在 2.8 μm处对离子交换形成了阻挡层,阻止了交换向KTP晶体的更深处进行.     

Characterization of laser waveguides in Nd:CNGG crystals formed by low fluence carbon ion implantation

We report on Nd:CNGG active planar waveguides produced by 6.0 MeV carbon ion implantation at fluence from 1 × 10¹⁴ ions/cm² to 8 × 10¹⁴ ions/cm². The refractive index profiles, which were reconstructed according to the measured dark mode spectroscopy, showed that the refractive indices had negative changes in the surface region, forming typical barrier waveguide. The width of waveguide structure induced by carbon ion implantation is ∼3.8 μm. The typical barrier-shaped distribution may be mainly due to the nuclear energy deposition of the incident ions into the substrate. By performing a modal analysis on the observed TE modes, it was found that the TE₀ and TE₁ modes can be well-confined inside the waveguide.     

Experimental observation and numerical simulation of guided modes in Nd:YLiF4 channel waveguides produced by carbon ion implantation

We report on, to our knowledge the first time, the channel waveguide formation in Nd:YLiF₄ laser crystal produced by 6 MeV carbon ion implantation. The guided modes are observed by using an end‐face arrangement. We construct the two‐dimensional (2D) refractive index profile of the channel waveguide cross section, which is based on the related planar waveguide index distribution as well as the rectangular shape of the waveguide cross sections. The modal intensity distribution is numerically calculated by using the beam propagation method according to the reconstructed index profile, which shows a reasonable agreement with the experimental result. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Characterization of optical waveguide in Nd: GdVO4 by triple-energy oxygen ion implantation

We report on the optical planar waveguide formation and modal characterization in Nd: GdVO₄ crystals by triple oxygen ion implantation at energies of (2.4, 3.0, and 3.6 MeV) and fluences of (1.4, 1.4, and 3.1)  × 10¹⁴ions/cm². The prism-coupling method is used to investigate the dark-mode property at wavelength of 632.8 nm. The refractive index profiles of the waveguide are reconstructed by an effective refractive index, n_eff method. The modal analysis shows that the fields of TE modes are well restricted in the guiding region, which means the formation of nonleaky waveguide in the crystal.     

Planar optical waveguide in Cu-doped potassium sodium strontium barium niobate crystal formed by mega-electron-volt He-ion implantation

The first planar optical waveguide to the authors' knowledge has been formed in Cu-doped potassium sodium strontium barium niobate crystal by mega-electron-volt He(+) implantation. Both TE and TM modes are observed. The profiles of the ordinary and the extraordinary refractive indices are deduced from dark-line mode spectroscopy. The results show that the mega-electron-volt He implantation results in a decrease in refractive index in barriers for both n(o) and n(e), but for n(e) there is an obvious increase in the waveguide region. From an experiment in photorefractive two-wave mixing, it is found that the erasure time for two-wave mixing is prolonged by ion implantation.     

Ag-Na离子交换玻璃波导的折射率分布研究

用Ag-Na离子交换技术制备了玻璃平面波导.通过棱镜耦合技术测量了波导的模折射率,用反WKB方法拟合得到了平面波导的折射率分布为高斯分布.发现Ag-Na离子交换的扩散系数与交换时间有关,并且随着交换时间的增加而减小.使用随离子浓度变化的扩散系数求解扩散方程得到了玻璃内部Ag离子浓度分布,并通过SEM谱证实了求解的正确性;使用一次多项式模拟的方法求解折射率变化与Ag离子浓度变化之间的关系,得到了平面波导的折射率分布.与反WKB法只能获得多模离子交换平面波导的折射率分布相比,这种方法可以得到任意扩散时间下折射率变化与Ag离子浓度,可以获得单模平面波导的折射率分布.     

Analysis and Determination of Refractive Index Profiles of O^2＋ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques

The refractive index profiles of 3 MeV O^2＋ ion-implanted planar waveguides in lithium niobate are reconstructed based on etching and ellipsometry techniques. SRIM2003 code is used to simulate the damage distribution in waveguide. It is demonstrated that the index profile of this kind of waveguide, extending to several micrometres in depth, can be determined by etching in combination with following ellipsometric measurements. A good agreement is found between the simulated damage distributions in waveguide and the index profiles based on experimental data, and the width of refractive index barrier is wider than the result of SRIM2003.     

Characterization of optical planar waveguide in Ce:KNSBN crystal formed by triple-energy helium ion implantation

We report on the optical planar waveguide formation and modal characterization in a Ce:KNSBN crystal by triple helium ion implantation at energies of (2.0, 2.2 and 2.4 MeV) and fluences of (1.5, 1.65 and 2.25) × 10¹⁵ cm⁻². The prism-coupling method is used to investigate the dark-line spectroscopy at wavelength of 632.8 and 1539 nm, respectively. The refractive index profiles of the waveguide are reconstructed by an effective refractive index method. It is found that the ion-beam irradiation creates slight increase of extraordinary index whilst decreases ordinary one in the guide region. The modal analysis shows, at wavelength of 632.8 nm, the fields of one TE and three TM modes are well restricted in the guiding region, which means the formation of non-leaky waveguide in the crystal. The damping coefficients of the waveguide are 0.6 and 1.6 cm⁻¹ for ordinary and extraordinary polarized light at 632.8 nm, respectively.     

Reconstruction of extraordinary refractive index profiles of optical planar waveguides with single or double modes fabricated by O ion implantation into lithium niobate

A method named intensity calculation method (ICM), which is based on beam propagation method (BPM) and image processing, was carried out to reconstruct the extraordinary refractive index profile (RIP) of single-mode planar waveguide in lithium niobate (LiNbO₃), which was fabricated by multi-energy megaelectron-volt (MeV) O²⁺ ion implantation. In addition, it has been proved reasonable that the alternation of extraordinary refractive index induced by ion implantation into LiNbO₃ is mainly due to the degradation of polarization and reduction of material physical density. As a result, the possible extraordinary RIP of the double-mode planar waveguide could be reconstructed using BPM according to such a hypothesis and the calculated guiding mode values. The end-fire coupling and m-line arrangements were carried out to obtain the near-field modal patterns and dark-mode spectra of waveguides, respectively.     

Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O^3＋ Implantation

A planar optical waveguide was formed in RbTiOP04 crystal by 6.0-MeV oxygen ion implantation with the dose of 2 × 10^15 ions/cm2 at room temperature. Annealing at 200℃ for 30min in air is performed to improve the thermal stability of the waveguide. The dark modes of the waveguide are measured at wavelengths 633 and 1539 nm, respectively. The refractive index profiles in the guiding layer are reconstructed by using the reflectivity calculation method. TRIM＇98 code was carried out to simulate the damage profiles caused by the implantation process to obtain a better understanding of the waveguide formation.     

基于平面波导激励的修正长程表面波的传感器研究

为了解决传统的强度检测型波导激励的表面等离子体共振传感器灵敏度不高的缺点,研究平面波导激励的介质膜-金属-被测介质的可激发修正的长程表面等离子体波结构。采用离子交换的方法制备折射率可用费米函数拟合的平面波导,研究了离子交换时间对平面波导的模数及等效折射率等特性的影响,为激励波导的优化设计提供有效依据。采用制备的平面波导激励介质膜-金属-被测介质的非对称结构,研究金属材质、介质膜厚和金属膜厚等因素对修正的长程表面等离子体波特性的影响,对被测溶液的折射率进行检测。实验结果表明,其灵敏度为传统的强度检测型表面等离子体共振传感器的6倍,并且具有较好的线性关系。     

The concept of quasi-discrete levels for ion-implanted waveguides

In this paper, we introduce the concept of quasistationary states for ion-implanted waveguides. It can be employed for a certain range of implanted barrier parameters. It is shown that for a rather large thickness of the barrier, the waveguide modes can be regarded as quasidiscrete lines with some widths. In order to estimate these widths the refractive index profile has been modelled by a four-layer step index function.     

Cu2+离子注入的石英光波导的特性研究

利用Cu2+离子注入的方式在熔融石英和石英晶体上分别制备了平面光波导结构.通过棱镜耦合实验测试了两种光波导的导模特性,结果表明:在同样的注入条件下熔融石英上形成了增加型的光波导结构,而石英晶体上形成了位垒型的光波导结构.研究了退火温度对两种光波导导模折射率的影响,熔融石英光波导中导模的折射率随着退火温度的升高而降低,而石英晶体光波导中导模的折射率随着退火温度的升高先增加后降低.为了进一步分析离子注入两种材料形成光波导的微观机理,利用SRIM模拟了Cu2+离子注入两种材料的电子能量损失和核能量损失,并且模拟了两种光波导结构的折射率分布.模拟结果表明:熔融石英光波导的主要形成原因是离子注入表面的折射率大于其体材料的折射率,而石英晶体光波导的主要形成原因是离子射程末端的折射率小于其体材料的折射率.因此,在熔融石英光波导的形成中电子能量损失起主要作用,而在石英晶体光波导的形成中核能量损失起主要作用.     

基于离子交换条波导的生物溶液浓度传感研究

提出并实施了一种实验推定离子交换单模条波导折射率分布的新方法,给出扩散系数可用常量等效的离子交换条件,导出了条波导离子交换制备过程的两维扩散方程的一般解,拟合推定了离子交换条波导的折射率分布.多波长测试的折射率色散通过引入玻璃色散关系解决,样品测试中表征导模吸收损耗的传播常量虚部由KK变换确定.在此基础上,试制了光纤-条波导-光纤一体化传感器结构,验证实测了多种不同浓度的葡萄糖溶液,最低检测限为0.1 μM,实现了低浓度微量测试,验证了条波导传感机制的有效性.     

Reconstruction of extraordinary refractive index profile of O ion-implanted LiNbO3 single-mode channel waveguide based on beam propagation method and image processing

A method bases on beam propagation method and image processing is brought forward to reconstruct the extraordinary refractive index profile of the ion-implanted single-mode channel waveguide in lithium niobate. Channel waveguide is formed by O²⁺ ion implantation at three energies of (3.0, 3.6 and 4.5 MeV) and respective doses of (1.8, 2.2 and 4.8) × 10¹⁴ ions/cm² in vacuum at room temperature. Only one enhanced-index mode is observed for extraordinary light at 1539 nm by prism-coupling method. TRIM’98 code is used to simulate the damage profile in channel waveguide. The modes pattern of TE and TM are measured by use of end-face coupling method.     

K-Na离子交换单模平面波导的制备及其表征

通过K-Na离子交换技术制备了多模玻璃平面波导.采用棱镜耦合技术测量了波导的有效折射率,用IWKB方法拟合得到K-Na离子交换波导的折射率分布符合高斯分布,由色散曲线得到单模波导的制备条件(即扩散深度范围),从而得出单模波导的离子交换时间范围,制备出单模波导,并通过求解WKB色散方程得出单模波导的表面折射率.用普通数码相机,通过对离子交换平面玻璃光波导传输线进行数字成像,根据传输线上的光强分布拟合出光强传输衰减曲线,计算出单模波导的传输损耗大约为0.4 dB/cm.     

Visible and near-infrared optical properties of Nd:CLNGG crystal waveguides formed by proton implantation

A Nd:CLNGG waveguide structure operated at wavelengths of both 632.8 nm and 1539 nm was demonstrated for the first time to our knowledge, which was produced by the 480-keV H~+ion implantation with a dose of 1.0×10~(17)protons/cm~2.Its propagating modes at 632.8 nm and 1539 nm were measured by the well-known prism coupling technique. The refractive index profile at either 632.8-nm wavelength or 1539-nm wavelength was optical barrier type in the proton-implanted Nd:CLNGG crystal optical waveguide, which was calculated by using the reflectivity calculation method. The near-field light intensity distributions were also simulated by the finite-difference beam propagation method in the visible and nearinfrared bands.     

Reverse-symmetry waveguides: theory and fabrication

We present an extensive theoretical analysis of reverse-symmetry waveguides with special focus on their potential application as sensor components in aqueous media and demonstrate a novel method for fabrication of such waveguides. The principle of reverse symmetry is based on making the refractive index of the waveguide substrate less than the refractive index of the medium covering the waveguiding film (n_water=1.33). This is opposed to the conventional waveguide geometry, where the substrate is usually glass or polymers with refractive indices of ≈1.5. The reverse configuration has the advantage of deeper penetration of the evanescent electromagnetic field into the cover medium, theoretically permitting higher sensitivity to analytes compared to traditional waveguide designs. We present calculated sensitivities and probing depths of conventional and reverse-symmetry waveguides and describe schemes for easy implementation of reverse symmetry. Polymer waveguides are demonstrated to be candidates for cheap, mass-producible reverse-symmetry sensor modules. The grating-coupled waveguiding films of controlled thickness are produced by soft lithography. The resulting films are combined with air-grooved polymer supports to form freestanding single-material polymer waveguides of reverse symmetry capable of guiding light. Received: 20 December 2001 / Published online: 14 March 2002     

The Observation of Photorefractive Effect of Prism Coupling in Ion-implanted Fe-doped LiNbO_3 Plannar Waveguide

1.IntroductionTheFe--dopedLithiumNiobate(LiNbO3)crystalhavebeenintensitystudiedbecauseoftheirimprovedphotorefractivepropertiesandutilizationinawiderangeofapplicationsinopticalstorage,opticalphaseconjugationandtwo-andfour--wavemixingtechniques.ThewaveguidefabricatedwithsuchcrystalisdesirablebecauseitprovidescomP8tibilitywithotherminiaturizedintegrateddevicescommonlyusedtoday,particularwithlaserdiodesandfibergeometries.Comparingtootherwaveguidefabricationtechniques,suchasmetaldiffusionorionex…