MEMS材料力学性能的测试技术

微电子机械系统(MEMS)技术的迅速崛起,推动了所用材料微尺度力学性能测试技术的发展.首先按作用方式将实验分成压痕/划痕、弯曲、拉伸、扭转四大类,系统介绍检测MEMS材料微尺度力学性能的微型试样、测试方法及其实验结果.测试材料主要有硅、氧化硅、氮化硅和一些金属.实验结果主要包括基本的力学性能参数如弹性模量、残余应力、屈服强度、断裂强度和疲劳强度等.最后,简要分析了未来的发展需求.      

空心玻璃微珠及玻璃纤维混合填充环氧树脂力学性能实验研究

制备了一种空心玻璃微珠质量比、四种玻璃纤维质量比的空心玻璃微珠及玻璃纤维混合填充环氧树脂复合泡沫材料。通过一系列准静态压缩、拉伸实验,研究了玻璃纤维填充量对复合材料的密度、强度、弹性模量等性能的影响,并分析了其影响原因。通过三点弯曲实验,研究了复合材料弯曲弹性模量、弯曲强度等力学性能与玻璃纤维填充量的关系。通过拉伸断口SEM照片分析了玻璃纤维增强复合材料力学性能的原因。研究表明:随着玻璃纤维填充量增加,复合材料的拉伸和弯曲强度、压缩屈服极限及弹性模量等力学性能都有较大的提高,且仍然保持了较好的弹性性能和塑性特征。     

基于新弹塑性模型全程模拟金属疲劳失效

金属材料疲劳失效问题是工程中一类主要问题,选择合理的材料本构关系对于准确确定疲劳失效强度至关重要．本文提出一个简单形式的自由光滑新弹塑性模型,该模型在不涉及通常的屈服条件以及加卸载条件的意义上完全自由,避免了模量间断问题,且比经典模型更简单、更符合实际．结果表明,该模型可直接模拟金属材料在循环加载下直至疲劳破坏的全过程,不涉及任何损伤变量以及人为假设的失效判据,特别地,可直接模拟金属材料的高周、低周疲劳直至最终失效破坏行为．应用P92钢的相关实验数据,给出了循环加载下的数值模拟结果,结果表明,在各种加载-卸载循环情形下,随着应力幅值的增大,疲劳失效循环数减少,这与实际材料行为相一致．     

梯度多孔材料单轴压缩弹塑性变形的宏微观数值分析

针对闭孔的密度梯度多孔材料,建立含球形孔洞的三维数值分析模型,研究其单轴压缩力学行为。首先,研究密度梯度对多孔材料宏观力学行为(如弹性模量和屈服强度)的影响;其次,研究密度梯度与材料局部力学性能的关系,得到了沿梯度方向弹性模量和屈服强度的分布规律;最后,讨论梯度多孔材料单轴压缩变形局部化机制。结果表明:当梯度材料与均质材料的总体相对密度相同时,梯度材料的宏观弹性模量和屈服强度均低于均质材料水平,其宏观应力-应变关系曲线降低;梯度多孔材料沿梯度方向的力学性能发生急剧变化,等效弹性模量沿梯度方向呈线性分布,屈服强度呈非线性曲线分布,导致沿梯度方向应力、应变呈现高度的不均匀性;多孔材料的变形局部化产生于孔隙率较大的薄弱位置,再逐渐向孔隙率较小的位置发展。由此可知,孔隙率的梯度变化影响多孔材料的力学性能,通过改变孔隙率的分布可实现材料预期的力学性质。     

锂离子电池隔膜的力学性能测量

隔膜是锂离子电池的重要组成部分,其力学性能的综合表现是保证电池电化学性能的关键因素。本文通过单向拉伸实验和数字图像相关(DIC)技术来研究表面涂敷聚偏二氟乙烯的聚乙烯隔膜的基本力学性能;结合工程应力-应变曲线,分别确定了隔膜横轴(TD)和纵轴(MD)方向在不同拉伸速率下的弹性模量和强度;利用DIC技术得到的应变-时间曲线,确定了隔膜TD和MD方向的泊松比。单向拉伸实验表明,隔膜TD和MD方向的弹性模量和极限强度值都与测试方向无关,且拉伸速率越快,弹性模量越大,但极限强度值基本不变。DIC测试结果表明,隔膜TD和MD方向的泊松比也相等。研究发现,与很多已有隔膜具有明显各向异性性质不同,测试隔膜不但具有较高的弹性模量和极限强度,而且具有明显的各向同性性质。     

射频非平衡磁控溅射WS_2薄膜的结构及其摩擦学性能研究

采用射频非平衡磁控溅射技术制备了具有不同(002)择优取向程度的WS2薄膜,研究了Ar流量对薄膜成分、微观结构、力学性能和摩擦学性能的影响.研究表明:随Ar流量的增大,WS2薄膜的S/W原子比和(002)衍射峰强度均表现出先降低后升高的变化趋势,而硬度和弹性模量表现出先升高后降低的变化趋势.在大气环境下,WS2薄膜的(002)择优取向程度、S/W原子比以及硬度对薄膜的摩擦学性能均具有显著影响,当S/W原子比较低、(002)择优取向度弱、硬度较高时,薄膜脆性较大,易于发生润滑失效;当S/W原子比、(002)择优取向度和硬度均较高时,薄膜结构致密,且摩擦过程中在对偶表面易于形成有效的转移膜,薄膜表现出较好的减摩、抗黏着特性和优异的抗磨性能.     

热障涂层-基体体系界面高温疲劳和断裂性能的实验研究

热障涂层(TBCs)作为发动机叶片的热防护涂层,能够显著提高叶片在高温环境下的使用寿命.本文围绕TBCs-镍基高温合金基体体系的界面性能,展开了比较系统的实验研究.通过实验方法得到了等温热处理前后陶瓷层的弹性模量、硬度及陶瓷层-粘结层界面的微结构的变化.结果显示,随着等温热处理时间的增加,弹性模量及硬度先增加后降低;氧化层随等温热处理时间和温度的增加逐渐增厚.利用本文提出的多相位角界面断裂韧性试验方法,建立了以应力强度因子为表征参数的TBCs界面失效准则.在假定界面间为粘性接触的条件下,预测了界面承载能力随陶瓷层弹性模量和氧化层厚度的变化趋势.通过热循环实验研究了TBCs-基体体系的热疲劳性能及失效机理.随着热循环高温保温时间的增加,热疲劳寿命先升高后降低,失效模式由界面失效转化为界面失效与陶瓷层失效并存;体系的失效由陶瓷层及氧化层的应变能密度、陶瓷层、氧化层及界面的断裂韧性,以及它们和界面微结构缺陷的相互作用共同决定.     

压入硬度与材料单轴强度的关系研究

通过量纲分析和有限元数值计算,对弹塑性材料在Berkovich压头作用下的压入响应进行了分析,揭示了Oliver与Pharr压入硬度与材料屈服强度和单轴强度之和间存在简单的近似函数关系.据此,材料的屈服强度和强度极限之和可以由压入测试获得,铝合金的拉伸与压入实验证实了上述近似函数关系的正确性.基于这一关系,不仅可以利用压入技术对材料强度水平进行直接比较,而且可以预测中低强度结构钢的疲劳极限.多种碳钢和热处理钢的疲劳实验数据验证了利用压入技术预测中低强度结构钢的疲劳极限的有效性.     

含有序孔洞的多孔氧化铝薄膜的弹性模量测量

高纯铝箔在特定的溶液下经过电化学阳极氧化腐蚀,可在其表面生成一层多孔的非晶氧化铝层,孔大致呈六方密排,孔径分布均匀.此类薄膜具有规则的纳米级孔径,大的比表面积,可用在微纳滤方面和纳米材料组装方面.然而,对于此类薄膜力学性能的研究较少,在一定程度上限制其功能的开发和应用.为了获得此类多孔膜的弹性常数,本文用鼓膜法结合散斑干涉实验方法、单轴拉伸结合双光束干涉法和多普勒测振仪三种方法测量氧化铝多孔膜的弹性模量,得到的宏观弹性模量基本相同, 并对三种方法的优缺点进行了比较,分析了多孔氧化铝膜与块状氧化铝材料或致密氧化铝膜力学性能的差异.     

磁过滤阴极弧制备类金刚石膜的疲劳性能及摩擦磨损性能研究

利用离面双弯曲磁过滤阴极真空弧沉积系统,在单晶硅片上制备类金刚石薄膜.采用原子力显微镜观察薄膜表面形貌,采用激光拉曼光谱仪对薄膜的结构进行分析,采用多功能纳米力学性能测试仪测定薄膜的硬度、弹性模量及耐疲劳性能,采用微摩擦磨损试验机考察薄膜的摩擦磨损性能.结果表明:所制备的类金刚石薄膜表面光滑致密,硬度较高;镀膜参数中基体脉冲偏压占空比对薄膜的结构与性能有一定影响.     

The stiffness and strength of the gyroid lattice

Recently, a nanoscale lattice material, based upon the gyroid topology has been self-assembled by phase separation techniques (Scherer et al., 2012) and prototyped in thin film applications. The mechanical properties of the gyroid are reported here. It is a cubic lattice, with a connectivity of three struts per joint, and is bending-dominated in its elasto-plastic response to all loading states except for hydrostatic: under a hydrostatic stress it exhibits stretching-dominated behaviour. The three independent elastic constants of the lattice are determined through a unit cell analysis using the finite element method; it is found that the elastic and shear modulus scale quadratically with the relative density of the lattice, whereas the bulk modulus scales linearly. The plastic collapse response of a rigid, ideally plastic gyroid lattice is explored using the upper bound method, and is validated by finite element calculations for an elastic-ideally plastic lattice. The effect of geometrical imperfections, in the form of random perturbations to the joint positions, is investigated for both stiffness and strength. It is demonstrated that the hydrostatic modulus and strength are imperfection sensitive, in contrast to the deviatoric response. The macroscopic yield surface of the imperfect lattice is adequately described by a modified version of Hill’s anisotropic yield criterion. The article ends with a case study on the stress induced within a gyroid thin film, when the film and its substrate are subjected to a thermal expansion mismatch.     

铝箔力学性能的实验研究

铝箔已被广泛应用于电子工业,现又被用作锂电池正极集流体,因而对于铝箔的力学性能要求也在不断提高。通过表征和研究铝箔的力学性能(弹性模量、屈服强度、断裂强度等),能够为铝箔相关技术的可靠性研究提供必要的数据支持和理论指导,从而使铝箔得到合理和可靠的使用。本文运用微拉伸、纳米压痕和动态力学分析(DMA)实验,分别研究了不同厚度的H18态和O态铝箔的力学性能。结果表明两者的弹性模量均约为30GPa,仅为块材的一半;H18态铝箔材料的断裂强度要明显强于块材,而O态铝箔材料的断裂强度则明显小于块材;此外,H18态铝箔材料的屈服强度明显大于块材,O态铝箔材料的屈服强度与块材相仿。并且,随着厚度的增加,H18态铝箔材料的延伸率显著增大,但是仍远小于块材。通过扫描电子显微镜(SEM)对铝箔材料断裂形貌进行微观分析,发现铝箔的拉伸断裂方式为脆性断裂。     

马氏体钢表面磁控溅射类金刚石薄膜滚动接触疲劳失效机理

采用磁控溅射技术在马氏体钢基体表面制备类金刚石(DLC)薄膜,应用扫描电镜、Raman光谱仪和划痕测试仪等对薄膜进行表征. 基于对失效表面及截面微观特征的详细分析,研究了DLC薄膜在接触疲劳载荷下的失效特征和机理. 结果表明:DLC薄膜试样的滚动接触疲劳(RCF)寿命比基体的寿命显著提高,且薄膜磨损后试样的剩余寿命仍比原基体寿命长. 薄膜厚度3 μm,处于接触最大应力分布的15 μm范围内. DLC薄膜是从基体表面粗糙峰处产生微裂纹进而导致薄膜剥落,基体材料裸露,最终试样失效.      

Gripless nanotension test for determination of nano-scale properties

This paper proposes a novel material testing method, gripless nanotension technique (GNT), to assess the basic mechanical properties of nano-scale structures in top-down processes. The GNT exhibits prominent advantages over conventional methods, i.e., use of a nanoindenter as a reliable and simple testing device, high-quality nano-scale metallic specimen with negligible residual stress, and tensile testing possible in the through-thickness direction. Using the proposed method, nano-scale polycrystalline specimens obtained from a nickel film were tested. Through the experiment, well-defined values of material properties with extraordinary phenomenal findings, i.e., strikingly reduced elastic modulus, yield strength and tensile strength of much higher values could be reliably observed and determined at the nano-scale.     

动高压加载下锆基金属玻璃强度测量

为了研究Zr₅₁Ti₅Ni₁₀Cu₂₅Al₉金属玻璃的高压强度特性,进行了平靶冲击实验。采用反向碰撞方式,运用DISAR技术测量金属玻璃样品/LiF窗口界面粒子速度剖面,分析粒子速度剖面获得了37~66GPa压力范围锆基金属玻璃的屈服强度和剪切模量。实验结果表明,在上述压力范围金属玻璃的屈服强度和剪切模量均显示出一定程度的压力硬化效应,分析表明金属玻璃冲击加载波阵面剪应力衰减并非由损伤/破坏或温度软化等因素导致。     

Molecular dynamics study of size, temperature and rate dependent thermomechanical properties of copper nanofilms

Molecular dynamics simulations are performed to study the thermomechanical properties of copper nanofilms at different temperatures and extremely-high loading rates. The results show a drastic temperature softening effect on the film strength and modulus. The increase of strain rate could result in a much higher strength while the modulus is relatively less affected. It is shown, based on the stress results, that the observed “smaller is softer” and “smaller is stronger” behaviors of nanofilms might be due to the surface plasticity and the volumetric dislocations, respectively. It is also found that the thinner a nanofilm, the smaller the thermal expansion coefficient. The present work reveals that the quasistatic thermomechanical properties of bulk copper at room temperature might be inadequate for the continuum-based study of thermomechanical response of copper nanofilms due to ultrafast laser heating.     

Effects of Environmental Degradation on Flexural Failure Strength of Fiber Reinforced Composites

Fiber-reinforced composite laminates are often used in harsh environments that may affect their long-term durability as well as residual strength. In general, environmental degradation is observed as matrix cracking and erosion that leads to deterioration of matrix-dominated properties. In this work, cross-ply laminates of carbon fiber reinforced epoxy were subjected to environmental degradation using controlled ultraviolet radiation (UV) and moisture condensation and the post-exposure mechanical properties were evaluated through elastic modulus and failure strength measurements. Additionally, both degraded and undegraded were subjected to cyclic fatigue loading to investigate possible synergistic effects between environmental degradation and mechanical fatigue. Experimental results show that the degradation results in reduced failure strength. Greater effects of degradation are observed when the materials are tested under flexural as opposed to uniaxial loading. Based on strength measurements and scanning electron microscopy, we identified various damage modes resulting from exposure to UV radiation and moisture condensation, and cyclic loading. The principal mechanisms that lead to reduction in mechanical properties are the loss of fiber confinement due to matrix erosion, due to UV radiation and moisture condensation, and weakened/cracked ply interfaces due to mechanical fatigue. An empirical relationship was established to quantify the specific influence of different damage mechanisms and to clarify the effects of various degradation conditions.     

A simple technique for determining yield strength of thin films

A technique to measure the yield strength of thin films has been developed which combines experimental observations of deflection and plastic deformation with finite element predictions of stress. This technique relies on integrated circuit technology to build bridge and cross beam test structures with a range of dimensions. Each structure is deflected in increments of 1 μm until the structure no longer elastically recovers upon release. In tandem with experimentally verified numerical predictions of force and stress, the yield strength of the thin film can be bounded between the highest elastic stress result and the lowest plastic stress result. For our test material of copper, this method provides a yield strength between 2.80 and 3.09 GPa, a value significantly larger than that for bulk copper, but consistent with thin film theory.     

单纤维微拉伸力学性能测试与分析

针对微尺度材料力学性能测试与尺度效应实验研究的需要,自行研制了一台FMT-I型高精度纤维材料微拉伸力学性能实验装置,并基于LabVIEW软件平台开发了相应的数据采集与控制系统,实现了测试过程的全自动化。该装置的测力传感器由非接触式激光位移传感器和两端固定的薄梁组成,可同时测量试样的拉伸力和上夹持端的位移量,帮助精确地获取试样的载荷-变形曲线。采用该装置对微米级直径的多晶铜丝、316L不锈钢纤维和T300碳纤维进行了拉伸测试。实验结果表明,直径为18～105μm多晶铜丝的拉伸力学行为并无明显的尺度效应;多晶铜丝和316L不锈钢纤维的弹性模量分别在43.9～60.0GPa和102.9～111.5GPa之间,均低于宏观尺度下材料的弹性模量;316L不锈钢纤维的抗拉强度和延伸率随着丝径的减小而降低;T300碳纤维的弹性模量为235.4±12.4GPa,抗拉强度为3238.2±280.8MPa,断裂应变约为1.5%。另外,相同的细铜丝材料的测试结果与Instron5848型商用拉伸试验机的测试结果进行了对比,吻合良好。通过系统的实验分析表明,该装置具有较高的精度和稳定性,适用于各种纤维材料的拉伸力学性能测试。