XeCl放电激光器的简化动力学模型

本文在自由电子玻尔兹曼编码及动力学计算基础上,选取了对XeCl激光动力学起主导作用的反应物及动力学过程,建立了一个简化的动力学模型.采用这个模型计算了不同气体混合比、不同电流密度下荧光及激光强度与气压的关系,这些结果能与X光预电离雪崩自持放电的XeCl激光器的实验结果很好地符合.     

电子束泵浦XeCl准分子激光器及应用

为了获得高能紫外激光输出,开展了电子束泵浦XeCl准分子激光技术研究。详细介绍了四向电子束泵浦准分子激光装置的工作原理和结构特征,简述Marx发生器的放电电压、放电电流,激光气室中的沉积能量,激光脉冲能量、脉宽等参数的测量方法;研究了电子束泵浦XeCl准分子激光输出特性,得到了激光脉冲能量随激光气室内混合气体气压变化的规律,当激光器的充电电压为81kV时,获得了能量100J、脉宽200ns的XeCl准分子激光输出,其本征效率约为3.2%。并且开展了XeCl准分子激光辐照涂层材料力学特性研究,采用微型红外通光冲量探头测量不同条件下激光辐照涂层材料的冲量耦合系数,在常压空气环境中的冲量耦合系数约为8.32×10-5 N·W-1。     

X光预电离脉冲雪崩放电中XeCl的形成效率和电子去激发速率

本文用Stern-Volmer作图法,在泵浦功率密度为每立方厘米数兆瓦的条件下,求得X光预电离脉冲雪崩放电中XeCl的形成效率和电子去激发速度分别为12.4％和1.16×10~(-7)cm~3/sec。     

用于ps脉冲放大的大口径放电泵浦KrF激光器

 以简单的火花间隙作为放电开关，建立了一种用于ps脉冲激光放大的大口径放电泵浦KrF准分子激光器。该激光器的有效增益口径截面为4cm×3cm，在自由运转情况下最大激光输出能量为1.3J，脉宽20ns。用作ps放大器时，利用光学偏振放大方式获得了激光能量140mJ，脉冲宽度10ps的激光输出。利用XeCl激光泵浦的染料激光作为探针测量了不同放电条件下和不同气分比条件下激光的增益和吸收系数。     

短谐振腔准分子激光输出的脉冲特性研究

用腔长为7.5cm～20cm的紫外光预电离Blumlein横向放电泵浦XeCl准分子激光器可产生半宽为1.8ns～5ns的短脉冲输出。速率方程的计算机模拟所给出的激光振荡初始尖峰和实验结果做了比较。     

直流电源耦合高功率脉冲非平衡磁控溅射电离特性

采用直流电源放电形成高功率脉冲非平衡磁控溅射(dc-high power impulse unbalanced magnetron sputtering,dc-HPPUMS 或dc-HiPiUMS),利用雪崩放电的击穿机理形成深度自触发放电,同轴线圈和空心阴极控制放电特性和提高功率密度.磁阱俘获雪崩放电形成的二次电子和形成漂移电流,形成了大电流脉冲放电,放电脉冲电流密度峰值超过100 A/cm²,脉冲频率小于40 Hz.由于放电等离子体远没有达到平衡状态,放电电流主要受到空间电荷效应 关键词： 放电 脉冲技术     

C-C转移放电泵浦XeCl准分子激光器能量沉积特性的分析

本文报道了一台使用UV自动预电离,C-C转移放电泵浦的XeCl准分子激光器,并且以激光器放电信号和输出激光信号的同时测量结果为依据,分析了激光器放电的能量沉积过程.可为设计同类型准分子激光器提供一些参考数据.     

用于薄膜沉积的XeCl激基激光器研制

以镀制半导体薄膜、巨磁薄膜、金刚石及其它薄膜,外延生长及后续的光刻,激光与物质的相互作用、等离子体研究为目的,设计、研制了脉冲放电激励的XeCl激基激光器.试验结果表明:激光脉宽18ns,单脉冲能量150mJ,矩形光斑大小2cm×1cm,束散角3mrad,最高重复频率5HZ.与同类激光器相比,具有结构简单、造价低廉、性能稳定等特点.     

超短脉冲激光照射下氧化铝的烧蚀机理

利用烧蚀面积与激光脉冲能量的线性关系，确定了氧化铝的破坏阈值，同时采用散射光探测法，研究了800和400nm超短脉冲激光作用下氧化铝的破坏阈值对激光脉宽的依赖关系，并探讨了氧化铝的烧蚀规律. 利用雪崩击穿模型，解释了实验结果，并讨论了导带电子光吸收机理. 关键词： 飞秒激光 氧化铝 破坏阈值 雪崩模型     

光学材料的多脉冲激光损伤研究

研究了ＺＦ２玻璃多脉冲与单脉冲激光损伤，分析了多脉冲损伤阈值与脉冲数，脉冲间隔的关系，进行了多脉冲损伤机理的分析，得出多脉冲损伤是热和缺陷累积共同作用最终促成雪崩击穿的结果，并提出了提高抗多脉冲激光损伤的方法。     

Short pulse,x-ray preionization of a high pressure XeCl gas discharge laser

A short pulse (35 ns), high energy X-ray source, driven by a coaxial Blumlein pulser, has been used to preionize a 2.5 × 3 × 30 cm³ active volume XeCl avalanche discharge laser. A maximum output energy of 1 J has been extracted at 0.9% efficiency (including X-ray preionization). Measurements have been performed to investigate the influence of the X-ray pulse timing on laser output and discharge quality.     

Preionization and discharge stability study of long optical pulse duration UV-preionized XeCl lasers

This paper presents a complete study of the temporal and spatial characteristics of the preionization of a XeCl rare-gas halide laser. The detailed study was made possible using the technique of laser-induced preionization which utilizes the uv radiation from a KrF laser to preionize a second rare-gas halide laser. In addition to the preionization study, high spatial and temporal resolution framing camera photographs have been used to investigate the growth of discharge instabilities which can lead to the premature termination of the XeCl optical pulse. The roles played by HCl, Xe, the buffer gas as well as the discharge energy loading in the development of discharge instabilities have been determined experimentally.     

High repetition rate effects in XeCl tea lasers

The high repetition rate capability of a discharge pumped XeCl laser with static fill has been studied by double pulse experiments. By suitably selecting the laser parameters (energy deposition, gas mixture composition, filling pressure), following an analytical model of the discharge induced thermal effects, laser action from the second pulse for delays as short as 5 ms with an energy of 12.5 mJ has been achieved.     

Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser

Improvements in output pulse energy and efficiency of a conventional capacitor-transfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 J for XeCl, KrF, and ArF lasers in square beams of about 2×2 cm², and the maximum overall efficiency observed is 2.9% for XeCl, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond ( 32 ps) XeCl laser amplification system, and was operated as an amplifier at a repetitive frequency of 10 Hz. Saturation fluence for XeCl laser was measured to be 1.4 mJ/cm², and the picosecond pulse energy of 40 mJ was extracted from the amplifier.On leave from Ebara Corp., 6-6-7, Ginza, Chuo-ku, Tokyo 104, JapanOn leave from Mitsubishi Heavy Industries, LTD., 4-6-22, Kan-on shinmachi, Nishi-ku, Hiroshima 733, Japan     

Preionization kinetics of an X-ray preionized XeCl gas discharge laser

The influence of preionization conditions on the performance of a XeCl gas discharge laser preionized by a short, high intensity x-ray pulse, has been studied. The laser output energy and optical pulse temporal characteristics have been used to determine the roles of initial electron density and of electron attachment to HCl and to impurities. Although the short pulse preionization technique functions well for XeCl when the laser voltage pulse has a short risetime (?20 ns), it is less well suited to XeCl lasers using slowly rising voltage pulses (>50 ns), or to F₂ containing gas mixtures (KrF and XeF lasers).     

XeCl discharge diagnostic by holographic interferometry

A direct measurement of the electron-density time evolution in the active medium of a self-sustained XeCl laser discharge has been performed by means of the holographic interferometry technique. The time and space resolved behaviour of the discharge seems to confirm that the halogen depletion instability and the hot spots developing in the cathode region are the basic mechanisms which determine the premature termination of the output laser pulse.     

高重复频率XeCl准分子激光器

本文报道一台高重复频率XeC准分子激光器的结构及其特性。采用接地栅金属陶瓷闸流管开关和气体横向流动系统及自动紫外火花预电离的放电结构。该激光器最高单脉冲能量为200mJ,最高重复脉冲频率为107Hz,最大平均功率18W。     

放电泵浦准分子激光器电路参数测定

用同轴型电阻分压器和微型罗柯夫斯基线圈测量了紫外自动预电离放电泵浦ＸｅＣｌ难分子激光器充放电电压和电流，并由此给出了充放电回路参数。     

Simulation studies of the prepulse-main-pulse XeCl discharge lasers with magnetic switching

A self-consistent model of a self-sustained discharge XeCl laser (Ne/Xe/HCl mixture) with prepulse-mainpulse excitation and magnetic switching which leads to high efficiency operation is described. The validity of the model is confirmed by comparing the results of the calculations with the measured time dependences of discharge voltage, current and lasing pulse for different operation modes as well as by comparing the results with the dependences of the laser output energy and efficiency on the charging voltage and capacitance of the pulse forming network for two different laser heads. The numerical evaluation has shown that our developed laser system operates under optimum conditions.