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1.
The multiferroic (PMN-PT/CFO)n (n = 1,2) multilayered thin films have been prepared on SiO2/Si(1 0 0) substrate with LNO as buffer layer via a rf magnetron sputtering method. The structure and surface morphology of multilayered thin films were determined by X-ray diffraction (XRD) and atom force microscopy (AFM), respectively. The smooth, dense and crack-free surface shows the excellent crystal quality with root-mean-square (RMS) roughness only 2.9 nm, and average grain size of CFO thin films on the surface is about 44 nm. The influence of the thin films thickness size, periodicity n and crystallite orientation on their properties including ferroelectric, ferromagnetic properties in the (PMN-PT/CFO)n multilayered thin films were investigated. For multilayered thin films with n = 1 and n = 2, the remanent polarization Pr are 17.9 μC/cm2 and 9.9 μC/cm2; the coercivity Hc are 1044 Oe and 660 Oe, respectively. In addition, the relative mechanism are also discussed.  相似文献   

2.
(Pb0.95Ca0.05)(Nb0.02Zr0.80Ti0.20)O3 [PCNZT] thin films were deposited on the Pt(1 1 1)/Ti/SiO2/Si(1 0 0) substrates by RF magnetron sputtering with and without a LaNiO3 [LNO] buffer layer. Ca and Nb elements in PZT films enhance the ferroelectric property, LaNiO3 buffer layer improves the crystal quality of the PCNZT thin films. PCNZT thin films possess better ferroelectric property than that of PZT films for Ca and Nb ion substitution, moreover, PCNZT thin films with a LNO buffer layer possess (1 0 0) orientation and good ferroelectric properties with high remnant polarization (Pr = 38.1 μC/cm2), and low coercive field (Ec = 65 kV/cm), which is also better than that of PCNZT thin films without a LNO buffer layer (Pr = 27.9 μC/cm2, Ec = 74 kV/cm). The result shows that enhanced ferroelectric property of PZT films can be obtained by ion substitution and buffer layer.  相似文献   

3.
The orientation-dependent dielectric properties of barium stannate titanate (Ba(Sn0.15Ti0.85)O3, BTS) thin films grown on (1 0 0) LaAlO3 single-crystal substrates through sol-gel process were investigated. The nonlinear dielectric properties of the BTS films were measured using an inter-digital capacitor (IDC). The results show that the in-plane dielectric properties of BTS films exhibited a strong sensitivity to orientation. The upward shift of Curie temperature (Tc) of the highly (1 0 0)-oriented BTS thin films is believed to be attributing to a tensile stress along the in-plane direction inside the film. A high tunability of 47.03% was obtained for the highly (1 0 0)-oriented BTS films, which is about three times larger than that of the BTS films with random orientation, measured at a frequency of 1 MHz and an applied electric field of 80 kV/cm. This work clearly reveals the highly promising potential of BTS films for application in tunable microwave devices.  相似文献   

4.
(Na0.85K0.15)0.5Bi0.5TiO3 thin films were deposited on LaNiO3(LNO)/SiO2/Si(1 0 0) and Pt/Ti/SiO2/Si(1 0 0) substrates by metal-organic decomposition, and the effects of bottom electrodes LNO and Pt on the ferroelectric, dielectric and piezoelectric properties were investigated by ferroelectric tester, impedance analyzer and scanning probe microscopy, respectively. For the thin films deposited on LNO and Pt electrodes, the remnant polarization 2Pr are about 22.6 and 8.8 μC/cm2 under 375 kV/cm, the dielectric constants 238 and 579 at 10 kHz, the dielectric losses 0.06 and 0.30 at 10 kHz, the statistic d33eff values 95 and 81 pm/V. The improved piezoelectric properties could make (Na1−xKx)0.5Bi0.5TiO3 thin film as a promising candidate for piezoelectric thin film devices.  相似文献   

5.
The (Pb0.90La0.10)Ti0.975O3/PbTiO3 (PLT/PT), PbTiO3/(Pb0.90La0.10)Ti0.975O3/PbTiO3 (PT/PLT/PT) multilayered thin films with a PbOx buffer layer were in situ deposited by RF magnetron sputtering at the substrate temperature of 600 °C. With this method, highly (1 0 0)-oriented PLT/PT and PT/PLT/PT multilayered thin films were obtained. The PbOx buffer layer leads to the (1 0 0) orientation of the films. The dielectric, ferroelectric and pyroelectric properties of the PLT multilayered thin films were investigated. It is found that highly (1 0 0)-oriented PT/PLT/PT multilayered thin films possess higher remnant polarization 2Pr (44.1 μC/cm2) and better pyroelectric coefficient at room temperature p (p = 2.425 × 10−8 C/cm2 K) than these of PLT and PLT/PT thin films. These results indicate that the design of the PT/PLT/PT multilayered thin films with a PbOx buffer layer should be an effective way to enhance the dielectric, ferroelectric and pyroelectric properties. The mechanism of the enhanced ferroelectric properties was also discussed.  相似文献   

6.
BaZr0.1Ti0.9O3 and BaZr0.2Ti0.8O3 (BZT) thin films were deposited on Pt/Ti/LaAlO3 (1 0 0) substrates by radio-frequency magnetron sputtering, respectively. The films were further annealed at 800 °C for 30 min in oxygen. X-ray diffraction θ-2θ and Φ-scans showed that BaZr0.1Ti0.9O3 films displayed a highly (h 0 0) preferred orientation and a good cube-on-cube epitaxial growth on the LaAlO3 (1 0 0) substrate, while there are no obvious preferential orientation in BaZr0.2Ti0.8O3 thin films. The BaZr0.1Ti0.9O3 films possess larger grain size, higher dielectric constant, larger tunability, larger remanent polarization and coercive electric field than that of BaZr0.2Ti0.8O3 films. Whereas, BaZr0.1Ti0.9O3 films have larger dielectric losses and leakage current density. The results suggest that Zr4+ ion can decrease dielectric constant and restrain non-linearity. Moreover, the enhancement in dielectric properties of BaZr0.1Ti0.9O3 films may be attributed to (1 0 0) preferred orientation.  相似文献   

7.
Ba(Sn0.15Ti0.85)O3 (BTS) thin films were grown on Pt(1 1 1)/Ti/SiO2/Si and LaNiO3(LNO)/Pt(1 1 1)/Ti/SiO2/Si substrates by a sol-gel processing technique, respectively. The BTS thin films deposited on annealed Pt(1 1 1)/Ti/SiO2/Si and annealed LNO/Pt(1 1 1)/Ti/SiO2/Si substrates exhibited strong (1 1 1) and perfect (1 0 0) orientations, respectively. The BTS thin films grown on un-annealed Pt(1 1 1)/Ti/SiO2/Si substrates showed random orientation with intense (1 1 0) peak, while the films deposited on un-annealed LNO/Pt(1 1 1)/Ti/SiO2/Si substrate exhibited random orientation with intense (1 0 0) peak, respectively. The dielectric constant of the BTS films deposited on annealed Pt(1 1 1)/Ti/SiO2/Si, annealed LNO/Pt(1 1 1)/Ti/SiO2/Si, un-annealed Pt(1 1 1)/Ti/SiO2/Si and un-annealed LNO/Pt(1 1 1)/Ti/SiO2/Si substrates was 512, 565, 386 and 437, respectively, measured at a frequency of 100 kHz. A high tunability of 49.7% was obtained for the films deposited on annealed LNO/Pt(1 1 1)/Ti/SiO2/Si substrate, measured at the frequency of 100 kHz with an applied electric field of 200 kV/cm. The high tunability has been attributed to the (1 0 0) texture of the films and larger grain sizes.  相似文献   

8.
A series of metallic LaNiO3 (LNO) thin films were deposited on MgO (1 0 0) substrates by pulsed laser deposition (PLD) under the oxygen pressure of 20 Pa at different substrate temperatures from 450 to 750 °C. X-ray diffraction (XRD) was used to characterize the crystal structure of LNO films. θ-2θ scans of XRD indicate that LNO film deposited at a substrate temperature of 700 °C has a high orientation of (l l 0). At other substrate temperatures, the LNO films have mixed phases of (l l 0) and (l 0 0). Furthermore, pole figure measurements show that LNO thin films, with the bicrystalline structure, were epitaxially deposited on MgO (1 0 0) substrates in the mode of LNO (1 1 0)//MgO (1 0 0) at 700 °C. Reflection high-energy electric diffraction (RHEED) and atomic force microscopy (AFM) were also performed to investigate the microstructure of LNO films with the high (l l 0) orientation. RHEED patterns clearly confirm this epitaxial relationship. An atomically smooth surface of LNO films at 700 °C was obtained. In addition, bicrystalline epitaxial LNO films, fabricated at 700 °C, present a excellent conductivity with a lower electrical resistivity of 300 μ Ω cm. Thus, the obtained results indicate that bicystalline epitaxial LNO films could serve as a promising candidate of electrode materials for the fabrication of ferroelectric or dielectric films.  相似文献   

9.
Fibre-textured and epitaxial Nb-doped Pb(Zr0.53Ti0.47)O3 (PNZT) thin films were grown on the different substrates by a sol-gel process. The [1 0 0]- and [1 1 1]-fibre-textured polycrystalline PNZT films were obtained on platinized silicon substrates by introducing PbO and TiO2 seeding layers, while the [0 0 1]- and [1 1 1]-oriented epitaxial PNZT films were formed directly on Nb-doped SrTiO3 (Nb:STO) single-crystal substrates with (1 0 0) and (1 1 1) surfaces, respectively. The preferential orientation and phase structure of the fibre-textured and epitaxial PNZT films, as well as their influences on the electrical properties were investigated. Higher remnant polarization (Pr) and piezoelectric coefficient (d33) were obtained for the epitaxial PNZT films on Nb:STO substrates than that for the fibre-textured ones on platinized silicon substrates. For both fibre-textured and epitaxial cases, the PNZT films with [1 0 0]/[0 0 1] orientations show higher piezoelectric responses than [1 1 1]-oriented ones, whereas better ferroelectric properties can be obtained in the latter. The intrinsic and extrinsic contributions were discussed to explain the difference in electrical properties for differently oriented fibre-textured and epitaxial PNZT films on different substrates.  相似文献   

10.
Pb(Zr0.52Ti0.48)O3 (PZT) thin films with large remanent polarization and SrBi2Ta2O9 (SBT) thin films with excellent fatigue-resisting characteristic have been widely studied for non-volatile random access memories, respectively. To combine these two advantages, bilayered Pb(Zr0.52Ti0.48)O3/SrBi2Ta2O9 (PZT/SBT) thin films were fabricated on Pt/TiO2/SiO2/Si substrates by chemical solution deposition method. X-ray diffraction patterns revealed that the diffraction peaks of PZT/SBT thin films were completely composed of PZT and SBT, and no other secondary phase was observed. The electrical properties of the bilayered structure PZT/SBT films have been investigated in comparison with pure PZT and SBT films. PZT/SBT bilayered thin films showed larger remanent polarization (2Pr) of 18.37 μC/cm2 than pure SBT and less polarization fatigue up to 1 × 109 switching cycles than pure PZT. These results indicated that this bilayered structure of PZT/SBT is a promising material combination for ferroelectric memory applications.  相似文献   

11.
Bi3.25La0.75Ti3O12 (BLT) thin films were fabricated on Pt/Ti/SiO2/Si(1 0 0) substrates by chemical solution deposition (CSD), and the dependence of ferroelectric and dielectric properties of the as-deposited BLT thin films on excess Bi content in precursor sols was studied. It is found that the prepared BLT thin film shows the best polarization-electric field, capacitance-voltage and dielectric constant (?r)-frequency characteristics, when the value of excess Bi content in precursor sols is 10%. In detail, its remnant polarization (2Pr) value is 40 μC/cm2, the capacitance tunability is 21% measured at room temperature under conditions of an applied voltage of 8 V and measurement frequency of 10 kHz, and the ?r is 696 at 100 kHz frequency.  相似文献   

12.
Ferroelectric BiFeO3 thin films and artificial superlattices of (BiFeO3)m(SrTiO3)m (m∼1-10 unit cells) were fabricated on (0 0 1)-oriented SrTiO3 substrates by pulsed laser ablation. The variation of leakage current and macroscopic polarization with periodicity was studied. Piezo force microscopy studies revealed the presence of large ferroelectric domains in the case of BiFeO3 thin films while a size reduction in ferroelectric domains was observed in the case of superlattice structures. The results show that the modification of ferroelectric domains through superlattice could provide an additional control on engineering the domain wall mediated functional properties.  相似文献   

13.
Ferroelectric BiFeO3 thin films with Nd-Cr (or Sm-Cr) co-substitution (denoted by BNdFCr and BSmFCr, respectively) were deposited on the Pt(2 0 0)/TiO2/SiO2/Si(1 0 0) substrates by a chemical solution deposition method. X-ray diffraction patterns revealed the formation of BNdFCr and BSmFCr thin films without any secondary phases. The co-substituted BNdFCr (or BSmFCr) thin films, which were annealed at 550 °C for 30 min in N2 atmosphere, exhibited enhanced electrical properties compared to BFO thin films with the remanent polarization (2Pr) and coercive electric field (2Ec) of 196, 188 μC/cm2 and 600, 570 kV/cm with the electric field of 800 kV/cm, respectively. The leakage current densities of BNdFCr and BSmFCr thin films measured at room temperature were approximately three orders of magnitude lower than that of BFO thin film, and the leakage current at room temperature of the thin films exhibited three distinctive conduction behaviors. Furthermore, the values of pulse polarizations [i.e., +(P*-P^) or −(P*-P^)] of BNdFCr and BSmFCr thin films were reasonably unchanged up to 1.4 × 1010 switching cycles.  相似文献   

14.
The [(Pb0.90La0.10)Ti0.975O3/PbTiO3]n (PLT/PT)n (n = 1-6) multilayer thin films were deposited on the PbOx(1 0 0)/Pt/Ti/SiO2/Si substrates by RF magnetron sputtering method. The layer thickness of PbTiO3 in one periodicity kept unchanged, and the layer thickness of (Pb0.90La0.10)Ti0.975O3 is varied. The electrical properties of the (PLT/PT)n multilayer thin films were investigated as a function of the periodicity (n) and the orientation. The studied results show that the PbOx buffer layer results in the (PLT/PT)n films’ (1 0 0) orientation, and the (1 0 0)-oriented (PLT/PT)n multilayer thin films with n = 2 exhibit better pyroelectric properties and ferroelectric behavior than those of (PLT/PT)n films with other periodicities and orientations. The underlying physical mechanism for the enhanced electrical properties of (PLT/PT)n multilayer thin films was carefully discussed in terms of the periodicities and orientations.  相似文献   

15.
It is shown that different highly oriented Pb(Zr0.52,Ti0.48)O3 films can be obtained on Pt/Ti/SiO2/Si substrate using a sol-gel technique. The effects of pyrolysis temperature on the orientation, phase composition and ferroelectric properties of the films are investigated. It is found the ferroelectric hysteresis loops of (1 1 1)-oriented film, (1 1 1) and (1 0 0) mix-oriented film can both be saturated when the external electric field is large enough, whereas the hysteresis loop of (1 0 0)-oriented film is difficult to saturate. The analysis of X-ray diffraction indicated the possibility of different phase composition in different oriented films under large film residual stress. Higher remnant polarization (53 μC/cm2) for (1 0 0)-oriented film can be attributed to its more tetragonal phase composition, which results in that the in-plane domain switching can continuously occur with external electric field increasing.  相似文献   

16.
Sr2Bi4Ti5O18 (SBTi) and Nd-modified SBTi (SBNT) thin films were deposited on Pt/Ti/SiO2/Si (1 0 0) substrates using a sol-gel method. Structure, morphology and electric properties were investigated systematically. These films were randomly oriented and composed of rod-like grains. The remanent polarization (2Pr) and coercive field (Ec) of SBNT films were 30 μC/cm2 and 55 kV/cm, respectively. This value of 2Pr was much higher than the reported value of SBTi prepared by pulsed-laser deposition. More importantly, the SBNT films showed high fatigue resistance against continuous switching up to 3×109 cycles and excellent charge-retaining ability up to 3×104 s.  相似文献   

17.
Barium strontium titanate (BST) thin films were prepared by RF magnetron sputtering. The dielectric constant-voltage curves and the hysteresis loops of BST thin films with different grain sizes and film thicknesses were investigated. When the grain size increases from 12 nm to 35 nm, remarkable increases in dielectric constant and tunability were observed. Above 12 nm, the BST films exhibited size effects, i.e. a decrease in maximal polarization (Pm) and an increase in coercive electric field (Ec) with reduction in grain size. In our investigation, the dielectric constant, tunability and maximal polarization increased as the film thickness increased. Furthermore, the size dependence of the dielectric constant and tunability of Ba0.6Sr0.4TiO3 thin films is determined by that of the maximal polarization and the coercive electric field.  相似文献   

18.
Thermally evaporated Bi2Te3 thin films were deposited on glass substrates. X-ray diffraction study confirmed that the growned films are polycrystalline in nature having hexagonal structure. The film exhibits preferential orientation along the [0 1 5] direction for the films of all thickness together with other abundant planes [0 1 1 1] and [1 1 0]. Various structural parameters such as lattice constants, crystallite size, strain, and dislocation density have been calculated and they are found to be thickness dependent. The lattice parameters are found to be a=4.38 Å and c=30.40 Å. The grain size of the films increases with thickness as the dislocation density and the microstrain decreases with thickness. The mean bond energy and the average coordination number of Bi2Te3 thin film are found to be 1.72 eV and 2.4, respectively.  相似文献   

19.
J.B. Xu  B. Shen 《Applied Surface Science》2009,255(11):5922-5925
The highly (1 0 0)-oriented BaTiO3 thin films were fabricated on LaNiO3(1 0 0)/Pt/Ti/SiO2/Si substrates under low-temperature conditions. Substrate temperatures throughout the fabrication process remained at or below 400 °C, which allows this process to be compatible with many materials commonly used in integrated circuit manufacturing. X-ray diffraction data provided the evidence for single BaTiO3 phase. Field-emission scanning electron microscopy was used to study the columnar structure of the films. The dielectric properties as a function of frequency in the range of 1 kHz to 1 MHz was obtained. The room temperature remanent polarization (2Pr) and coercive field were found to be ∼5 μC/cm2 and 50 kV/cm, respectively. The BTO film maintains an excellent fatigue-free character even after 109 switching cycles.  相似文献   

20.
Lanthanum doped bismuth titanate thin films (Bi3.25La0.75Ti3O12 - BLT) were produced by the polymeric precursor method and crystallized in a domestic microwave oven and in conventional furnace. Using platinum coated silicon substrates configuration, ferroelectric properties of the films were determined with remanent polarization Pr and a coercive field Ec of 3.9 μC/cm2 and 70 kV/cm for the film annealed in the microwave oven and 20 μC/cm2 and 52 kV/cm for the film annealed in conventional furnace, respectively. The films annealed in conventional furnace exhibited excellent retention-free characteristics at low infant periods indicating that BLT thin films can be a promise material for use in non-volatile memories. On the other hand, the pinning of domains wall causes a strong decay at low infant periods for the films annealed in the microwave furnace which makes undesireable the application for future FeRAMS memories.  相似文献   

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