Statistical approach to bulk inclusion initialized damage in films

In experiments, we have found an abnormal relationship between probability of laser induced damage and number density of surface inclusion. From results of X-ray diffraction (XRD) and laser induced damage, we have drawn a conclusion that bulk inclusion plays a key role in damage process. Combining thermo-mechanical damage process and statistics of inclusion density distribution, we have deduced an equation which reflects the relationship between probability of laser induced damage, number density of inclusion, power density of laser pulse, and thickness of films. This model reveals that relationship between critical sizes of the dangerous inclusions (dangerous inclusions refer to the inclusions which can initialize film damage), embedded depth of inclusions, thermal diffusion length and tensile strength of films. This model develops the former work which is the statistics about surface inclusion.     

薄膜体内缺陷对损伤概率的影响

由实验中得到的激光损伤概率与表面杂质密度的关系出发，结合XRD测试和激光损伤测试的结果，得到体缺陷或杂质破坏起主导作用的损伤机理.将激光作用时杂质吸收的热学和力学过程与杂质分布的统计规律结合起来，得到了深埋于薄膜内部的杂质诱导薄膜损伤概率与杂质密度、激光功率密度以及薄膜厚度的关系.该模型认为能诱导薄膜破坏的杂质尺寸范围与杂质填埋深度有关，所以不同深度处能诱导薄膜损伤的杂质密度不一样，理论结果与实验结果符合得很好.该理论模型还可以很好地解释损伤形貌.     

VO2光学薄膜的脉冲激光损伤特性测试

为评价VO2光学薄膜在光电器件中的工作可靠性,搭建了可输出连续渐变激光能量密度的脉冲激光照射实验平台,运用1对1与s对12种激光损伤测试手段进行激光辐射照射实验,采用线性外推法和测量计算法2种方法对实验结果进行了处理并得出VO2薄膜在重复频率10 kHz、中心波长532 nm、脉冲宽度15 ps脉冲激光辐射下的损伤特性。结果表明:VO2薄膜损伤几率与脉冲激光的单脉冲能量密度呈线性关系,重复辐射的激光脉冲对VO2薄膜造成的损伤具有积累效应,且重复辐射的激光脉冲次数越多损伤积累效果越明显。     

多脉冲激光辐照下介质损伤理论研究

针对纳秒脉冲和飞秒脉冲不同的损伤机制,分别建立了两种多脉冲激光损伤模型。脉宽小于10 ps时,损伤是由于等离子体形成造成介质发生烧蚀所致,对此建立了基于电子密度演化方程的介质击穿模型;脉宽大于100 ps时,损伤是由于热沉积造成介质发生熔融所致,对此建立了基于傅里叶热传导方程的介质热损伤模型。通过计算两种模型下激光参数和材料参数对多脉冲损伤的影响,发现由于损伤机理不同,不同参数对单脉冲损伤阈值和多脉冲损伤阈值的影响趋势不完全一致,敏感程度也不同。通过计算得到了与实验结果一致的多脉冲损伤阈值与脉冲数间关系,使定量预估多脉冲损伤阈值和元件使用寿命成为可能。     

532nm皮秒脉冲激光对单晶硅的损伤特性研究

随着光电对抗和超短脉冲激光技术的发展,研究超短脉冲激光与单晶硅相互作用具有非常重要的理论和实际意义.为了进一步明确532 nm皮秒脉冲激光对单晶硅的损伤机理,本文开展了532 nm皮秒脉冲激光辐照单晶硅的损伤效应实验研究,测定了损伤阈值,明确了损伤机理,探讨了低通量下的脉冲累积效应.首先,利用波长为532 nm、脉冲宽...     

脉宽对中红外激光带内损伤HgCdTe材料的影响

研究了脉宽对于中红外脉冲激光带内损伤碲镉汞（HgCdTe）材料阈值的影响,使用一维自洽模型对激光辐照HgCdTe材料程中的载流子数密度,载流子对数目流,载流子对能流,载流子温度和材料晶格温度等相关参数进行仿真计算。仿真结果表明,波长2.85 μm,脉宽30 ps～10 ns单脉冲激光带内辐照HgCdTe材料的损伤阈值为200～500 mJ/cm2。其中,300 ps～3 ns脉冲激光的损伤阈值相近,均为200 mJ/cm2且低于其他脉宽激光的损伤阈值。搭建实验光路并进行相关实验验证仿真模型的正确性。实验发现,波长2.85 μm、脉宽300 ps的单脉冲激光带内辐照HgCdTe材料的损伤阈值在200 mJ/cm2左右。相同条件下,10 ns单脉冲激光带内辐照HgCdTe材料的损伤阈值约474 mJ/cm2。百皮秒脉冲激光对HgCdTe材料的损伤过程结合了热击穿和光学击穿效应,其独特的毁伤机理加剧了材料的损伤。     

Varied laser induced damage phenomena of gold coated gratings for pulse compression

In this paper, gold-coated gratings for pulse compression have been prepared and their laser damage experiments have been performed. Varied laser damage morphologies have been observed: when a 60 fs-pulsed laser with energy density slightly higher than the damage threshold was used, damage morphology with a characteristic of discrete distribution of small pits was appeared. These damage pits are linearly distributed at the junction of ridges and grooves. If the laser energy density is much higher than the damage threshold, the gold films was overall ablated and the grating structure disappeared. Besides, if the gold film has poor adhesion, it was peeled off. When a 450 ps-pulsed laser with energy density slightly higher than the damage threshold was used, part of grating ridges will be ablated and an obvious line exists between the ablated area and the unchanged area. In theory, the laser induced temperature field and stress field in gold-coated gratings were calculated based on the electromagnetic field using the finite element method. It is demonstrated that the temperature and thermal stress distribution characteristics are affected by the laser heating rate and the heat diffusion time (the calculated diffusion time ranges from 6 fs to 450 ps), which determines the laser damage characteristics. The possible damage drivers have electron hydrodynamic pressure, thermal ablation and thermal stress.     

The role of electron-phonon coupling in femtosecond laser damage of metals

Femtosecond laser pulses were applied to study the energy deposition depth and transfer to the lattice for Au, Ni, and Mo films of varying thickness. The onset of melting, defined here as damage threshold, was detected by measuring changes in the scattering, reflection and transmission of the incident light. Experiments were done in multi-shot mode and single-shot threshold fluences were extracted by taking incubation into account. Since melting requires a well-defined energy density, we found the threshold depends on the film thickness whenever this is smaller than the range of electronic energy transport. The dependence of the threshold fluence on the pulse length and film thickness can be well described by the two-temperature model, proving that laser damage in metals is a purely thermal process even for femtosecond pulses. The importance of electron-phonon coupling is reflected by the great difference in electron diffusion depths of noble and transition metals.     

杂质诱导熔石英激光的损伤机理

发展了355 nm纳秒激光下亚波长杂质粒子引起熔石英损伤的基本模型。通过Mie散射理论和热传导方程,计算了粒子与熔石英边界处的温度随粒子尺寸的变化关系,并分析了达到临界温度时,不同粒子诱导损伤所需的关键能量密度,讨论了各粒子最易引起熔石英损伤的尺寸。实验采用355 nm纳秒激光脉冲作用熔石英及其HF刻蚀样品,测得两者的损伤概率。研究表明:粒子吸收激光能量,随着粒子半径的增加,其边缘温度先增大后减小,一定尺寸范围内的粒子才会引起熔石英的损伤;关键能量密度所对应的粒子半径为最易引起熔石英损伤的关键粒子半径;经刻蚀后,熔石英样品表面杂质数密度降低,损伤概率降低,损伤阈值提高。     

原子激发态在高频强激光作用下的光电离研究

本文通过数值求解动量空间的三维含时薛定谔方程, 研究了原子高激发态在高频激光脉冲作用下, 在电离阈值附近的光电子能谱和两维动量角分布. 研究结果表明: 在该能量范围内, 单光子电离过程的贡献是最主要的. 体系初态的主量子数可以由光电子能谱峰值的位置来确定; 体系初态的角量子数可以通过光电子的两维动量角度分布确定. 在比较宽泛的参数范围内, 这一规律不随入射激光的强度和脉冲时间宽度的改变而改变, 因此原则上可以利用它对原子的初态进行识别. 此外, 还研究了体系的初态为相干叠加态, 光电子动量谱随着叠加态相对相位的变化规律. 关键词： 阈上电离 激发态 高频激光脉冲 两维动量角度分布     

基于Fokker-Planck方程的电介质材料短脉冲激光破坏机制分析

基于Pokker-Planck方程,建立一个描述短脉冲激光作用下电介质材料中导带电子能量分布随时间变化的模型,用数值方法计算电子能量分布与电子数密度随时间的演化过程,根据临界等离子体密度准则得到了不同激光脉冲宽度和波长下电介质材料(以SiO<,2>为例)的破坏阈值.结果发现,尽管激光波长通过3种途径对材料破坏阈值的确定...     

多波长激光同时辐照下熔石英元件的损伤研究

对比研究了3ω单独辐照、3ω＋2ω和3ω＋1ω双波长同时辐照下熔石英元件的初始损伤和损伤增长规律，重点研究3ω能量密度在其阈值附近时，低能量密度的2ω和1ω对初始损伤和损伤增长的影响，分析了波长间的能量耦合效应。结果表明:双波长同时辐照下，当2ω和1ω能量密度远低于其自身阈值时，它们对初始损伤几率和损伤增长阈值的影响可以忽略，但也会参与初始损伤和损伤增长过程，会增加初始损伤程度和损伤增长系数。基于飞秒双脉冲成像的冲击波速度测量表明，3ω和1ω同时辐照下，波长间的能量耦合效应会促进激光能量向材料沉积的效率。     

用1064nm激光增强HfO2/SiO2薄膜的抗激光损伤能力的实验研究

 用1 064nm激光实验研究了HfO₂/SiO₂薄膜的激光损伤增强效应，实验以薄膜激光损伤阈值70%的激光能量开始，采用N-ON-1方式处理薄膜，激光脉冲的能量增量为5J/cm²。实验结果表明，激光处理薄膜表面能使激光损伤阈值平均提高到3倍左右，并且薄膜的损伤尺度也明显减小。对有缺陷的薄膜，其缺陷经低能量激光后熔和消除，其抗激光损伤能力得到增强，但增强得并不显著，而薄膜本身的激光预处理，可以使其激光损伤阈值大大提高。     

Melting and resolidification of gold film irradiated by laser pulses less than 100 fs

The rapid melting and resolidification of gold films irradiated by laser pulses less than 100 fs are investigated using the dual-hyperbolic two-step model. The solid–liquid interfacial velocity in the ultrafast phase change process is obtained by coupling a hyperbolic interfacial energy balance equation and nucleation dynamics. The results are compared with the experimental data for the 28-fs laser. The effects of laser pulse widths and fluences on melting process are investigated. A phase chart of the variations of pulse widths and fluences is established. The relationship between the melting threshold and ablation threshold is also presented.     

不同脉冲宽度355 nm波长激光诱导DKDP晶体损伤特性

研究了用于三倍混频的Ⅱ类DKDP晶体在35 ps,850 ps和7.6 ns三种不同脉宽355 nm波长激光作用下的损伤特性。实验对比分析了损伤阈值、概率和损伤针点形貌、尺寸和密度,并根据损伤阈值及概率得到前驱体阈值及密度。结果表明,前驱体的激光能量吸收量与脉宽线性相关。35 ps激光作用下DKDP有一种前驱体吸收激光能量形成熔融状损伤针点。850 ps激光作用下有两种前驱体吸收激光能量并产生力学破坏形成中心熔融四周断裂的损伤针点。7.6 ns激光作用下只有一种前驱体吸收激光能量,并且形成的损伤针点与850 ps对应的损伤针点有相同特征。     

激光作用下纳米限域介质材料中的电子加速过程

采用蒙特卡罗方法模拟了1064 nm,GW/cm²级脉冲激光辐照下,纳米尺度材料中电子迁移及加速过程.电子在激光场中迁移的过程涉及晶格散射、表面散射以及碰撞电离等作用.结果表明:材料的尺度小到一定程度后,表面散射作用主导电子散射过程,小尺寸限制效应表现明显,电子很难有效地吸收激光能量.研究结果对分析具有纳米尺度微结构材料的激光损伤行为提供了依据.同时,根据该小尺寸限制效应可以设计出具有新型纳米微结构的高激光损伤阈值薄膜. 关键词： 激光辐照 小尺度效应 电子加速 蒙特卡罗模拟     

紫外脉冲激光退火发次对KDP晶体抗损伤性能的影响

在R-on-1的辐照模式下, 利用355 nm的紫外脉冲激光以低于KH₂PO₄ (KDP)晶体零概率损伤阈值的通量对其进行不同发次的全域扫描, 目的是为了研究KDP晶体在接受不同发次的紫外激光辐照后其抗损伤能力的变化规律及机制. 辐照后的1-on-1损伤测试表明, 适当的紫外激光退火可以有效地提升KDP晶体的抗损伤能力, 提升的幅度与其接受激光扫描的次数有关. 通过荧光和紫外吸收检测深入探讨了晶体内缺陷对激光退火的影响, 结果表明: 紫外脉冲激光辐照后KDP 晶体内的氧空位电子缺陷的存在与否是导致其抗损伤能力变化的主要原因; 通过拉曼和红外光谱的测量表明, 辐照后KDP 晶体内的PO₄, P–OH和P＝O基团的极化变形也导致了其抗损伤能力的改变. 关键词： 激光退火 荧光 拉曼 红外     

Pulse-width influence on the laser-induced structuring of CaF2 (111)

We have investigated the morphology of CaF₂ (111) irradiated by 780 nm laser pulses of varying pulse width (200 fs-8 ns) with fluences above the damage threshold. Large differences can be observed which we relate to the mechanisms and dynamics of defect production in this wide band gap material. The best defined and most controllable ablation is obtained for laser pulse widths of a few picoseconds. For nanosecond and femtosecond pulses strong fracturing of the crystal is observed with damage outside the laser irradiated zone. This has a thermal origin for nanosecond pulses but a non-thermal origin for pulse widths below approximately 1 ps.     

Plasma-mediated ablation of brain tissue with picosecond laser pulses

Plasma-mediated ablations of brain tissue have been performed using picosecond laser pulses obtained from a Nd:YLF oscillator/regenerative amplifier system. The laser pulses had a pulse duration of 35 ps at a wavelength of 1.053 µm. The pulse energy varied from 90 µJ to 550 µJ at a repetition rate of 400 Hz. The energy density at the ablation threshold was measured to be 20 J/cm². Comparisons have been made to 19 ps laser pulses at 1.68 µm and 2.92 µm from an OPG/OPA system and to microsecond pulse trains at 2.94 µm from a free running Er:YAG laser. Light microscopy and scanning electron microscopy were performed to judge the depth and the quality of the ablated cavities. No thermal damage was induced by either of the picosecond laser systems. The Er:YAG laser, on the other hand, showed 20 µm wide lateral damage zones due to the longer pulse durations and the higher pulse energies.     

脉冲CO2激光烧蚀锡靶等离子体的数值研究

使用一维辐射流体力学程序MULTI模拟了脉冲CO2激光烧蚀平面锡靶的过程,研究了脉冲宽度、峰值功率密度、靶材初始密度对锡等离子体电子密度、电子温度的时空分布的影响,并结合统计分析得到最有利于产生13.5 nm 极紫外光的激光脉冲宽度。模拟结果表明,脉冲宽度为100~200 ns的长脉冲激光产生的等离子体有利于实现极紫外输出的最佳条件,通过分析等离子体的电子密度、电子温度的分布对这一结论进行了解释。临界电子密度区域有效吸收了脉冲能量,而低密度的羽辉对激光与极紫外辐射的吸收很少。采用长脉冲激光,使得辐射极紫外等离子体持续时间更长,是提高极紫外辐射效率的有效手段。同时模拟还发现,靶材初始密度对等离子体参数的影响不大。