Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses

By moving silica glass in a preprogrammed structure, we directly produced three-dimensional holes with femtosecond laser pulses in single step. When distilled water was introduced into a hole drilled from the rear surface of the glass, the effects of blocking and redeposition of ablated material were greatly reduced and the aspect ratio of the depth of the hole was increased. Straight holes of 4-mu;m diameter were more than 200 microm deep. Three-dimensional channels can be micromachined inside transparent materials by use of this method, as we have demonstrated by drilling a square-wave-shaped hole inside silica glass.     

Formation and Characteristics of Through Holes with Picosecond-Laser Helical Drilling on Alloy Material

Precision drilling can improve the microhole quality by yielding a reduced recast layer thickness and no heat-affected zone. We evaluate the quality of the helical drilled holes, e.g., the recast layer, microcracks, and circularity by scanning electron microscopy. We investigate the overlap rate of the laser beam and find its influence on the efficiency of through-hole machining. The microhole entrance, exit, and side walls are smooth, without an accumulation of spattering material and the formation of a recast layer and microcracks. Optimum parameters for drilling through holes on alloy material GH2132 are a thickness of 500 μm, a laser fluence of 3.06 · 10^?2 J/mm², a pulse repetition rate of 100 kHz, and a helical speed of 60 rev/s. The tapering phenomenon can be avoided by using a helical system with a rotating stage, and the hole circularity is fairly good. Picosecond laser helical drilling can be effective for manufacturing microholes with a high quality. The development of high-power picosecond laser would promote picosecond laser drilling with future industrial relevance.     

Low-repetition-rate high-peak-power Kerr-lens mode-locked TiAl(2)O(3) laser with a multiple-pass cavity

We demonstrate a novel, long, multiple-pass cavity (MPC) to obtain low repetition rates and high peak intensities from Kerr-lens mode-locked lasers. We show that the MPC provides a zero effective length by a unity transformation of the q parameter after a given number of transits of the laser beam. Pulse durations of 16.5 fs with 0.7 MW of power at a 15-MHz repetition rate are achieved. This is, to our knowledge, the lowest repetition rate ever achieved directly from a femtosecond laser resonator without use of additional active devices and cavity dumping. The combination of low repetition rates and high peak intensity is extremely useful for femtosecond pump-probe and other nonlinear experiments because it permits the application of high peak intensity without excessive average power.     

Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses

Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated.     

高激光损伤阈值Ge-As-S硫系玻璃光纤及中红外超连续谱产生

测量了Ge-As-S系列硫系玻璃在中红外波段的飞秒激光损伤阈值,研究了它与玻璃化学组成的关系.基于优化的玻璃组成,采用棒管法制备了芯径为15μm的阶跃折射率非线性光纤.采用飞秒脉冲抽运光纤,研究了光纤中超连续谱(supercontinuum,SC)的产生特性.在研究的Ge-As-S硫系玻璃中,具有化学计量配比的Ge0.25As0.1S0.65玻璃显示出最高的激光损伤阈值.以该玻璃作为纤芯材料、以与其相匹配的Ge0.26As0.08S0.66玻璃作为包层材料制备的光纤的数值孔径约为0.24,背景损耗<2 dB/m.采用4.8μm的飞秒激光抽运长度为10 cm的光纤,获得了覆盖2.5-7.5μm的SC.这些结果表明,Ge-As-S硫系玻璃光纤是一种有潜力的中红外高亮度宽带SC产生的非线性介质.     

100W高光束质量光子晶体光纤棒皮秒脉冲放大器

使用光子晶体光纤棒作为增益介质,设计了皮秒脉冲放大器的实验光路。通过实验研究分析了光子晶体光纤棒皮秒脉冲放大器的输出功率、斜率效率与光光转换效率、光束质量、重复频率、脉宽、光谱。获得了最大平均功率为101.7 W,重复频率为30 MHz,脉宽为6.4 ps,横向和纵向光束质量分别为1.111,1.017的近衍射极限输出,放大器的斜率效率达到了65%,光光转换效率达到了58.9%。     

飞秒激光在空气和水中对硅片烧蚀加工的实验研究

采用1 kHz,800 nm,50 fs—24 ps的钛宝石激光脉冲对单晶硅样品在空气和水溶液环境中的烧蚀加工特性进行了研究.实验观察到了超短脉冲激光在空气氛围中烧蚀形成的双层环状结构,分析揭示了加工区域中心和边缘的烧蚀物理机制分别为热熔化和库仑爆炸,并测量了双层环状结构半径随入射激光能量、脉冲数及持续时间等的变化关系,结果表明获取较大深-宽比的加工效果需选择小能量脉冲激光的多次作用.在水溶液环境中,实验发现飞秒激光在样品表面诱导产生了亚微米量级的多孔状结构,而皮秒激光则更容易实现对硅表面的非热性去除.这是由于激光诱导的光机械应力和空泡效应随脉冲宽度变大而增强所致,在实验上确立了区分这两种不同加工状态的临界脉冲宽度. 关键词： 飞秒激光 硅片 激光加工     

Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers

Ultra-short pulsed laser ablation and micromachining of n-type, 4H-SiC wafer was performed using a 1552 nm wavelength, 2 ps pulse, 5 μJ pulse energy erbium-doped fiber laser with an objective of rapid etching of diaphragms for pressure sensors. Ablation rate, studied as a function of energy fluence, reached a maximum of 20 nm per pulse at 10 mJ/cm², which is much higher than that achievable by the femtosecond laser for the equivalent energy fluence. Ablation threshold was determined as 2 mJ/cm². Scanning electron microscope images supported the Coulomb explosion (CE) mechanism by revealing very fine particulates, smooth surfaces and absence of thermal effects including melt layer formation. It is hypothesized that defect-activated absorption and multiphoton absorption mechanisms gave rise to a charge density in the surface layers required for CE and enabled material expulsion in the form of nanoparticles. Trenches and holes micromachined by the picosecond laser exhibited clean and smooth edges and non-thermal ablation mode for pulse repetition rates less than 250 kHz. However carbonaceous material and recast layer were noted in the machined region when the pulse repetition rate was increased 500 kHz that could be attributed to the interaction between air plasma and micro/nanoparticles. A comparison with femtosecond pulsed lasers shows the promise that picosecond lasers are more efficient and cost effective tools for creating sensor diaphragms and via holes in 4H-SiC.     

Laser-induced changes in titanium by femtosecond,picosecond and millisecond laser ablation

In order to realize the qualitative control of the laser-induced changes trend and the quantitative control of the laser-induced changes range in titanium upon laser irradiation with different pulse duration, comparative ablation experiments by femtosecond, picosecond and millisecond pulsed lasers were carried out on titanium in this study. Then the final surface morphology, aspect ratio, chemical composition and microstructural state of the ablated titanium were analyzed by laser scanning confocal microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy, respectively. The dependency of the morphology, size, composition and microstructure of ablated titanium on laser pulse duration variation were emphatically discussed. It is found that, as the laser pulse duration increases from femtosecond to millisecond scale, surface morphology quality of ablated titanium gets worse, aspect ratio of microgroove decreases, proportion of titanium oxides in final ablation products becomes larger and the microstructural state of ablated titanium has a higher amorphization degree, which can be attributed to the decreased laser intensity per pulse and enhanced heat conduction effect in titanium with the pulse duration increasing.     

135 W average-power femtosecond pulses at 520 nm from a frequency-doubled fiber laser system

We present a high-average-power femtosecond laser system at 520 nm central wavelength. The laser system delivers sub-500 fs pulses with 135 W average power at a pulse repetition rate of 5.25 MHz. Excellent beam quality is provided by high power fiber amplifiers and maintained during frequency doubling, resulting in a beam quality factor of M2<1.2. To our knowledge, the system presented here is the highest average power green laser source generating femtosecond pulses with diffraction-limited beam quality.     

用于高功率密度光束控制的光寻址光阀研制

为解决光寻址液晶光阀在高功率密度光束控制领域的应用限制,介绍一种可用于高功率密度激光系统的光寻址液晶光阀,该光阀开关比不低于140∶1,可在高于2300 W/cm²的连续激光系统中正常工作。同时,所研制的光阀可在高重频吉瓦(GW)级功率密度的fs脉冲激光系统中正常工作,在该系统最大功率密度激光作用下,光阀未见明显温度变化,该脉冲激光系统最大平均功率密度超过300 W/cm²。     

1.8 mJ高倍率Nd:YAG板条皮秒激光放大器

设计了一种高倍率的固体皮秒脉冲激光放大器,采用Nd:YAG板条作为激光增益介质。借助板条结构的角度选通结构,搭建了板条五通放大系统,实现了对注入皮秒脉冲激光的高倍率放大。种子源工作在脉冲模式,放大器泵浦源在连续模式工作。皮秒光纤激光器可以在不同的重复频率下工作,脉冲宽度为13.4 ps。种子光经过隔离和耦合系统之后,注入板条的单脉冲能量为25 nJ。当种子源工作重复频率为24.46 MHz时,板条放大器输出平均功率377 W,单脉冲能量15.5 μJ;当种子源工作重复频率为49.8 kHz时,板条放大器输出平均功率89 W,单脉冲能量1.8 mJ,峰值功率为134 MW,放大倍率达到7.2×104。     

Diffractive multi-beam surface micro-processing using 10 ps laser pulses

A high repetition rate picosecond laser system is combined with a spatial light modulator (SLM) for diffractive multiple beam processing. The effect of the zero order beam is eliminated by adding a Fresnel zone lens (FZL) to defocus the un-diffracted beam at the processing plane. Chromatic dispersion, which is evident with a large bandwidth femtosecond pulses leading to the problem of distorted hole shape is eliminated due to the much narrower spectral bandwidth, 0.1 nm at 10 ps pulselength, resulting in highly uniform intensity spots, independent of diffraction angle. In addition, high-throughput processing is demonstrated by combining the high power laser output, 2.5 W at λ ≈ 1064 nm and fast repetition rate, f ≈ 20 kHz with P > 1.2 W diffracted into 25 parallel beams. This has the effect of creating an “effective” repetition rate of 500 kHz without restrictive scan speeds.     

高能激光器气动窗口光束质量的评价方法探讨

 通过对高能激光器气动窗口的研究现状和应用需求的分析，指出建立一套气动窗口光束质量的评价方法是十分必要的。在分析气动窗口工作机理和现有激光光束质量评价因子的基础上，提出一种评价气动窗口光束质量的方法，即用斯特列尔比来评价气动窗口的光束质量，并辅以相对衍射极限因子进行远场直观说明。分析表明，此种评价方法是可行的，并达到了不受限于气动窗口类别的光束质量评价的要求。     

Femtosecond laser ablation of gold in water: influence of the laser-produced plasma on the nanoparticle size distribution

We have demonstrated that a thick polymer cover layer can significantly improve UV laser micromachining. The polymer cover layer acts as a wave-guide, concentrating the incoming laser beam onto the underlying substrate to be machined. With this method very low laser fluences can be used to drill fine, high aspect ratio holes in quartz, glass and other materials that are generally difficult to machine. We show that despite the improvements recorded, our experimental conditions are not optimized and the contribution of the cover layers in our experiments is less than what it could be. We suggest improvements to the cover layer material to improve the micomachining. The method has important advantages over conventional methods since a mask is not required and common laser equipment can be used to quickly and inexpensively form desired holes within the substrate. PACS 89.20.Bb     

ICAN as a new laser paradigm for high energy,high average power femtosecond pulses

The application of petawatt lasers to scientific and technological problems is advancing rapidly. The usefulness of these applications will depend on being able to produce petawatt pulses at much higher repetition rates than is presently possible. The International Coherent Amplification Network (ICAN) consortium seeks to design high repetition rate petawatt lasers using large scale coherent beam combination of femtosecond pulse amplifiers built from optical fibres. This combination of technologies has the potential to overcome many of the hurdles to high energy, high average power pulsed lasers, opening up applications and meeting societal challenges.     

10MW串级脉冲发电机的理论、设计、实验豚应用研究

脉冲发电机具有小型、机动、灵活、可靠、寿命长等特点,作为高功率固体激光器和加速器电源是一新的技术路线,比较了各种类型脉冲电源的性能指标,解决了旋转磁通压缩和串级原理,提出了串级脉冲发电机的自激,偏极与双机同壳概念,给出电机的设计公式,10MW串级脉冲发电机的设计实验在强激光与粒子束领域中的潜在应用。     

飞秒激光烧蚀0Cr18Ni9不锈钢精度的影响因素

为了研究影响飞秒激光烧蚀0Cr18Ni9不锈钢精度的因素,采用飞秒激光对0Cr18Ni9不锈钢进行了切割和打孔实验。利用光学显微镜、光学金相显微镜等设备,对不锈钢烧蚀区形貌和切缝显微组织进行检测,基于烧蚀过程中CCD实时采集到的不锈钢表面的激光光斑图样,采用COMSOL Multiphysic数值模拟软件,模拟了烧蚀过程中激光束的发散传播行为,并计算了光束发散角。结果表明:当激光重复频率为5kHz时,厚度为160μm的0Cr18Ni9不锈钢切缝和孔边缘被明显烧黑,切缝处晶粒明显长大,存在热影响区;烧蚀过程中,由飞秒激光超高功率密度所致的金属-空气混合等离子体使光束沿传播方向上发生散射,发散角在6°～10°之间。热影响区的存在和混合等离子体的行为是影响飞秒激光烧蚀0Cr18Ni9不锈钢精度的主要因素。     

Femtosecond laser processing of indium-tin-oxide thin films

Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam׳s diameter (7 μm at 1/e²).     

Phase control of iron silicides using femtosecond laser irradiation

Phase control of Fe–Si amorphous thin film in micro area is demonstrated using femtosecond laser irradiation. A femtosecond laser beam with a high repetition rate over 200 kHz and tightly focused through an objective lens promotes both crystallization and phase transformation from an amorphous phase into crystalline β-FeSi₂, α-FeSi₂, or ε-FeSi phases. Formation of each crystalline phase is possible by changing the pulse energy or the scanning speed of the incident laser beam.