正弦相位调制型激光自混合干涉仪的实时位移测量技术

采用正弦相位调制技术与时域解调相位方法相结合,提高激光自混合干涉仪在大量程位移测量中实时测量的准确度和速度。通过在激光器外腔中放置的电光晶体调制器对光束进行正弦相位调制,采用时域解调相位方法解调干涉信号相位。同时满足了大量程位移测量过程中的速度要求以及实现干涉仪位移测量的实时性。实验上,用PI公司高分辨率的商用电动位移平台标定的结果验证了该正弦相位调制激光自混合干涉仪在百毫米级大尺度位移测量中可达到小于0.5μm的位移测量误差。对干涉仪在实时位移测量中的影响测量速度的因素进行了分析,得出了本干涉仪的测速上限。     

正弦相位调制自混合干涉微位移测量精度分析

为了提高自混合干涉仪的位移测量精度,提出将正弦相位调制技术引入自混合干涉中。相位调制由置于自混合干涉仪外腔中的电光晶体实现,相位解调由傅里叶分析的方法得到。对位移测量过程中各种可能的误差来源如电光晶体调制不稳定性、光在外腔中的二次反馈效应等对测量精度的影响进行了模拟分析,从理论上得到了这种新的信号处理方法可以达到纳米级的测量精度。实验上,用高精度的商用压电陶瓷标定的结果验证了这种正弦相位调制自混合干涉仪在普通实验室噪声环境中可以达到纳米级的位移测量精度。     

以慢变化近似为基础的新型正弦相位调制半导体激光干涉仪

提出并在实验上实现了一种以慢变化近似为基础的新型正弦相位调制半导体激光干涉仪。原理上它不要求相位解调一次和二次谐波分量振幅在实验中必须保持相等，从而将动态范围提高了３－４个数量级且不损失精度。用压电陶瓷和微电机驱动位移。     

相位调制激光多普勒频移测量方法的改进

本文对现有相位调制激光多普勒频移测量方法进行了改进,通过定义新的鉴频参量来同时利用相位调制信号直流和交流分量中的有用信息进行多普勒频移测量.由于相位调制信号直流分量中包含着调制信号光的Fabry-Perot干涉仪光强透过率,所以这一改进本质上是将基于Fabry-Perot干涉仪的边缘技术激光多普勒频移测量方法的优势引入到相位调制测量方法中,以提高其自身的性能.理论上证明改进后的相位调制激光多普勒频移测量方法无需对信号光的光强进行测量,所以可以进一步简化探测系统的结构和较少噪声混入的通道.另外,通过对改进前后鉴频和测量灵敏度曲线进行对比,还证明了其具有更高的测量灵敏度和动态范围.实验上对硬目标反射的频移可控信号光进行测量,不但证明了理论的正确性,而且证明了改进后的相位调制激光多普勒频移测量方法,测量动态范围提高约1倍,测量标准偏差降低约35%.     

干涉法测量半导体激光频率漂移实验

半导体激光在外调制时将产生频率漂移，将这种调制激光引入Michelson干涉仪，从强度调制和频率调制双重假设出发导出光强干涉方程，通过测量干涉项的相位噪声确定频率漂移值并对实验结果与过程作探讨.     

利用原子干涉仪的相位调制进行绝对转动测量

提出一种基于原子干涉仪的相位调制进行绝对转动测量的方法.以π/2-π-π/2构型的空间型原子干涉仪为例,通过对拉曼激光进行相位调制,然后在动量谱空间测量转动对原子速度谱的调制周期,获得原子干涉仪相对惯性空间的绝对转动.文章对于采用该法进行角速度测量的测量范围以及对相位调制频率的要求进行了分析,对于散粒噪声限下的转动测量灵敏度及其影响因素进行了仿真. 关键词： 原子干涉仪 原子陀螺 相位调制 绝对转动测量     

基于相位调制器与Fabry-Perot干涉仪的激光多普勒频移测量方法

提出了一种激光多普勒频移测量方法, 此方法利用正弦相位调制使信号光在原频率成分基础上产生正负一阶边带, 再由Fabry-Perot干涉仪对调制光振幅和相位进行调整, 使其产生固定频率的拍频信号, 利用此拍频信号的振幅随频率变化而变化的性质来进行多普勒频移测量. 通过理论分析证明该方法具有很高的测量精度, 加工装调难度不大, 兼顾了普通相干与非相干探测方法的优势. 另外通过实验证明该方法的正确性与可行性, 并通过与普通非相干方式比较发现该方法在测量精度上可以提高 约1个数量级. 关键词： 多普勒频移 相位调制 Fabry-Perot干涉仪 拍频     

利用原子干涉仪的相位调制进行绝对转动测量

提出一种基于原子干涉仪的相位调制进行绝对转动测量的方法.以π/2-π-π/2构型的空间型原子干涉仪为例，通过对拉曼激光进行相位调制，然后在动量谱空间测量转动对原子速度谱的调制周期，获得原子干涉仪相对惯性空间的绝对转动.文章对于采用该法进行角速度测量的测量范围以及对相位调制频率的要求进行了分析，对于散粒噪声限下的转动测量灵敏度及其影响因素进行了仿真.     

相位调制激光多普勒频移测量方法的误差研究

为了能够对相位调制激光多普勒频移测量方法进行定量分析以及优化设计,使其在实际应用中获得最佳测量结果,从该多普勒频移测量方法的工作原理出发,对其测量误差分布规律进行了理论与实验研究,建立了该方法的测量误差模型。并利用该模型对此测量方法的频移测量精度等方面受相位调制频率和相位调制深度的影响进行了理论研究,发现当相位调制频率为Fabry-Perot干涉仪透射率曲线半峰全宽的0.63倍以及相位调制深度为1.08时,该方法的测量精度可以达到最高。     

空间域相位调制干涉仪用于微位移测量

本文从波动光学的干涉理论出发，描述了空间域相位调制干涉测量位移的原理。给出干涉仪的系统构成原理。比较空间域相位调制与时间域相位调制的异同点。指出空间域相位调制的特点。提出空间域相位调制干涉仪的两种工作状态，即单条纹和双条纹工作状态。最后给出位移测量结果。     

Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy

In this paper, the displacement of an object is measured with a photothermal phase-modulating laser diode interferometer. A feedback control system is designed to reduce the measurement errors caused by the fluctuations in the optical wavelength of the laser diode and the vibrations of the optical components in the interferometer. A new method is proposed to enlarge the measuring range of displacement. Using this method, the measuring range is enlarged from half wavelength to nearly 125 μm and the measurement accuracy is about 1 nm. The simulation and experimental results have shown the usefulness of the method and the feedback control system.     

In-plane ESPI using an achromatic interferometer with low-coherence laser source

The use of an achromatic interferometer is explored as a means of doing in-plane ESPI measurements using a laser diode as the light source. This interferometer type, which uses a diffraction grating in place of the conventional beamsplitter, has two features that make it suitable for making ESPI measurements over extended areas, even when using a low-coherence laser diode source. First, the parallelogram optical geometry of the interferometer causes all rays passing through to have the same optical path lengths. Second, the interferometer is achromatic, whereby the piezo-actuated mirror that steps the illumination light does so by the same phase angle, independent of wavelength. This latter feature accommodates the spectral impurity of a laser diode source. A periodic variation of fringe visibility is observed in experiments, where narrow ranges of high visibility occur at regular spatial intervals. This behavior derives from the clustered discrete spectral character of laser diode light output. A method to “tune” the interferometer by slightly rotating the diffraction grating is described so as to achieve consistent high fringe visibility throughout the measured images.     

Two-wavelength speckle interferometry on rough surfaces using a mode hopping diode laser

Two measurements performed on rough surfaced objects are described in this paper. The first sample is a mechanical component with a rather difficult accessible surface to be measured. A two-wavelength krypton laser interferometer with an effective wavelength of 36.47 μm has been used. The second example is a convex surface of a ground lens. Here a mode hopping diode laser interferometer with an effective wavelength of 2·020 mm has been used.     

Laser mode behavior of the Cassini CIRS Fourier transform spectrometer at Saturn

The CIRS Fourier transform spectrometer aboard the NASA/ESA/ASI Cassini orbiter has been acquiring spectra of the Saturnian system since 2004. The CIRS reference interferometer employs a laser diode to trigger the interferogram sampling. Although the control of laser diode drive current and operating temperature are stringent enough to restrict laser wavelength variation to a small fraction of CIRS finest resolution element, the CIRS instrument does need to be restarted every year or two, at which time it may start in a new laser mode. By monitoring the Mylar absorption features in un-calibrated spectra due to the beam splitter Mylar substrate, it can be shown that these jumps are to adjacent modes and that most of the 8-year operation so far is restricted to three adjacent modes. For a given mode, the wavelength stability appears consistent with the stability of the laser diode drive current and operating temperature.     

Fast interrogation using sinusoidally current modulated laser diodes for fiber Fabry–Perot interferometric sensor consisting of fiber Bragg gratings

A fast interrogation method using a sinusoidal modulated laser diode for a fiber Fabry–Perot interferometric sensor consisting of Bragg gratings (FBG–FPI) is proposed.. The FBG–FPI has sharp transmittance peaks in the reflection band of the FBGs. Wavelength sweep produced by current modulation of a laser diode can be used to detect the peak position. This enables high-resolution strain or temperature measurement. To precisely control the current, the current modulation is realized using a laser diode controller (LDC) with external modulation function. In the modulation by a sawtooth wave, the possible speed of wavelength sweeping is limited to 100 kHz or less due to the bandwidth limitation of an LDC and thermal effect in a laser diodeUsing a sinusoidal wave as a modulation waveform enables wavelength sweeping at speeds exceeding 100 kHz. The modulation characteristics of the laser wavelength is evaluated experimentally and the operating wavelength is monitored using an asymmetric Mach–Zehnder interferometer. The resolution of 0.2 fm/\(\sqrt{\mathrm{Hz}}\) and measurement time of 1 \(\upmu\)s were experimentally demonstrated in the present sensor.     

Analysis of fringe locking in a laser diode interferometer under injection-current modulation

A theoretical analysis has been performed that explains a fringe-locking phenomenon observed in a two-beam interferometer in which a laser diode was subjected to optical feedback and modulation of its injection current. The dependence of wavelength change on the injection-current variation is calculated by use of a model of coupled resonators consisting of the laser cavity and the interferometer. The fringe phase change caused by modulation of the injection current is derived from this model and has proved to be suppressed within much less than 2pi in excess of an integer multiple of 2pi if the path difference of the interferometer is longer than 10 mm. The calculated phase fluctuation agrees well with those observed in experiments.     

A novel tunable dual-wavelength external-cavity laser diode array and its applications

We review the principles and characteristics of a novel tunable external-cavity laser diode source. It can operate as either a continuous wave (CW) single-wavelength, a CW dual-wavelength, a single-wavelength mode-locked, or a tunable dual-wavelength mode-locked laser. The gain medium is a commercial laser diode array. The telescopic external cavity consists of a grazing-incidence grating, a lens and a stripe-mirror. The external cavity provides functions of wavelength selection, dispersion compensation and spatial mode control. The characteristics of the laser under CW or mode-locked operation are described. The dual-wavelength laser output exhibits beat note beyond 7 THz. The tunable multi-terahertz beat frequency is characterized by a non-collinear intensity autocorrelation technique. A dual-wavelength interferometer that uses a tunable dual-wavelength laser as the light source is demonstrated. Finally, theoretical analysis is presented, which demonstrates that the dual-wavelength output of the laser is stable if the modes at the two wavelengths correspond to different array lateral modes.     

双剪切波面干涉测量法

用于星间通信的激光器具有接近衍射极限的激光波面,已有的波面测量方法,在这一具体测量问题中,都存在一定限制。双剪切波面干涉测量法在雅满横向剪切干涉仪的基础上,采用四块楔形平板,将干涉图分为上下两个部分,具有不同的条纹间距,由此求出波面高度和符号,同得到单幅干涉图的其它干涉测量方法相比,它的最小可测量波高减小一倍以上。在介绍干涉仪的基本结构和原理的基础上,模拟了像差存在时的干涉图,并在实验上得到了波高为0．3A的初步结果。双剪切波面干涉测量法,可以目视判断波差的符号和估计量值,为等光程相干,适用于半导体等相干长度小的光源。     

Phase-shifting interferometric profilometry with a wavelength-tunable diode source

A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carré algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.     

Sinusoidal phase-modulating laser diode interferometer insensitive to intensity modulation for real-time displacement measurement with feedback control system

In sinusoidal phase modulating laser diode (LD) interferometer, the injection current of the LD is sinusoidally modulated to realize the modulation of the wavelength. However, the light intensity of LD is also modulated, which affects the measurement accuracy. An all-fiber sinusoidal phase modulating LD interferometer for real-time displacement measurement is proposed where the influence of the intensity modulation is eliminated with a new algorithm. It is made clear that an optimal depth of the sinusoidal phase modulation (SPM) exists in the algorithm. Moreover, the SPM depth is locked at the optimal value by controlling the injection current with a feedback control system. The feasibility of the proposed interferometer for displacement measurement is verified by experiments.