气体放电阴极鞘层氩离子的自洽蒙特卡罗模拟

建立了气体放电阴极鞘层离子的自洽蒙特卡罗模拟模型,考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在阴极鞘层中的运动,得到了不同气压下自治电场分布,离子的能量分布和角分布,发现:离子由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场加速和聚焦了离子;在鞘层边界附近的电场呈非线性。     

气体放电空心阴极鞘层氩离子的蒙特-卡罗模拟研究

建立了气体放电空心圆筒阴极鞘层离子的自洽蒙特-卡罗模拟模型,对鞘层区内离子的输运过程进行了研究。考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在空心阴极鞘层中的运动,得到了不同放电条件下自洽电场分布,离子的能量分布,角分布以及电子密度分布和离子密度分布。计算结果表明:离子在由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场对离子起加速和聚焦作用;在鞘层内离子密度分布比较均匀,只是在鞘层边界附近变化 关键词：     

等离了体源离子注入球靶的蒙特—卡罗模拟

建立了在球形靶鞘层中蒙特－卡罗模拟模型，考虑了离子与中性粒子的电荷交换碰撞和弹性散射，以及精确依赖于入射离子能量的电荷交换碰撞截面和动量输运截面。模拟了不同气压下，在鞘层扩展过程中，氮离子Ｎ＾＋２到达靶表面的能量分布和入射分布，研究了它们的变化规律。     

等离子体源离子注入球形靶的蒙特-卡罗模拟

建立了在球形靶鞘层中离子的蒙特-卡罗模拟模型,考虑了离子与中性粒子的电荷交换碰撞和弹性散射,以及精确依赖于入射离子能量的电荷交换碰撞截面和动量输运截面。模拟了不同气压下,在鞘层扩展过程中,氮离子N_2~+到达靶表面的能量分布和入射角分布,研究了它们的变化规律。     

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采用蒙特卡罗模型对氮空心阴极放电等离子体鞘层离子(N2 、N )的输运过程进行了模拟研究,计算了阴极鞘层中氮离子(N2 、N )的能量及角分布的空间变化和粒子密度及平均能量随放电参数的变化规律。研究结果表明:空心阴极放电产生的氮离子,在鞘层输运过程中,N2 是密度几乎不变的低能粒子;N 是密度逐渐减少的高能粒子。随着电压增加,N 密度减小,平均能量增加;N2 密度和平均能量变化不明显。能量及入射角的相对分布规律与平板电极氮直流辉光放电基本类似,但圆筒空心阴极放电更有利于氮离子的产生。     

直流辉光等离子体阴极鞘层电子的输运过程

采用蒙特卡罗方法对氦直流辉光放电平板电极等离子体阴极鞘层内电子的输运过程进行了研究。利用实验数据拟合得到的电子与中性粒子的碰撞截面,计算了电子的平均能量及能量分布的空间变化,同时研究了电子的其它参数分布.     

氮气辉光放电阴极鞘层重粒子输运过程研究

采用蒙特卡罗模拟对氮气辉光放电等离子体阴极鞘层内离子(N₂⁺,N⁺)和快中性分子(N_2f)的输运过程进行了研究,计算了阴极鞘层中离子(N₂⁺,N⁺)和快中性分子的能量及角分布的空间变化,较好地解释了实验结果.得到了氮气辉光放电等离子体阴极附近主要存在着能量较低的荷能分子、密度较低的高能原子离子及密度和能量居中的分子离子.诸粒子状态随放电条件而变化.模拟结 关键词：     

离子(N2+, N+)在氮辉光放电等离子体光辐射中的作用

采用氮辉光放电等离子体电子与重粒子综合的Monte Carlo模型,研究了离子(N2+,N+)与氮分子碰撞产生光辐射的强度分布及其 在氮辉光放电等离子体光辐射中的作用。两种离子产生的各种碰撞激发和辐射都分布在鞘层区内,光辐射强度向阴极方向逐渐 增加,且总强度随放电电压增加而增强。相对于电子产生的碰撞激发辐射,离子(N2+,N+)引起的辐射在阴极附近引起次最大 光强,且原子离子N+的作用较分子离子N2+大。当电压较低时,离子(N2+,N+)引起的辐射可以忽略。模拟结果很好解释了两 种典型的N2辉光放电光学发射谱的实验结果,为等离子体诊断研究中的光谱数据分析提供参考。     

磁场对直流辉光放电阴极鞘层中电子输运过程的影响

采用MonteCarlo模拟方法研究了磁场对直流辉光放电阴极鞘层中电子输运过程的影响.磁场垂直于阴极鞘层中电场的方问.模型中,电子与中性粒子的碰撞过程有三种(弹性碰撞;激发碰撞和电离碰撞).电子的自由飞行步长由电子与中性粒子的碰撞频率来决定.计算了电子的密度分布,电子与中性粒子的非弹性碰撞速率,以及电子能量和电子通量分布等.结果表明,横向磁场能在一定程度上改变直流放电中电子的输运过程.磁场中电子与中性粒于的非弹性碰撞速率被增强,这一结果与实验结果符合较好.     

碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响

考虑了离子与中性粒子的弹性碰撞和电荷交换碰撞效应,建立了一套描述射频等离子体鞘层动力学特性的自洽模型,并利用MonteCarlo模拟方法研究了入射到电极上的离子的能量分布和角度分布.数值结果表明:随着放电气压增加,入射到电极上离子的能量分布逐渐地由双峰分布变成单峰分布,而且低能离子的数目也逐渐地增加.入射到电极上的离子呈小角分布,而且放电气压等参数对角度分布的影响不是太明显. 关键词： 射频放电 等离子体 离子 鞘层     

Hybrid computer simulations: electrical charging of dust particles in low-temperature plasma

This paper is focused on the study of the electrical charging process of micron-sized particles immersed into low-temperature argon plasma by the methods of computer modelling. The hybrid computer simulations are performed for a set of particles with the radius up to in order to determine the dependence of the electric charge on the surface of the particulate on its radius. This dependence seems to be linear. The distribution of the electric potential in the vicinity of the particulate is obtained from the fluid model. Afterwards, the non self-consistent particle simulation is performed in order to determine both the reaction rates and the electric charge on the surface of the particulate. The most important collision processes of charged particles in plasma and the appropriate dependence of the collision cross-section on the particle energy are considered (elastic scattering of electrons on neutrals, excitation of neutrals into all important energetic states, ionisation of Argon atoms by fast electrons, elastic scattering of positively charged ions etc.). The presented algorithm provides an effective way, how the key quantity in dusty plasma physics – electric charge on the surface of the particulate – can be determined.     

Energy exchange in structure scattering: a molecular dynamics study for Cs from Pt(1 1 1)

We have employed a classical molecular dynamics simulation to investigate the energy transfer of a heavy projectile ion to a surface, i.e. Cs⁺ impacting onto Pt(1 1 1), for incidence energies between 25 and 100 eV and an incidence angle of 45°. The in-plane scattering results show a continuous increase of the final energy with increasing scattering angle. All scattering intensities have a main supraspecular peak and scattering into subspecular angles increases with increasing incidence energy. The large projectile/target mass ratio causes a high energy loss and a strong angular dependence of the final energy distribution. The trends of the energy transfer and its angular dependence can be understood in terms of a binary collision model, augmented with double collisions and an the image charge correction. Backscattering at high incidence energies leads to a distribution of very low final energies, indicating the onset of surface sputtering. Peaks in the energy spectra arise from impact site dependent scattering and can be assigned to single, double, triple or sputtering type collisions.     

He-O_2转动激发截面的理论计算

用公认精确的密耦 (Close Coupling)方法、采用两种不同的相互作用势计算了He -O2 碰撞的态 态转动激发截面 (E =2 6.8meV) ,通过系统研究和计算发现 :低能散射时 ,He -O2 碰撞的弹性散射主要发生在小角部分 ,而非弹性转动激发主要发生在大角部分。研究表明 :转动激发截面对势能表面的方向性和散射角都非常敏感。     

Neutralization of multiply charged ions at a surface

We report on emission processes induced by particle-solid interaction involving ions with a large potential (i.e., high ion charge state) and low kinetic energy. After an introduction into existing neutralization models for ion scattering at a metal surface a detailed discussion on the electron emission processes is presented.The number of electrons emitted per incident ion is shown to be proportional to the potential energy only within a restricted parameter field involving charge state and ion velocity. The kinetic energy distribution of emitted electrons is dominated by low-energetic electrons (30 eV), while inner shell holes of the projectile ion can initiate high-energetic characteristic Auger electrons. The presence of inner shell holes is also of importance for the charge state of highly charged ions being scattered at surfaces whereas normally the charge state distribution of scattered ions depends on the impact parameter only.The influence of the primary ion charge state on the sputtering yield of insulating surfaces is seen for the charge state of sputtered particles, whereas the total sputtering yield seems to be insensitive. This question is still subject to controversy, however.Photon emission dependent on the charge state of the impinging ion has been observed up to now only for extremely highly charged ions as hydrogenlike Ar or Kr.     

电子和负离子的反射运动对碰撞电负性磁鞘的影响

研究了鞘层中电子和负离子的反射运动对碰撞电负性磁鞘玻姆判据和鞘层结构的影响.通过理论推导得到了考虑鞘层中电子和负离子的反射运动时鞘层玻姆判据表达式,并通过数值模拟得到了电子和负离子采用玻尔兹曼模型和反射运动模型时离子马赫数的下限随参数的变化曲线以及鞘层中带电粒子密度的分布曲线.结果表明,电子和负离子的反射运动模型和玻尔兹曼模型离子马赫数的上限完全相同,下限表达式不同,反射运动模型中下限还与基板电势有关,且随着基板电势值的增加而增大,达到与玻尔兹曼分布中相同值后保持不变,随着鞘边负离子浓度和温度的不同达到最大值的速度不同;离子马赫数的下限在玻尔兹曼和反射运动模型中都随鞘边负离子浓度的增加和温度的降低而减小,只是在反射运动模型中的最大值要小;两种模型中离子马赫数的下限都随鞘边电场的增加而增加,但在玻尔兹曼模型中增加得更快最终值更大;两种模型离子马赫数的下限都随碰撞参数或磁场角度的增加而降低,但在玻尔兹曼模型中降低更快,随着碰撞参数或者磁场角度的增加两种模型中离子马赫数的下限趋于一致;当基板电势值较小时,电子和负离子的反射运动对鞘层结构影响较大,当基板电势值较大时电子和负离子反射运动对鞘层中带电粒子密度分布的影响很小.     

电子碰撞Ne和类Ne离子电离的三重微分截面理论研究

采用扭曲波玻恩近似理论计算了共面对称几何条件下类Ne离子2p轨道电子在不同出射电子能量下的(e,2e)反应三重微分截面,出射电子能量分别为3,5,7.5,10,15,20,30和50 eV.计算结果表明,随着出射电子能量的增大和核电荷数Z的增大,三重微分截面的幅度逐渐减小.除Ne以外,对其他离子,在出射电子角度为150?附近出现了一个新的结构,对比不同出射电子能量时的(e,2e)反应三重微分截面,发现这个结构的幅度随着出射电子的能量先增大后减小,文中用一种两次两体碰撞过程对这些现象进行了解释.     

Hyperthermal scattering of Cs from Pt(1 1 1): the effect of image charge on the ion-surface energy transfer

We have studied the energy exchange between hyperthermal (5-100 eV) Cs⁺ projectiles and a Pt(1 1 1) surface by measuring the kinetic energy of the scattered ions. The scattering geometry was chosen to be in-plane with specular scattering angles, and the energy of the scattered ions was analyzed as functions of incidence energy and angle. For low incidence energy (<40 eV), the energy transfer to the Pt surface is substantially enhanced due to the attractive image charge force between Cs⁺ and the surface. The image charge effects are highlighted by the different energy transfer on Pt(1 1 1) and Si(1 1 1) surfaces. Analysis of the experimental results using two- and three-dimensional theoretical models revealed a well depth of 1 eV for the image charge potential. Hyperthermal Cs⁺ ions scatter from Pt(1 1 1) predominantly via double collisions with Pt atoms, though the scattering phenomena are insensitive to the impact site at the surface.     

Energy distributions of low-energy noble gas ions backscattered from a single-crystal nickel surface

The energy distribution of noble gas ions in the energy range below 1 keV from a single-crystalline surface depends on the composition and the structure of the surface, the mass and energy of the impinging ions and the geometrical conditions (e.g. angle of incidence) of the experiment. In the case of He ions the kinematic binary collision theory can be applied. For Ne ions the scattering process is more complicated, good agreement between a multiple scattering model and the experiment is achieved. Deviations from this general behaviour are observed with heavier ions (Ar⁺) and at very low energies. The experimental evidence for the different processes is discussed.