Dynamic modeling of thickness-mode piezoelectric transducer using the block diagram approach

This paper aims to provide an alternative method to determine the characteristics of a piezoelectric transducer from measurement. A block diagram approach is proposed to analyze the dynamic characteristics of a thickness-mode piezoelectric transducer at its resonance frequency. Based on the feedback loop framework, the input-output relations of the electromechanical interaction of the transducer are described in terms of linear block diagram models. Furthermore, the closed-loop relations from external force to vibration velocity and electric current from generated voltage are easily found by Mason’s rule to characterize the equivalent mechanical admittance and electrical impedance, respectively. An example of a Langevin transducer with 28.15 kHz resonance frequency is illustrated for dynamics analysis. The frequency responses of the piezoelectric transducer, resulting from a force and current input, are respectively measured to identify the system parameters of the feedback model. The experimental results demonstrate the effectiveness of the proposed method.     

Complete ultrasonic transducer characterization and its use for models and measurements

Transmitting and receiving properties of ultrasonic piezoelectric crystal transducers that directly affect the measured output voltage in an ultrasonic measurement system are described. These transducer properties are the transducer's electrical impedance and sensitivity, the transducer's radiation impedance, and the transducer's effective parameters (effective radius and focal length). It is shown that all these properties can be obtained with a series of calibration measurements, most of them purely electrical in nature. This series of measurements is described, including a newly developed method that makes the determination of the transducer sensitivity simpler than with previous methods. It is demonstrated that by combining these transducer properties with knowledge of the electrical properties of the pulser/receiver and cabling and the acoustic/elastic processes present in an ultrasonic measurement system, it is possible to accurately simulate the output voltage of the system.     

Definition and measurement of the normalized electrical impedance of lossy piezoelectric resonators for ultrasonic transducers

Relevant equivalent circuit parameters and values of material constants of a piezoelectric resonator can be determined from measurements of its electrical input impedance as a function of frequency. The complex electrical impedance curves and the associated critical frequencies are the basis of this characterization by the piezoelectric resonance method. In this paper, the previously introduced concept of normalized electrical impedance of the lossy resonator, extended to include piezoelectric losses, is applied to the analysis of the effects of different types of intrinsic losses on peak values, bandwidths and characteristic frequencies. The resulting impedance patterns depend solely on the electromechanical coupling coefficient and the loss tangents, providing a useful tool for the analysis of low-Q resonators. The normalized impedance is experimentally evaluated from the basic data provided by an HP 4194A impedance analyser by means of specifically developed ASP programs.     

Monodispersion of the Investigated Flow in the Sorting Unit of a particle size optical and electrical analyser

The use of a compact cylindrical piezoelectric transducer in the jet dispersion unit of the sorting system of an optical or electrical particle size analyser is discussed. Solving two equations for the shift distribution in a piezoelectric transducer with a running fluid chamber, important expressions for the vibrational velocity of acoustic terminal, mechanical impedance, of the stable part of the jet are obtained. The practical application of this technique is illustrated by the calculation of desi parameters for an industrial dispersion unit used in an H.cytophotometer (Ortho Instruments, USA). Good agreement between theoretical and experimental results is shown.     

Electro-acoustical characterization procedure for cMUTs

A procedure for the electro-acoustical characterization in air of cMUTs is reported. First, the measured input electrical impedance of the transducer is used to calculate the transducer parameters at different bias voltages by fitting it with the Mason model. Then, the single membrane equivalent circuit can be calculated. Second, the cMUT impulse response is obtained through a send-and-receive experiment to be compared with the one predicted by the Mason model. In order to minimize the influence of the emitter in the obtained impulse response an ad hoc broadband piezoelectric transducer centered at the resonant frequency of the cMUT was fabricated. Using this transducer, no deconvolution of the impulse response of the emitter in the cMUT reception pulse is necessary. The procedure is tested for two cMUTs with silicon-rich nitride as structural layer and different membrane diameters (60 and 70 microm).     

Design and modeling of inversion layer ultrasonic transducers using LiNbO3 single crystal

Using inversion domain engineering controlled by heating temperature, the LiNbO(3) (LNO) piezoelectric plate with both odd and even-order thickness-extensional modes can be excited simultaneously. Therefore, the inversion layer ultrasound transducer is expected to be capable of operating over a wider frequency range. In this paper, the electrical impedance and the acoustic characteristics of LiNbO(3) (LNO) inversion layer transducer have been studied by finite element modeling (FEM). The transducer designed for this study uses a 36 degrees rotated Y-cut LiNbO(3) thin plate with an active element thickness of approximately 100 microm. First the electrical and elastic properties of the 36 degrees rotated Y-cut LNO were obtained by transforming a basic piezoelectric matrix for Z-cut LNO. In order to validate the FEM using the transformed properties several pieces of pure and 50% inversion layer LNO were tested on the electrical impedance analyzer. The modeled impedance characteristics were consistent with the measured data. Next the model was used to design 50-60 MHz transducers using pure and 30% inversion LNO. Two lambda/4 matching layers and a Tungsten loaded epoxy backing were used in these designs. The modeled results show that an over 90% bandwidth transducer can be made with proper matching and 30% inversion layer.     

Mode analysis of trilaminar bender bar transducers using an approximation method

Based on the vibration theory of a thin plate, an analytical treatment of the trilaminar bender bar with piezoelectric elements and inert substrate of various lengths is presented for mode analysis. Resonance frequency and effective electromechanical coupling coefficient are calculated by this method. The impacts of the geometries of the bender bar on the performance of its fundamental and third-order flexural mode are investigated in detail under rigid boundary conditions. It is shown that resonance frequency is extremely sensitive to the thickness of inert substrate. Moreover, the effective electromechanical coupling coefficient has peaks as the length of piezoelectric elements varies. The peaks are achieved when the length of piezoelectric elements equals the length between two nodes having zero strains in the x-direction. The trilaminar bender bar will be effectively excited when the strains on the piezoelectric element are in the same phase, which is important to disclose the vibration mechanisms of this kind of transducer. Also, analytical results are compared with the ones of numerical simulation. The results suggest that effective electromechanical coupling coefficient shares similar patterns with electrical conductance, which can be used to characterize transducer performance to a certain extent. It also demonstrates that the analytical treatment provides an efficient alternative way for optimizing the bender bar transducer design.     

Bonding and impedance matching of acoustic transducers using silver epoxy

Silver epoxy was selected to bond transducer plates on glass substrates. The properties and thickness of the bonding medium affect the electrical input impedance of the transducer. Thus, the thickness of the silver epoxy bonding layer was used as a design parameter to optimize the structure for the transducer input impedance to match the 50 Ω output impedance of most radio frequency (RF) generators. Simulation and experimental results show that nearly perfect matching is achieved without using any matching circuit. At the matching condition, the transducer operates at a frequency band a little bit below the half-wavelength resonant frequency of the piezoelectric plate. In experiments, lead titanate (PT) piezoelectric plates were employed. Both full-size, 11.5 mm × 2 mm × 0.4 mm, and half-size, 5.75 mm × 2 mm × 0.4 mm, can be well matched using optimal silver epoxy thickness. The transducer assemblies demonstrate high efficiency. The conversion loss from electrical power to acoustic power in soda-lime glass is 4.3 dB. This loss is low considering the fact that the transducers operate at off-resonance by 12%. With proper choice of silver epoxy thickness, the transducer can be matched at the fundamental, the 3rd and 5th harmonic frequencies. This leads to the possible realization of triple-band transducers. Reliability was assessed with thermal cycling test according to Telcordia GR-468-Core recommendation. Of the 30 transducer assemblies tested, none broke until 2900 cycles and 27 have sustained beyond 4050 cycles.     

Receiving sensitivity and transmitting voltage response of a fluid loaded spherical piezoelectric transducer with an elastic coating

A method is presented to determine the response of a spherical acoustic transducer that consists of a fluid-filled piezoelectric sphere with an elastic coating embedded in infinite fluid to electrical and plane-wave acoustic excitations. The exact spherically symmetric, linear, differential, governing equations are used for the interior and exterior fluids, and elastic and piezoelectric materials. Under acoustic excitation and open circuit boundary condition, the equation governing the piezoelectric sphere is homogeneous and the solution is expressed in terms of Bessel functions. Under electrical excitation, the equation governing the piezoelectric sphere is inhomogeneous and the complementary solution is expressed in terms of Bessel functions and the particular integral is expressed in terms of a power series. Numerical results are presented to illustrate the effect of dimensions of the piezoelectric sphere, fluid loading, elastic coating and internal material losses on the open-circuit receiving sensitivity and transmitting voltage response of the transducer.     

Modeling NDT piezoelectric ultrasonic transmitters

Ultrasonic NDT applications are frequently based on the spike excitation of piezoelectric transducers by means of efficient pulsers which usually include a power switching device (e.g. SCR or MOS-FET) and some rectifier components. In this paper we present an approximate frequency domain electro-acoustic model for pulsed piezoelectric ultrasonic transmitters which, by integrating partial models of the different stages (driving electronics, tuning/matching networks and broadband piezoelectric transducer), allows the computation of the emission transfer function and output force temporal waveform. An approximate frequency domain model is used for the evaluation of the electrical driving pulse from the spike generator. Tuning circuits, interconnecting cable and mechanical impedance matching layers are modeled by means of transmission lines and the classical quadripole approach. The KLM model is used for the piezoelectric transducer. In addition, a PSPICE scheme is used for an alternative simulation of the broadband driving spike, including the accurate evaluation of non-linear driving effects. Several examples illustrate the capabilities of the specifically developed software.     

Electrical characterization of plate piezoelectric transducers bonded to a finite substrate

This article presents a new technique for characterizing piezoelectric transducers attached to a finite substrate. It consists of determining the impedance of the transducer cleared of the effects caused by finite dimensions of the substrate. This technique is validated by comparison with measurements on a transducer mounted on an effectively half-infinite substrate. It is applied for the electrical matching of a lithium niobate plate transducer bonded to a fused quartz rod.     

Simulations of a full sonoreactor accounting for cavitation

In spite of the increasing interest in ultrasound processing applications, industrial scale-up remains limited, in particular by the unavailability of predictive computer tools. In this study, using a previously published model of cavitating liquids implementable as a non-linear Helmholtz equation, it is shown that a full sonoreactor can be modelled and simulated. The model includes the full transducer and the vibrations of the vessel walls, using the physics of elastic solids and piezo-electricity. The control-loop used by the generator to set the optimal frequency is also accounted for. Apart from the geometry, the unique input of the model is the current feeding the transducer whereas the dissipated electrical power, transducer complex impedance and working frequency are available as outputs. The model is put to the test against experiments realized in different geometries, varying either the input current or the transducer immersion depth. Despite the overestimation of the power dissipated in the liquid, the evolution of the acoustic load in both cases is reasonably well reproduced by simulation, which partially validates the method used.     

A FEM-based method to determine the complex material properties of piezoelectric disks

Numerical simulations allow modeling piezoelectric devices and ultrasonic transducers. However, the accuracy in the results is limited by the precise knowledge of the elastic, dielectric and piezoelectric properties of the piezoelectric material. To introduce the energy losses, these properties can be represented by complex numbers, where the real part of the model essentially determines the resonance frequencies and the imaginary part determines the amplitude of each resonant mode. In this work, a method based on the Finite Element Method (FEM) is modified to obtain the imaginary material properties of piezoelectric disks. The material properties are determined from the electrical impedance curve of the disk, which is measured by an impedance analyzer. The method consists in obtaining the material properties that minimize the error between experimental and numerical impedance curves over a wide range of frequencies. The proposed methodology starts with a sensitivity analysis of each parameter, determining the influence of each parameter over a set of resonant modes. Sensitivity results are used to implement a preliminary algorithm approaching the solution in order to avoid the search to be trapped into a local minimum. The method is applied to determine the material properties of a Pz27 disk sample from Ferroperm. The obtained properties are used to calculate the electrical impedance curve of the disk with a Finite Element algorithm, which is compared with the experimental electrical impedance curve. Additionally, the results were validated by comparing the numerical displacement profile with the displacements measured by a laser Doppler vibrometer. The comparison between the numerical and experimental results shows excellent agreement for both electrical impedance curve and for the displacement profile over the disk surface. The agreement between numerical and experimental displacement profiles shows that, although only the electrical impedance curve is considered in the adjustment procedure, the obtained material properties allow simulating the displacement amplitude accurately.     

Vibration characteristics of a piezoelectric open-shell transducer

This paper deals with the vibration characteristics of a piezoelectric open-shell transducer which was made by dividing a cylindrical piezoelectric transducer longitudinally into two segments. Two-dimensional governing equations were derived by using the cylindrical membrane theory. Applying mechanical and electrical boundary conditions yielded a characteristic equation for the resonance frequencies of the piezoelectric open-shell transducer. The fundamental frequency and the electromechanical coupling factor were calculated and compared with the results of the finite element analysis and experiment. The fundamental mode shape obtained theoretically was compared with the result of the finite element analysis. The theoretical analysis was verified to provide the vibration characteristics of an open-shell transducer.     

压电换能器导纳的研究

本对压电换能器的等效电路及导纳圆测定方法进行了介绍．对于提供压电换能器与所在电路间的阻抗匹配有重要意义。     

Characteristics of backing impacts on the performance of the thickness mode piezoelectric transducer

The impacts of the thickness, the specific acoustic impedance and the mechanical loss factor of the backing on the performance of the thickness mode piezoelectric transducer are systemically studied, which are focused on the effective electromechanical coupling coefficient and the mechanical quality factor near the center frequency. The results show that with contin?uous increasing of the backing thickness, the effective electromechanical coupling coefficient and the mechanical quality factor are found rapidly declined by oscillation way. With the increase of the difference value of the acoustic impedance between the backing material and the piezoelec?tric material, the effective electromechanical coupling coefficient deceases and the mechanical quality factor increases. Under condition that the thickness of the piezoelectric material is fixed, the effective electromechanical coupling coefficient is found declined with the increase of the mechanical loss factor by monotonous way. The mechanical quality factor has minimum value and the electric characteristic curve tends to be smooth in a given frequency range. The equivalent circuit theory result is in good agreement with the ones by finite element method and the experimental results. The work mentioned above provides a theoretical guidance for the design and experimental fabrication of the thickness mode piezoelectric transducer.     

Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage. The major design novelty is the isolation posts in the vacuum cavities of the CMUT cells instead of full-coverage insulation layers in conventional CMUTs. This eliminates the contact voltage drifting due to charging caused by the insulation layer, and enables repeatable CMUT operation in the post-contact regime. Ultrasonic tests of the CMUTs with isolation posts (PostCMUTs) in air (electrical input impedance and capacitance vs. bias voltage) and immersion (transmission and reception) indicate acoustic performance similar to that obtained from conventional CMUTs while no undesired side effects of this new design is observed.     

基于2-2型压电复合材料的新型宽频带径向振动超声换能器

本文提出了一种基于2-2型压电复合材料的新型宽频带径向振动超声换能器,它主要由内金属圆环和外压电陶瓷复合材料圆环组成.首先利用Newnham串并联理论和均匀场理论推导了2-2型压电复合材料的等效参数;其次利用解析法得到了金属圆环和径向极化压电复合陶瓷圆环径向振动的机电等效电路;最后得到了换能器的六端机电等效电路,从而得到了换能器的频率方程.接着分析了换能器共振频率和反共振频率以及有效机电耦合系数与几何尺寸、两相体积占比的关系,采用仿真软件对新型换能器的径向振动进行了数值模拟.结果表明,利用解析法得到的共振频率和反共振频率与数值模拟结果吻合较好.此外,对换能器在水下的辐射声场进行了仿真研究,结果表明新型复合材料径向换能器相比传统纯陶瓷径向换能器,发射电压响应幅值更大,工作带宽提高接近一倍,声匹配更佳.     

Traveling wave ultrasonic motor: coupling effects in free stator

Generally a stator of traveling wave ultrasonic motor (TWUM) consists of piezoelectric transducers (annular plate or rods) coupled by the way of a metallic ring. These transducers divided into halves are excited independently by two electrical signals with different phases of about 90 degrees. So an elastic traveling wave propagates along the circumference of the ring and a rotor pressed on this vibrating surface is then driven by the stator via contact forces. Many difficulties appear in developing TWUM because the contact between the stator and the rotor via a frictional material is very important. However that may be, the first stage consists in obtaining a vibrating stator with optimum characteristics with two symmetrical phases. The aim of this paper is to discuss some coupling effects in a free stator through an enhanced equivalent circuit model. A simple experimental method based on impedance measurements is performed to estimate the coupling characteristics at a low driving voltage. This paper reports results obtained with the free stator of the well known piezoelectric ultrasonic motor "USR60" by Shinsei Co. Ltd. Since the stator behaves as an elastic body, interactions between the two electrical inputs might be described by the introduction of a coupling oscillator. The comparison of experimental and theoretical results leads to validate the new equivalent circuit of the free stator. The presence of coupling impedance could imply a change of electrical supply condition to optimize the TWUM efficiency. The effects of unbalanced features for each electrical input and the applicability of the proposed model to actual operating condition are discussed in the paper.     

Study on the broadband tonpilz transducer with a single hole

To get a wide-band transducer, the piezoelectric sandwiched transducer with a frustum hole in its head piece is presented in this paper. The equivalent circuit is derived, and the expressions of the equivalent mass and the equivalent impedance of the transducer are obtained by using one-dimensional (1D) design theory. Moreover, the expressions of the mechanical quality factor and the frequency bandwidth are obtained and the transmitting voltage response of the transducer is calculated by using finite element method. The theoretical results show that the frequency bandwidth of the transducer with a hole is wider than that without a hole when their resonant frequencies are almost equal. The tested results are in good agreement with the theoretical calculations.