共查询到20条相似文献,搜索用时 63 毫秒
1.
提出一种新的零朗奇检测法用于测量大口径非球面镜的面形。利用光线追迹和正弦条纹的相位信息设计补偿正弦光栅。使用透射液晶显示屏显示补偿正弦光栅并作为相移装置。一个离轴点光源发出的光被镜面反射后通过补偿正弦光栅,摄像机记录携带镜面偏差信息的相移条纹图。通过对相移条纹图的分析确定被测镜面的实际横向像差以及对应的理想横向像差,然后基于朗奇检测的几何原理得到被测镜面的偏差梯度,对其积分获得被测镜面的偏差,进而重建被测镜面的三维面形。与传统的零朗奇检测法相比,这种方法可以消除补偿光栅上每个条纹带边缘的锯齿形状,而且可以获得镜面上足够多的待测点信息。计算机模拟和初步实验验证了该方法的可行性。 相似文献
2.
3.
Shack-Hartmann波前传感器非零位在轴检测离轴非球面反射镜 总被引:1,自引:0,他引:1
在离轴非球面反射镜研磨后期和粗抛光阶段,被测反射镜面形与理想面形存在着较大的偏差,表面反射率较低,采用干涉测量会因局部区域干涉条纹过密或条纹对比度过低,造成普通干涉仪无法进行全口径测量,而普通接触式轮廓仪测量精度此时已经不能满足加工要求。鉴于Shack-Hartmann波前传感器较大的动态范围和较高的测量精度,提出了采用Shack-Hartmann波前传感器非零位在轴检测离轴非球面面形,研究了该方法的检测原理并搭建了检测系统,分析了系统误差来源,并制作了用于在轴检测离轴非球面的参考波前,对两个不同加工精度的离轴非球面反射镜进行了测量,并与干涉仪的测量结果进行了对比。对比结果表明,Shack-Hartmann波前传感器的测量结果是正确可靠的,并且可以弥补轮廓仪测量和干涉仪测量的不足,从而证明了采用Shack-Hartmann波前传感器在轴检测离轴非球面的可行性和正确性。 相似文献
4.
朗契检验相位探测和波面恢复 总被引:3,自引:1,他引:2
本文将传统的朗契检验的物理原理和同相位探测技术结合起来,解决了用其它干涉测量方法所难以解决的大量值波差或非球面波面的检测,并提供了一个简单而有效的检测方法。在该方法中,横向移动朗契光栅,使得朗契图的辐射光通量随时间作周期性变化,运用同相位探测技术来求取朗契图所表示的波象差的两个斜率面,利用Zernike多项式拟合算法由这两个斜率面复原出波象差,并结合实验装置实测了大象差系统的波象差。 相似文献
5.
6.
7.
According to the structural characteristics of aspheric off-axis two-mirror optical system, the imaging characteristics of the system were analyzed by using primary aberration theory. Based on the characteristics of different aspheric surfaces, the vector expression of system aberrations was derived. Using the Seidel coefficients, the primary wave aberration of systems were expanded and values of system aberration for different aspheric surface shapes were specifically calculated. After the evaluation index of the off-axis structure was determined, the imaging qualities of different surface shape combinations were compared. Then the optimal surface shape selection method was analyzed by quantitative comparison results. The results show that compared with other reflector combination methods, the spherical aberration, coma and astigmatism of the off-axis double paraboloid system are all 0, the wavefront RMS is much better than λ/14 (λ=0.587 6 μm), and the Strehl ratio is greater than 0.8. According to the calculation results, it not only has a stronger ability to suppress multiple primary aberrations, but also can effectively compress the volume of the system. Copyright ©2022 Journal of Applied Optics. All rights reserved. 相似文献
8.
为满足离轴非球面镜在光学检验前的面形检测需求,对使用激光跟踪仪测量离轴非球面的方法进行了研究。详细介绍了使用激光跟踪仪测量离轴非球面的检测步骤及数据处理方法。使用激光跟踪仪对一处于研磨阶段的口径为150 mm,顶点曲率半径为1200 mm,离轴量为240 mm的离轴抛物面镜进行了测量,进行了测量不确定度分析并与三坐标测量机的测量结果进行了比对。结果显示激光跟踪仪与三坐标测量机的面形测量峰谷值一致性优于1 μm。分析及实验结果表明此检测方法简单易行,灵活通用,适用于离轴非球面抛光前的面形检测。 相似文献
9.
为了能够精确地完成对大口径高陡度非球面在细磨和抛光过程中的测量,提出了一种将子孔径拼接技术和补偿技术相结合的检测方法。介绍了该方法的基本原理,建立了合理的数学模型,编制了拼接计算软件。利用该方法对一外形尺寸为400 mm×300 mm的高次离轴非球面进行了测试,通过最小二乘法拟合消去各子孔径相对基准子孔径的调整误差以及整个系统的装调定位误差,得到了准确的全孔径面形分布。对实验精度和误差来源进行了分析,并将拼接面形与全孔径测量面形相对比,二者是一致的。 相似文献
10.
The Ronchi grating is applied to measure the large-aperture aspheric surfaces in a quantitative way on the basis of self-made software which includes Ronchi null grating design, collection of Ronchi graph, and data processing. The measured concave parabolic mirror has a diameter of 630 mm and an F number of 1.34. The measurement result is approximately the same as that of the ZYGO interferometer. This analysis software and test method establish a good foundation for the quantitative measurement of the big error about the large-aperture aspheric surfaces of the next generation telescope. 相似文献
11.
12.
13.
提出了一种用朗奇法定量检测大口径非球面的新技术。主要以大口径非球面镜的加工表面为研究对象,设计了大口径非球面检测系统,该系统由CCD摄像机、He-Ne激光器、郎奇光栅、微型计算机等组成。并利用大口径非球面检测系统对一个顶点曲率半径为1638.69mm,被测曲面半通光口径为315mm的光学元件的面形进行了实际测量,给出了光学元件标准偏差和峰谷值测量结果。最后对测量结果进行了讨论。研究结果表明:基于郎奇法的几何原理,利用CCD摄像系统定量检测大口径非球面的方法具有较高的精度。 相似文献
14.
子孔径拼接检测非球面时调整误差的补偿 总被引:1,自引:0,他引:1
针对在子孔径拼接测量非球面的过程中干涉仪与待测非球面相对位置存在的对准误差,提出了一种基于模式搜索迭代算法的调整误差补偿方法。该方法可以很好地从测量的子孔径相位数据中消除由拼接测量位置没有对准带来的调整误差,实现多个子孔径的精确拼接。对该方法的基本原理和实现步骤进行了分析和研究,建立了子孔径拼接测量的调整误差补偿模型。对口径为230 mm×141 mm的离轴碳化硅非球面反射镜进行了调整误差补偿和相位数据拼接,得到了精确的全口径面形分布。作为验证,对待测非球面进行了零位补偿检测,结果显示两种测试方法的面形PV值和RMS值的相对偏差仅为0.57%和2.74%。 相似文献
15.
16.
利用莫尔条纹的准正弦特性的三维轮廓术 总被引:5,自引:0,他引:5
分析了两个矩形光栅迭合产生的莫尔条纹的光强分布特性,通过选择适当的光栅参数,可得到一个近似的正弦分划板,并把它用于三维面形测量中,实验结果表明,这种方法简单,易于自动处理,有广泛的实用价值。 相似文献
17.
A simplified reconstructing method for the aspheric surface testing based on scanning interference technology is presented. The aspheric normal intersects the optical axis at different points with different angles, which is called normal congruence; a normal congruence can identify an aspheric surface. In this method, the test aspheric surface is shifted along the optical axis to scan the tested aspheric surface; meanwhile a series of interferograms and phase maps are obtained. The angles between the normal lines and the aspheric axis are obtained using the positions of zero-phase points, according to the image-forming principle of the camera. Here, Zernike polynomials are applied to analyze the phase maps and extract the zero-phase points. Finally, the absolute coordinates of the test surface is rebuilt through iterative integration. Because both the system deformation and amplification do not affect the reconstruction result, this method can avoid complicated stitching algorithm in the subaperture stitching interferometric method. Experimental results show that the method has high accuracy and reliability. 相似文献
18.
基于付科法的离轴非球面波面再现检测技术,通过对付科检测过程的数学分析,建立了离轴非球面波面再现的数学模型,提出了波面整合算法,通过对两幅阴影图灰度值积分、去倾斜及波面整合等数据处理再现出被检离轴非球面的波面误差.在被检离轴非球面两个方向的弥散斑分别为0.152mm和0.284mm时,干涉检测得到其面形误差峰谷值为1.110μm、均方根值为0.194μm,且两种检测方法的波面轮廓相一致.实验结果验证了基于付科法的离轴非球面再现技术的正确性,可以应用于指导离轴非球面在细磨粗抛阶段的加工并且实现与精抛光阶段干涉检测的有效衔接. 相似文献
19.
20.
J. D. R. Valera P. G. Sinha T. Yoshino O. J. Lkberg 《Optics and Lasers in Engineering》1999,31(3):231
We describe a technique that is used for the real-time measurement of the vibration of an object point. The technique can be used when the vibration is characterized by a large amplitude, i.e. several millimeters. The technique has additional advantages that it requires no special surface treatment and is insensitive to object in-plane displacements that are small. In this technique an object point is illuminated by a small diameter beam (at an angle) that is structured with straight parallel fringes. The illuminated object point is then imaged onto a Ronchi ruling. The total light transmitted through the Ronchi ruling is then used to recover the vibration of the object point, in real time, by using well-known servo techniques. 相似文献