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1.
针对衍射光学元件制造中材料选择的局限以及遮挡效应,采用了紫外光固化有机-无机纳米复合材料快速成型技术制造衍射光学元件,获得高折射率、高色散的衍射光学元件。通过有机-无机纳米复合材料制备实验获得了一种适合制造衍射光学元件的复合材料配方,配方各成分包括质量分数为57.97%的2官脂肪族聚氨酯丙烯酸酯(2PUA)、质量分数为38.64%的季戊四醇三丙烯酸酯(PETA)、质量分数为1.45%的光引发剂184(Irgacure 184)、质量分数为1.93%的分散剂163(disperbyk 163)和质量分数可控的纳米粒子ITO。使用该方法制备了紫外光固化衍射光学元件,并使用台阶仪测量得到衍射光学元件模芯表面的平均微结构高度为13.26μm,光固化衍射光学元件表面的平均微结构高度为12.58μm,使用光固化衍射光学元件与模芯微结构的相对误差为5.141%。紫外光固化有机-无机纳米复合材料的衍射光学元件制造技术突破了材料选择局限,减小了遮挡误差,对宽波段的折衍射混合光学系统的快速成型具有重要意义。  相似文献   

2.
介绍了一种基于计算全息的非对称多台阶衍射光学元件印模制备方法,研究了相位型计算全息的工作原理和设计方法,建立了相应的光学系统和衍射光波模型,设计了求取相位型印模微结构的算法流程。在理论分析的基础上,以叠心图案为例,利用MATLAB分别仿真了2台阶、4台阶、8台阶、16台阶衍射光学元件的相位信息以及表面微结构形貌,并对比了其再现图像的质量,发现台阶数越多,再现图像的质量越好。获得印模空间高度数据以及表面结构分布后,利用单点金刚石车削技术,采用快刀加工方式,分别加工了元件尺寸为6 mm×6 mm,最小特征尺寸为30 um的2台阶和4台阶印模,并获得了实际加工的台阶轮廓曲线以及表面结构轮廓。最后采用紫外固化纳米压印技术实现了4台阶印模的复制过程,并对复制样品进行了图像再现,结果表明该方法能用于非对称低台阶数衍射光学元件印模的制备。  相似文献   

3.
纳米压印多孔硅模板的研究   总被引:2,自引:0,他引:2       下载免费PDF全文
张铮  徐智谋  孙堂友  徐海峰  陈存华  彭静 《物理学报》2014,63(1):18102-018102
纳米压印模板通常采用极紫外光刻、聚焦离子束光刻和电子束光刻等传统光刻技术制备,成本较高.寻找一种简单、低成本的纳米压印模板制备方法以提升纳米压印光刻技术的应用成为研究的重点与难点.本文以多孔氧化铝为母模板,采用纳米压印光刻技术对纳米多孔硅模板的制备进行了研究.在硅基表面成功制备出纳米多孔阵列结构,孔间距为350—560 nm,孔径在170—480 nm,孔深为200 nm.在激发波长为514 nm时,拉曼光谱的测试结果表明,相对于单面抛光的硅片,纳米多孔结构的硅模板拉曼光强有了约12倍左右的提升,对提升硅基光电器件的应用具有重要的意义.最后,利用多孔硅模板作为纳米压印母模板,通过热压印技术,成功制备出了聚合物纳米柱软模板.  相似文献   

4.
陈修国  袁奎  杜卫超  陈军  江浩  张传维  刘世元 《物理学报》2016,65(7):70703-070703
为了实现有效的工艺监控, 在批量化纳米制造中对纳米结构的关键尺寸等几何参数进行快速、低成本、非破坏性的精确测量具有十分重要的意义. 光学散射仪目前已经发展成为批量化纳米制造中纳米结构几何参数在线测量的一种重要手段. 传统光学散射测量技术只能获得光斑照射区内待测参数的平均值, 而对小于光斑照射区内样品的微小变化难以准确分析. 此外, 由于其只能进行单点测试, 必须要移动样品台进行扫描才能获得大面积区域内待测参数的分布信息, 从而严重影响测试效率. 为此, 本文将传统光学散射测量技术与显微成像技术相结合, 提出利用Mueller矩阵成像椭偏仪实现纳米结构几何参数的大面积快速准确测量. Mueller矩阵成像椭偏仪具有传统Mueller矩阵椭偏仪测量信息全、光谱灵敏度高的优势, 同时又有显微成像技术高空间分辨率的优点, 有望为批量化纳米制造中纳米结构几何参数提供一种大面积、快速、低成本、非破坏性的精确测量新途径.  相似文献   

5.
陆乃彦  翁雨燕 《物理学报》2014,63(22):228104-228104
纳米压印模板通常需要经过电子束光刻、电子束沉积、光刻胶剥离、反应离子刻蚀等一系列复杂工艺获得,这使得纳米压印模板的制作难度大,成本高. 寻找一种灵活简单的纳米压印模板制备方法以提升纳米压印模板的制作效率,是广泛应用纳米压印技术的研究重点和难点. 本文以写好光栅结构的电子束光刻胶层为母模板,获得聚二甲基硅氧烷软模板,并以此为模板对共轭高分子聚(9,9-二辛基)芴薄膜进行纳米压印,实现光栅结构转移,成功制备出纳米光栅结构的共轭高分子薄膜. 偏振吸收谱和透射电镜结果表明,纳米压印实现图案转移的同时,还可以将共轭高分子的主链控制在光栅条纹方向,这对有机发光器件性能的提升具有重要的意义. 研究结果还表明,应用该方法同样可以对聚(9,9-二辛基芴共苯并噻二唑)薄膜进行光栅图案化,同时实现其取向控制. 关键词: 纳米压印 软模板共轭高分子 分子链取向  相似文献   

6.
用串行迭代算法设计具有长焦深功能的衍射光学元件   总被引:3,自引:0,他引:3  
提出一种串行迭代算法,将它用于控制波前传播进行衍射光学元件设计.用此算法设计出能使半导体激光束聚焦并具有长焦深功能的衍射光学元件.模拟计算结果表明了此设计方法的有效性.该衍射光学元件已用光刻和离子刻蚀技术制备并进行了光学实验研究,取得了与理论设计一致的实验结果.  相似文献   

7.
针对传统聚光系统中菲涅耳透镜成本较高并且光强分布不均匀的弊端,提出了利用紫外纳米压印技术制作菲涅耳透镜的方法.利用几何光学的光线追迹理论,设计了菲涅耳透镜模具.采用自行研制的紫外纳米压印系统对模具进行压印,紫外曝光后制得薄膜菲涅耳透镜.在太阳光下进行了测试,测试结果表明,低成本、高聚光倍数和光强分布均匀的菲涅耳透镜是可以实现的.  相似文献   

8.
针对传统聚光系统中菲涅耳透镜成本较高并且光强分布不均匀的弊端,提出了利用紫外纳米压印技术制作菲涅耳透镜的方法.利用几何光学的光线追迹理论,设计了菲涅耳透镜模具.采用自行研制的紫外纳米压印系统对模具进行压印,紫外曝光后制得薄膜菲涅耳透镜.在太阳光下进行了测试,测试结果表明,低成本、高聚光倍数和光强分布均匀的菲涅耳透镜是可以实现的.  相似文献   

9.
陈雷明  郭艳峰  郭熹  唐为华 《物理学报》2006,55(12):6511-6514
制备纳米压印中的模版是压印技术的基本条件.目前很多压印模版是利用高硬度材料制作的,但是这些材料比较难以加工,从而限制了纳米压印技术的发展.提出一种利用光刻胶制备纳米压印模版的方法.利用聚焦离子束对光刻胶的改性作用,控制加工的条件,将柔性的光刻胶改性为硬度很高的材料,从而形成纳米压印模版.这种方法具有速度快、制备简单等特点,是一种新颖的加工方式,扩展了聚焦离子束的加工范围,可用于其他的纳米加工领域. 关键词: 纳米压印 光刻胶 聚焦离子束 纳米孔阵列  相似文献   

10.
为改善电铸填充高深宽比纳米光栅结构时出现的空洞现象,本文向电铸液中添加平整剂健那绿,利用健那绿分子的静电吸附原理消除该工艺缺陷.结合纳米压印技术及电铸工艺,在柔性基底上完成了纳米压印镍模板的复制.复制过程中,首先通过热压将硅原始模板上的纳米光栅结构转移到聚合物基底上,制作出压印所需的软模板;然后采用溅射工艺在聚合物基底纳米结构表面沉积镍种子层并通过电铸工艺完成纳米光栅结构的填充及复制模板背板的生长;最后将铸层与聚合物基底进行分离.通过此工艺,成功复制了一块带有6个1.3mm×1.3mm纳米光栅区域的纳米压印镍模板,模板表面光栅周期为201nm,线宽98nm,深度104nm.与原始硅模板相比,复制模板特征尺寸偏差在5%以内,表明复制模板特征尺寸与相应原始模板特征尺寸之间有良好的一致性.热压实验后复制模板表面光栅结构周期无偏差,线宽偏差在2%以内,实验结果表明复制的纳米压印模板机械强度足以适用于热压过程.  相似文献   

11.
A review of schemes for multiple access in fiber optic networks shows that a hybrid of wavelength and code division multiple access (WCDMA) combines the best features of both. In particular, the hybrid scheme retains the large information carrying capacity of wavelength division multiple access (WDMA) and flexibility of code division multiple access (CDMA). In this paper WDMA, optical CDMA (OCDMA), and WCDMA networks are discussed. In OCDMA networks, concept of incoherent and coherent coding including inverse decoding and matched filter is introduced. The delay performance of both WDMA and WCDMA networks, under the simple suboptimum access protocols based on cyclic search, is computed. It has been shown quantitatively that tuning delay significantly affects the delay performance of both WDMA and WCDMA networks. Futhermore, delay performance of WCDMA networks is always better than the WDMA networks for the same tuning delay, load, and number of users.  相似文献   

12.
Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.  相似文献   

13.
A simple technique of pulse compression, based on the linear chirp compensation of self-phase modulation (SPM) spectra in dispersion shifted fibers, is demonstrated. The optimization procedure is carried out, for a short span of a single-mode fiber, using a parabolic law, which describes the behavior of the squared output pulse width versus the pump peak power in the case of Gaussian pulses. The experimental results give a minimum pulse duration of 233 fs, which is in good agreement with the model. Shorter and coherent pulses, down to 90 fs, have been obtained by inserting an interference filter at the optical output.  相似文献   

14.
Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·104 Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.  相似文献   

15.
A multi-conjugate adaptive optics (MCAO) can offer a possibility of widening field of view (FOV) characterized by the isoplanatic angle, and the choose of conjugate height becomes a basic problem for MCAO, which influences the size of iosplanatic angle. Considering the application of lidar, the isoplanatic angle's expressions of two deformable mirrors (DMs) MCAO for uplink and downlink are deduced. The effects of conjugate heights for dual-conjugate AO are thoughtfully discussed, and the isoplanatic angles are further analyzed. The results show that the isopanatic angle varies with the conjugate height and reaches the maximum as the conjugate height is at the optimal altitude. Moreover, the optimal conjugate height changes with the propagation distance.  相似文献   

16.
Due to the limit of response speed of the present single-photon detector, the code rate is still too low to come into practical use for the present quantum key distribution (QKD) system.A new idea is put up to design a quick single-photon detector.This quick single-photon detector is composed of a multi-port optic-fiber splitter and many avalanche photo diodes (APDs).Au of the ports with APDs work on the time division and cooperate with a logic discriminating and deciding unit driven by the clock signal.The operation frequency lies on the number N of ports, and can reach N times of the conventional single-photon detector.The single-photon prompt detection can come true for high repetition-rate pulses.The applying of this detector will largely raise the code rate of the QKD, and boost the commercial use.  相似文献   

17.
18.
The performance of port/starboard discrimination of dual-line array will be seriously degraded when the space between the two line arrays of the dual-line array is mismatched. The directivity function of the delay-sum and delay-subtract beamforming is deduced and the port/starboard discrimination of the delay-sum and delay-subtract beamforming is also studied both under the ideal status and the status under which the space between the two line arrays of the dual-line array is mismatched. Analysis results show the delay-subtract beamforming has better performance of port/starboard discrimination. At last, the sea trial results demonstrate the theoretical results.  相似文献   

19.
The Shanghai Synchrotron Radiation Facility(SSRF)booster ring,a full energy injector for the storage ring,is deigned to accelerate the electron beam energy from 150MeV to 3.5GeV that demands high extraction efficiency at the extraction energy with low beam loss rate when electrons are ramping.Closed orbit distortion(COD)caused by bending magnet field uniformity errors which affects the machine performance harmfully could be effectively reduced by bending magnet location sorting.Considering the affections of random errors in measurement,both ideal sorting and realistic sorting are studied based on measured bending magnet field uniformity errors and one reasonable combination of bending magnets which can reduce the horizontal COD by a factor of 5is given as the final installation sequence of the booster bending magnets in this paper.  相似文献   

20.
With a novel light-weight and absolutely calibrated ultraviolet (UV) spectrometer, UV skylight radiances and O3 slant column densities are measured by balloon-borne limb measurements in Xinjiang area, China. UV skylight radiances measured at the height of 31 km are compared with the results from Modtran in the wavelength range from 290 to 420 nm. O3 slant column densities are derived from radiance spectra in the Huggins bands (320 - 335 nm) using differential optical absorption spectroscopy method. And the parameter exhibits a good correlation with the same value simulated by radiative transfer model (Tracy). The O3 profile simultaneously measured by an O3 sonde is used as input in Tracy calculations. The O3 sonde is launched on the same balloon.  相似文献   

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