Rapid fabrication of microchannels using microscale plasma activated templating (microPLAT) generated water molds

Poly(dimethylsiloxane) (PDMS) is a common material used in fabricating microfluidic devices. The predominant PDMS fabrication method, soft lithography, relies on photolithography for fabrication of micropatterned molds. In this technical note, we report an alternative molding technique using microscale PLasma Activated Templating (microPLAT). The use of photoresist in soft lithography is replaced by patterned water droplets created using microPLAT. When liquid PDMS encapsulates patterned water and then solidifies, the cavities occupied by water become structures such as microchannels. Using this method, device fabrication is less time consuming, more cost efficient and flexible, and ideal for rapid prototyping. An additional important feature of the water-molding process is that it yields structural profiles that are difficult to achieve using photolithography.     

Masterless soft lithography: patterning UV/ozone-induced adhesion on poly(dimethylsiloxane) surfaces

A novel microreactor-based photomask capable of effecting high resolution, large area patterning of UV/ozone (UVO) treatments of poly(dimethylsiloxane) (PDMS) surfaces is described. This tool forms the basis of two new soft lithographic patterning techniques that significantly extend the design rules of decal transfer lithography (DTL). The first technique, photodefined cohesive mechanical failure, fuses the design rules of photolithography with the contact-based adhesive transfer of PDMS in DTL. In a second powerful variation, the UVO masks described in this work enable a masterless soft lithographic patterning process. This latter method, UVO-patterned adhesive transfer, allows the direct transfer of PDMS-based polymer microstructures from a slab of polymer to silicon and other material surfaces. Both methods exploit the improved process qualities that result from the use of a deuterium discharge lamp to affect the UVO treatment to pattern complex, large area PDMS patterns with limiting feature sizes extending well below 1 microm (> or = 0.3 microm). The use of these structures as resists is demonstrated for the patterning of metal thin films. A time-of-flight secondary ion mass spectroscopy study of the process provides new insights into the mechanisms that contribute to the chemistry responsible for the interfacial adhesion of DTL transfers.     

Photolithographic surface micromachining of polydimethylsiloxane (PDMS)

A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS.     

Kinetics of ultraviolet and plasma surface modification of poly(dimethylsiloxane) probed by sum frequency vibrational spectroscopy

In numerous applications in microfluidics, cell growth, soft lithography, and molecular imprinting, the surface of poly(dimethylsiloxane) (PDMS) is modified from a hydrophobic methyl-terminated surface to a hydrophilic hydroxyl-terminated surface. In this study, we investigated molecular structural and orientational changes at the PDMS-air interface in response to three commonly used surface modification processes: exposure to long-wavelength ultraviolet light (UV), exposure to short-wavelength UV that generates ozone (UVO), and exposure to oxygen plasma (OP). The surfaces of two PDMS compositions (10:1 and 4:1 of base polymer/curing agent) were probed during modification, using monolayer-sensitive IR + visible sum frequency generation (SFG) vibrational spectroscopy, with two different polarization combinations. During PDMS surface modification, the peak intensities of CH3 side groups and CH2 cross-link groups decreased, while peak intensities of Si-OH groups increased. There was no significant change in the average orientation of the CH3 groups on the PDMS surface during modification. The concentration of CH3 groups on the surface decreased exponentially with time, for all three UV, UVO, and OP modification processes, with first order kinetics and time constants of approximately 160, 66, and 0.3 min, respectively. At steady state, residual CH3 groups were detected at the PDMS surface for UV and UVO treatments; however, there were negligible CH3 groups detected after OP modification.     

Superhydrophilic–superhydrophobic micropattern on TiO2 nanotube films by photocatalytic lithography

The present paper describes an unconventional approach to fabricate the superhydrophilic–superhydrophobic micropatterns on the TiO₂ nanotube structured film by photocatalytic lithography with a two-step process. At the first step, the superhydrophobic TiO₂ nanotube film is fabricated through electrochemical and self-assembled techniques. And at the second step, the superhydrophobic film is selectively exposed to UV light through a photomask to locally photocatalyse the organic monolayer assembled on the TiO₂ nanotube surface. The superhydrophilic–superhydrophobic micropatterns have thus been developed, as a novel template to fabricate a define micropatterned coating of nano octacalcium phosphate by electrochemical deposition. It is indicated that these combined processes reveal a very promising approach for constructing well-defined micropatterns of various functional materials.     

A method of printing uniform protein lines by using flat PDMS stamps

In this paper, we report a method of printing uniform protein lines on glass slides by using UV-treated flat PDMS stamps. Unlike traditional microcontact printing (μCP) which requires microstructured PDMS stamps, this μCP method only requires a flat PDMS stamp, an UV lamp and a number of straight needles. Our results show that lines of bovine serum albumin (BSA), immunoglobin (IgG), anti-biotin, anti-human IgG and anti-mouse IgG can be printed evenly on glass slides by using this μCP method. We also demonstrate that the printed protein lines are suitable for applications such as microfluidic immunoassays.     

Poly(methyl methacrylate) CE microchips replicated from poly(dimethylsiloxane) templates for the determination of cations

A novel method for the rapid fabrication of poly(methyl methacrylate) (PMMA) microfluidic chips using poly(dimethylsiloxane) (PDMS) templates has been demonstrated. The PDMS molds were fabricated by soft lithography. The dense prepolymerized solution of methyl methacrylate containing thermal and UV initiators was allowed to polymerized between a PDMS template and a piece of a 1 mm thick commercial PMMA plate under a UV lamp. The images of microchannels on the PDMS template were precisely replicated into the synthesized PMMA substrates during the UV-initiated polymerization of the prepolymerized solution on the surface of the PMMA plate at room temperature. The polymerization could be completed within 10 min under ambient temperature. The chips were subsequently assembled by thermal bonding of the channel plate and the cover sheet. The new fabrication method obviates the need for specialized replication equipment and reduces the complexity of prototyping and manufacturing. Nearly 20 PMMA chips were replicated using a single PDMS mold. The attractive performance of the new microfluidic chips has been demonstrated by separating and detecting cations in connection with contactless conductivity detection. The fabricated PMMA microchip has also been successfully employed for the determination of potassium and sodium in environmental and biological samples.     

薄层软刻蚀法制备PMMA微图案结构

对现有的软刻蚀方法提出了改进,让其与压印技术及毛细力刻蚀技术相结合形成一种薄层软刻蚀技术,并以这种技术制备出PMMA薄膜微图案化结构.在30 mm/h的拉膜速度以及弹性印章表面图形深度确定不变的情况下,PMMA流体能够完全填充到弹性印章的微通道中,SEM和光学显微镜照片证明得到的PMMA微图案是相互分离的.因此,薄层软刻蚀技术可以克服普通微模塑方法制备分离图形困难和纳米压印技术中需要使用巨大机械压力的缺点.     

Fabrication of circular microfluidic channels by combining mechanical micromilling and soft lithography

The fabrication of microfluidic channels with complex three-dimensional (3D) geometries presents a major challenge to the field of microfluidics, because conventional lithography methods are mainly limited to rectangular cross-sections. In this paper, we demonstrate the use of mechanical micromachining to fabricate microfluidic channels with complex cross-sectional geometries. Micro-scale milling tools are first used to fabricate semi-circular patterns on planar metallic surfaces to create a master mold. The micromilled pattern is then transferred to polydimethylsiloxane (PDMS) through a two-step reverse molding process. Using these semi-circular PDMS channels, circular cross-sectioned microchannels are created by aligning and adhering two channels face-to-face. Straight and serpentine-shaped microchannels were fabricated, and the channel geometry and precision of the metallic master and PDMS molds were assessed through scanning electron microscopy and non-contact profilometry. Channel functionality was tested by perfusion of liquid through the channels. This work demonstrates that micromachining enabled soft lithography is capable of fabricating non-rectangular cross-section channels for microfluidic applications. We believe that this approach will be important for many fields from biomimetics and vascular engineering to microfabrication and microreactor technologies.     

Rapid and inexpensive method for the simple fabrication of PDMS‐based electrochemical sensors for detection in microfluidic devices

The fabrication of PDMS microfluidic structures through soft lithography is widely reported. While this well‐established method gives high precision microstructures and has been successfully used for many researchers, it often requires sophisticated instrumentation and expensive materials such as clean room facilities and photoresists. Thus, we present here a simple protocol that allows the rapid molding of simple linear microchannels in PDMS substrates aiming microfluidics‐based applications. It might serve as an alternative to researchers that do not have access to sophisticated facilities such as clean rooms. The method developed here consists on the use of pencil graphite leads as template for the molding of PDMS channels. It yields structures that can be used for several applications, such as housing support for electrochemical sensors or channels for flow devices. Here, the microdevices produced through this protocol were employed for the accommodation of carbon black paste, which was utilized for the first time as amperometric sensor in microchip electrophoresis. This platform was successfully used for the separation and detection of model analytes. Ascorbic acid and iodide were separated within 45 s with peak resolution of 1.2 and sensitivities of 198 and 492 pA/μM, respectively. The background noise was ca. 84 pA. The analytical usefulness of the system developed was successfully tested through the quantification of iodide in commercial pharmaceutical formulations. It demonstrates good efficiency of the microfabrication protocol developed and enables its use for the easy and rapid prototyping of PDMS structures over a low fabrication cost.     

An inkjet printing soft photomask and its application on organic polymer substrates

This article presents a simple, fast and low-cost method to fabricate a flexible UV light photomask. The designed micropatterns were directly printed onto transparent hybrid composite film of biaxially oriented polypropylene coated with silica oxide (BOPP-SiO _x ) by an inkjet printer. Compared to the conventional chrome-mask, it is of advantages such as suitable for non-planar substrates, scalable for large area production, and extreme low cost. Combined with the confined photo-catalytic oxidation (CPO) reaction, the printed flexible BOPP-SiO _x photomask was successfully used to pattern the shape of wettability of organic polymer surfaces, and then polyaniline patterns were deposited on the modified substrates with strong adhesion. With the above photomasks, the polyacrylic acid graft chains were duplicated on the poly (ethylene terephthalate) (PET) and BOPP substrates by photografting polymerization. We grafted polyacrylic acid (PAA) on a non-planar plastic substrate with this soft and thin plastic photomask. Scanning electron microscopy (SEM) and optical microscopy were used to characterize the surface morphology and thickness of ink layers of the printed photomask. Optical microscopy was used to characterize the deposition polyaniline micropatterns. It was found that the desired patterns were precisely printed on the modified polymer films and were applied in modifying organic polymer substrates. The printed photomask could be exploited in the fields such as prototype microfluidics, micro-sensors, optical structures and any other kind of microstructures which does not require high durability and dimensional stability.     

Three-dimensional interconnected microporous poly(dimethylsiloxane) microfluidic devices

This technical note presents a fabrication method and applications of three-dimensional (3D) interconnected microporous poly(dimethylsiloxane) (PDMS) microfluidic devices. Based on soft lithography, the microporous PDMS microfluidic devices were fabricated by molding a mixture of PDMS pre-polymer and sugar particles in a microstructured mold. After curing and demolding, the sugar particles were dissolved and washed away from the microstructured PDMS replica revealing 3D interconnected microporous structures. Other than introducing microporous structures into the PDMS replica, different sizes of sugar particles can be used to alter the surface wettability of the microporous PDMS replica. Oxygen plasma assisted bonding was used to enclose the microstructured microporous PDMS replica using a non-porous PDMS with inlet and outlet holes. A gas absorption reaction using carbon dioxide (CO(2)) gas acidified water was used to demonstrate the advantages and potential applications of the microporous PDMS microfluidic devices. We demonstrated that the acidification rate in the microporous PDMS microfluidic device was approximately 10 times faster than the non-porous PDMS microfluidic device under similar experimental conditions. The microporous PDMS microfluidic devices can also be used in cell culture applications where gas perfusion can improve cell survival and functions.     

Engineers are from PDMS-land, Biologists are from Polystyrenia

As the integration of microfluidics into cell biology research proceeds at an ever-increasing pace, a critical question for those working at the interface of both disciplines is which device material to use for a given application. While PDMS and soft lithography methods offer the engineer rapid prototyping capabilities, PDMS as a material has characteristics that have known adverse effects on cell-based experiments. In contrast, while polystyrene (PS), the most commonly used thermoplastic for laboratory cultureware, has provided decades of grounded and validated research conclusions in cell behavior and function, PS as a material has posed significant challenges in microfabrication. These competing issues have forced microfluidics engineers and biologists to make compromises in how they approach specific research questions, and furthermore, have attenuated the impact of microfluidics on biological research. In this review, we provide a comparison of the attributes of PDMS and PS, and discuss reasons for their popularity in their respective fields. We provide a critical evaluation of the strengths and limitations of PDMS and PS in relation to the advancement and future impact on microfluidic cell-based studies and applications. We believe that engineers have a responsibility to overcome any challenges associated with microfabrication, whether with PS or other materials, and that engineers should provide options and solutions that assist biologists in their experimental design. Our goal is not to advocate for any specific material, but provide guidelines for researchers who desire to choose the most suitable material for their application, and suggest important research directions for engineers working at the interface between microfabrication technology and biological application.     

A novel fabrication technique to minimize poly(dimethylsiloxane)‐microchannels deformation under high‐pressure operation

PDMS is one of the most common materials used for the flow delivery in the microfluidics chips, since it is clear, inert, nontoxic, and nonflammable. Its inexpensiveness, straightforward fabrication, and biological compatibility have made it a favorite material in the exploratory stages of the bio‐microfluidic devices. If small footprint assays want to be performed while keeping the throughput, high pressure‐rated channels should be used, but PDMS flexibility causes an important issue since it can generate a large variation of microchannel geometry. In this work, a novel fabrication technique based on the prevention of PDMS deformation is developed. A photo‐sensible thiolene resin (Norland Optical Adhesive 63, NOA 63) is used to create a rigid coating layer over the stiff PDMS micropillar array, which significantly reduces the pressure‐induced shape changes. This method uses the exact same soft lithography manufacturing equipment. The verification of the presented technique was investigated experimentally and numerically and the manufactured samples showed a deformation 70% lower than PDMS conventional samples.     

Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 μm and a depth of 10 μm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.     

Controlling and manipulating supported phospholipid monolayers as soft resist layers for fabricating chemically micropatterned surfaces

Chemically micropatterned surfaces have broad applications in many fields. In this paper, we report a new method for preparing chemically micropatterned surfaces by controlling and manipulating supported phospholipid monolayers as soft resist layers with molecular-level precision. First, we introduce self-assembled supported phospholipid monolayers on solid surfaces and use a microcontact lift-up process to create micropatterned phospholipid monolayers (with micrometer resolution) on the surface. Next, the micropatterned phospholipid monolayers can function as "soft" resist layers to protect underlying solid substrates and create either positive or negative chemically micropatterned surfaces during subsequent treatments. Unlike traditional "hard" resist layers which can only be removed by using harsh chemical treatments, this novel soft resist layer only comprises a single layer of compact phospholipid; therefore, it can be easily removed by water rinsing after the preparation of micropatterns. This method is also versatile. It can be applied to prepare a protein microarray or silver patterns on solid substrates.     

Light stamping lithography: microcontact printing without inks

We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate patterns with a wide range of feature sizes on diverse substrates. To demonstrate its usefulness, the LSL method was applied to prepare several PDMS patterns on a variety of substrates. The PDMS patterns were then used as templates for selective deposition of TiO2 thin film using atomic layer deposition as well as resists for selective wet etching.     

Simple and cheap microfluidic devices for the preparation of monodisperse emulsions

Droplet microfluidics, which can generate monodisperse droplets or bubbles in unlimited numbers, at high speed and with complex structures, have been extensively investigated in chemical and biological fields. However, most current methods for fabricating microfluidic devices, such as glass etching, soft lithography in polydimethylsiloxane (PDMS) or assembly of glass capillaries, are usually either expensive or complicated. Here we report the fabrication of simple and cheap microfluidic devices based on patterned coverslips and microscope glass slides. The advantages of our approach for fabricating microfluidic devices lie in a simple process, inexpensive processing equipment and economical laboratory supplies. The fabricated microfluidic devices feature a flexible design of microchannels, easy spatial patterning of surface wettability, and good chemical compatibility and optical properties. We demonstrate their utilities for generation of monodisperse single and double emulsions with highly controllable flexibility.     

Fabrication of biomimetic superhydrophobic surfaces by a simple flame treatment method

A simple flame treatment method was explored to construct micro/nanostructures on a surface and then fabricate a biomimetic superhydrophobic surface at a relatively low cost. SiO₂‐containing polydimethylsiloxane (PDMS) was used as a substrate. The PDMS replicas with various micropatterned surfaces were fabricated using grass leaf, sand paper, and PET sheet with parallel groove geometry as templates via PDMS replica molding. The PDMS replica surfaces with micron structures and the surface of a flat PDMS sheet as a control sample were further treated by flame. The fabricated surfaces were characterized by scanning electron microscopy and water contact angle measurements. The effect of surface microstructures on the transparency of PDMS was also investigated. The studies indicate that the fine nanoscale structures can be produced on the surfaces of PDMS replicas and a flat PDMS sheet by a flame treatment method, and that the hierarchical surface roughness can be adjusted and controlled by varying the flame treatment time. The flame‐treated surfaces of PDMS replicas and a flat PDMS sheet possess superhydrophobicity and an ultra‐low sliding angle reaching a limiting value of 1°, and the anisotropic wettability of the PDMS replica surface with oriented microgroove structures can be greatly suppressed via flame treatment. The visible light transmittance of the flame‐treated flat PDMS surface decreases with prolonged flame treatment times. Copyright © 2016 John Wiley & Sons, Ltd.     

Preparation,Micro-Patterning and Electrical Characterization of Functionalized Carbon-Nanotube Polydimethylsiloxane Nanocomposite Polymer

Summary : We present the preparation, improved micro-patterning, and electrical property characterization of COOH- functionalized mutli-walled carbon nanotube (MWCNT) and polydimethylsiloxane (PDMS) conductive nanocomposite polymers that can be employed for lab on a chip applications. The nanocomposites are prepared by mixing functionalized MWCNTs into an uncured PDMS matrix and employing high frequency ultrasonics (∼ 42-50 kHz) using a horn tip probe. The prepared nanocomposites are micromolded using soft lithography techniques down to a feature size of 25 µm against a micropatterned SU-8 polymer master. An array of peg like microstructures have been fabricated with a radii of 25 µm and height of 100 µm, that are embedded on a non-conductive PDMS substrate using novel and improved fabrication techniques. The percolation threshold of the prepared nanocomposite is achieved at 1.5 weight percentage (wt.%) of COOH- functionalized MWCNT in the PDMS matrix. Resistivity levels at 2 wt.% of functionalized MWCNTs are 62 Ω-cm or better, which is an improvement over our previously reported nanocomposite resistivity value of 100 Ω-cm at 2 wt.% of nonfunctionalized MWCNT's in a PDMS matrix. The nanocomposites also have fairly uniform dispersion and no agglomeration of COOH- functionalized MWCNT as shown by SEM analysis. Furthermore, the nanocomposites show a negative temperature coefficient of resistivity (NTCR), making them ideal candidates for micropatternable temperature microsensors for lab on a chip systems.