基于机器视觉的干涉条纹检测

基于机器视觉系统OpenMV,以迈克耳孙干涉仪干涉条纹为研究识别对象,根据光源相干性及干涉条纹动态特性,提出基于灰度采样统计的干涉条纹识别检测算法(干涉条纹同心形态搜索算法),运用MicroPython或Python语言编制实时检测程序,运行结果表明仿真和真实干涉条纹都得到了可靠的检测,精度为0.5个条纹,并且测量不确定度主要由算法制定的此条纹检测精度引起,证明了干涉条纹机器视觉检测方法和技术的有效性.     

长度测量中干涉条纹的自动识别技术研究

利用激光干涉与数字图像处理技术以及应用FFT分析干涉条纹方法,分析并解决了测量端面长度标准中条纹图的处理技术,应用这种方法不但提高了测试过程的自动化程度,而且大大地提高了测量结果的精度,并给出了最典型的端面长度标准量块的干涉条纹小数部分的实测结果.     

光的等厚干涉图像数据处理系统

将数字图像处理技术应用于牛顿环等厚干涉实验的数据处理过程,以方便测量平凸透镜的曲率半径。以JAVA语言为开发工具深入研究了牛顿环数字图像处理、测量与识别方法。主要包括图像的采集与增强、灰度化与二值化、滤波处理与降噪处理等,并在此基础上,设计算法以确定干涉圆环半径及其圆心,实现了等厚干涉实验数据的图像化处理,既提高了测量精度,也提升数据处理的效率。     

用激光干涉法测量长度的智能化处理技术研究

介绍利用激光干涉与数字图像处理技术以及应用FFT分析干涉涤纹方法，分析并解决测量端面长度标准中条纹图的处理技术。应用这种方法不但提高了测试过程的自动化程度，而且大大地提高了测量精度。文中给出了最典型的端面长度标准量块的干涉条纹小数部分的实测结果。     

基于LabVIEW机器视觉的迈克耳孙干涉仪实验

基于机器视觉设计了迈克耳孙干涉仪实验,采用机器视觉技术替代人眼对目标(干涉圆环)进行分析与测量,可有效避免因视觉疲劳而造成的测量错误.     

压电陶瓷压电特性的激光调制法测量研究

介绍可测量压电陶瓷压电特性的激光干涉调制测量方法.采用相干检测原理对信号进行提取,不仅可以抑制噪声对干涉信号的影响,而且还可以大大降低光电探测器和电路的1/f噪声.与通常干涉仪测量方法相比,这种方法具有测量灵敏度高等优点.利用该方法对压电陶瓷压电特性进行了测量,讨论了激励电压信号的频率、幅度对压电陶瓷压电常数d₃₁的影响,并对其压电迟滞曲线进行了测量.     

多普勒加速度测量的数字相关鉴相算法

针对激光多普勒加速度测量系统信号信噪比较差的问题,提出了一种采用数字相关鉴相算法进行加速度解调的方法。使用数字相关鉴相算法计算激光多普勒加速度测量系统中两路干涉信号的相位差,再由相位差的变化率来计算目标加速度,从而实现运动物体加速度的连续测量。仿真结果表明:该算法在信噪比为20dB时,加速度测量的误差为0.135m/s~2,分辨率为7.3×10~(-3) m/s~2。搭建了激光多普勒加速度测量系统,对压电陶瓷振荡器的加速度进行测量,加速度的测量误差为0.13m/s~2。测量结果表明,该算法能够有效减少随机噪声的干扰,提高加速度的测量精度。     

干涉仪自适应抗振的空间移相术

根据时域移相算法的概念,提出了一种空间移相术,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化.运用这种技术在TwymanGreen移相式干涉仪中建立了一套自适应抗振系统,它可以实时测量振动引起的相位变化大小,并通过反馈器件PZT实时校正干涉条纹的相位,使得干涉条纹稳定以保证光学测量的正常进行,与此同时PZT还作为移相器件.     

数字图像处理技术在叠栅条纹测量中的应用

将数字图像处理技术应用于叠栅条纹测量物体三维形状,使用Inter公司的开源视觉库OpecCV,经过灰度化、锐化和去噪、叠加虚参考光栅对图像进行处理,简化测量过程,提高测量速度和精度.     

偏振激光干涉仪的非线性误差实时校正方法

提出一种偏振激光干涉仪的误差校正方法,可实时地对干涉信号的非线性误差进行校正。由于单频激光干涉仪中的光电元件存在的参数误差和位置误差以及外界环境因素的影响,使得输出的4路干涉信号的正交性受到破坏,产生了非线性误差。基于椭圆匹配原理,给出了非线性误差的校正算法和判据。对干涉信号的参数特征进行实时地统计与估值,并借助于对干涉条纹实现16384点细分,从而得到皮米级的位移测量分辨力。搭建了零差偏振激光干涉仪及振动实验装置,对校正前后的信号进行了对比实验。结果表明,经过非线性校正干涉仪信噪比提高超过30dB,测量的分辨力优于10pm/Hz1/2。     

Shape identification using phase shifting interferometry and liquid-crystal phase modulator

A phase shifting technique using a Michelson interferometry system is presented and applied to surface contour measurement. Hyperbolic fringes are produced by the interference of two spherical wavefronts expanded from a beam expander. The fringe pattern is projected on an object surface and the deformed grating image is captured by a CCD camera for subsequent analysis by a PC. Phase variation is achieved by a liquid-crystal device incorporated in the Michelson interferometry system. Results obtained using the proposed method for objects of various shapes and sizes compared well with those from a conventional profilometer.     

Random depth access full-field heterodyne low-coherence interferometry utilizing acousto-optic modulation and a complementary metaloxide semiconductor camera

With analog scanning, time-domain low-coherence interferometry lacks precise depth information, and optical carrier generation demands a linear scanning speed. Full-field heterodyne low-coherence interferometry that uses a logarithmic complementary metal-oxide semiconductor camera, acousto-optic modulation, and digital depth stepping is reported, with which random regions of interest, lateral and axial, can be accessed. Furthermore, nanometer profilometry is possible through heterodyne phase retrieval of the interference signal. The approach demonstrates inexpensive yet high-precision functional machine vision offering true digital random access in three dimensions.     

Continual deformation analysis with scanning phase method and time sequence phase method in temporal speckle pattern interferometry

If a laser beam illuminates a continual deformation object surface, it will lead to a temporal speckle pattern on the observation plane. Recording this time-dependent speckle pattern the deformation of the surface of an object can be obtained. Two methods, scanning phase method (SPM) and time sequence phase method (TSPM), have been introduced for measuring the displacement caused by the deformation in temporal speckle pattern interferometry (TSPI). Their principle is that by capturing a series of speckle interference patterns related to the object deformations, the fluctuations in the intensity of the interference patterns can be obtained. Through scanning these fluctuations and estimating both the average intensity and modulation of the temporal speckle interference patterns, the phase maps for whole-field displacements are calculated. In this way one is capable of quantitatively measuring continual displacements simply using a conventional electronic speckle pattern interferometry (ESPI) system without phase shifting or a carrier. The elaboration on the new methods is given in this paper and experiments are performed to demonstrate their performance with a conventional ESPI system.     

基于散斑干涉光谱分布变化量探测瞬态高温的研究

为了提高瞬态高温检测的精度,利用快速傅里叶变换(FFT)对散斑干涉条纹进行光谱分析,提出了通过光谱分布的偏移及幅值变化反演温度的方法。当激光照射应变材料时,瞬态高温使材料发生形变从而使散斑干涉条纹改变,被测表面形变前后获得的干涉条纹由面阵CCD采集。由于其对应的光谱密度分布函数也会发生相应的改变,即中心波长位置偏移及振幅变化,通过其改变反演材料的瞬态温度。在分析推导了瞬态温度变化、材料应变及干涉条纹变化之间的函数关系后,仿真分析得到了瞬态温度正比于压强系数、反比于温度系数。实验采用660 nm半导体激光器,SI6600型面阵CCD探测器,从获得的光谱分布函数中提取中心波长的偏移量,经计算和标定所得数据与传统的干涉测温方法进行对比,探测精度可达0.3%。相比传统的直接检测干涉条纹的变化量,由被测面形变量推导温度的方法精度提高近3倍。     

有遮拦干涉图像的数字化处理技术研究

介绍有了遮拦干涉图像的数字化处理技术的原理与方法,利用移相干涉术的特点,提出了“阀值分割区域法”和“顺序跟踪边缘点”分割区域的方法。这些技术成功地应用到了对有遮拦的面形的测一和有遮拦的系统波像差的测量。     

频域干涉测量中脉冲延迟时间测定方法的研究

在基于超短激光脉冲频域干涉技术的超快激光与物质相互作用的测量实验中,束一束间的延迟时间对瞬态特性的测量至关重要。利用两束脉冲频谱干涉条纹宽度与脉冲相对延迟时间成反比关系这一特性,阐述了通过对脉冲频谱干涉图进行傅里叶变换,在干涉条纹傅里叶变换面（时间域）上测量脉冲延迟时间的基本原理,并给出了测量误差分析,数值模拟结果显示通过傅里叶变换的方式,在频谱干涉图的时间域上可以有效地提取出两束脉冲间的相对延迟时间。     

层状GRIN板折射率分布的自动测量

采用溶液 凝胶扩散共聚法成功地合成了二元体系的甲基烯酸苄酯 甲基烯酸甲酯 (BZMA MMA)层状梯度折射率板 ,折射率分布是其主要性能指标。给出了一种测量该制品折射率分布的简便实验装置和自动实现方法。该测量方法基于激光干涉的原理 ,由计算机自动跟踪干涉条纹的移动来计算梯度折射率材料的折射率分布。实验表明 ,该方法简单易行 ,具有较高的折射率测量精度 ,为科学评价自研制梯度折射率材料的性能提供了保证     

High sensitivity micro-displacement homodyne interferometry北大核心CSCD

Interferometry is widely used in nano-scale micro-topography measurement. In order to improve its accuracy and sensitivity, a high-sensitivity homodyne interferometry based on white light interference and laser secondary interference was proposed. A high-sensitivity homodyne interferometry system was designed, and the zero point of the laser secondary interference was used to locate the dark striation of white light interference, so that it could reach the maximum slope when optical path difference was zero. The signals of white light and laser were analyzed by using the wave principle and intensity formula of interference fringes, and a sensitivity calculation method based on the combination of white light and laser interference signal was proposed. The system and its sensitivity were simulated. Finally, the optical path was built, and the white light interference fringes were adjusted to the dark striations position, so as to locate the zero position of laser secondary interference and carry out the data acquisition. It is showed that the sensitivity of the measurement method is at least 1 832 times higher than that of the laser secondary interference, and the corresponding measurement uncertainty is only ±0.288 7 mV. The measurement system can effectively solve the problem of large amount of calculation in traditional interferometry, and has high sensitivity, stability and reliability. Copyright ©2022 Journal of Applied Optics. All rights reserved.     

Measurement of fiber chromatic dispersion using spectral interferometry with modulation of dispersed laser pulses

We propose and experimentally demonstrate a method for fiber dispersion measurement based on the modulation of laser pulses stretched by the fiber under test. The measured spectrum of the modulated pulses is the result of the interference between the stretched pulse spectra shifted by the modulation harmonics. The interference pattern is processed as in Fourier transform spectral interferometry. Unlike to conventional spectral interferometry, environmental conditions do not affect the interferogram due to the lack of any interferometer; additionally, large dispersions can be characterized by the method proposed. Its high accuracy is demonstrated in experimental comparison with the widely used phase shift technique.     

Two-Period Interference Fringe Interferometry for Step-Profile Altitude Difference Measurement

This paper proposes a new measuring method called two-period interference fringe interferometry, for a step-profile altitude difference measurement. The principle of the method is different from that of the two-wavelength interferometry which is widely known. The two interference fringes with only slight difference between their spatial periods are obtained by turning a binary step-grating, and they produce a synthetic equivalent period much longer than either of the two periods alone. The interference fringes are produced by the ±1st-order beams diffracted from the grating. The intensity distribution of the interference pattern is independent of the wavelength of the laser-diode light source used. The measuring range of this method is much larger than that of the two-wavelength interferometery. Sinusoical phase modulating technique is easily applied to detect the phase distribution of the interference pattern by vibrating the grating sinusoidally. A plane reflector of 3mm thickness is measured to verify this novel method.