Untersuchung der Prozesse in der aktiven Zone der Hohlkatodenbogenentladung I. Die Energieverteilungsfunktion der Elektronen,die Anregungs- und Ionisationsgeschwindigkeit

In this paper the processes of excitation and ionization inside the cathode of a hollow cathode are discharge will be studied. The electron energy distribution function is calculated from the kinetic equation. For this we take into account the following processes: elastic and inelastic collisions of electrons with atoms, Coulomb interaction between emitted fast electrons and electrons of the plasma.     

微空心阴极放电的流体模型模拟

采用流体模型研究了微空心阴极放电(MHCD)的特点，对放电中电场的形成，电子和离子的密度分布，电子能量分布进行了数值模拟.该计算是针对高气压，圆筒形阴极结构下的He放电.结果表明放电中存在空心阴极效应，从电子能量分布可以看出，放电中存在高能电子，放电空间的电场分布主要表现为径向电场.此外，通过改变气压，阴极孔径等参数计算出它们对放电的影响.分析表明减小孔径有利于负辉区更充分的重合.提高气压将缩短阴极位降区. 关键词： 微空心阴极放电 流体模型     

直流空心阴极放电中鞘层区电子的输运过程

采用蒙特－卡洛方法对空心阴极放电中鞘层区电子的输运过程进行了研究，电子在鞘层区被非均匀电场加速，两次碰撞之间的步长是由电子与中性粒子的碰撞频率确定。模型中三种碰撞截面积是由实验和理论数据拟合而来。研究了电子平均能量、电子密度和电离系数在径向的分布。电子能量的空间分布结果与实验很好地符合。 关键词：     

微空心阴极放电的3维数值模拟

 给出了圆筒形微空心阴极的3维流体方程组及其稳态的差分方程和合理的边界条件,并利用计算机模拟计算,得出了He放电形成的粒子密度、电子能量、 电场及电势分布。讨论了在阴极孔径为240~360 mm,气压6 666.1~13 332.2 Pa的范围内放电参量的变化规律:固定电压和气压时,阴极孔径减小,负辉区重合越多;固定阴极孔径和气压时,气压升高,带电粒子密度随着气压增加而增加。结果表明放电参量强烈依赖阴极孔径和气压。     

Electron Energy Function Distribution in Hollow Cathode Discharge at Resonant Irradiation

Abstract

The behaviour of electron energy function distribution in hollow cathode discharge at resonant light irradiation is analyzed. The function is calculated for energies near and higher than the energy excitation ?₁ of the hellium metastable levels. It turns out that the electron energy function distribution is essentially influenced in the vicinity of point ?₁.     

流体-亚稳态原子传输混合模型模拟空心阴极放电特性

利用流体-亚稳态原子传输混合模型研究了氩气矩形空心阴极放电稳态时的参数. 数值计算得到了压强为10 Torr时的电势、电子、离子和亚稳态氩原子密度以及电子平均能量的分布. 结果表明电子和离子密度峰值为4.7×10¹² cm^-3, 亚稳态原子密度峰值为2.1×10¹³ cm^-3. 本文同时对流体-亚稳态原子传输混合模型和单一流体模型模拟得到的放电参数进行了比较. 结果表明, 分步电离是新电子产生的重要来源, 亚稳态原子对空心阴极放电特性有重要影响. 与单一流体模型相比, 混合模型计算得到的电子密度升高, 阴极鞘层宽度和电子平均能量降低. 关键词： 空心阴极放电 流体-亚稳态原子传输模型 电子密度 分步电离     

The model of internal column of hollow cathode vacuum discharge

Analyzes the characteristics of rarefied, nonequilibrium-state plasmas in the internal column of a hollow cathode discharge (HCD). The analysis is based on the theory of plasma disintegration in a strong electric field (Dreicer 1959, 1960). It is demonstrated that this process has a crucial influence upon the forming of directed flux of electrons with energy values 20-30 eV at the exit of the hollow cathode. The obtained values significantly exceed the energy of thermal motion of electrons in the plasma disintegration zone. A new method is suggested of calculating electron density and electric field intensity in respect to the axis of the internal column in the channel model of the discharge. In addition, a method is presented of calculating the length of the internal column and the energy of the directed electron flux at the exit of the hollow cathode on the basis of HCD fundamental parameters     

Nonlocal electron kinetics in collisional gas discharge plasmas

Nonlocal phenomena in electron kinetics of collisional gas discharge plasmas, their kinetic treatment by a nonlocal approach, and relevant experimental results are reviewed in this paper. Using the traditional two-term approximation for the electron distribution function, a general method to analyze electron kinetics in nonuniform plasmas in DC and RF fields for atomic gases is presented for the nonlocal case, when the electron energy relaxation length exceeds the characteristic spatial scale of bounded plasmas. The nonlocal method, which is based on the great difference between the electron mean free path for the momentum transfer and the electron energy relaxation length, considerably simplifies the solution of the kinetic equation and, in a number of cases, allows one to obtain analytical and semi-analytical solutions. The main simplification is achieved for trapped electrons by averaging the Boltzmann equation over space and fast electron motion. Numerous examples of spatial nonlocality are considered in the positive column and near the electrodes of DC glow discharges, in spatial relaxation of the electron distribution and in striations, and in capacitively and inductively coupled low-pressure RF discharges. The modeling of fast beam-like electrons is based on a continuous-energy-loss approximation with the assumption of forward scattering. Simple analytic expressions for the fast electron spectrum are obtained in cathode regions of DC discharges with planar and hollow cathodes     

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开发了氮空心阴极放电PIC/MC二维自洽模型。研究了N2传统空心阴极向微空心阴极放电转变过程中电势和电场的变化。结果表明,不同尺寸的空心阴极放电的电势及电场分布规律几乎类似,但空心阴极孔径减小且气压增加时,电场近似线性增加;典型微空心阴极电场比传统空心阴极放电电场约大3个量级;微空心阴极放电产生的电子,氮分子离子和氮原子离子的密度比传统空心阴极放电约大3个量级,且微空心阴极放电中,N2+密度比N+密度大8倍以上。     

Calculation of the parameters of a high-current reflective discharge with a hot cathode

A physical model of a self-sustaining reflective discharge is formulated based on the continuity equation for the electron flux and the equation of energy balance on the hot cathode. The model allows one to calculate the current-voltage characteristic of a high current reflective discharge with a hot cathode in a wide range of magnetic fields, discharge cell dimensions, and cathode material work functions. An advantage of the model is that it is capable of describing the ordinary operating mode of a reflective discharge with cold cathodes as a limiting case. The model predicts the existence of two discharge operating modes with thermionic electron emission on the cathode: a low-voltage mode with a high current density and a high-voltage mode with a significantly lower current density. It is shown that the low-voltage operating mode can occur in a wide range of the discharge currents, while the discharge voltage can be substantially reduced by using a cathode material with a low work function.     

Untersuchung der Prozesse in der aktiven Zone der Hohlkatodenbogenentladung. II. Die Bilanzgleichungen,Ergebnisse

In [1] we studied the electron distribution function and the processes of excitation and ionization inside the cathode of hollow cathode arc discharge. In this paper we solve the equations of energy and particle balances using the results of [1]. Adding the minimum principle of energy it is possible to calculate the concentration and the temperature of electrons, the cathode drop, the temperature of the cathode wall and the current density in the active zone. Some of calculated values will be compared with experimental ones. We found satisfactory agreement.     

微空心阴极放电的Monte Carlo模拟研究

基于MATLAB与VC++混合语言，采用Monte Carlo模拟对高气压下亚毫米级微空心阴极放电（MHCD）中电子的运动过程进行了研究，计算出不同气压下的稳态时场向电子密度分布，电子能量分布以及对各种碰撞的统计等.分析表明：高气压下微空心阴极放电更能反映空心阴极效应——“来回振荡”的本质.通过模拟得到，电子在阴极间来回振荡的过程中，仍以前向散射为主.随着气压的升高，侧向散射效应逐渐体现出来. 关键词： 微空心阴极 Monte Carlo 负辉区 碰撞截面     

Determination of electron density and energy influx in a hollow cathode glow discharge used for powder modification

The electron density and energy influx in an argon hollow cathode glow discharge were determined to obtain adequate parameters for subsequent surface modification of low density polyethylene (LDPE) powder to change the wettability. The electron density was studied by Langmuir probe measurement in dependence on process gas pressure and hollow cathode material. Besides the determination of the rate of increasing electron density with input power an optimal experimental pressure was determined. The energy influx was studied by thermal probe measurements in dependence on process gas pressure, bias voltage, axial position and hollow cathode material. Inside the hollow cathode the energy influx is nearly constant along the whole cathode length. With increasing pressure the energy influx decreased. At biased thermal probe the energy influx was observed to decrease up to the floating potential and beyond it increases with increasing voltage. Using different hollow cathode materials the electron density as well as the energy influx reach higher values for aluminum than for copper and stainless steel.     

Predicted emittance and brightness of the pseudospark electron-beam

The emittance and brightness of the electron beam generated during the hollow cathode phase of pseudospark operation are calculated using the two-dimensional hybrid fluid-particle model previously developed to study the time and space development of the plasma in a pseudospark discharge. Two distinct energy components exist in the electron beam; a high-energy component with an energy equivalent to the full discharge voltage and another, broad, low-energy component. In the 100 ns following breakdown and for the conditions of the calculations, the emittance of the high energy component decreases by an order of magnitude and the brightness of the high energy component reaches almost 10¹⁰ A/m² rad². This work demonstrates the feasibility of using the model to guide the optimization of the pseudospark electron beam properties and shows that the optimum beam properties are achieved after the plasma has filled the hollow cathode and begun to expand radially in the main gap     

Chopped CW laser-induced optogalvanic effect in a neon hollow cathode discharge

A detailed model for the optogalvanic effect in a neon hollow cathode discharge irradiated by a chopped CW dye laser is presented. A rate equation formalism is used to calculate the evolution of the first and second electronic configuration populations coupled by the laser and of the electric charges number density. Processes as ambipolar-like electrons loss, electronic collisional coupling of level populations and electron emission by the cathode due to VUV radiation from the 1s ₂ resonant level are taken into account and further discussed.The transients and steady-state magnitude of the optogalvanic signal are calculated, compared with experimental data and related to population changes. We predict sign changes of the optogalvanic signal when the laser is tuned over transitions originating from the resonant level with respect to transitions involving the metastables states. The optogalvanic signal is shown to be basically determined by the laser-induced variations of the excited-state populations while changes in the electron temperature, due to laser energy transfer by collisions between electrons and excited atoms, play a negligible role.     

Non-local model of hollow cathode and glow discharge

A general form of the non-local equation for an ionization source in glow discharge and hollow cathode 3D-simulation is formulated. It is a fundamental equation in hollow cathode theory, which allows formulation of a complete set of field equations for a self-consistent problem in a stationary glow discharge and hollow cathode. It enables us to describe the region of negative glow and the hollow cathode effect and compare calculation results of electrical dependencies (pressure-voltage) with experimental data, – under conditions of gradual appearance of the hollow cathode effect.     

微空心阴极放电时空特性

为了揭示微空心阴极放电的放电机理,利用流体模型研究了矩形微空心阴极放电的时间和空间分布特性。在氩气环境下计算得到了压强为1.3×10~4Pa时电流、电势、电场、电子和离子密度等随时间的发展变化。结果表明,整个放电过程分为四个阶段,即预放电阶段、电场由轴向向径向转换阶段、电流缓慢增长向空心阴极效应过渡阶段和稳态放电阶段。稳态放电时出现明显的空心阴极效应,阴极位降区存在很高的径向电场和较高的电子平均能量,而负辉区径向电场很弱,电子平均能量较低,电子和离子密度峰值出现在负辉区,二者数值基本相等,而在阴极位降区离子密度远高于电子密度。     

大面积等离子体片密度分布分析

利用空心阴极放电产生了尺寸为60 cm× 60 cm× 2 cm的大面积等离子体面. 在实验室条件下对大面积等离子体片的密度分布进行了测量. 由于高压放电脉冲脉宽较短, 实验中改变了测量方法, 同时, 在中等磁场影响下, 为了得到真实的等离子体密度, 进行了必要的数值修正.在放电电流为1---6 A时, 测量了二维的电子密度分布. 另外, 测量并讨论了其他环境参数对等离子体密度的影响. 电子密度的分布情况对与微波波束切换相当重要. 由空心阴极增强型放电产生的大面积等离子体面具有反射X波段(8---12 GHz) 微波需要的足够稠密的电子密度和足够均匀的密度分布, 这是等离子体面在雷达系统中取代金属面板的有利条件.     

Breakdown formation in a transient hollow cathode discharge-astatistical study

Discharge formation at low pressure is found to be greatly influenced in the presence of a suitable hollow cathode region. The formation of a moving virtual anode which extends the anode potential to within the hollow cathode region is thought to be responsible for the enhanced ionization growth which subsequently leads to gas breakdown. In this paper, the spatial evolution of the local potential in the discharge region of a pulsed hollow cathode discharge has been measured in a range of pressures with two different cathode apertures. An extensive data set has been collected and analyzed using a statistical technique. From the characteristic of the statistical distribution of the data, unique features associated with the role of hollow cathode at the different stages of discharge formation have been identified. It was found that the influence of the hollow cathode region is strongest in the start of ionization growth and in the final change over to high current breakdown     

Measurements on electron beams in pulsed hollow-cathode discharges

Two different regimes of electron beams have been reported in the pulsed hollow cathode discharge-a low-current, high-energy beam, and a relatively high-current beam of low energy. The high-energy beam is related to the hollow cathode geometry and is found to be present even in the absence of subsequent gas breakdown, while the low-energy beam is always associated with voltage breakdown. Detailed measurements of the spatial and temporal distribution of the electron beam transported beyond a semitransparent anode associated with gas breakdown are reported. In particular, a high-energy component is observed after electrical breakdown. Low-energy electron beams are observed to be transported beyond the anode throughout the main discharge period