Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

The transition of a low-current discharge with a self-heated hollow cathode to a high-current discharge is studied, and stability conditions for the latter in the pulsed–periodic mode with a current of 0.1–1.0 kA, pulse width of 0.1–1.0 ms, and a pulse repetition rate of 0.1–1.0 kHz are determined. The thermal conditions of the hollow cathode are analyzed, and the conclusion is drawn that the emission current high density is due to pulsed self-heating of the cathode’s surface layer. Conditions for stable emission from a plasma cathode with a grid acting as a plasma boundary using such a discharge are found at low accelerating voltage (100–200 eV) and a gas pressure of 0.1–0.4 Pa. The density of the ion current from a plasma generated by a pulsed beam with a current of 100 A is found to reach 0.1 A/cm². Probe diagnostics data for the emitting and beam plasmas in the electron source are presented, and a mechanism behind the instability of electron emission from the plasma is suggested on their basis.     

Characteristics of an ion source with a plasma cathode and a multipole magnetic system for confining fast electrons

Parameters and ion-emission characteristics of the plasma generated in the anode stage of an ion source with a hollow glow-discharge plasma cathode are studied. To decrease the minimum operating gas pressure to 5×10³ Pa, a multipole magnetic system was installed on the surface of the hollow cathode and the peripheral magnetic field was enhanced in the anode stage of the source. The effect of the gas pressure, the plasma-cathode current, and the voltage between the electrodes of the anode stage on the value of the ion current extracted from the plasma is investigated. It is found that the size of the exit aperture of the hollow cathode substantially affects the efficiency of ion extraction. The potential (1–5 V) and the electron temperature (1–8 eV) of the anode-stage plasma are measured by the probe method. The conditions are determined that ensure the maximum ion-emission current from the plasma at low gas pressures.     

微空心阴极放电的流体模型模拟

采用流体模型研究了微空心阴极放电(MHCD)的特点，对放电中电场的形成，电子和离子的密度分布，电子能量分布进行了数值模拟.该计算是针对高气压，圆筒形阴极结构下的He放电.结果表明放电中存在空心阴极效应，从电子能量分布可以看出，放电中存在高能电子，放电空间的电场分布主要表现为径向电场.此外，通过改变气压，阴极孔径等参数计算出它们对放电的影响.分析表明减小孔径有利于负辉区更充分的重合.提高气压将缩短阴极位降区. 关键词： 微空心阴极放电 流体模型     

The characteristics of pulsed hollow cathode discharges used forpseudospark switch triggering

The complex interaction between the trigger discharge and the main switch discharge in high-power gas discharge switches influences both the switching characteristics, and the switch and trigger lifetime. Any attempts to improve either of these parameters has to take into account the pressure and geometry dependence of a particular trigger geometry. Yet, although not very intensely investigated in detail for this particular purpose, pulsed hollow cathode discharges are commonly used for low-pressure gas discharge triggering as in pseudospark switches. Measurements of the electron current flowing to the cathode backplane of a pseudospark switch from the pulsed hollow cathode trigger discharge show that maximum current densities are peaked around the symmetry axis of the trigger electrode, an effect which is more pronounced at low pressures. Delayed (and slowed-down) increase of the current density at larger radii leads to increasing delay and jitter, provided the trigger coupling holes in the cathode backplane are located off-axis. The electron current density increases with decreasing diameter of the trigger electrode, and with increasing pressure of the working gas. In addition, it is shown that a preionization (keep-alive) current in the trigger electrode region shows a distinct influence on the trigger current distribution, proving that there exists an optimum keep-alive current depending on the geometry and gas pressure     

微空心阴极放电的3维数值模拟

 给出了圆筒形微空心阴极的3维流体方程组及其稳态的差分方程和合理的边界条件,并利用计算机模拟计算,得出了He放电形成的粒子密度、电子能量、 电场及电势分布。讨论了在阴极孔径为240~360 mm,气压6 666.1~13 332.2 Pa的范围内放电参量的变化规律:固定电压和气压时,阴极孔径减小,负辉区重合越多;固定阴极孔径和气压时,气压升高,带电粒子密度随着气压增加而增加。结果表明放电参量强烈依赖阴极孔径和气压。     

小型空心阴极等离子体电子枪实验

基于空心阴极效应和低压辉光放电原理,设计了一种小型空心阴极等离子体电子枪并进行了实验研究,在低气压下获得了稳定的空心阴极辉光放电,测量电子枪放电结果表明:在空心阴极中加入灯丝热子可明显降低放电气压;电子束电流的大小随放电电压增大而增大,受气体气压影响较小;在气压2Pa,放电电压10kV,脉宽4μs脉冲下放电,可得到脉宽为2μs,电流为600mA的电子束。     

Characterization of a RF/dc-magnetron discharge for the sputter deposition of transparent and highly conductive ITO films

A RF-superimposed dc-magnetron sputter process for coating color filter materials with transparent and conducting ITO films was investigated. In this process, the sputtering cathode is excited simultaneously by dc- and RF-power (at 13.56 MHz). This work summarises the measured properties of the gas discharge. Some basic data of the deposited ITO films are given, also. The dependence of the RF portion of the total sputtering power on the discharge voltage has been monitored for different values of total power and process pressure. The ion energy distribution function of the positively charged ions approaching the substrate surface has been measured using a retarding field plasma analyser probe. It was shown that the mean energy of the ions increases with increasing RF portion of the total power. The electron temperature in the body region of the gas discharge has been derived from measurements of the optical emission of the excited species. Received: 3 November 1998 / Accepted: 8 March 1999 / Published online: 14 July 1999     

Formation of narrow-focused electron beams generated by a source with a plasma cathode in the forevacuum pressure range

Results are presented from experimental studies of the formation of focused electron beams produced by extracting electrons from the plasma of a steady-state discharge with a hollow cathode in the forevacuum pressure range. Based on the measurements of the energy spectrum and diameter of the electron beam, as well as of the emission parameters of the plasma produced in the course of beam-gas interaction, a conclusion is drawn about the excitation of a beam-plasma discharge that deteriorates the beam focusing conditions. The threshold beam current density for the excitation of a beam-plasma discharge is found to increase with accelerating voltage and gas pressure.     

赝火花开关放电的蒙特卡罗粒子模拟

采用粒子模拟和蒙特卡罗相结合的方法,应用静电求解模型,对赝火花开关初始放电过程进行了模拟。赝火花开关初始放电过程主要由汤森放电过程、等离子体形成、空心阴极效应和场致发射引发主放电组成;等离子体形成和空心阴极效应对赝火花开关的发展导通具有至关重要的作用。改变赝火花开关工作参数,如气压、电极孔径、阳极电压和阴极腔中初始粒子密度,研究其对赝火花开关电子峰值电流形成时间的影响。结果表明:随着气压、电极孔径、阳极电压和初始粒子密度的增大,赝火花开关电子峰值电流形成时间减小。     

Electron transport properties of stationary plasma clouds generatedwith hollow cathode discharges

The electron transport properties of plasma clouds generated by a hollow cathode discharge are investigated. The voltage-current characteristic curves indicate that the electron-emitted electron current depends on both bias voltage and discharge current. The spatial dependence of the electronic density, plasma potential, and electronic temperature is measured. The energy loss rate of a high energy group of electrons with the radial distance is also presented. These experimental results are compared with a nonisothermal transport model which reproduces the spatial dependence of plasma properties     

Numerical modeling of a He-Kr coil hollow cathode laser

A theoretical study of a He-Kr laser (KrII, 469.4 nm line) pumped by a helical hollow cathode discharge is presented. A detailed kinetic model of plasmachemical reactions and radiative processes including the influence of gas heating on the active medium is developed. In the process of numerical calculations the dependence of the plasma parameters (electron and gas temperature, electron and metastable density, upper and lower laser level density) and laser characteristics (output power and gain coefficient) on the variations of discharge pumping, gas-mixture partial pressures and geometry of the coil hollow cathode, are investigated. The results of the numerical calculations are in a good agreement with the experimental data.     

直流空心阴极放电中鞘层区电子的输运过程

采用蒙特－卡洛方法对空心阴极放电中鞘层区电子的输运过程进行了研究，电子在鞘层区被非均匀电场加速，两次碰撞之间的步长是由电子与中性粒子的碰撞频率确定。模型中三种碰撞截面积是由实验和理论数据拟合而来。研究了电子平均能量、电子密度和电离系数在径向的分布。电子能量的空间分布结果与实验很好地符合。 关键词：     

反铁电陶瓷的强电子发射特性研究

采用掺镧锆锡钛酸铅反铁电陶瓷作为阴极材料,研究了脉冲电压激励下陶瓷的电子发射特性.当激励电压为800V、抽取电压为0V时,得到1.27A/cm²的发射电流密度;当抽取电压增加到4kV时,获得1700A/cm²的发射电流密度.分析了发射电流随抽取电压的变化关系,讨论了反铁电陶瓷强电子发射的内在机理.结果表明：掺镧锆锡钛酸铅反铁电陶瓷能够在较低的激励电压(400V)下实现电子发射,发射电流远大于按照Child-Langmuir定律计算出的电流,三接点附近局域反铁电—铁电相变产生初始电子发射,初始电子电离中性粒子形成等离子体,增强了电子发射. 关键词： 铁电阴极 反铁电体 电子发射     

微波电子回旋共振等离子体阴极电子束的实验研究

介绍了实验室研制的微波电子回旋共振(ECR)等离子体阴极电子束系统及初步研究结果，该系统包括微波ECR 等离子体源、电子束引出极、聚焦线圈等。通过测量水冷靶电流和靶上的束斑尺寸，实验研究了微波ECR 等离子体阴极电子束的流强、聚束性能等随电子束系统工作条件的变化。结果表明：微波输入功率越高、引出电压越高，引出电子束流强越大；工作气压对电子束流强的影响较复杂，随气压增加呈现出先降低后升高的特点；在7×10⁻⁴Pa 的极低气压下电子束流强可达75mA，引出电压9kV；能量利用率可达0.6；调整聚焦线圈的驱动电流，电子束的束斑直径从20mm 减小到13mm，电子束流强未有明显变化。     

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The generation and control of microwave electron cyclotron resonance (ECR) plasma cathode electron beam is studied experimentally. A complete set of discharge, electron beam extraction, focusing and measuring system was set up. The characteristics and performance of microwave ECR plasmas as electron beam extraction source were studied by measuring the current of water cooling target and the beam spot size on the target. Experimental results indicated that both microwave input power and accelerating voltage are conducive to improving electron beam current. The influence of gas pressure on the electron beam current was complex. With the increase of gas pressure, the electron beam current is characterized by decreasing first and then increasing. The extracted electron current of microwave ECR plasma cathode can reach 75mA at gas pressure of 7×10⁻⁴Pa, and the energy of the electron beam can reach 9keV. The energy utilization can reach 0.6. By adjusting the current of the focusing coil, the diameter of electron beam spot is reduced from 20mm to 13mm and the electron beam current keeps the value unchanged.     

Zur Diagnostik der Ionenkomponente im Plasma der äußeren positiven Säule einer stromstarken,unmagnetisierten Argon-Hohlkatodenbogenentladung

This paper reviews two measuring methods of the ions and their results in low pressure plasmas, if spectroscopical methods are not applicable to this situation. The behaviour of ions in the positive column of a high current argon hollow cathode arc was studied in dependence of various plasma parameters with the help of a gridded probe and a quadrupole mass spectrometer. The obtained results were analysed with simple theoretical models and measured electron distribution functions.     

Experimental Studies on Low-Pressure Plane-Parallel Hollow Cathode Discharges

Hollow cathode discharge (HCD) is widely used in material processing and plasma emission spectroscopy due to several advantages over other plasma sources. Basically, the HCD consists of a cathode with a hollow structure (cavity, hole, or parallel faces) and an anode of arbitrary shape. In this investigation, experimental studies on low-pressure plane-parallel HCD operated at different process conditions are reported. Herein, we investigate the dependence of the discharge current on the product of the gas pressure and inter-cathode distance (pD). In addition, the electron temperature and density were inferred from the current-voltage characteristics of a single cylindrical Langmuir probe positioned between the cathodes, on the discharge axis. The measurements were carried out at different gas pressures, magnetic field intensities, working gases, inter-cathode distances, cathode materials, and discharge voltages. The results showed that, at different gas pressures, the maximum discharge current (I_d,max) is not only a function of the product pD, but also of the pressure itself. Application of a uniform longitudinal magnetic field improved plasma confinement between cathodes, leading to a substantial increase in I_d,max in most of the situations considered in this study. However, for oxygen discharge, a strong discharge current reduction after the application of the magnetic field was observed. In relation to the Langmuir probe studies, it was observed that the uniform longitudinal magnetic field reduced the electron temperature, but this behavior depends strictly on pD. The typical values of electron density and electron temperature in the case of the nitrogen discharge were n_e?=?10¹⁷ m^?3 and T_e?=?2.5 eV, respectively. Finally, our experiments showed that the pD range for hollow cathode effects was between 0.2–5 Pa m.     

Particle‐in‐cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

Electron and ion currents to a cylindrical Langmuir (electrostatic) probe were calculated using the particle‐in‐cell/Monte Carlo (PIC/MC) self‐consistent simulation for a neutral gas in the pressure range 2–3,000 Pa. The simulation enables us to calculate the probe currents even at high neutral gas pressures when the collisions of collected charged particles with neutral gas particles near the probe are important. The main aim of this paper is the calculation of probe currents at such high gas pressures and the comparison of the results with experimentally measured probe currents. Simulations were performed for two cases: (a) probes with varying radii in a non‐thermal plasma with high electron temperature at low neutral gas pressure of 2 Pa (in order to verify the correctness of our simulations), and (b) probe with the radius of 10 μm in the afterglow plasma with low electron temperature and a higher neutral gas pressure (up to 3,000 Pa). The electron probe currents obtained in case (a) show good agreement with those predicted by the orbital motion limited current (OMLC) theory for probes with radii up to 100 μm for the given plasma conditions. At larger probe radii and/or at higher probe voltages, the OMLC theory incorrectly predicts too high an electron probe current for the plasma parameters studied. Additionally, a formula describing the spatial dependence of the electron density in the presheath in the collisionless case is derived. The simulation at higher neutral gas pressures, i.e. case (b), shows a decrease of the electron probe current with increasing gas pressure and the creation of a large presheath around the probe. The simulated electron probe currents are compared with those of measurements by other authors, and the differences are discussed.     

Gasaufheizung und Energiebilanz einer stationären hochfrequenten Ringentladung in Edelgasen

Gasheating and Energy Balance of a Stationary High Frequency Ring Discharge in Rare Gases The energy balance of an inductively coupled high frequency (28,5 Mhz) discharge in a cylindrical vessel (11,2 cm diam.) in Ne, Ar, Kr, Xe at pressures between 0,1 and 10 Torr and at power inputs between 10 and 1000 W is investigated. The heat power transferred to the neutral gas in the stationary discharge is determined from the time behaviour of the neutral gas pressure in the afterglow period. The power measurements are completed by probe measurements of the electron density and energy distribution function. The measured electron energy distribution functions are maxwellian with a slight deficit electrons in the energy range of inelastic collisions. The electron temperatures show a rather low radial space dependence which can be explained on the basis of the local energy, balance by thermal conduction in the electron gas. The measured gas heating power is within the experimental error (factor 2) in agreement with calculations from the measured electron temperature and density under the assumption that the gas is heated by elastic electron-atom-collision only. A discussion of the energy balance for the total discharge indicates volume recombination losses of the ions which increase the density of the excited atoms and hence the energy losses by stepwise exitations.     

The model of internal column of hollow cathode vacuum discharge

Analyzes the characteristics of rarefied, nonequilibrium-state plasmas in the internal column of a hollow cathode discharge (HCD). The analysis is based on the theory of plasma disintegration in a strong electric field (Dreicer 1959, 1960). It is demonstrated that this process has a crucial influence upon the forming of directed flux of electrons with energy values 20-30 eV at the exit of the hollow cathode. The obtained values significantly exceed the energy of thermal motion of electrons in the plasma disintegration zone. A new method is suggested of calculating electron density and electric field intensity in respect to the axis of the internal column in the channel model of the discharge. In addition, a method is presented of calculating the length of the internal column and the energy of the directed electron flux at the exit of the hollow cathode on the basis of HCD fundamental parameters