仪器展宽对大气压等离子体电子密度测量的影响

实验使用两台不同的单色仪,采用光谱线型法测量了大气压氩气介质阻挡放电中的电子密度.诊断结果表明,由于不同的单色仪其仪器加宽不同,仪器加宽对总的光谱线型有较大影响.通过考虑等离子体中的各种加宽机制,采用卷积和反卷积的方法对氩原子发射谱线线型进行了分析,从整个光谱线型中分离出Stark线型,排除了仪器加宽对最终诊断结果的影响.从而最终测量了大气压氩气介质阻挡放电中的电子密度.测量得到在大气压氩气介质阻挡放电中单个放电丝存在时,电子温度为10000K时,电子密度约为3.05-3.26×1021 m-3.此方法不仅可以应用在大气压介质阻挡放电中,还可以用于测量其它大气压等离子体电子密度.     

Measurement of neutral gas temperature in inductively coupled plasmas

Dependence of the neutral gas temperature on the gas pressure and discharge power in an inductively coupled plasma source has been investigated using optical emission spectroscopy. Both nitrogen and argon plasmas have been studied separately. In the case of argon plasma, about 5% nitrogen was added to the total gas flow as an actinometer. The maximum temperature was found to be as high as 1850 K at 1 Torr working pressure and 600 W radiofrequency power. The temperature increases almost linearly with the logarithm of the gas pressure, but changes only slightly with the discharge power in the range of 100–600 W. In a nitrogen plasma, a sudden increase in the neutral gas temperature occurs when the gas pressure is increased at a given discharge power. This suggests a discharge-mode transition from the H-mode (high plasma density) to the E-mode (low plasma density). In the H-mode, the gas temperature is proportional to the logarithm of the gas pressure, as in the argon plasma. However, the gas temperature increases almost linearly with the discharge power, which is in contrast to the case of argon plasma. The electron density in the nitrogen plasma is about 10% of that in the argon plasma. This may explain the observation that the nitrogen neutral temperature is always lower than the argon neutral temperature under the same discharge power and gas pressure.     

Magnetic reconnection in collisionless plasmas

A class of processes involving magnetic field reconnection, in collisionless plasmas and magnetic configurations where the field undergoes a finite change of direction, is investigated. Reconnecting modes that rely on the effects of electron Landau resonance and density gradient for their excitation are found to require the analytical or numerical treatment of four consecutive asymptotic regions. The influence of finite electron temperature gradient in the region where the effects of electron Landau resonance prevail, and the convection of energy toward the region where ion Landau resonance is dominant tend to dampen these modes. Conversely, significant distortions of the ion distribution can follow their excitation. The relevance of the obtained results to experimental observations on laboratory plasmas and in space physics is discussed. Different processes are involved with magnetic reconnection in magnetic configurations where the field does not have appreciable shear but has a neutral surface on which it vanishes.     

Power Consideration for Pulsed Discharges in Potassium Seeded Argon

Minimization of energy consumed in plasma generation is critical for applications, in which a large volume of plasmas is needed. We suggest that a high electron density atmospheric pressure plasmas can be generated by pulsed discharges in potassium seeded argon at an elevated temperature with a very small power input. The ionization efficiency and power budget of pulsed discharges in such plasmas are analytically studied. The results show that ionization efficiency of argon, especially at small reduced electric field E/N （the ratio of the electric field to the gas number density）, is improved effectively in the presence of small amount of potassium additives. Power input of pulsed discharge to sustain a prescribed average level of ionization in potassium seeded argon is three orders of magnitude lower than that in pure argon. Further, unlike in pure argon, it is found that very short high-voltage pulses with very high repetition rates are unnecessary in potassium seeded argon. A pulse with lOOns of pulse duration, 5kHz of repetition rate, and 2Td （1 Td = 1 × 10^-21 Vm^2） of E/N is enough to sustain an electron density of 10^19 m^-3 in 1 arm 1500K Ar＋0.1% K mixture, with a very small power input of about 0.08 × 10^4 W/m^3.     

非理想氩等离子体电子密度和平均离化度理论研究

用SHM模型计算了非理想Ar等离子体在温度T为2.0eV、密度ρ为0.01~0.5g•cm-3的电子密度和平均离化度。研究了非理想Ar等离子体电子密度和平均离化度随温度、密度的变化规律,得到了在温度T为2.0eV、密度ρ为0.01~0.5g•cm-3非理想Ar等离子体的平均离化度小于0.5的结果。这表明非理想Ar等离子体的平均离化度非常低,大量的Ar仍然处于非电离状态。计算的结果还显示了平均离化度随等离子体密度ρ增加而减小的特征,并分析了减小的原因。     

BEHAVIOR OF Ar PLASMA FORMED IN A HIGH DENSITY PLASMA SOURCE-AN ECR REACTOR

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.     

Density effects on the spectral emission of a high temperature argon plasma

In order to explain the detailed features of radiation spectra obtained from dense argon plasmas, an ionization-radiation model for argon has been constructed which calculates time-integrated spectra as a function of plasma temperature, density and size. The model describes a plasma in collisional-radiative equilibrium (CRE) by solving the time-dependent atomic rate equations for ground state and selected excited state populations of argon coupled with a probability-of-escape radiation transport scheme for both bound-bound and bound-free photons. Results are presented which illustrate basic changes in the X-ray spectra of an argon plasma as density is increased, in particular, relative intensities of resonance, satellite and intercombination lines as well as the free-bound continuum. In addition, temperature and density profiles from 1-D MHD calculations characterizing the peak emission from argon puffed-gas plasmas (≈10¹⁹ions/cm³) and argon-seeded laser-imploded microballons (?10²²ions/cm³) are post-processed using the model and the resulting spectra are discussed.     

Observations of Nonlinear Behavior in a Low-Pressure Discharge Column

Sudden and abrupt jumps in the plasma density and discharge current of low-pressure magnetized argon and helium plasmas are observed. These jumps are found to depend on the discharge bias voltage, the neutral gas pressure, and the magnetic field strength and occur with a substantial hysteresis in those parameters. These jumps are accompanied by the onset of intense and coherent low-frequency plasma oscillations. In addition, under certain conditions, the radial density profile of the plasma is found to be significantly different following a jump. Some possibly related plasma instabilities are discussed.     

一种计算氩等离子物态方程的简单模型

将Thomas-Feimi统计模型电离势的数值结果进行函数逼近，给出一个便于近似数值求解的解析表达式和计算电离度的近似计算方法，计算了Ar元素LTE情况下的电离度和物态方程，结果与Saha模型的计算结果和实验结果符合较好.所提出的简单模型也适用于计算混合物物态方程，可以在电磁发射技术领域中的强电离等离子体中有广阔的应用前景. 关键词： 等离子体 物态方程 电离势 电离度     

冲击压缩产生的氩等离子体辐射不透明度研究

采用平面冲击压缩方法产生密度和温度都均匀的氩等离子体,根据光谱辐射强度随时间的变化测量了氩等离子体在可见光区几个波长通道的辐射不透明度,等离子体温度在1.4—2.2eV范围,密度在0.0083—0.015gcm³之间.测量值和理论计算结果符合较好,说明平均原子模型可以较好地描述该热力学条件下氩等离子体的光子输运行为.基板表面的光反射率在确定辐射不透明度时是一个重要参数.采用简化的自洽方法求解基板表面的光反射率.结果表明,基板/氩气界面的光反射率R在0.4附近,与Erskine专门实验 关键词： 物态方程 不透明度 氩     

射频等离子体离子能量分布特性研究

利用质谱仪对不同进气速率下的氩气、氮气及氮-氘混合三种射频感应耦合等离子体的离子能量分布、离子浓度演化进行了研究。实验结果表明,等离子体的离子能量分布呈多峰结构;在功率一定时,纯氩气及氮气离子的峰值能量随进气速率增加向低能端移动,且离子通量密度逐渐降低;而氮-氘混合等离子体生成的氨系离子 ND₄⁺,峰值离子能量随氘气进气速率先降低后上升,通量密度先增大后降低。      

侧吹气体对光纤激光修锐青铜金刚石砂轮等离子体特性影响

为了研究辅助侧吹氩气对光纤激光修锐青铜结合剂金刚石砂轮等离子体的影响,利用高速摄像机拍摄不同侧吹工艺参数下等离子体空间膨胀形态,结果表明：氩气降低了等离子体的膨胀高度,随着压力增加,等离子体的膨胀距离减小,等离子抑制作用增强。 利用光谱仪研究了等离子体发射光谱在砂轮径向上的最大值随氩气压力的变化情况,并根据Boltzmann斜线法和Stark展宽法,计算不同氩气压力下等离子体在砂轮径向上电子温度和电子数密度的最大值,结果表明：气体压力增大,等离子体光谱线强度先增大后减小,等离子体光谱线强度在0.2 MPa时达到峰值,较大的氩气压力明显降低等离子体电子温度和电子数密度,从而减小对砂轮表面形貌的影响。 利用超景深三维扫描仪观测添加侧吹气体前后砂轮表面形貌,结果表明：0.5 MPa侧吹氩气后,砂轮表面形貌质量明显优于未添加侧吹气体时。     

Influence of Negative Ions on Drift Waves in a Low‐Density Ar/O2‐Plasma

The effect of negative ions on the drift wave instability has been studied in detail in a linear device by means of Langmuir probes and cross‐correlation analysis. Drift waves are excited in low‐density (5 × 10¹⁴ m^–3) and strongly magnetized (0.5 T) pure argon plasmas and in the presence of an oxygen admixture. The radial density profile of negative ions is hollow. For increasing concentration of negative ions the wave frequency decreases by about 25%. Despite of an axial density gradient, a global wave frequency is established for the entire column length. While for the noble gas case the drift wave frequency is given by the equilibrium plasma parameters in the mid‐plane, there is no such relationship for the argon plasma with oxygen admixture. This different finding is attributed to the inhomogeneous distribution of the negative ions (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Mitigation of tokamak disruptions using high-pressure gas injection

High-pressure gas-jet injection of neon and argon is shown to be a simple and robust method to mitigate the deleterious effects of disruptions on the DIII-D tokamak. The gas jet penetrates to the central plasma at its sonic velocity. The deposited species dissipates >95% of the plasma by radiation and substantially reduces mechanical stresses on the vessel caused by poloidal halo currents. The gas-jet species-charge distribution can include >50% fraction neutral species which inhibits runaway electrons. The favorable scaling of this technique to burning fusion plasmas is discussed.     

Spectroscopic characteristics of argon plasma produced bymultistage pseudospark discharges

A measurement is made of the spectroscopic characteristics of argon plasma produced by multistage pseudospark discharges in a peculiar geometry which has not yet been reported in literature. High electron temperature, high peak current density, and a high degree of ionization are demonstrated in such a device. The population number density of the upper and lower levels of 488.0, 476.6, 514.5, 351.1, and 363.8 nm transitions in ArII and ArIII are measured. The ultraviolet emission characteristics of pure Ar and Ar/He mixture plasmas are compared. An appreciable increase is observed in peak intensities of ArIII lines when nitrogen is added to Ar     

普朗克谱分布的辐射场对束缚电子布居的影响

研究了外加普朗克辐射场对不同温度和密度下的等离子体的主量子壳层束缚电子的布居数的分布以及随时间的演化规律的调制作用.结果表明：当具有普朗克谱分布的辐射场的辐射温度接近于等离子体的电子温度,且辐射场的强度等于等效温度下的黑体谱辐射强度时,随着等离子体的时间演化,等离子体中主壳层束缚电子布居数分布由non-LTE分布过渡到LTE分布. 关键词： 流体动力学 激光等离子体 布居数 普朗克辐射场     

碰撞辐射稳态等离子体电荷态分布的一种扩展模型

通过等离子体中离子激发-退激发平衡关系,构造一种离子激发组态之间满足的非Boltzmann分布,利用这个分布作为权函数对原子过程速率系数进行平均,构造出一个扩展的碰撞辐射稳态模型.利用该模型计算从低Z到高Z元素等离子体平均离子电荷随电子温度的变化.进而研究非Boltzmann分布对平均电离度和激发组态相对密度的影响.结果表明,它对相对激发组态密度的影响非常显著. 关键词： 扩展的碰撞辐射稳态 概率分布 能级动理学     

Behaviour of fully ionized seed plasma excited by microwave

Nonequilibrium plasmas with cesium metal vapor ionization in helium and argon gases at moderate pressures are excited with microwave power. The structures and behaviour of the seeded plasmas are experimentally examined, particularly under the condition of Full seed (cesium atoms) ionization. By cesium seeding, the minimum power sustaining the plasma is reduced markedly, and both a broad plasma observed in pure helium and unsteady filament-like plasmas in pure argon change to the steady and broad plasma locating close to the inner surface of a discharge tube, it is revealed from the electron temperature measurements that the plasma can be in the regime of full seed ionization for suitable microwave powers, where the electron density is kept almost constant. The thickness of the fully ionized seed (FIS) plasma decreases with increasing the mole fraction of cesium vapor, and is almost independent of noble gas pressure. The thickness almost coincides with the skin depth determined from the electrical conductivity almost uniform in the FIS plasma. These facts suggest that the FIS plasma will be easily produced and maintained as long as the microwave power is consumed to the electron heating     

Measurements of microwave transmission through a decaying plasmacolumn

We have studied the width and the amplitude of the transmitted radio frequency (RF) pulse, as a function of the afterglow time for argon and nitrogen plasmas. In our study, the neutral gas pressure for the case of argon was 2 torr and that for nitrogen was 0.5 torr. The RF energy of the transmitted pulse was found to reach half of its maximum value for afterglow times of about 0.1 s for argon and about 375 μs for nitrogen     

Zur Diagnostik der Ionenkomponente im Plasma der äußeren positiven Säule einer stromstarken,unmagnetisierten Argon-Hohlkatodenbogenentladung

This paper reviews two measuring methods of the ions and their results in low pressure plasmas, if spectroscopical methods are not applicable to this situation. The behaviour of ions in the positive column of a high current argon hollow cathode arc was studied in dependence of various plasma parameters with the help of a gridded probe and a quadrupole mass spectrometer. The obtained results were analysed with simple theoretical models and measured electron distribution functions.