射频等离子体离子能量分布特性研究

利用质谱仪对不同进气速率下的氩气、氮气及氮-氘混合三种射频感应耦合等离子体的离子能量分布、离子浓度演化进行了研究。实验结果表明，等离子体的离子能量分布呈多峰结构；在功率一定时，纯氩气及氮气离子的峰值能量随进气速率增加向低能端移动，且离子通量密度逐渐降低；而氮-氘混合等离子体生成的氨系离子 ND₄⁺，峰值离子能量随氘气进气速率先降低后上升，通量密度先增大后降低。 

Studies on the ion energy distribution of radio-frequency discharges

Using a diagnostic system with a spectrometer, ion energy distributions and ion concentration  evolutions of argon, nitrogen and nitrogen-deuterium plasmas induced by radio frequency were studied at  different inlet flow rates. It is found that the plasma ion energy distribution has a multi-energy-peak structure,  peak values and ion flux in argon and nitrogen plasmas with fixed discharge power decrease with the increase of  gas flow rate. Peak energy of ND₄⁺ in nitrogen-deuterium plasma initially decreases and then increases while the  ion flux increases first and then falls down as the increment of extra supplement of deuterium.