基于总散射测量的表面质量检测新方法

光学元件在加工及使用过程中引入的麻点或擦痕会严重影响其表面质量。基于Peterson疵病散射理论,将麻点或擦痕引起的散射光分为两部分,即对麻点(或擦痕)内部表面的散射光作漫反射分析,对麻点或擦痕外围轮廓引起的散射光作衍射分析。进一步考虑麻点和擦痕的挡光效应,以及麻点衍射消失的边界条件,通过将疵病散射理论与国家标准GB/T 1185—2006相结合,推导出麻点、擦痕的双向反射分布函数的解析表达式,进而分析了不同疵病级数下的角分辨散射和总散射。研究结果表明:表面疵病的总散射与疵病面积近似成线性正比,进而据此提出了一种基于总散射测量的表面质量检测新方法,并分析了光学元件表面疵病的阈值。     

精密表面疵病检测美标数字化评价实现算法

采用美国军用标准MIL-PRF-13830B（简称美标）对光学元件表面疵病进行数字化评价,其难点主要在于美标中表面疵病密集度的判定。针对该难点,提出了一种表面疵病密集度判定算法。该算法采用权重域叠加的方法,通过为表面疵病赋予相应的权重域来确定疵病密集圆域,并将权重域间的叠加转换成了矩阵间位置关系的判断和计算,有效的利用了矩阵运算的便利性。实验中通过对已知表面疵病信息的石英标准板进行判定,其得到的圆域即为疪病密集圆域,与预期结果一致,验证了该算法的正确性。目前该算法已经运用于光学车间精密光学元件表面疵病的美标数字化评价。     

基于高分辨力CCD的大口径光学元件疵病检测

 介绍了一种利用高分辨力CCD快速检测大口径光学元件表面和体内疵病的方法。利用侧照明方式对大口径光学元件进行均匀掠射照明,表面和体内疵病因为散射在暗室成像过程中影像被放大。对比研究了疵病示踪尺寸和真实尺寸,得出近似数学关系,利用高分辨力CCD,通过一次性成像获得光学元件疵病尺寸近似值、2维空间位置等定量描述表面特征的信息。     

大口径光学元件表面疵病在位检测与评价研究

精密光学元件在加工过程中如果工艺控制不当,产生的划痕、麻点等疵病分布范围虽然较小,但对整个光学系统的性能影响却很大,破坏力非常强,目前的表面疵病检测仪基本上针对平面或球面光学元件进行离线检测。文章以光学加工机床为运动平台,采用暗场散射成像方法,设计多光束均匀照明系统,研究表面疵病微细特征的识别算法,实现大口径光学表面疵病的在位检测与评价;标定结果表明,表面疵病宽度偏差为2.05%,长度偏差为2.39%,满足指标要求;在此基础上针对Φ280 mm平面硅镜进行自动化在位检测,给出了不同类型疵病的统计数据,解决了离线检测中非加工时间长与多次装夹引起定位误差等问题。     

球面光学元件表面疵病视觉检测方法研究

球面光学元件由于其光学结构的影响,采用机器视觉的方法对其表面疵病进行检测时,无法将被测面都成像在一个像平面上并且在成像的过程中丢失了疵病的三维信息,造成了检测的误差。为了解决这些问题,提出了一种机器视觉与三维重构相结合的检测方法。首先,根据球面光学元件的特性设计了图像采集平台,以获得高质量的疵病图像。然后,通过图像处理算法对疵病图像进行预处理与疵病识别。最后,基于计算机视觉图像重构技术与球心投影技术,对疵病图像进行三维重构。实验表明,该方法提升了机器视觉对球面光学元件表面疵病检测的精度,可达99%,具有可行性和研究价值。     

基于条纹反射的光学表面疵病检测法

提出一种基于条纹反射的光学表面疵病检测方法,检测系统由液晶显示屏、CCD相机和计算机组成.检测时在显示屏上分别显示水平和垂直两个方向正交的正弦性条纹,用CCD相机记录经被测表面反射的正弦条纹像,通过相移技术得到两个方向正交的相位分布和对比度分布,通过对比度分布确定被测表面的疵病位置.被测面表面面形相关信息包含在相位分布中,其表面疵病细节信息包含在局部微观相位分布之中.对相位分布进行多项式拟合后相减得到疵病引起的微观相位分布,计算得到表面疵病的梯度分布,积分得其高度分布.实验验证了该方法的可行性.     

基于BRDF的光学表面疵病散射特性的仿真研究

为了研究精密光学元件表面微弱疵病的散射特性,基于矢量散射理论和双向反射分布函数,建立了光学表面微弱疵病的散射理论模型.通过仿真计算了双向反射分布函数随散射角的变化情况,分析了入射角度、入射光波长以及疵病自身尺寸等因素对疵病散射光特性的影响.基于仿真数据分析,针对光源参数对散射特性的影响进行仿真分析,为使用暗场成像法进行...     

光学元件表面缺陷的显微散射暗场成像及数字化评价系统

根据国际ISO10110-7的表面缺陷标准及惯性约束聚变(ICF)工程标准,提出了一种新颖的光学元件表面缺陷的光学显微散射成像及数字化评价系统,多束光纤冷光源呈环状分布并以一定角度斜入射到数毫米视场的被检表面,形成适合数字图像二值化处理的暗背景上的亮疵病图像。对X,Y两方向进行子孔径图像扫描成像,利用模板匹配原理对获得的子孔径图像进行拼接得到全孔径表面疵病图像信息。基于数学形态学建立了可用于大口径表面检测扫描的图像处理的模式识别软件体系,并应用二元光学制作了标准对比板,以获得疵病正确的评价依据。最终利用该变倍光学显微镜散射成像系统得到能分辨微米量级表面疵病的图像,其单个子孔径物方视场约为3 mm,对X,Y两方向进行5×5子孔径图像扫描成像,并给出了与标准比对的定量数据结果。实验结果表明,本系统完全可以实现光学元件表面缺陷的数字化评价。     

大口径精密表面疵病的数字化检测系统

 根据散射光成像原理,采用大小两个视场来获取不同精度的暗背景下的亮疵病图像,设计了完整的数字化表面疵病检测系统。该系统采用多区域自适应阈值分割算法对图像进行分割,然后采用基于等价归并标记方法快速提取疵病的特征参数,最后利用BP神经网络对疵病进行分类。实验结果表明该方法既满足实时性需求,又取得了较好的分类检测效果。     

光学元件表面的数字全息检测

针对球形光学元件的表面质量检测,开发了一种基于数字全息的表面曲率参数及疵病的同步检测方法。利用最小二乘法对再现波前进行参数拟合和计算,解决了再现过程中倾斜因子补偿对测量可靠性造成的影响。通过将原始数据与生成的虚拟曲面相减实现了表面疵病信息的同步提取。实验证明,该方法的测量结果与白光干涉仪的测量差异小于1.5%,在不同倾斜因子补偿系数作用下的测量结果误差小于1%。     

Yield estimation of metallic layers in integrated circuits

In the existing models of estimating the yield and critical area, the defect outline is usually assumed to be circular, but the observed real defect outlines are irregular in shape. In this paper, estimation of the yield and critical area is made using the Monte Carlo technique and the relationship between the errors of yield estimated by circular defect and the rectangle degree of the defect is analysed. The rectangular model of a real defect is presented, and the yield model is provided correspondingly. The models take into account an outline similar to that of an original defect, the characteristics of two-dimensional distribution of defects, the feature of a layout routing, and the character of yield estimation. In order to make the models practicable, the critical area computations related to rectangular defect and regular (vertical or horizontal) routing are discussed. The critical areas associated with rectangular defect and non-regular routing are developed also, based on the mathematical morphology. The experimental results show that the new yield model may predict the yield caused by real defects more accurately than the circular model. It is significant that the yield is accurately estimated using the proposed model for IC metals.     

缺陷对单壁碳纳米管熔化与预熔化的影响

利用分子动力学模拟研究了具有几种常见缺陷的单壁碳纳米管的熔化与预熔化性质. 研究结果表明, 类似于纳米颗粒和聚合物, 碳纳米管发生熔化时的Lindemann指数为003, 远低于晶体熔化的判据01—015 使用Lindemann指数, 得出标准碳纳米管的熔化温度为4800K左右, 而带缺陷的碳纳米管的熔化总是从缺陷处开始, 并且缺陷会影响碳纳米管局部的熔化温度, 导致局部预熔化. Stone-Wales缺陷在2600K引起碳纳米管的局部熔化,空位缺陷导致的局部熔化温度在3200K, 而具有硅替位缺陷的碳纳米管在3800K以下具有很好的热稳定性. 关键词： 熔化 预熔化 缺陷 碳纳米管     

激光超声检测带过渡圆角平板表面缺陷的数值研究

为了研究激光激发出的超声波在带过渡圆角的金属平板上的传播规律和检测表面缺陷的方法，采用有限元法模拟了该类平板中的激光超声现象，分析了表面波在圆角区域的传播规律和与表面缺陷的作用过程。数值结果表明:激光激发出纵波、横波和Rayleigh波等，其中Rayleigh波主要存在于表面mm量级，并且在过渡圆角处发生模式转换生成了直达波R′和模式转换波R_R等多种表面波；经过过渡区域后的声波在表面缺陷处发生了反射和透射现象，通过B扫图可以检测缺陷的位置。随着缺陷深度的增加，表面波的透射系数不断减小，且透射波R_t和R_st存在0.5 μs左右的到达时间差，该时间差与缺陷深度近似成线性正相关。数值结果为激光超声检测带过渡圆角的平板表面缺陷提供了有价值的参考。     

车辆轮对踏面缺陷的光电检测方法研究

铁路车辆轮对踏面的擦伤与剥离是车辆在运行过程中形成的一种常见的不规则表面缺陷,是轮对检修过程中必须检测的一个项目。提出了一种利用光电技术非接触测量此表面缺陷的方法。该方法在轮对旋转条件下,用精密激光位移传感器对踏面进行快速扫描,采集值经处理后被转换为数字图像,再通过图像处理识别是否存在表面缺陷。必要时通过对缺陷部位的往复扫描,更准确识别出擦伤与剥离是否超出段修限度。该方法可有效检测出踏面缺陷,重复性好,可满足车辆段修现场使用要求。     

二维磁振子晶体中线缺陷模的性质及其应用

在超原胞近似下, 利用平面波展开法数值计算了含线缺陷结构的二维磁振子晶体带结构及缺陷模的磁化强度场分布. 研究结果表明, 线缺陷结构的引入会在禁带中产生一个小范围的通带, 即产生线缺陷模. 该模式的存在可使自旋波沿着线缺陷结构的方向传播, 利用此性质含线缺陷结构的二维磁振子晶体材料可作为自旋波导波器件的制作材料. 关键词： 磁振子晶体 线缺陷 波导     

Convergence properties of the supercell approach in the study of local defects in solids

The “supercell” scheme is applied to the study of local defects in MgO (Ca substitution, cation and anion vacancies) and bulk silicon (carbon substitution). The trend of the quantities of interest (defect formation energy, geometrical relaxation, charge distribution around the defect) as a function of the supercell size is explored; when neutral defects are considered, supercells containing 50 to 100 atoms are large enough to allow for most of the nuclear and electronic relaxation and to produce a negligible interaction between defects in different cells. These conclusions apply both to ionic and covalent host crystals. Present day ab initio quantum mechanical periodic computer programs can handle cells of such a size at a relatively low cost and high numerical accuracy.

When charged defects are considered (vacancies in MgO), the supercell scheme must be modified in order to avoid Coulomb divergencies, but the usually adopted correction, which consists in introducing a compensating uniform background of charge, generates spurious higher order electrostatic interactions, which are far from being negligible. The resulting defect formation energies show very slow, if any, convergence trends and “a posteriori” semiclassical corrections proposed in the literature do not represent a general solution to the problem. On the other hand, other properties, such as atom relaxation and charge distribution, show a much faster convergence than energy with respect to the cell size.     

空位结构缺陷对C纳米管弹性性质的影响

用分子动力学方法对不同空位缺陷的扶手椅型与锯齿型单壁C纳米管杨氏弹性模量进行了计算和分析. 结果表明：扶手椅型（5, 5）, （10,10）和锯齿型（9, 0）, （18, 0） 纳米管在无缺陷时其杨氏模量分别为948,901和804,860 GPa. 随管径的增大,扶手椅型和锯齿型单壁C纳米管弹性模量分别减小和增大,表现出完全不同的变化规律. 随着C纳米管中单点空位缺陷的均匀增加,杨氏模量下降,当缺陷比率增加到一定程度时,杨氏模量下降骤然趋缓,形成一下降平台;双空位缺陷对C纳米管杨氏模量的影响与其分布方向有关;随单点空位缺陷间原子数的增加,在轴向上,杨氏模量下降到某一值小幅波动,而在周向上杨氏模量先下降,然后上升到某一稳定值. 随两单点空位缺陷的空间距离进一步增大,杨氏模量又呈微降趋势. 通过分子间σ键与π键特征及缺陷间近程电子云耦合作用规律与空位缺陷内部5-1DB缺陷的形成特点等理论对上述规律进行了分析. 关键词： 空位缺陷 C纳米管 分子动力学 杨氏模量     

Distribution of Topological Defects on Axisymmetric Surface

We propose a general method of determining the distribution of topological defects on axisymmetric surface,and study the distribution of topological defects on biconcave-discoid surface, which is the geometric configuration of red blood cell. There are three most possible cases of the distribution of the topological defects on the biconcave surface:four defects charged with 1/2, two defects charged with 1, or one defect charged with 2. For the four defect charged with 1/2, they sit at the vertices of a square imbedded in the equator of biconcave surface.     

The effect of surface cleanness of thin defects on the reflection of ultrasound

In a previous paper, the authors described experiments in which simulated defects of thickness 20–200 nm were detected ultrasonically. The defects were produced by creating thin gaps between the surfaces of optical flats. A relation between reflectivity and cleanness of the surfaces was noted.This paper describes new experiments and some theoretical considerations which further explore the relation between cleanness and reflectivity. It is concluded that the surface properties of the thin defects tested affect the reflectivity. In particular, it appears that the surface energy of the defect attracts additional material, which provides a mechanism for transmission of sound across the defect.     

XPS study on the evaporation of gold submonolayers on carbon surfaces

We investigated the early nucleation stages of evaporated gold submonolayers on different carbon surfaces (pristine HOPG, argon-ion irradiated HOPG and amorphous carbon). Gold core-level and valence band spectra were measured by monochromatised X-ray photoelectron spectroscopy (MXPS). The Au 4f spectra for the lowest coverages (0.1 Å equivalent thickness) on irradiated HOPG and amorphous carbon surprisingly exhibited two well-separated doublets. We attribute this phenomenon to a bimodal particle size distribution caused by gold atom pinning at carbon defect sites. Deposition at elevated temperatures (on irradiated HOPG) opens a possibility to grow particles preferentially on defect sites. The influence of carbon surface defects on the cluster morphology was checked by SEM imaging. These results are interesting for future applications as they help to improve control over metal nanodots growth.