Photoacid generating polymers based on sulfonyloxymaleimides and application as single-component resists

Three sulfonyloxymaleimides (RsOMI), N-(tosyloxy)maleimide (TsOMI), N-(methane-sulfonyloxy)maleimide (MsOMI), and N-(trifluoromethanesulfonyloxy)maleimide (TfOMI), have been synthesized and used to make novel photoacid generating polymers. The sulfonyloxymaleimides easily copolymerized with styrene derivatives to give high molecular weight polymers having an alternating structure of both monomer units. Terpolymers based on RsOMI and p-(tert-butyloxycarbonyloxy)styrene (t-BOCSt) were prepared for enhancing resist properties such as adhesion to substrates, solubility in aqueous alkaline solutions, or transparency in the deep-UV region. The RsOMI copolymers were found to produce corresponding sulfonic acids (RsOH), TsOH, MsOH, and TfOH, by deep-UV irradiation in the film state. Thus, the polymers having both the RsOMI and t-BOCSt units show the capability of a single-component, chemically amplified resist system in the deep-UV region without addition of any photoacid generator. Positive- and negative-tone images were obtained by exposure of the polymer films to deep-UV and post-exposure bake followed by development with organic solvents or aqueous alkaline solutions. © 1996 John Wiley & Sons, Inc.     

Syntheses and polymerizations of some vinyl monomers containing nitro- or fluorophthalimides

4-Nitro-N-vinylphthalimide ( 4 ) was synthesized by two different procedures. Compound 4 was not polymerizable or copolymerizable by AIBN. Poly(N-vinylphthalimide) ( 17 ) was prepared and partially nitrated at 10–25°C. N,N′-(1,2-Ethanediyl)bis(4-nitrophthalimide) ( 15 ) and N,N′-(1,3-propanediyl)bis(4-nitrophthalimide) ( 16 ) were prepared by the condensation of the corresponding diamine with phthalic anhydride followed by nitration of the condensation products. 4-Nitrophthalic anhydride was prepared by the hydrolysis of 15 . Four styrene-substituted phthalimide monomers were synthesized. These include N-(4-vinylphenyl)phthalimide ( 25a ), N-(4-vinylphenyl)-3-fluorophthalimide ( 25b ), N-(4-vinylphenyl)-3-nitrophthalimide ( 25c ), and N-(4-vinylphenyl)-4-nitrophthalimide ( 25d ). Monomers 25a and 25b were polymerized by freeradical initiator (AIBN), whereas monomers 25c and 25d were not polymerizable or copolymerizable by AIBN due to a strong inhibitive effect exerted by the nitrophthalimide group. Monomers 25c and 25d were cationically polymerized (BF₃·OEt₂). Monomer 25b and styrene were copolymerized and their reactivity ratios were r₁ = 1.7 and r₂ = 0.55, respectively. The prepared polymers are useful as backbone polymers for grafting living anionic polymers.     

Optically active imidazole-containing polymers

In order to investigate the stereospecificity of enzyme-catalyzed reactions, an optically active copolymer of 4(5)-vinylimidazole and 2,5(S)-dimethyl-1-hepten-3-one was synthesized, and its effects on the solvolytic rates, in ethanol-water, of the p-nitrophenyl and 4-carboxy-2-nitrophenyl esters of 3(R)- and 3(S)-methylpentanoic acid and of the commercially available N-carbobenzoxy-(R)- and (S)-phenylalanine p-nitrophenyl esters were investigated. The optically active comonomer was prepared by thermal decomposition of solid (+)-1-piperidino-2,5(S)-dimethylheptan-3-one hydrochloride, which was obtained from the reaction of 2(S)-methylbutyllithium with 3-piperidino-2-methylpropionitrile. The 3(R)-methylpentanoic acid was prepared in 92% optical purity from L -alloisoleucine via diazotization in concentrated hydrobromic acid and subsequent reductive debromination with zinc amalgam in dilute hydrochloric acid. In the optically active copolymer-catalyzed solvolyses of the optically active esters performed at pH values of 6–8 no significant differences between the solvolytic rates of (R) and (S) isomers of substrates were observed. Poly-L -histidine was also employed as a catalyst for the solvolyses of these substrates. At pH 6.0 in ethanol–water the latter catalyst also failed to exhibit specificity towards (R) and (S) substrates.     

Synthesis and characterization of styrenic polymers with pendant pyrazole groups. II

The synthesis of styrenic monomers that have pyrazolic or bipyrazolic pendant groups is described. Their homopolymerization and their copolymerization with maleic anhydride (MA) and N-(3-acetoxy propyl) maleimide is reported. The monomers were prepared from the Williamson reaction between 2-pyridine carbinol, hydroxy monopyrazole, hydroxy bipyrazole, and chloromethyl styrene. The homopolymerizations of such styrenic monomers were tried under different conditions, which led to low molecular weight polymers with a high polydispersity. However, alternating copolymers were obtained using maleic anhydride or N-(3-acetoxy propyl) maleimide as comonomers, as shown by ¹H-NMR, elemental analysis, and reactivity ratios r₁ and r₂. Furthermore, the hydrolysis of the acetate function of different copolymers was performed quantitatively. Unlike the acetoxy copolymers, such products do not have any glass transition temperature. Thermogravimetric investigations have shown that these copolymers exhibit good thermostability. © 1994 John Wiley & Sons, Inc.     

Syntheses and reactions of functional polymers. XLVI. Preparation and reactions of N-benzyloxyisomaleimide–styrene copolymer

Polymerization of N-benzyloxymaleimide(I) was attempted to obtain a polymer with the N-hydroxysuccinimide unit in the chain. In the light of infrared and NMR data the compound reported by Ames as N-benzyloxymaleimide is N-benzyloxyisomaleimide (III). Homopolymerization of III did not give polymer. Copolymerization of III with styrene was carried out in dioxane at 70°C. A strong alternation tendency like that of maleimides was observed. Monomer reactivity ratios and Q-e values were determined. Copolymer having the isoimide structure showed infrared absorptions at 1815 and 1675 cm^?1 in the carbonyl region. The copolymer was isomerized to N-benzyloxymaleimide type copolymer and debenzylated to N-hydroxymaleimide type copolymer. An insoluble copolymer was prepared by using divinylbenzene as a crosslinking agent and was converted to N-acetoxymaleimide type copolymer, which was used as an insoluble acetylating agent.     

SYNTHESIS AND RADICAL POLYMERIZATION OF BIFUNCTIONAL MALEIMIDES WITH DIFFERENT FUNCTIONAL REACTIVITIES

Three bifunctional N-phenylmaleimide derivatives, N-[4-(2-hydroxy-3-methacryloyloxy propyloxycarbonyl)phenyl]male-imide (GMAPMI, 1), N-(4-methacryloyloxyphenyl) maleimide (MAPMI, 2) and 4-(4-maleimidobenzoyloxy)styrene (MIBOSt, 3) having radically polymerizable maleimide and vinyl groups together have been synthesized and polymerized. Polymerizations of the bifunctional maleimide monomers were carried out using a radical initiator at 55°C and the results were compared with those obtained by self-polymerization in the absence of ini-tors. All of the polymers obtained were insoluble in organic solvents owing to cross-linking between different functional groups. The reactivity for homopolymerization of monomer 3 is higher than that of monomers 1 and 2 because the styryl moiety of monomer 3 has better electron-donor strength than the methacrylate moiety. Under the same conditions, GMAPMI was copolymerized with N-vinyl-2-pyrrolidone and styrene as an electron-donor to give higher conversions by electron-donor/acceptor polymerization in which the maleimide moiety of GMAPMI mainly involved as an electron acceptor.     

Synthesis and photocrosslinking of maleimide-type polymers

Self-sensitizable photocrosslinking maleimide-type polymers were synthesized by using (N-cinnamoyloxymethyl)maleimide ( 1 ) as a maleimide having a photodimerizable group, nitrophenyl acrylate as a sensitizer monomer, and styrene or methyl acrylate. The fluorescence spectra of these polymers exhibit an excimer band around 455 nm. The excimer intensity of the polymers decreased mainly during the early irradiation time. This decreasing tendency was similar to the increasing tendency of the insoluble fractions of the polymers with irradiation time. These results suggest that the photocrosslinking reaction of the polymers occurs via an excimer formation of the cinnamoyl groups and can be traced by fluorescence spectroscopy.     

Polycyclic nitrogen compounds. Part I. Synthesis of new heterotricyclic quinoxalinones with bridgehead nitrogen atoms

New tricyclic quinoxalinone skeletons with a fully-reduced ring ‘C’ -1,2,3,3a-tetrahydropyrrolo[1,2-α]quin-oxalin-4-one (I-II) and 7,8,9,10-tetrahydropyrido[1,2-α]quinoxalin-6-one (III-IV) derivatives were obtained by selective hydrogen transfer reductive cyclisation of N-(2-nitrophenyl)pyrrolidine-2-carboxylic acid esters and N-(2-nitrophenyl)piperidine-2-carboxylic acid esters (VIa,b and VIIIa,b), respectively.     

Effects of the acid chain length and copolymer crosslinking on the acylation of N-hydroxysuccinimide copolymers with carbobenzoxyoligo-ϵ-aminocaproic acids

N-Hydroxysuccinimide-type soluble copolymer with styrene and three similar divinylbenzene (3–4 mole-%) crosslinked copolymers with styrene, N-vinylpyrrolidone, and N,N-dimethylacrylamide were prepared from their precursor copolymers of N-acetoxymaleimide. Acylation of these N-hydroxyl polymers with carbobenzoxyoligo-?-aminocaproic acids was conducted in dimethylformamide at room temperature by using dicyclohexylcarbodiimide as condensing agent. The soluble styrene copolymer was acylated in good conversions (76–89%) in every case (n = 1–3), whereas the acylation of the crosslinked copolymers decreased slightly from n = 1 to n = 2, and dropped suddenly to only small conversions (4.7–7.4%) with n = 3, showing a marked inhibitory effect of crosslinking when the acids became longer. The effect of the microenvironment of the polymer did not appear significant. All the acyl polymers, including the precursor polymers, yielded the corresponding cyclohexylamides when treated with cyclohexylamine.     

Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging

Synthesis and properties of photoacid generating polymers based on four sulfonyloxymaleimides (RsOMI), N-(tosyloxy)maleimide (TsOMI), N-(methanesulfonyloxy)maleimide (MsOMI), N-(trifluoromethanesulfonyloxy)maleimide (TfOMI), and N-(10-camphorsulfonyloxy)maleimide (CsOMI) are described. The RsOMI polymers photochemically produce corresponding sulfonic acids (RsOH), TsOH, MsOH, TfOH and 10-camphorsulfonic acid (CSA) which can catalyze deprotection of the acid-labile t-BOC groups in the same polymer chains via a chemical amplification process. The photoacid generating polymers with concurrent acid-labile groups offer great potential for applications in functional transformation and photoimaging.     

Synthesis and characterization of thiophene‐substituted N‐phenyl maleimide polymers by photoinduced radical polymerization

Two types of novel functionalized N‐[4‐(4′‐hydroxyphenyloxycarbonyl)phenyl]maleimide and N‐(4‐{[2‐(3‐thienyl)acetyl]oxyphenyl}oxycarbonylphenyl)maleimide (MIThi) were synthesized starting from 4‐maleimido benzoic acid. Photoinduced radical homopolymerization of MIThi and its copolymerization with styrene were performed at room temperature to give linear polymers containing pendant thienyl moieties using ω,ω‐dimethoxy‐ω‐phenylacetophenone as an initiator. Copolymers' compositions and the equilibrium constant (K) for electron donor–acceptor complex formation suggest an alternating nature of the copolymerization. The monomer reactivity ratios and Alfrey–Price Q,e values were also determined. The thermal behavior of the new synthesized monomers and polymers was investigated by differential scanning calorimetry and thermogravimetric analysis. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 995–1004, 2002     

Anionic graft copolymerization of diene polymers with vinyl monomers

A mixture of homopolymer and graft copolymer was obtained by adding the monomer at 0°C to the polylithiodiene solution. Styrene, methyl methacrylate, and acrylonitrile were used as the monomers. Polylithiodienes were prepared by the metalation of diene polymers, i.e., polybutadiene or polyisoprene, with the use of n-butyllithium in the presence of a tertiary amine (N,N,N′,N′-tetramethylethylenediamine) in n-heptane. The graft copolymers were separated by solvent extraction and were confirmed by turbidimetric titration and elementary analysis. Oxidation of the polybutadiene–styrene grafts revealed that the molecular weight of the side chains was the same as the molecular weight of the free polystyrene formed. The grafting efficiency and grafting percentage were studied for polybutadiene–styrene graft copolymers prepared under various conditions.     

Control of thermal,mechanical, and optical properties of three‐component maleimide copolymers by steric bulkiness and hydrogen bonding

N‐substituted maleimides polymerize in the presence of a radical initiator to give polymers with excellent thermal stabilities and transparency. In this study, we synthesized various maleimide copolymers with styrenes and acrylic monomers to control their thermal and mechanical properties by the introduction of bulky substituents and intermolecular hydrogen bonding. Three‐component copolymers of N‐(2‐ethylhexyl)maleimide in combination with styrene, α‐methylstyrene (MSt), or 1‐methylenebenzocyclopentane (BC5) as the styrene derivatives, and n‐butyl acrylate, 2‐hydroxyethyl acrylate, 4‐hydroxybutyl acrylate, or acrylic acid as the acrylic monomers were prepared by radical copolymerization. These copolymers were revealed to exhibit excellent heat resistance by thermogravimetric analysis. Glass transition temperatures increased by the introduction of bulky MSt and BC5 repeating units. The mechanical properties of the copolymer films were improved by the introduction of intermolecular hydrogen bonding. Optical properties, such as transmittance, refractive index, Abbe number, and birefringence, were determined for the copolymers. © 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2019, 57, 1569–1579     

Water-Soluble imide-amide copolymers. I. Preparation and characterization of poly [acrylamide-co-sodium N-(4-sulfophenyl) maleimide]

Sodium N-(4-sulfophenyl) maleimide (SPMI) and its saturated succinimide counterpart were first prepared according to established methods. Hydrolysis experiments on these monomers monitored by ¹H-NMR showed that although SPMI monomer was about 15% hydrolyzed in D₂O at 23°C in 24 h. Sodium N-(4-sulfophenyl) succinimide, which is similar in structure to the imide units in the copolymers, was only 1% hydrolyzed after 18 days at 23°C and 29% hydrolyzed after 18 days at 60°C. This indicated that the saturated imide rings in the copolymer might be sufficiently stable to hydrolysis for the copolymers to be useful. However, hydrolysis at high pH demonstrated that the imide rings would be rapidly saponified under alkaline conditions, destroying the structural rigidity that the intact rings might have provided in the copolymer chains. Sodium N-(4-sulfophenyl) maleimide (SPMI) was copolymerized with acrylamide in water at 30°C without cleavage of the imide ring. Water-soluble poly [acrylamide-co-sodium-N-(4-sulfophenyl) maleimide] (PAMSM) samples containing from 7.4 to 64 mol % imide were prepared. Photoacoustic FTIR and ¹³C-NMR spectra were used to confirm the structure of the copolymers obtained. Elemental analysis was used to determine the imide content of the copolymers, and from this composition data reactivity ratios were calculated for the two component monomers.     

Syntheses of imidazolium-bridged cyclodextrin dimers and their catalytic properties in the hydrolytic cleavage of p-nitrophenyl alkanoates

Two imidazolium-bridged cyclodextrin dimers 3a and 3b were prepared by reacting 6-deoxy-6-N-imidazolyl-β-CD (2) with bis(bromomethyl)benzene. The catalytic properties of 2, 3a and 3b in the hydrolytic cleavage of p-nitrophenyl alkanoates, in the form of acetate (PNPA) , butanoate (PNPB) , hexanoate (PNPH) and octanoate (PNPO), were examined. CD dimeis showed middling rate enhancements around neutrality. Catalytic rate constants ( kc) in the presence of 3a or 3b did not vary much with chain length of esters. In contrast, dissociation constants ( Kd) and selectivity factors (kc/Kd) for "long-chain" esters were much smaller and significantly larger than those for short-chain ones respectively, indicating CD dimers 3a and 3b have good dimensional recognition ability and substrate selectivity in the hydrolytic cleavage of p-nitrophenyl alkanoates . Their kinetic consequences are briefly interpreted.     

Shape- and stereo-selective esterase activities of cross-linked polymers imprinted with a transition-state analogue for the hydrolysis of amino acid esters

Various cross-linked (with N,N′-ethylene (C₂), butylene (C₄), hexamethylene (C₆), or decamethylene (C₁₀)-bisacrylamide) polymer catalysts containing l-histidine and quaternary trimethylammonium groups were imprinted with a racemic transition-state analogue of phenyl 1-benzyloxycarbonyl-3-methylpentylphosphonate for the hydrolysis of p-nitrophenyl N-(benzyloxycarbonyl)-l (or d)-leucinate (Z-l (or d)-Leu-PNP). Among these polymer catalysts, N,N′-C₄-bisacrylamide-cross-linked polymer catalyst, which was copolymerized with styrene monomer, exhibited the notable substrate-stereospecificity for the Z-l-Leu-PNP hydrolysis among the hydrolyses of enantiomeric l (or d)-N-protected (such as tert-butyloxycarbonyl (Boc-), acetyl (C₂-), decanoyl (C₁₀-) or benzyloxycarbonyl (Z-)) amino acid (Leu, Ala, or Phe) p-nitrophenyl esters in 10 vol.% MeCN-Tris buffer (pH 7.15) at 30°C.     

Preparation of polymers containing the 1,3,4-oxadiazoline-5-thione structure and their application to the activation of N-protected α-amino acids

Two new monomers with pendent 1,3,4-oxadiazoline-5-thione structures were prepared. Homopolymerization of 2-isopropenyl-1,3,4-oxadiazoline-5-thione (V) and copolymerization with styrene (M₁)(r₁ = 0.02, r₂ = 1.56, Q = 4.12, e = 1.06) were examined. Further, 2-(4-methacryloylaminophenyl)-1,3,4-oxadiazoline-5-thione (VIII) having a phenylcarbamoyl group between the isopropenyl and 1,3,4-oxadiazoline-5-thione ring as a spacer was also synthesized and polymerized. The resultant polymers were allowed to react with N-protected α-amino acids such as Z-AlaOH, Z-LeuOH and Z-PheOH by the DCC method. The polymers containing amino acids thus obtained were reacted with ethyl glycinate to give the corresponding dipeptides in excellent yields without racemization.     

Syntheses and reactions of porphyrin and metalloporphyrin polymers

Various porphyrin functions such as protoporphyrin IX and chlorin a as well as metalloporphyrin functions such as Mg(II)– and Cu(II)–chlorophyllin a and Fe(III)– and Co(II)–protoporphyrin IX were incorporated into vinyl polymers by preparation and polymerization of their p-vinylbenzyl esters. The porphyrin function was also incorporated by reaction of poly-p-chloromethylstyrene with porphyrins or metalloporphyrins or by the reaction of p-aminostyrene polymers with chlorophyll b through Schiff-base formation. Mg(II)–porphyrin polymers were found to be remarkably effective as catalysts in photoredox systems; porphyrin polymers without central metal atoms were also effective to a lesser extent.     

Functional polymers. XXVII: 2[2-hydroxy-4-acryloxy(methacryloxy)phenyl]2H-benzotriazole: Monomers,polymers, and copolymers

2(2,4-Dihydroxyphenyl)2H-benzotriazole has been prepared in about 50% yield by condensation ofo-nitrobenzenediazonium chloride with resorcinol followed by reductive cyclization of the initially obtained azo compound with zinc and sodium hydroxide. The condensation of the diazonium salt had to be carried out under carefully controlled conditions and in acidic medium, otherwise bis-condensation occurred which, after reductive cyclization, yielded 2(2,4-dihydroxyphenyl)1,3-2H-dibenzotriazole. 2(2,4-Dihydroxyphenyl)2H-benzotriazole was allowed to react with acryloyl or methacryloyl chloride. Monoacylation in the 4-position occurred by interfacial acylation technique and 2[2-hydroxy-4-acryloxy (or 4-methacryloxy)]2H-benzotriazole was obtained in over 60% yield. The two monomers were homopolymerized and copolymerized with styrene, methyl methacrylate, andn-butyl acrylate to polymers of high molecular weight. Incorporation of 2[2-hydroxy-4-acryloxy (or 4-methacryloxy)]2H-benzotriazole into the copolymer was from 1 to 10 mol% of the comonomer mixture. The ultraviolet spectra of monomers, homo- and copolymers were also determined.This paper is dedicated to Professor Dr.Karl Schlögl on the occasion of his 60th birthday with our warmest wishes.     

Syntheses and reactions of optically active polymers. II. Preparations of optically active polymers containing quinine,L-ephedrine,and L-histidine residues and their reactions with α-cyanoethylaquocobaloxime

Preparations of polymers with bis(dimethylglyoximato)cobalt (cobaloxime) were investigated. 4-Vinylpyridine was reacted with α-cyanoethylaquocobaloxime to produce α-cyanoethyl-4-vinylpyridinatocobaloxime (I) in 72% yield. It did not, however, polymerize by the use of azobisisobutyronitrile (AIBN) as an initiator. Polymers containing α-cyanoethylcobaloxime were obtained by reactions of polymers with α-cyanoethylaquocobaloxime (II). Poly(9-O-methacryloylquinine) (III), poly(O-methacryloyl-N-methyl-L -ephedrine) (IV), poly[N^α-(o-vinylbenzyl)-L -histidine] (V), and poly(4-vinylpyridine) (VI) were prepared and used in these reactions. Polymers V and VI were reacted with II to give polymers X, XI, XII, and XIII containing α-cyanoethylcobaloxime.