光谱共焦位移传感器镜头设计

光谱共焦位移传感器是一种以波长信息反映位移变化的非接触式光电位移传感器,色散镜头是传感器重要组成部分,其轴向色散与波长之间的线性度和色散范围会影响系统整体性能。为产生较大的线性轴向色散和良好的线性度,文章阐述了光谱共焦位移传感器的基本原理,分析了轴向色散与玻璃材料及波长之间的的关系,使用ZEMAX光学设计仿真软件的多重结构功能,设置评价函数操作数进行优化得到了一个镜头组。镜头组采用正负透镜组分离结构,在486～656nm波长范围内,色散范围约为1mm,各个单色波长在其焦点位置产生最大的RMS半径为1.552μm且达到衍射极限,同时波长色散离焦量与波长之间通过线性拟合所得判定系数R~2为0.9976,理论分辨率为5nm,镜头在产生大的色散范围同时也拥有着良好的线性性。     

光谱共焦位移传感器色散镜头设计

色散镜头是光谱共焦位移传感器的核心部件,轴向色散与波长之间的线性度直接影响系统的测量精度。研究了轴向色散与玻璃材质之间的关系,结合透镜组光焦度分配公式,分析线性色散产生条件,设计了一款色散镜头;使用ZEMAX进行仿真优化,镜头在500~700nm工作波段范围内,色散范围约为150.34μm,轴向色散与波长线性度通过一元线性拟合分析,判定系数达0.9972,镜头分辨率较高,配合现有的光谱仪使用,传感器分辨率可达纳米级,满足高精度测量要求。     

紧凑长轴向色散光谱共焦镜头

为提高和扩大光谱共焦位移传感器的测量精度和测量范围,并解决像方测量大数值孔径和物方光纤小数值孔径匹配下镜头过长的问题,设计一种紧凑型长轴向色散光谱共焦镜头。色散镜头用5个球面镜片,在工作波长450～700 nm内轴向色散范围达3.5 mm,波长和焦移线性拟合相关系数为0.97,像方数值孔径为0.48,光学长度为135 mm。在相同的镜头参数下,该色散镜头的轴向长度相比普通色散镜头减少了约35%。最后利用设计的色散镜头搭建光谱共焦位移测量系统,并进行性能评估实验。实验结果表明,该系统的最大测量标准差为0.05μm,最大平均绝对误差为0.04μm,实际轴向分辨率优于0.5μm,对被测物的最大测量角约为28.5°。     

基于偏振衍射色散共焦的光学元件轴向间距测量

光学元件轴向间距测量对精密光学系统的定位和装调具有重要意义。针对现有色散共焦测量系统中色散物镜结构复杂、色散范围小的问题,提出基于偏振衍射色散共焦的光学元件轴向间距测量方法,将传统折射共焦镜头几百毫米的轴向尺寸和复杂的装调需求简化为数毫米的单片镜,简化了系统结构。透镜间距和厚度测量实验表明,间距测量误差为10 μm。     

采用变焦液体透镜的共焦检测系统的设计与仿真

共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。     

线性色散设计的光谱共焦测量技术

研制了高精度的光谱共焦位移测量系统并完成相关测试。基于色差理论和材料优化选择设计一种色差与波长成线性关系的色散物镜,有助于平衡系统在全测量范围的灵敏度。理论分析了系统参数对系统的影响规律,计算了针孔尺寸与系统的分辨率和信噪比的关系,给出了参数优化结果。利用设计的线性色散物镜和参数优化结果,构建了光谱共焦测量系统,完成了系统的校准、测试和应用研究。结果表明,系统的轴向测量范围达到1 mm,分辨力优于0.5μm,全程测量误差小于2μm,符合设计要求。     

光谱共焦三维形貌仪用超大色散线性物镜组设计

光谱共焦三维形貌仪具有精度高、测量范围大、适应性强等特点,其关键部件是产生轴向色散的物镜,色散物镜轴向色散与波长间的非线性会导致系统整体性能下降。分析了共焦法检测表面形貌的工作原理,以及产生线性轴向色散的条件,根据共焦光学系统的基本设计原理,在预设的设计指标及要求下,完成一个超大色散线性物镜组设计。该色散物镜组采用四级串联结构,在400~700 nm光谱范围内达到30 mm的色散范围,波长离焦量和波长之间线性度通过线性回归拟合得出判定系数为1,满足色散的线性度要求。     

基于二元光学透镜光谱聚焦特性的微间距测量

针对传统色散透镜的色散线性度很难保证为绝对线性,测量范围很窄的问题,且为了尽量减小球差尤其是对测量影响最大的轴向球差,提出一种将二元光学透镜引入到光谱共聚焦微小间距测量的方法。该方法中二元光学透镜的色散只与入射光的波长有关,且严格与入射光的波长成反比。二元光学透镜不存在球差问题且可以补偿校正测量系统中其他光学组件的未知色差。实验中选择510～690nm范围内的光谱,利用分辨率为0.5nm的光谱仪接收光谱信息,测得该方法的测量量程为13.95mm,测量误差为0.6μm,并通过对光盘上的刻录间距进行测量,验证了该方法的有效性。     

基于光谱共焦的碱金属气室壁厚测量传感器的线性色散物镜设计

基于光谱共焦的碱金属气室壁厚测量传感器是通过直接测量光波波长信息来得到透明材料厚度值,是一种非接触式厚度测量传感器.色散物镜是厚度测量传感器的核心部件,色散物镜的线性度和色散范围决定了厚度测量传感器的精度和分辨率.文章介绍了基于光谱共焦的厚度测量传感器的原理,分析了波长信息与轴向色散范围之间的关系,利用ZEMAX光学设...     

基于彩色共焦的位移测量系统研究

为实现小型化、非接触式、快速高精度的位移测量,设计并搭建了基于光学彩色共焦原理的位移测量系统。系统中数据拟合采用的方法是,对光谱响应函数极值周围的数据进行高斯叠加拟合,以获得光谱响应曲线的峰值,从而得到峰值所对应的波长。经过实验验证,系统的测量范围为2mm,测量精度可以达到10μm,线性度为3.4%,光谱响应的半高宽(FWHM)为49nm。因此能够满足一定精度的位移测量需求。     

多波长广角f-theta透镜光学设计

f-theta透镜作为激光扫描系统中必不可少的部件,对系统工作面尺寸、测量速度、测量精度等起着决定性的作用。为改变以往f-theta透镜扫描范围小、工作波长单一等不足,设计出了一种工作于486 nm~656 nm波段的广角f-theta透镜。通过初级像差分析,确定系统的初级结构参数,利用光学材料的不同色散性能分配合理的光焦度来进行色差校正。设计结果表明:f-theta镜头像散值在像差容限范围内满足平像场要求,f-theta镜头系统最大色差为3 μm,线性畸变误差值不超过0.015%,光能利用率接近90%,聚焦性能接近衍射极限,满足多工作波长、高精度激光打标机的实际需求。     

A hybrid doubled achromat based on a photon sieve

Photon sieves are diffractive optical elements with large chromatic aberration. To correct the dispersion of a photon sieve, a novel hybrid doubled achromat combined a photon sieve and a refractive lens is proposed. The design of this achromat applies the opposite dispersive characteristics of diffractive and refractive elements. Two design examples for different bandwidths of 300 nm and 80 nm in visible spectrum are given. For analyzing their focusing properties, the intensity distributions both along the axis and at the focal plane are studied. The results illustrate that the achromatic design is achieved and the secondary spectrum can be corrected for a narrow bandwidth. And compared to traditional hybrid achromat, it can focus to a sharper spot.     

Optical system design of the Dyson imaging spectrometer based on the Fery prism

Imaging spectrometer has obtained wide development since rich feature information can be obtained by it; now, we focus on its high spectral resolution and miniaturization. In this paper, we design the Dyson imaging spectrometer system based on Fery prism. The average spectral resolution is 4.3 nm and the structure of the total length is 229 mm. It is a small, high-spectrometer imaging system. The front and rear surface of the traditional prism are plane, but the surfaces of the Fery prism are spherical, which can provide some optical power to realize imaging function and produce the dispersion effect. The Fery prism does not need to be placed in the parallel optical path, which simplifies the collimator lens and the imaging lens and are necessary in the prism spectrometer, making it possible to obtain a compact spectrometer. Full-spectrum transmittance of the prism is up to 94 %. Compared to the convex grating, the energy efficiency is greatly improved, and the free spectral range is wider, and its dispersion will not bring higher-order spectral aliasing problem. The small high spectrometer only includes two components. Its spectral range is from 400 to 1000 nm, covering the near-ultraviolet to near-infrared. The various aberrations of the typical spectrum are corrected. The spectrometer is excellent in performance.     

通信系统中色散补偿光纤的研究

对五包层色散补偿光纤进行了研究,分析了各个参量对色散补偿光纤性能的影响,发现色散补偿光纤只有在一定范围的拉丝芯径内,以牺牲负色散数值为代价才能获得较大的负色散斜率。在1550nm处获得了不大于150ps/(nm·km)的负的总色散和负色散斜率的色散补偿光纤。采用在光纤拉丝时旋转预制棒的工艺减小了光纤的偏振模色散,并采用化学汽相沉积(MCVD)光纤生产工艺,研制出了性能较好的色散补偿光纤。     

Broadening of the phase-matching bandwidth in quasi-phase-matched second-harmonic generation using GaN-based Bragg reflection waveguide

We present an analysis of a high index core symmetric Bragg reflection waveguide (BRW) design based on a GaN/AlxGa1-xN system for efficient quasi-phase-matched second-harmonic generation for broadband applications. By choosing the fundamental frequency to be a BRW mode and suitably tailoring the overall dispersion characteristics, the strong dispersion of the second-harmonic mode is partially canceled, leading to phase matching between the fundamental and second-harmonic over a broad range of wavelengths. The crucial interplay between the dispersive behavior of the fundamental and second-harmonic wave manifests as a broad acceptance bandwidth of approximately 33 nm accompanied with appreciable conversion efficiency (22.8%/W) for a 10 mm long waveguide. The impact of tailoring the dispersion characteristics on the conversion efficiency is also discussed.     

High-dispersive mirror for pulse stretcher in femtosecond fiber laser amplification system

We present a high-dispersive multilayer mirror for pulse stretching in a femtosecond fiber laser amplification system. The designed mirror contains 54 layers with a total physical thickness of 7.3 μm, which can provide a positive group delay dispersion (GDD) of 600 fs² and a high reflectance over 99.9% from 1010 to 1070 nm. The samples were prepared by dual ion beam sputtering. The measured transmittance matches well with the theoretical result. The GDD characteristics of samples were tested by home-made white light interferometer. The measured GDD is higher than the design results, an average GDD of +722 fs² from 1010 nm to 1070 nm. The mirrors were employed in a Yb-doped large-mode-area photonic crystal fiber amplification system. An input pulse compressed by the gratings with autocorrelation function of 83 fs is obtained with a stretched FWHM of 1.29 ps after 28 bounces between the dispersive mirrors. The results show that the multilayer dispersive mirror could be an effective and promising technique for pulse stretching in femtosecond amplification systems.     

Ф750mm口径望远镜光学系统的检测(英文)

为了探测更高轨道的空间目标,研制了一台通光口径为Ф750mm的望远镜.该望远镜为主焦点光学系统,由一片二次非球面反射元件和四片透射元件组成,具有大视场(4°),大相对孔径(1∶1.32)和宽光谱(500～800nm)的特点.本文以该望远镜的研制为基础,介绍了其光学系统各个元件的单独检测和系统装调完成后的整体检测方法和过程.采用样板法对系统中的球面透射元件进行了单独检测,采用透射无像差补偿器法对二次非球面反射镜进行了单独检测,采用反射无像差补偿器法对组合起来的透射校正镜组进行了检测,并且对系统装调对准之后的光学系统进行室内平行光管和室外对星观测两种方法进行检测.测量结果均满足设计要求,其中球面透镜的面形误差小于0.1个光圈,反射元件和透射元件非球面表面的面形误差均优于λ/30(λ=632.8nm),透射校正镜组的波像差优于λ/30(λ=632.8nm).光学系统整体检测结果表明,室内和室外检测结果一致,其像面的80%能量集中度直径在4°的全视场范围内均小于2个像元,达到了设计的成像要求.     

贝塞尔高斯涡旋光束在大气湍流中的传输特性

为了探测更高轨道的空间目标,研制了一台通光口径为Ф750 mm的望远镜.该望远镜为主焦点光学系统,由一片二次非球面反射元件和四片透射元件组成,具有大视场(4°),大相对孔径(1∶1.32)和宽光谱(500~800 nm)的特点.本文以该望远镜的研制为基础,介绍了其光学系统各个元件的单独检测和系统装调完成后的整体检测方法和过程.采用样板法对系统中的球面透射元件进行了单独检测,采用透射无像差补偿器法对二次非球面反射镜进行了单独检测,采用反射无像差补偿器法对组合起来的透射校正镜组进行了检测,并且对系统装调对准之后的光学系统进行室内平行光管和室外对星观测两种方法进行检测.测量结果均满足设计要求,其中球面透镜的面形误差小于0.1个光圈,反射元件和透射元件非球面表面的面形误差均优于λ/30(λ=632.8 nm),透射校正镜组的波像差优于λ/30(λ=632.8nm).光学系统整体检测结果表明,室内和室外检测结果一致,其像面的80% 能量集中度直径在4°的全视场范围内均小于2个像元,达到了设计的成像要求.