智能激光测距机组件检测系统

为了解决目前各激光测距机检测仪功能单一、检测准确度低等问题,研制了一种新型智能激光测距机参数检测仪.系统采用先进的控制技术和方便快捷的微机软件,且配有结构巧妙的分光束光学系统,能同时实现对测距机的光轴平行性、光束性能参数,包括光束发散能量、脉宽、编码准确度的测试;天线的视场和灵敏度测试;系统整体性能测试.2 048×2 048高空间分辨率CCD的引入,使系统的角分辨率达到了5″;15 GHz示波器用于捕获窄达 100 ps的激光脉冲;高准确度,大动态范围的激光能量计可精确测量出激光的能量.     

Real-time adjustment of optical transmitter by laser beam parameter measurement based on two linear array CCD scanning imaging

In this paper, we present a real-time measurement and adjustment method, based on scanning imaging, for optical transmitter which emits 90° × 2° linear laser beam. This novel optical arrangement consists of an area array CCD and two linear array CCDs. According to the relationship between the positions, angles of transmitter optical components and the beam parameters of emergent laser, the system can help us to decide the real-time adjustment of optical transmitter by measuring the related beam parameters. In order to improve the measurement speed, avoid occlusion and ensure simultaneous measurement, the two linear array CCDs are placed at near field, far field and separated by a definite angle to acquire the beam intensity distribution through suitable nonlinear correction during the process of scanning. After a complete scanning, the beam parameters and the spot image are acquired by continuous measurement. The proof-of-principle experiments showed that the measurement results were in agreement with the analysis. The presented method was applied to direct fast adjustment for higher quality on the assembly of the optical transmitter. The presented procedure is highly advantageous for diverse laser beam emitted from the optical transmitter, such as elliptic, linear and so on.     

Micromachined silicon lenses for terahertz applications

Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO₂ laser.     

A miniature electron beam pumped laser

The 1.73 μm XeI laser has been operated in a fully continuous mode using a table-top electron beam pumped laser setup. A 12 keV electron beam sent through a 300 nm thick silicon nitride membrane into a laser gas mixture of typically 600 mbar gas pressure was used for pumping. A low loss cavity was installed, resulting in a very low pumping power of 37 mW to reach laser threshold. The geometrical conditions for the laser setup such as the shape of the beam pumped volume and its overlap with the optical mode volume are discussed. The laser scheme has been clearly identified as a recombination laser scheme by operating the laser in pulsed mode and observing the time structure of the laser pulse.     

13.9nm软X射线激光用大面积多层膜分束镜研制

 基于分束镜反射率和透射率的乘积为衡量标准的原则,设计了13.9nm软X射线激光干涉测量所需的多层膜分束镜，用磁控溅射法在有效面积达10mm×10mm，厚100nm的氮化硅窗口上镀制Mo/Si多层膜,实现了分束镜制作。用表面轮廓仪实测分束镜面形精度达到nm量级，同步辐射反射率计测试表明,分束镜的反射率和透射率乘积约4%。     

One — dimensional laser beam steering using frequency detuning in two — wave mixing with a BaTiO3 crystal

We demonstrate a method of one-dimensional laser beam deflection using frequency detuning in two-wave mixing. Energy exchange between the interfering beams in a photo-refractive BaTiO₃ crystal has been used for deflection of a pump beam into predetermined probe beam directions. A one-dimensional array of several beams is generated from a single probe beam, employing a piezo-mirror and beam splitter combination. Probe beams so produced are detuned by exciting the piezo-mirror with a periodic near-saw-tooth voltage so as to produce running fringes. However, stable holographic gratings are recorded by matching the frequency of the probe beam with that of a pump beam reflected from another vibrating piezo-mirror, thereby controlling the direction of beam deflection.     

Higher diffraction order photorefractive optical beam splitter

A higher diffraction order photorefractive (PR) optical beam splitter has been realized based on a PR higher diffraction order grating. In the experiments, the beam splitter was produced by two-wave coupling at a small incident angle in Fe:LiNbO₃ using the output from a He–Ne laser at 632.8 nm. An incident signal beam containing three different wavelengths (632.8, 532.0 and 488.0 nm) was split into multi-output beams by the beam splitter. The size of higher diffraction order is given and the influence of crystal thickness is discussed. Results show that the higher diffraction order PR optical beam splitter provides a practical method to split a multi-wavelength signal beam.     

Investigations on ultrafast welding of glass–glass and glass–silicon

Using ultrafast laser radiation glass substrates are welded with glass and silicon plates. The pump beam is focused by a microscope objective with large NA=0.4 (beam diameter 4 μm) into the glass. After partial absorption of the optical energy, the glass is heated and melted. Procedures for high-quality welding of glass–glass and glass–silicon substrates with high-repetition ultra-fast laser radiation have been derived at the repetition rate 700 kHz. The dependencies of the dimension and geometry of the welding seam on scan velocity, repetition rate and pulse energy have been investigated defining a process window. Adding a noninterferometric technique for quantitative phase detection with the welding setup, the interaction zone of the welding seam for the welding partners glass–glass is detected. A change in refractive index is induced by heating and compression of the glass and has been detected by phase detection up to 2 μs after irradiation with 100 fs time resolution.     

Time-multiplexing generates a diode laser beam with high beam quality

The beams of four pulsed high-power laser diodes are time-multiplexed resulting in a laser beam of high quality. A combination of polarization switches and filters forming a digital time-multiplexer is utilized to guide laser pulses produced by the individual laser diodes onto a common optical path. A resulting beam with an optical power of 10 W and a beam quality comparable with that of a single laser diode at a wavelength of 960 nm is obtained.     

Direct writing of micro/nano-scale patterns by means of particle lens arrays scanned by a focused diode pumped Nd:YVO4 laser

A practical approach to a well-known technique of laser micro/nano-patterning by optical near fields is presented. It is based on surface patterning by scanning a Gaussian laser beam through a self-assembled monolayer of silica micro-spheres on a single-crystalline silicon (Si) substrate. So far, the outcome of this kind of near-field patterning has been related to the simultaneous, parallel surface-structuring of large areas either by top hat or Gaussian laser intensity distributions. We attempt to explore the possibility of using the same technique in order to produce single, direct writing of features. This could be of advantage for applications in which only some areas need to be patterned (i.e. local area selective patterning) or single lines are required (e.g. a particular micro/nano-fluidic channel). A diode pumped Nd:YVO₄ laser system (wavelength of 532 nm, pulse duration of 8 ns, repetition rate of 30 kHz) with a computer-controlled 3 axis galvanometer beam scanner was employed to write user-defined patterns through the particle lens array on the Si substrate. After laser irradiation, the obtained patterns which are in the micro-scale were composed of sub-micro/micro-holes or bumps. The micro-pattern resolution depends on the dimension of both the micro-sphere’s diameter and the beam’s spot size. The developed technique could potentially be employed to fabricate photonic crystal structures mimicking nature’s butterfly wings and anti-reflective “moth eye” arrays for photovoltaic cells.     

Large area laser surface micro/nanopatterning by contact microsphere lens arrays

Laser surface micro/nanopatterning by particle lens arrays is a well-known technique. Enhanced optical fields can be achieved on a substrate when a laser beam passes through a self-assembled monolayer of silica microspheres placed on the substrate. This enhanced optical field is responsible for ablative material removal from the substrate resulting in a patterned surface. Because of the laser ablation, the microspheres are often ejected from the substrate during laser irradiation. This is a major issue impeding this technique to be used for large area texturing. We explored the possibility to retain the spheres on the substrate surface during laser irradiation. A picosecond laser system (wavelength of 515 nm, pulse duration 6.7 ps, repetition rate 400 kHz) was employed to write patterns through the lens array on a silicon substrate. In this experimental study, the pulse energy was found to be a key factor to realize surface patterning and retain the spheres during the process. When the laser pulse energy is set within the process window, the microspheres stay on the substrate during and after laser irradiation. Periodic patterns of nanoholes can be textured on the substrate surface. The spacing between the nanoholes is determined by the diameter of the microspheres. The depth of the nanoholes varies, depending on the number of laser pulses applied and pulse energy. Large area texturing can be made using overlapping pulses obtained through laser beam scanning.     

激光器参数综合检测系统设计

为解决目前各激光器检测仪功能单一、检测精度低等问题,研制了一种新型智能激光器参数检测系统。该系统采用现代控制技术和微机软件,且配有特定结构的分光束光学系统,能同时实现辐射器光轴平行性、光束性能参数（包括光束发散能量、脉宽、编码精度）、光轴稳定性测试和系统整体性能测试。通过引入红外自准直仪使系统的角分辨率达到了2″,借助示波器捕获窄达100ps的激光脉冲,高精度、大动态范围的激光能量计可精确测量出激光的能量。     

Laser processing of micro-optical components in quartz

Laser induced backside wet etching combined with the diffractive gray tone phase mask has been used for the fabrication of a micro-lens array with a single lens diameter of 1 mm and a micro-prism in quartz. The micro-lens array was tested as beam homogenizer for high power XeCl excimer laser yielding a clear improvement in the quality of the laser beam.The optimum fluence range for fabrication of micro-lenses by laser induced backside wet etching using 1.4 M pyrene in THF solution and 308 nm irradiation wavelength is 1-1.6 J/cm². The etching mechanisms of LIBWE are based on a combination of pressure and temperature jumps at quartz-liquid interface.     

13.9 nm马赫贞德干涉仪用软X射线分束镜研究

 介绍了13.9 nm马赫贞德干涉仪用软X射线分束镜的设计、制备与性能检测。基于分束镜反射率和透过率乘积最大的评价标准，设计了13.9 nm软X射线激光干涉实验用多层膜分束镜。采用磁控溅射方法在有效面积为10 mm×10 mm、厚度为100 nm的Si3N4基底上镀制了Mo/Si多层膜，制成了多层膜分束镜。利用X射线掠入射衍射的方法测量了Mo/Si多层膜的周期。用扩束He-Ne激光束进行的投影成像方法定性分析了分束镜的面形精度，利用光学轮廓仪完成了分束镜面形精确测量。利用北京同步辐射装置测量了分束镜反射率和透射率，在13.9 nm处，分束镜反射率和透过率乘积达4%。使用多层膜分束镜构建了软X射线马赫贞德干涉仪，并应用于13.9 nm软X射线激光干涉实验中，获得了清晰的含有C8H8等离子体电子密度信息的动态干涉条纹。     

用于MHZ重频光导开关触发的光纤分光系统设计

为了实现光导开关以MHz重复频率运行,设计了通过延迟产生MHz序列重复频率触发光的分光系统。分光系统由多根类蜂窝状排布的光纤组成并分为数组,各组光纤长度不同以产生时间序列。进行了光纤分光系统的理论计算,设计了分组程序,获得了各根光纤的输出端能量占比,实现了光纤输出端的分组设计优化。计算结果表明:当分光系统半径与激光器焦斑之比增大时,分光系统效率增高,达到一定数值后,分光系统效率趋于稳定;当激光器焦斑大小不变时,光纤层数增大,分光系统效率变小;当触发光脉冲数不变时,在一定范围内,光纤层数增大,输出端激光能量的最大相对误差变小。实验结果表明:四脉冲10 MHz分光系统实现了周期为100 ns的4个光脉冲输出,输出端能量最大相对误差6.80%,系统效率为38.07%。     

Analysis of the laser ablation processes for thin-film silicon solar cells

A detailed analysis of the monolithical series connection of thin-film silicon modules with ZnO/Ag back contact is presented. In this study, pulsed lasers with wavelengths of 1064 nm and 532 nm were used. The influence of various laser parameters like laser power, pulse overlap, etc., on the different patterning steps is discussed. The focus of this study was on the back contact patterning process. Here (i) the flake formation process during the ablation and (ii) the influence of a NIR-laser source as an alternative approach to the green laser were investigated in detail. The latter would reduce system costs if only one NIR-laser source could be used for all patterning steps.     

Optical transmission and reflection of aluminum film irradiated by nanosecond laser beam and experimental studying of phase-explosion

In this paper we present evidence for a phase explosion during the laser-induced ablation process by studying the optical reflectivity of the ablated plume. The ablation was produced by irradiating thin film aluminum coated on a quartz substrate with a single pulse laser beam in ambient air. The laser pulse was provided by the second harmonic of a Q-switched Nd:YAG laser with ∼10 ns pulse duration. The transmission of a low power He–Ne laser beam through the hot ablated material plume and its reflection (from the front surface, and rear surface of aluminum film) were also monitored during the duration of the ablation event. The results show that the front surface reflectivity is enhanced at an early time of ablation which is described as strong evidence for the creation of a phase explosion in this process.     

Laser-induced spark for simultaneous ignition and fuel-to-air ratio measurements

This work investigates the use of laser-induced gas breakdown for simultaneously igniting and measuring fuel-to-air ratio of CH₄–air and H₂–air combustible mixtures. The fuel-to-air ratio is determined using the measured spectral peak ratio I_o,Hα/I_o,OI. Sparks are produced using a single-mode, Q-switched Nd–YAG laser. The laser produces a beam of 6 mm in diameter at the wavelength of 1064 nm and pulse duration of 5.5 ns. The beam optics is designed to have mainly a beam splitter and a focusing lens. The beam splitter is coated to reflect the laser beam and transmit emission lines with wavelengths from 600 to 900 nm which are then collected by a fiberoptic cable and detected by an imaging spectrometer–detector assembly. The results showed a linear dependence of the spectral peak ratio on the equivalence ratio that can be generally expressed by φ=a(I_o,Hα/I_o,OI)+b, where a and b are the parameters that depend on the gas pressure. Using the least-square curve fitting technique to fit the experimental data, a calibration curve for calculating the equivalence ratio as a function of the ratio of (I_o,Hα/I_o,OI) was generated.     

Ablation depth control with 40 nm resolution on ITO thin films using a square,flat top beam shaped femtosecond NIR laser

We reported on the ablation depth control with a resolution of 40 nm on indium tin oxide (ITO) thin film using a square beam shaped femtosecond (190 fs) laser (λ_p=1030 nm). A slit is used to make the square, flat top beam shaped from the Gaussian spatial profile of the femtosecond laser. An ablation depth of 40 nm was obtained using the single pulse irradiation at a peak intensity of 2.8 TW/cm². The morphologies of the ablated area were characterized using an optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS). Ablations with square and rectangular types with various sizes were demonstrated on ITO thin film using slits with varying x–y axes. The stereo structure of the ablation with the depth resolution of approximately 40 nm was also fabricated successfully using the irradiation of single pulses with different shaped sizes of femtosecond laser.     

Laser-induced local dehydroxylation on surface-oxidized silicon substrates: mechanistic aspects and prospects in nanofabrication

Processing of silicon oxide surfaces with a focused laser beam at a wavelength of 514 nm has been investigated. Laser processing of native silicon samples (d _ox=1–2 nm) allows the fabrication of reactive templates with laterally varying hydroxyl group density. Very similar results were also obtained on thermally oxidized silicon samples (d _ox≈100 nm), whereas respective experiments on quartz plates have failed. These results support a photothermal mechanism where laser irradiation causes a local temperature rise and initiates dehydroxylation. In agreement with a photothermally induced dehydroxylation reaction, a thermokinetic analysis of the experimental data points to a highly activated process. In conjunction with site-selective functionalization routines this opens up an avenue towards functional surface structures with lateral dimensions significantly below the optical diffraction limit.