PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS

Measurements of hydrogen plasma density are made in a symmetric single frequency confined capacitively coupled plasma (C-CCP) RF system. Comparison is made between density measured by microwave interferometer (MWI) and electrode wall ion density gathered from Ion Energy Distribution Function (IEDF) responses. Ion number density at electrode wall is obtained by two methods as IEDF integration method and IEDF splitting method. Both methods were compared with MWI and a linear relation is obtained between both methods and MWI. It is demonstrated that electrode wall surface density obtained by IEDF splitting and IEDF integral methods are about 50,000 times less than the bulk plasma density, and integral method reads more data than splitting method. The three different measurement results are compared and they are in good qualitative agreement; the deviation in ratio of bulk plasma density measured by MWI to number density at the electrode wall resolved from ion energy distribution function is greatest at highest pressure or electrode voltages/powers. The reasons for deviations are explained by analysis of the potential drop across the presheath decreases with respect to increased applied power.     

Vacuum arc cathode spot grouping and motion in magnetic fields

Two of the important vacuum arc phenomena observed when the arc runs in a transverse magnetic field are cathode spot grouping and the cathode spot retrograde motion, i.e., in the anti-Amperian direction. This paper summarizes the main experimental observations and proposes a physical model for spot grouping and spot retrograde motion. The proposed spot motion model take in account the previous theoretical model of the cathode thermal regime and the plasma flow near the cathode surface that is based on two conditions: i) the heat loss in the cathode bulk is relatively small to the heat influx, and ii) the plasma flow in the Knudsen layer is impeded. In the present model, the current per group spot is calculated by assuming that the plasma kinetic pressure is comparable to the self-magnetic pressure in the acceleration region of cathode plasma jet. The model includes equations for the current per spot group, spot velocity dependence on the magnetic field and on the arc current in vacuum, as well as in gas filled arc gap. The calculated currents per spot group and spot velocity increase linearly with the magnetic field and arc current, and this dependencies well agree with previous observations. The cathode spot retrograde motion in short electrode gaps and at atmospheric pressure arcs, and the reversal motion in strong magnetic fields (>1 T) observed by Robson and Engel are discussed. The details of the retrograde motion observed in the last decades including the spot velocity dependence on the electrode gap, roughness, temperature, and material could be understood in the frame of the proposed model.     

非对称电极表面微观形貌对交流电渗流速的影响

经典交流电渗理论是利用电场进行非机械式微流体驱动的基础.传统理论交流电渗理论以双电层理论为基础,通过耦合电场方程以及流场方程得到微电极表面交流电渗流速表达式,通常与实验流速相差较大. 以电极表面微观形貌对交流电渗流速的影响为研究目标,定义微电极表面粗糙度为微观形貌特征参数,建立了等效双电层模型,并对传统交流电渗流速公式进行了修正.理论并仿真分析了表面粗糙度对于交流电渗流速的影响,利用非对称电极对交流电渗微流体驱动进行了实验研究,并进行对比分析.结果表明,理论分析与实验结果具有较好的一致性. 关键词： 交流电渗 电极表面粗糙度 等效双电层     

Anregung von Volumen- und Oberflächenplasmaschwingungen in Al und Mg durch mittelschnelle Elektronen

Dispersion and scattering cross section of the bulk plasma losses of Al and Mg are compared with plasma theory. The low lying Mg loss shows an asymmetric intensity distribution for non-normally incident electrons and an angular dependence of intensity as expected from the theory of surface losses. In very thin Al films, coupling effects between the two opposite surfaces are found, causing some new properties of the surface losses. Especially a thickness dependent dispersion of the surface loss is measured which is quite different from that of the bulk losses and characteristic for surface excitation.     

Simulation of nanoparticle coagulation in radio-frequency C_2H_2/Ar microdischarges

The nanoparticle coagulation is investigated by using a couple of fluid models and aerosol dynamics model in argon with a 5% molecular acetylene admixture rf microdischarges,with the total input gas flow rate of 400 sccm.It co-exists with a homogeneous,secondary electron-dominated low temperature γ-mode glow discharges.The heat transfer equation and flow equation for neutral gas are taken into account.We mainly focused on investigations of the nanoparticle properties in atmospheric pressure microdischarges,and discussed the influences of pressure,electrode spacing,and applied voltage on the plasma density and nanoparticle density profiles.The results show that the characteristics of microdischarges are quite different from those of low pressure radio-frequency discharges.First,the nanoparticle density in the bulk plasma in microdischarges is much larger than that of low pressure discharges.Second,the nanoparticle density of 10 nm experiences an exponential increase as soon as the applied voltage increases,especially in the presheath.Finally,as the electrode spacing increases,the nanoparticle density decreased instead of increasing.     

Surface Tension of a Metal-Electrolyte Boundary: Exactly Solvable Model

An ideal conductor electrode in contact with a semi-infinite two-dimensional two-component plasma in an external potential is considered. The model is mapped onto an integrable sine-Gordon theory with Dirichlet boundary conditions. The information gained from the mapping provides an explicit form of the surface tension in the plasma-stability regime.     

Theories of surface elasticity for nanoscale objects

The emergence of nanotechnology has driven recent interest in systems having surface atoms as a significant fraction of all atoms present, in particular nano-sheets (ultra-thin slabs), nano-wires, and nano-particles. In these systems, the bulk (i.e. non-surface region or interior) is typically strained in response to the stress of the surface. This elastic strain of the bulk in turn changes the surface lattice constants. Since the bulk and the surface are coupled, the problem must be solved self-consistently. Solving this problem requires a quantitative model of the surface elastic properties which are different from the bulk. In this paper we consider various models that have been proposed for surface elasticity. Our goal is to elucidate the relationship between two contrasting approaches: (1) the Shuttleworth equation which defines a surface stress based on the strain derivative of the surface energy and (2) the Gurtin-Murdoch (GM) theory which considers the surface layer as a membrane with residual strain and with elastic constants different from the bulk. The GM theory is analogous to the 2-D Frenkel-Kontorova (FK) model and can be used to obtain quantitative parameters for the FK model. We present an embedded atom method calculation of the surface elastic constants of Cu(1 1 1) using the GM theory with the surface represented by a membrane one atomic layer thick. This quantitative approach describes the elastic properties of surfaces in a physically appealing way. Just as the bulk elastic constants provide direct information regarding the stress/strain relationship in a bulk material, the surface elastic constants provide similar information for a surface monolayer. This theory will allow elasticity analysis and atomistic calculations of properties of nano-scale objects.     

吸气式高超声速飞行器机体/推进一体化内外流非定常耦合方法

基于吸气式高超声速飞行器机体/推进一体化的气动布局设计方式，文章提出了一种内外流一体化流场的耦合求解方法，其中燃烧室内流场采用考虑有限速率化学反应动力学模型的一维非稳态方法求解，进气道和尾喷管外流场采用二维CFD软件计算，进气道与燃烧室在耦合界面处通过一维平均方法实现静温、静压和Mach数等参数传递.并分别以日本国家航空与航天实验室（NAL）的氢燃料燃烧室模型作为内流场验证算例，以某典型高超声速飞行器一体化模型作为内外耦合流场验证算例.研究结果表明:有限速率化学反应准一维方法能较为准确地模拟燃烧室内燃烧流场，提出的内外流场耦合方法能够有效地计算出内外流耦合效应，计算后体压力分布与理论值较接近.该方法可为超燃冲压发动机的性能快速分析和吸气式高超声速飞行器机体/推进一体化的初步分析设计提供重要参考.      

Double-spray counterflow diffusion flame model

In this spray model we consider two gaseous streams approaching each other from opposite directions in a counterflow. The two opposed streams each carry a distribution of liquid droplets. The sprays vaporize, and the vaporized fuel and oxidizer gases diffuse and convect toward a chemical reaction region near the stagnation plane, at which the reactants burn. A set of steady-state ordinary differential equations is derived to describe the temperature of the gas flow and the mass fractions of each reactant. We solve the differential equations in three consequent cases, each more complicated than the previous one: (i) fast vaporization and fast chemistry; (ii) finite-rate vaporization and fast chemistry; and (iii) finite-rate vaporization and finite-rate chemistry. Comparisons are made of our model results to previous fuel-spray-only and purely gaseous counterflow diffusion flame models. The parametric dependences of vaporization-zone movement, flame movement, temperature rise and degree of reactant leakage through the flame are examined. In addition, the strain rate dependence of these quantities is examined up to and including extinction.     

Positive ion speed at the plasma–sheath boundary of a negative ion-emitting electrode

One-dimensional fluid model for a planar sheath in front of a negative ion-emitting electrode surface immersed in a collision-less, non-magnetized, electronegative plasma is presented. It was found that the positive ion speed at the plasma–sheath boundary (PSB) increases linearly with negative ion emission from the electrode but attains a saturation value as soon as a virtual cathode is formed near the electrode surface. The effect of negative ion emission on the pre-sheath region shows that the potential drop increases across the pre-sheath in accordance with the rise in positive ion speed at the PSB. The sheath width obtained using the present model shows a similar trend as the Child-Langmuir law, but its magnitude is found to be consistently higher compared with a non-emitting electrode. A plausible explanation has been given to explain these effects.     

Kinetics of charged particles in a high-voltage gas discharge in a nonuniform electrostatic field

A high-voltage gas discharge is of interest as a possible means of generating directed flows of low-temperature plasma in the off-electrode space distinguished by its original features [1–4]. We propose a model for calculating the trajectories of charges particles in a high-voltage gas discharge in nitrogen at a pressure of 0.15 Torr existing in a nonuniform electrostatic field and the strength of this field. Based on the results of our calculations, we supplement and refine the extensive experimental data concerning the investigation of such a discharge published in [1, 2, 5–8]; good agreement between the theory and experiment has been achieved. The discharge burning is initiated and maintained through bulk electron-impact ionization and ion–electron emission. We have determined the sizes of the cathode surface regions responsible for these processes, including the sizes of the axial zone involved in the discharge generation. The main effect determining the kinetics of charged particles consists in a sharp decrease in the strength of the field under consideration outside the interelectrode space, which allows a free motion of charges with specific energies and trajectories to be generated in it. The simulation results confirm that complex electrode systems that allow directed plasma flows to be generated at a discharge current of hundreds or thousands of milliamperes and a voltage on the electrodes of 0.3–1 kV can be implemented in practice [3, 9, 10].     

On the flow of thermal defects from the bulk to surfaces

This paper treats flow of defects between bulk and surface sites, as a crystal passes towards equilibrium, for some practical cases. These include the realistic but quite elaborate example in which vacancy flow from the bulk is coupled to surface step edges, acting as sinks, by reaction with adatoms that are believed to dominate transport on metal surfaces. It is shown how surface processes modify the defect flow from the bulk only at short times. Lacking accurate parameters (such as concentrations) for surface defects, a crude modeling of the theoretical results is offered in order to explore likely generic behavior. The model employs a recently described approximate universality of behavior, scaled to the melting temperature, relevant mainly to fcc (1 1 1) surfaces. Under a range of conditions it is the reaction of advacancies with adatoms that provides the important channel for bulk vacancy flow. Adatom flow onto the terraces from surface step edge sinks is the bottleneck to flow above a crossover temperature (depending on step spacing) and equilibrium recombination is the bottleneck below the crossover.     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

等离子体对含硼两相流扩散燃烧特性的影响

为排除来流空气对含硼燃气的掺混效应, 研究等离子体对含硼富燃料推进剂在补燃室二次燃烧过程的影响, 建立了含硼两相流平行进气扩散燃烧物理模型. 利用高速摄影仪拍摄了含硼燃气在补燃室二次燃烧的火焰图像, 分析了该物理模型的扩散燃烧特性和硼颗粒的二次点火距离. 采用硼颗粒的King点火模型、有限速度/涡耗散模型、颗粒轨道模型和RNG k-ε模型以及等离子体模型, 模拟了一定条件下等离子体对含硼两相流扩散燃烧过程的影响. 结果表明, 依据含硼燃气二次燃烧图像得到的硼颗粒二次点火距离, 与数值模拟结果基本一致, 保证了该物理模型和计算方法的可靠性. 含硼两相流经过等离子体区域后, 硼颗粒在运动轨迹上颗粒温度明显增加, 颗粒直径明显减小, B₂O₃的质量分数分布区域明显扩增, 70%的硼颗粒在到达补燃室2/3尺寸前燃烧效率已达到100%, 硼颗粒充分燃烧释放出更多热量导致中心流线区域温度增加近1/2, 可见等离子体可以明显强化含硼两相流的燃烧过程, 提高硼颗粒的燃烧效率.     

Interaction of a surface glow discharge with a gas flow

A surface glow discharge in a gas flow is of particular interest as a possible tool for controlling the flow past hypersonic aircrafts. Using a hydrodynamic model of glow discharge, two-dimensional calculations for a kilovolt surface discharge in nitrogen at a pressure of 0.5 Torr are carried out in a stationary gas, as well as in a flow with a velocity of 1000 m/s. The discharge structure and plasma parameters are investigated near a charged electrode. It is shown that the electron energy in a cathode layer reaches 250–300 eV. Discharge is sustained by secondary electron emission. The influence of a high-speed gas flow on the discharge is considered. It is shown that the cathode layer configuration is flow-resistant. The distributions of the electric field and electron energy, as well as the ionization rate profile in the cathode layer, do not change qualitatively under the action of the flow. The basic effect of the flow’s influence is a sharp decrease in the region of the quasineutral plasma surrounding the cathode layer due to fast convective transport of ions.     

Investigation on RF styrene plasma by emission spectroscopy

In order to gain an insight into the processes in an RF styrene plasma, gas phase plasmas were investigated by emission spectroscopy. The plasma reactor was a bell-jar-type chamber with two parallel plate electrodes. The measurement of plasma emission spectra was made with axial resolution. The correlations among the emission intensities of CH and C₄H₂⁺ species, the polymer deposition rate and the polymeric structure of the deposited films were studied. The proposed analysis showed that the gas flow pattern in the plasma reactor, and the difference in collisions between styrene monomer molecules and energetic free electrons occurring in the plasma region and RF sheath, made the fragments and ions produced change in the different regions, resulting in a change in polymeric structure and deposition rate of the polymer films. With increasing distance between the substrate position and the lower electrode, the deposition rate and the concentration of phenyl groups both at the polymer surface and in the bulk decreased     

Role of surface and interface science in chemical vapor deposition diamond technology

Diamond is well known as the hardest material in nature. It also has other unique bulk physical and mechanical properties, such as very high thermal conductivity and broad optical transparency, which enable a number of new applications now that large areas of diamond can be fabricated by the new diamond plasma chemical vapor deposition (CVD) technologies. However, some of the most interesting properties of diamond, including the ability to be grown over large areas by CVD processes, result not from its bulk properties but from its special and unique surface chemistry. The surface chemistry derived properties are as remarkable as the bulk properties, and in the end may enable the development of new applications, technologies, and industries which are at least as important as those based on the bulk properties. Some of these surface properties are extreme chemical inertness, low surface energy, low friction coefficients, negative electron affinity, biological inertness, and high over-voltage electrode behavior. The surface science and some of the interesting ongoing research in these areas are explored and illustrated, and unresolved questions are highlighted.     

具有空心阴极放电特征的射频放电的两电子组模型

 运用两电子组模型，考虑了射频放电中的α过程和γ过程两种电离机制，并结合流体模型，研究了中等气压下窄电极间隙容性耦合射频放电在运行模式转变区的等离子体密度以及电离速率分布等特性。理论研究表明，γ电离过程在高电流模式运行中起主要作用，并证实了此类放电中存在显著的电子摆钟效应，具有类似于空心阴极放电的特征。     

脉冲高能准分子激光烧蚀块靶产生等离子体的动力学过程的差分模拟

 利用质量连续性、动量守恒和能量守恒这三个基本方程,研究高能脉冲激光照射块状靶材产生等离子体的物理特性。采用差分法和Pichard迭代法,求解带特定边界条件的流体力学三方程,得出已喷射等离子体的温度、密度和速度的分布的迭代方程,并用计算机进行了数值模拟。