Planar Bragg gratings made by excimer-laser modification of ion-exchanged waveguides

The refractive indices of planar silver-ion-exchanged waveguides have been modified by UV excimer laser irradiation (lambda=193 nm) . The effective index changes of the fundamental modes of the waveguides after exposition are as large as 2x10(-2) . The procedure permits the fabrication of integrated optical components in a direct way, with neither the use of standard lithography nor previous sensitizing of the substrate. Optical characterization of the irradiated samples is presented. By the use of appropriate masks, we have fabricated planar Bragg gratings.     

Investigation of a UV-laser generated waveguide in a planar polymer chip using an improved interferometric method

Polymeric integrated-optical waveguides are prepared in a planar polymer chip by UV-laser lithographic methods. The waveguide samples are irradiated by an excimer laser at a wavelength Λ=248 nm with various irradiation parameters (different fluencies and irradiation doses). Mach-Zehnder interferometer is employed and the refractive index depth profiles of the waveguide samples are obtained. This profile covers two regions having exponential and Gaussian shapes. The model field distributions strongly depend on the refractive index of each region. The mode field distribution and the effective mode indices for each region have been calculated on the basis of a theoretical model and the experimentally measured data.     

A novel measurement method for the photosensitivity of fibers

An online measurement method for the photosensitivity of fibers is proposed. This method is simple and useful. Theoretical and experimental studies have been carried out. This method is based on the Mach-Zehnder interferometer (MZI). One arm of the MZI is externally exposed to UV light at 248 nm originating from a KrF excimer laser. Then the output optical spectrum is measured, by some relevant analysis, and the photosensitivity of the fiber can be obtained. The relationship between the refractive index increment of fibers and the exposure time is in accordance with the absorbing model that is brought forward by H. Patrick, which shows that this method has high precision.     

Investigation of a UV-laser generated planar polymeric waveguide directly and after five years of preparation using an interferometric method

Polymeric integrated-optical waveguides were prepared in a planar chip using UV-laser lithographic method. Five waveguide samples were irradiated by an excimer laser of wavelength 248 nm with different irradiation parameters (fluence and irradiation doses). Using Mach–Zehnder interferometer, the refractive index depth profiles of these samples are determined in two cases, directly and five years later of preparation. A crucial change of refractive indices profiles has been recorded after five years of preparation. In the first case we got double region waveguides fitted a Gaussian shape, while in the second one we observe a single region waveguide which has exponential shape. The photochemical reactions responsible for these changes in the two cases are demonstrated. This is quite important when such waveguides are used in the applications. Also it was interesting to investigate the aging impact on mode field distributions and the effective mode indices. The mode parameters are determined based on a theoretical model and the experimentally obtained data. The results show a notable change in the mode field distributions and the propagation coefficients as influence of aging.     

Low loss optical channel waveguides for the infrared range using niobium based hybrid sol-gel material

In this work, we report the fabrication of single-mode Nb₂O₅ based hybrid sol-gel channel waveguides. Nb₂O₅ based hybrid sol-gel material has been deposited by spin-coating on silicon substrate and channel waveguides have been fabricated by a UV direct laser writing process. Optical guided modes have been observed to confirm single-mode conditions and optical propagation loss measurements have been performed using the cut-back technique. Optical propagation losses were measured to be 0.8 dB/cm and 2.4 dB/cm at 1.31 μm and 1.55 μm respectively. These experimental results demonstrate low loss optical waveguiding within the infrared range and are very promising in view of material choice for the development of integrated optical devices for telecommunication.     

Fabrication of Si-based waveguide splitters using photosensitive sol-gel method

In this paper, a photosensitive sol-gel method for 1 × 8 Y-branch optical splitter is reported. The poly (methyl methacrylate) (PMMA) cladding films with different thicknesses (above 10 μm) on Si substrates are prepared on Si substrates by dip-coating, the root-mean-square roughness (Rrms) of which is less than 0.7 nm. The UV photosensitive organic-inorganic composite SiO₂/ZrO₂/H core films are then coated on these PMMA cladding films using photosensitive sol-gel method. The refractive indexes of PMMA cladding films examined by spectroscopic ellipsometer are 1.4854, 1.4815 and 1.4806 at 0.85, 1.31 and 1.55 μm, while that of the SiO₂/ZrO₂/H gel films are 1.5569, 1.5489 and 1.5472 μm, respectively, which is larger than that of PMMA cladding films. Therefore, the composite structure of SiO₂/ZrO₂/H gel films on PMMA-on-Si substrates could be used to fabricate waveguide splitter. Based on the inherent photosensitivity of the SiO₂/ZrO₂/H gel film, 1 × 8 Y-branch optical power splitters with a thickness of 5 μm are fabricated by irradiating the gel film with UV light through a mask followed by dissolving the non-irradiated area in a suitable solvent. The line-width and output spacing of this splitter are 25 and 110 μm, respectively. The observed near-field pattern indicates that the light with a wavelength of 1.53-1.56 μm can be transmitted and split into eight branches in the optical splitter, which is fabricated by using the above technique.     

Impact of misfit dislocations on wavefront distortion in Si/SiGe/Si optical waveguides

Silicon-rich SiGe alloys represent a promising platform for the development of large-area single-mode optical waveguides to be integrated in silicon-based optical circuits. We find that SiGe layers epitaxially grown on Si successfully guide radiation with a 1.55 μm wavelength, but, beyond a critical core thickness, their optical properties are strongly affected by the clustering of misfit dislocations at the interface between Si and SiGe, leading to a significant perturbation of the local refractive index. Transmission electron microscopy and micro-Raman spectroscopy, together with finite-element simulations, provide a complete analysis of the impact of dislocations on optical propagation.     

The influence of UV irradiation on the surface of chitosan films

The surface properties of chitosan films before and after UV-irradiation (λ = 254 nm and 248 nm, respectively) were investigated using the technique of scanning electron microscopy (SEM) and by means of contact angle measurements allowing the calculation of surface free energy. Moreover, in order to determine the film mass changes, quartz crystal microbalance (QCM) measurements were performed. Measurements of the contact angle for diiodomethane (D), formamide (F) and glycerol (G) on the surface of chitosan films were made. The chemical and structural changes during UV irradiation were studied by FTIR-ATR spectroscopy.The contact angle and the surface free energy were altered by UV irradiation of chitosan films. The microscopy images have shown that the KrF excimer laser irradiation caused visible damages on the surface in comparison with the surface exposed to the mercury UV lamp. The surface modification of chitosan films can be achieved using both, the low intensity UV lamp and the excimer laser.     

UV-laser-based fabrication of a planar,polymeric Bragg-structure

The fabrication of a planar polymeric Bragg-structure by a UV-laser-lithographic method is described in this paper: A polymeric substrate is irradiated by a UV-excimer laser inducing photo-reactions at the substrate surface. In this way the polymeric material can be locally removed from the substrate surface or the surface refractive index can be locally changed in a reproducible way. Several integrated optical microstructures can be generated by UV-laser-lithographic methods (amplitude and phase mask methods in contact modus), e.g. waveguides or surface relief gratings. A polymeric planar Bragg-structure is realized which can be used as a (de-) multiplexer in optical telecommunications technology or as a temperature or strain sensor in optical sensor technology.     

Photoexpansion and photobleaching effects in oxysulfide thin films of the GeS2+Ga2O3 system

Oxysulfide systems undergo structural transformations upon illumination with laser light of near bandgap energy, as well as chalcogenide materials (glasses and films). In this paper, photoinduced effects such as photoexpansion and photobleaching were observed in GeS₂+Ga₂O₃ (GGSO) films synthesized by electron beam evaporation. A surface expansion of the thin films and a shift to shorter wavelengths of the optical absorption edge were observed as a result of UV laser irradiation (wavelength of 351 nm) and they are dependent on laser power density, exposure time and film composition. These parameters were varied to evaluate and enhance the observed effects. In addition, the irradiated GGSO samples exhibited a decrease in refractive index, measured with a prism-coupling technique, which makes these films suitable candidates for applications as gratings and waveguides in integrated optics.     

Incubation/ablation patterning of polymer surfaces with sub-μm edge definition for optical storage devices

By exposure to low fluence UV laser radiation, the optical absorption coefficient of subsurface polymer material can be increased (incubation) with spatial control, using a suitable contact mask, proper imaging of the mask, or laser direct writing. Spatially selective ablation of polymethylmethacrylate (PMMA) is then achieved with large area XeCl excimer laser pulses at 308 nm. In this way, the transfer of spatial information to the material can be decoupled from the high laser fluence removal (ablation) step. The advantages are: The mask is exposed to only low fluence laser radiation — damage is avoided. Since the mask can be removed before the ablation step, mask contamination by the ablated plume cannot occur. Using this incubation/ablation method, PMMA surfaces can be patterned (248 nm/308 nm) with submicrometer spatial control and edge contrasts better than 0.2 m. This has impact on optical storage technology and laser surface processing techniques in general. The smallest single structure obtained was somewhat smaller than 0.5 m in diameter up to now, given by the mask.Presented at Laserion '91, June 12–14, 1991     

Optical modulator based on negative refractive material

Using negative refractive material slow-wave waveguide, a compact and integrated optical modulator is proposed for the first time to our knowledge. The slow group velocities of light, which are readily achievable in negative refractive material waveguide, can dramatically increase the induced phase shifts caused by small changes in the refractive index. Modulation operation with a 40 μm long negative refractive material slow-wave waveguide of a Mach–Zehnder interferometer (MZI) structure was demonstrated by using finite-element method. The size of the novel optical modulator is 100 times shorter than that of the conventional lithium niobate MZI optical modulator.     

On the effects of using CO2 and F2 lasers to modify the wettability of a polymeric biomaterial

Enhancement of the surface properties of a material by means of laser radiation has been amply demonstrated previously. In this work a comparative study for the surface modification of nylon 6,6 has been conducted in order to vary the wettability characteristics using CO₂ and excimer lasers. This was done by producing 50 μm spaced (with depths between 1 and 10 μm) trench-like patterns using various laser parameters such as varying the laser power for the CO₂ laser and number of pulses for the excimer laser. Topographical changes were analysed using optical microscopy and white light interferometry which indicated that both laser systems can be implemented for modifying the topography of nylon 6,6. Variations in the surface chemistry were evaluated using energy-dispersive X-ray spectroscopy and X-ray photoelectron spectroscopy analysis which showed that the O₂ increased by up to 1.5 at% and decreased by up to 1.6 at% for the CO₂ and F₂ laser patterned samples, respectively. Modification of the wettability characteristics was quantified by measuring the advancing contact angle, which was found to increase in all instances for both laser systems. Emery paper roughened samples were also analysed in the same manner to determine that the topographical pattern played a major role in the wettability characteristics of nylon 6,6. From this, it is proposed that the increase in contact angle for the laser processed samples is due to a mixed intermediate state wetting regime owed to the periodic surface roughness brought about by the laser-induced trench-like topographical patterns.     

Optical loss measurements in femtosecond laser written waveguides in glass

The optical loss is an important parameter for waveguides used in integrated optics. We measured the optical loss in waveguides written in silicate glass slides with high repetition-rate (MHz) femtosecond laser pulses. The average transmission loss of straight waveguides is about 0.3 dB/mm at a wavelength of 633 nm and 0.05 dB/mm at a wavelength of 1.55 μm. The loss is not polarization dependent and the waveguides allow a minimum bending radius of 36 mm without additional loss. The average numerical aperture of the waveguides is 0.065 at a wavelength of 633 nm and 0.045 at a wavelength of 1.55 μm. In straight waveguides more than 90% of the transmission loss is due to scattering.     

Influence of surface effects on the performance of lead-niobium-germanate optical waveguides

Lead-niobium-germanate planar waveguides have been produced by pulsed laser deposition. The composition of the waveguides is found to be relatively weakly dependent on the laser fluence, while their surface morphology is affected dramatically. Smooth surfaces are obtained for a narrow fluence range centered at 2.0 J/cm², while particulates having typical diameters of <0.5 μm or droplets with typical diameters of <10 μm are observed at lower and higher fluences, respectively. The refractive index of the waveguides increases with fluence up to 2.1 at 2.0 J/cm², which is close to the value of the bulk glass, and remains constant at higher fluences. Propagation losses show instead a minimum (≈6.5 dB/cm) at 2.0 J/cm². The characteristics of the ablation process that leads to the ejection of solid particulates or molten droplets as well as the increase of the waveguides density on increasing the fluence are discussed to be responsible for the observed optical behavior.     

Structural and optical characterization of undoped, doped, and clustered ZnO thin films obtained by PLD for gas sensing applications

The synthesis by pulsed laser deposition technique of zinc oxide thin films suitable for gas sensing applications is herein reported. The ZnO targets were irradiated by an UV KrF^* (λ = 248 nm, τ_FWHM ∼7 ns) excimer laser source, operated at 2.8 J/cm² incident fluence value, whilst the substrates consisted of SiO₂(0 0 1) wafers heated at 150 °C during the thin films growth process. The experiments were performed in an oxygen dynamic pressure of 10 Pa. Structural and optical properties of the thin films were investigated. The obtained results have demonstrated that the films are c-axis oriented. Their average transmission in the visible-infrared spectral region was found to be about 85%. The equivalent refractive indexes and extinction coefficients were very close to those of the tabulated reference values. Doping with 0.5% Au and coating with 100 pulses of Au clusters caused but a very slight decrease (with a few percent) of both transmission and refractive index values. The coatings with the most appropriate optical properties as waveguides have been selected and their behavior was tested for butane sensing.     

Modulation of refractive index and thickness of poly(methyl methacrylate) thin films with UV irradiation and heat treatment

This paper reports changes in refractive index and thickness of spin-coated poly(methyl methacrylate) (PMMA) thin films upon irradiation by a conventional high-pressure mercury UV lamp. Significant increase in refractive index and reduction in thickness are detected. Index modulations of greater than 0.01 are achieved in the thin films after 4 min of irradiation. The thickness reduction of an irradiated PMMA film is consistent with its weight loss. This is caused by the escape of the volatile molecules generated during the irradiation process. A slight increase in the refractive index is also found in the film, heat-treated above its glass transition temperature (Tg). This thermal effect is detected in the UV irradiation process. We propose three possible aliphatic structures that are formed during the photochemical reaction and may exist in the main chain of irradiated PMMA after the irradiation. Their refractive indices in aggregate state are greater than that of PMMA based on an evaluation using the Lorentz-Lorenz equation. This is suggested to be an important reason for the refractive index increase in the UV-irradiated PMMA films. A UV-irradiated film, heat-treated above its Tg, has a rough surface with many tiny holes as illustrated by atomic force microscopy. These holes are attributed to the evaporation of the small molecules generated during the irradiation process.     

Interference microscopy of femtosecond laser written waveguides in phosphate glass

By focusing fs-laser radiation in the volume of a transparent material the refractive index can be changed locally, leading to 3-dimensional waveguiding structures. Waveguides are written in phosphate glass (IOG from Schott) at a depth of 100 μm below the surface. The pulse energy and the scan velocity are varied. For the first time the optical path difference caused by the waveguides and therefore the refractive index distribution of the waveguides and their cross sections are determined using interference microscopy. The optical path difference measured in the written structures and their cross sections is analyzed by a phase-shift algorithm. Thus, the refractive index distribution both along a line perpendicular to the waveguide and in the plane of a cross section is determined. The results are visualized as 2-dimensional graphics. Several regions of opposite sign of the refractive index change are observed in the cross sections of waveguides generated by femtosecond laser pulses. The number and the size of these regions are increasing with increasing pulse energy and decreasing scan velocity.     

LIGA technology for the synthesis of diffractive refractive intraocular lenses

The manufacturing of test diffractive refractive intraocular lenses is illustrated by means of LIGA (deep X-ray LIthography and GAlvanoplastics and polymer forming). Dynamic X-ray lithography used while rotating the substrate versus an X-ray mask fixed in a beam of synchrotron radiation (SR) yields smooth optical 3D surfaces with roughnesses of 10–30 nm rms in polymethylmethacrylate (PMMA) layers. The axisymmetric diffractive refractive profile of a lens is predetermined by the radial angular function of the X-ray mask topology. The quality of the optical surface is reproduced for the nickel master form, which is electroplated onto a gold layer atop the PMMA relief. The optical quality also remains high for replicated lenses synthesized in this manner during silicon polymerization.     

Photosensitivity and grating development in trans-4-stilbenemethanol-doped poly(methyl methacrylate) materials

This paper reports the photosensitivity of poly(methyl methacrylate) (PMMA) and its copolymer doped with trans-4-stilbenemethanol. UV irradiation of the doped-PMMA at 325 nm induced the trans- to cis-isomerization of the dopant. This process was confirmed by ¹H NMR spectra of trans-4-stilbenemethanol in CDCL₃ solvent before and after irradiation. The isomerization can be initiated by the irradiation with an intensity of 0.62 mW/cm². Photo-induced refractive index change of −0.0024 was obtained when a PMMA copolymer film doped with 5.1 wt% dopant was exposed to 325 nm light. Lorentz-Lorenz equation was used to estimate the refractive index of a trans-4-stilbenemethanol-PMMA composite and a trans-4-stilbenemethanol-PMMA copolymer composite from the mole refraction and van der Waals volume of each component. A slight elevation of molecular packing coefficient (K) for PMMA and its copolymer containing the dopant implies a denser aggregation as compared to the polymer without the dopant. Long period gratings were created in doped-PMMA films and doped-PMMA copolymer fibers using amplitude mask technique. Gratings were confirmed by microscopic observation and diffraction patterns.