共查询到20条相似文献,搜索用时 229 毫秒
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设计并制作了一种用于波长信道选择系统的新型柔性悬臂梁电磁驱动光开关,该光开关采用微光机电系统技术制作,由带有平面螺旋形线圈的聚酰亚胺悬臂梁、圆柱形永磁体、基座以及双面反射棱镜组成.通过改变线圈中激励电流的方向来控制开关动作.运用有限元的方法,模拟分析了线圈与永磁体之间电磁力的分布以及悬臂梁回复力、电磁力与挠度的关系.对该光开关的驱动性能进行了测试,实验结果表明:加载较小的工作电流(0.15A),悬臂梁便可以产生较大的挠度(0.925mm),满足波长信道选择系统光路偏转的要求.
关键词:
微光机电系统
光开关
柔性悬臂梁
电磁驱动 相似文献
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设计并制作了一种用于波长信道选择系统的新型柔性悬臂梁电磁驱动光开关,该光开关采用微光机电系统技术制作,由带有平面螺旋形线圈的聚酰亚胺悬臂梁、圆柱形永磁体、基座以及双面反射棱镜组成.通过改变线圈中激励电流的方向来控制开关动作.运用有限元的方法,模拟分析了线圈与永磁体之间电磁力的分布以及悬臂梁回复力、电磁力与挠度的关系.对该光开关的驱动性能进行了测试,实验结果表明:加载较小的工作电流(0.15A),悬臂梁便可以产生较大的挠度(0.925mm),满足波长信道选择系统光路偏转的要求. 相似文献
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低功耗聚合物Mach-Zehnder热光开关 总被引:3,自引:0,他引:3
采用传统的半导体工艺制作了聚合物Mach-Zehnder型热光开关.利用扫描电镜观测波导形貌,通过红外摄像机观测波导的近场输出光斑,在通信波段1 550 nm波长下测试了器件的输出光谱.在电极上施加直流信号,测得热光开关的消光比为-15 dB,驱动功率为16 mW.引入直流偏置网络,获得了器件的开关特性曲线,经测量开关上升时间为1.2 ms,下降时间为0.8 ms. 相似文献
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光热膨胀材料的光谱特性是影响微型光热驱动机构性能的关键因素,该文在理论分析的基础上,采用单积分球测量法对四种聚合物材料的反射光谱及吸收特性进行了实验测量,据此选择制作光热驱动机构的最佳光热膨胀材料,发现掺杂染料的高密度聚乙烯(HDPE)材料在600~690 nm的范围内有较强烈的吸收.选取HDPE作为光热膨胀材料,设计制作了一种长度1 500 μm的微型光热驱动机构,并采用自行研制的CCD显微监控和视频运动测量系统进行了驱动机构的驱动性能测量实验.研究结果表明,在10 mW/650 nm的半导体激光器驱动下,该微型光热驱动机构可以产生18.7 μm的光热偏转量,说明其具有良好的光谱吸收和光热转换特性,可望在微光机电系统(MOEMS)中获得广泛应用. 相似文献
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一种新的时间分辨光谱测量方法 总被引:1,自引:1,他引:0
提出用汇编语言编制程序控制单片机(AT89C51)及外围电路组成的驱动电路驱动步进电机带动单色仪旋转,得到各个期望波长的光,然后使光信号经过光电倍增管(Hamamatsu 1P28)进行光电转换后得到电信号,把电信号传进数字示波器,通过数字示波器上带有的RS232串口把光谱数据传回计算机处理得到各个波长光的衰减曲线、然后用计算机编程绘图进行处理得到时间分辨光谱的方法。这种测量时间分辨光谱方法的特点是测量各个波长光谱时,在时间上是并行测量而在波长上是串行测量的。通过测量样品Tb(o-BBA)3phen中稀土元素Tb发光的时间分辨光谱验证了这种方法的可行性。介绍了所用测试系统的各部分硬件组成和测试技术,获得了样品Tb(o-BBA)3phen的荧光强度-波长-时间的三维立体图以及对时间积分的积分谱。 相似文献
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为满足加速度传感器微型化、低成本的需求,提出了一种带有单微环谐振腔的悬臂梁式光学加速度传感器结构,采用耦合模和传输矩阵理论求取了微环谐振器的传递函数,利用检测同一波长处光强度变化的新测量方法实现了对加速度的探测,从而得到了加速度传感器的灵敏度和探测极限,深入研究了不同结构参数对系统灵敏度的影响,数值仿真并分析了输出端口的光谱特性。结果表明:加速度传感器在外界加速度作用时,悬臂梁在应力的作用下会发生弯曲,使得固定在悬臂梁上的微环谐振器发生形变,即微环谐振器的长度和折射率都发生了变化,从而光在微环谐振器中的传输特性发生变化,因此可以通过探测微环输出端光场强度的变化来测定加速度值;悬臂梁的长度、厚度以及微环谐振腔的固定位置都是影响加速度传感器性能的直接因素,并且选择最佳的结构参数可以有效地提高系统灵敏度和精度。经过数值仿真,对于信噪比为30 dB系统,波长在1.515 μm处,悬臂梁的长度、厚度分别为180和3 μm时,系统的灵敏度可达到2.112 g-1,探测极限为1.421×10-3 g,因此在悬臂梁可承受的范围内,选取长度较长的悬臂梁结构能够有效地改善系统的灵敏度和探测极限。该结构为制备高灵敏度、低成本、易于加工的加速度传感器及可嵌入式微型光学器件提供理论基础。 相似文献
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We propose a scheme for measuring the angular velocity of absolute rotation using a three-mode optomechanical system in which one mode of the two-dimensional(2 D) mechanical resonator is coupled to an optical cavity. When the total system rotates, the Coriolis force acting on the 2 D mechanical resonator due to the absolute rotation will affect the mechanical motion and thus change the phase of the output field from the cavity. The angular velocity of the absolute rotation can be estimated by monitoring the spectrum of the output field from the cavity via homodyne measurement. The minimum measurable angular velocity, which is determined by the noise spectrum, is calculated. The working range of the gyroscope for measuring angular velocity is discussed. 相似文献
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Dongming Sun Wei Dong Wenbin Guo Caixia Liu Guodong Wang Xin Yan Baokun Xu Weiyou Chen Michael Kraft 《Optics & Laser Technology》2005,37(8):601-607
The micro-opto-electro-mechanical systems (MOEMS) optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Based on the torsion dynamics theory, the technique and relative formula are presented for the first time for analyzing the actuating voltage and the switch time. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). Finally, the difference between the experimental results and theoretical data is discussed. 相似文献
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A compact, low cost, high speed, non-destructive testing NIR (near infrared) spectrometer optical system based on MOEMS grating device is developed. The MOEMS grating works as the prismatic element and wavelength scanning element in our optical system. The MOEMS grating enables the design of compact grating spectrometers capable of acquiring full spectra using a single detector element. This MOEMS grating is driven by electromagnetic force and integrated with angle sensor which used to monitored deflection angle while the grating working. Comparing with the traditional spectral system, there is a new structure with a single detector and worked at high frequency. With the characteristics of MOEMS grating, the structure of the spectrometer system is proposed. After calculating the parameters of the optical path, ZEMAX optical software is used to simulate the system. According the ZEMAX output file of the 3D model, the prototype is designed by SolidWorks rapidly, fabricated. Designed for a wavelength range between 800 nm and 1500 nm, the spectrometer optical system features a spectral resolution of 16 nm with the volume of 97 mm × 81.7 mm × 81 mm. For the purpose of reduce modulated effect of sinusoidal rotation, spectral intensity of the different wavelength should be compensated by software method in the further. The system satisfies the demand of NIR micro-spectrometer with a single detector. 相似文献
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碳酸钙微粒光致旋转的实验和理论研究 总被引:3,自引:0,他引:3
理论分析了由于光束轨道角动量和自旋角动量传递以及微粒的特殊形状导致微粒旋转的机理.实验建立了单光束激光光镊装置,不仅可以捕获并移动直径为微米量级的微小粒子,而且利用圆偏振光与微粒之间角动量的传递,实现了对具有双折射特性的碳酸钙微粒的光致旋转.实验中发现微粒的旋转不仅取决于光束的偏振态,还与微粒本身的形状有关,解释了实验中观察到的几种旋转现象.碳酸钙微粒旋转的最高转速达到12转/秒,转速与激光功率成正比. 相似文献
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微光机电系统(MOEMS)微镜在激光显示、光束扫描、自适应光学等领域都有重要应用。现有的MOEMS微镜驱动器一般为静电吸引型,难以克服其吸合效应造成的各种问题,同时,方形的驱动器难以与圆形的镜面形成良好匹配,填充比较低。提出了一种环形静电排斥驱动器的MOEMS微镜,该静电排斥驱动器以环形排列,并围绕在镜面的周围,达到了与圆形镜面的良好匹配。所设计的微镜口径为204μm,并利用PolyMUMPS表面工艺进行加工。模拟仿真及实验测试结果显示,该微镜具有0.62°的最大旋转角,494μs的响应时间和1.191kHz的工作带宽,适用于一般光束扫描等的应用需求。 相似文献
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V. M. Kotov 《Technical Physics》1997,42(7):769-774
Planar acoustooptic 2×2 directional couplers that switch optical rays with different wavelengths are considered. A method
for calculating the angular and frequency characteristics of such switches is developed, and the parameters of a switch based
on a planar Ti-LiNbO3 structure are calculated. Experiments employing bulk acoustooptic diffraction in TeO2 are performed, confirming the basic theoretical assumptions. It is shown experimentally that the best conditions for switching
optical rays directed into optical fibers can be provided nearly always by varying the diffraction angles and the frequencies
of the sound waves. The functional possibilities of the 2×2 directional coupler investigated in a fiber-optic gyroscope are
described.
Zh. Tekh. Fiz. 67, 57–62 (July 1997) 相似文献
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We demonstrate a 7-bit photonic true-time-delay (TTD) system which uses an 8 × 8 micro-optical-electro- mechanical system (MOEMS) optical switch for phased array antennas (PAAs) beamforming applications. The switch controls the optical signal to pass by the fiber delay lines (FDLs) of different lengths. Different time delays between adjacent channels are obtained due to the chromatic dispersion of FDLs. Therefore, the system cannot be disturbed by the environment. The measured time delay responses are nearly linear with the wavelength spacing between optical carriers as well as the lengths of FDLs, which agrees well with the theoretical analysis. 相似文献
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提出了一种能完整测量零锁区激光陀螺法拉第偏频组件中旋光膜片的法拉第旋光效应和超低损耗的方法和自动测量系统.该方法利用双光路正交分解平衡测量原理,通过测量两束光光强平衡时起偏器的偏振方向来确定旋光膜片的法拉第转角和超低损耗.测量结果表明:系统对法拉第转角的测量分辨率小于0.9″,损耗测量分辨率为10 ppm.环境温度的波动对法拉第转角的测量变化很小,但对膜片超低损耗测量影响很大,温度变化8.1 K,膜片损耗测量值变化一个周期.实验及结果证明,该系统能满足超高精度测量的要求. 相似文献
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基于MOEMS扫描微镜的近红外光谱仪分光系统结构 总被引:1,自引:0,他引:1
针对近红外光谱仪由于红外CCD导致的红外光谱仪高成本问题,提出用MOEMS微镜阵列进行光路结构改进,并且解决了红外光谱仪成像像斑不规则从而难以采用MOEMS微镜阵列进行光谱扫描的问题,设计了一种新的分光成像结构.该结构基于全息凹面光栅理论来规则光谱成像的像斑,采用光学设计软件ZEMAX和针对特定像差评判标准的优化算法,... 相似文献