N2微空心阴极放电特性及其阴极溅射的PIC/MC模拟

采用两维PIC/MCC模型模拟了氮气微空心阴极放电以及轰击离子 (N₂⁺,N⁺) 的钛阴极溅射. 主要计算了氮气微空心阴极放电离子 (N₂⁺,N⁺) 及溅射原子Ti的行为分布, 并研究了溅射Ti 原子的热化过程. 结果表明: 在模拟条件下, 空心阴极效应是负辉区叠加的电子震荡; 在对应条件下, 微空心较传统空心放电两种离子 (N₂⁺,N⁺) 密度均大两个量级, 两种离子的平均能量的分布及大小几乎相同; 在放电空间N⁺的密度约为N₂⁺的1/6, 最大能量约大2倍; 在不同参数 (P, T, V)下, 轰击阴极内表面的氮离子(N₂⁺,N⁺)的密度近似均匀, 其平均能量几乎相等; 从阴极溅射出的Ti原子的初始平均能量约6.8 eV, 离开阴极约0.15 mm处几乎完全被热化. 模拟结果为N₂微空心阴极放电等离子体特性的认识提供了参考依据. 关键词： 微空心阴极放电 PIC/MC模拟 2等离子体')" href="#">N₂等离子体     

氮气射频放电与直流放电PIC/MC模拟的比较

建立氮气容性射频等离子体过程的PIC/MC模型,将模拟结果与直流放电进行比较.结果表明:射频等离子体粒子(e,N₂⁺,N⁺)的平均密度较直流放电约大-个量级,在射频电极附近粒子(e,N₂⁺,N⁺)的平均能量比直流放电阴极附近的能量低3倍左右;密度偏低的原子离子N⁺在两电极附近具较高的能量,能量较低的分子离子N₂⁺在放电空间具较高密度,N₂⁺的密度大约是N⁺的6倍;计算的电子能量几率分布与测量结果-致.     

宏观放电参数对快原子态氮(N+,Nf)的影响

采用氮直流辉光放电等离子体中快电子和重粒子(N₂⁺,N⁺,N_f)混合的蒙特卡罗方法,模拟研究了快原子态粒子(N⁺,N_f)的产生率及轰击阴极的能量分布随宏观放电参数(P,V)的变化规律.结果表明,存在一最佳放电条件,使阴极壁处粒子(N⁺,N_f)的粒子数密度大且能量高;当电压大于800V时,轰击阴极的活性粒子(N⁺,N_f),主要由N₂⁺-N₂离解过程产生,电压小于300V时,主要由e^--N₂离解过程产生,模拟结果与实验结果相符合.     

等离子体金属表面氮化中放电温度对氮原子态粒子的影响

采用快电子和重粒子(N₂⁺,N⁺,N_f)混合的Monte Carlo模型,研究了氮直流辉光放电等离子体金属表面氮化过程中.e-N_2s及N₂⁺-N_2s两种碰撞离解过程产生的原子态粒子(N⁺,N)的产生率和氮化粒子(N⁺,N_f)轰击靶表面的能量、粒子数密度及入射角分布随气体温度的变化规律.结果表明,使阴极靶处活性粒子(N⁺,N_f)的能量高且粒子数密度大,存在一个最佳放电温度;粒子(N⁺,N)的产生率及在靶表面的密度数都随着放电气体温度的升高而减少;有大量中性快原子N_f在工件表面小角入射,且粒子(N⁺,N_f)角分布受温度的影响很小.     

介质阻挡均匀大气压氮气放电特性研究

基于一维流体力学模型，对介质阻挡均匀大气压氮气放电特性进行了数值计算研究.模型中考虑了氮气中主要的电离、激发过程，所包含的粒子种类为e，N₂，N⁺₂，N⁺₄，N₂(a¹∑^-_u)，N₂(A³∑⁺_u).模拟结果显示，氮中的放电具有低气压下汤生放电的特性.放电电流幅度较小，放电过程中气体电压变化缓慢，电子密度远低于离子密度，而且最大值出现在阳极，电子不能在放电间隙中被俘获，不存在中性等离子体区，气体中的电场趋于线性变化.亚稳态N₂(A³∑⁺_u)和N₂(a¹∑⁺_u)在整个放电空间都具有非常高的密度，比电子密度高三个量级以上，亚稳态密度的最大值出现在阳极，这样的分布决定了放电的空间结构.放电所需的种子电子主要由亚稳态之间潘宁电离提供，这种机理使放电的电离水平较低，导致氮气中的放电只能是汤生放电.随着放电参数的变化，多电流峰放电也可在氮气中获得. 关键词： 大气压均匀放电 介质阻挡放电 数值模拟 氮气     

蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

利用蒙特卡罗方法模拟氩气直流辉光放电鞘层内离子的运动过程.模拟基于离子与中性原子的电荷转移和弹性散射两种主要的散射过程，考虑了碰撞截面与能量相关和不相关两种情况，在弹性散射中采用了势场相互作用模型和刚性球碰撞两种模型.通过模拟得到不同气压和不同放电电压下离子入射阴极的能量分布和角度分布，并对几种模型的模拟结果进行了比较和讨论. 关键词： 辉光放电 等离子体鞘层 蒙特卡罗模拟     

N+2离子在氮直流辉光放电中碰撞离解的作用

采用氮辉光放电等离子体快电子和各种重粒子（N＋２，N＋，Nf）的混合Monte Carlo模型，从不同放电条件的离解碰撞率，快原子态粒子（N+，Nf）在阴极鞘层区的输运过程及轰击阴极的能量及角分布三个方面研究了 N＋２+N２→N+＋N+N2f反应在氮气直流辉光放电中的作用.该过程在电压较高时为阴极鞘层区的重要离解过程， 且主要发生在阴极附近，其碰撞率随电压和气压增加而增加；阴极表面附近的活性粒子（N＋，Nf）主要由该离解过程产生（而不是e--N2离解电离过程），而且这些粒子具有中等的平均能量且小角入射，是 关键词： 氮直流辉光放电 Monte Carlo模拟 N＋２-N２碰撞离解     

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采用蒙特卡罗模型对氮空心阴极放电等离子体鞘层离子(N2 、N )的输运过程进行了模拟研究,计算了阴极鞘层中氮离子(N2 、N )的能量及角分布的空间变化和粒子密度及平均能量随放电参数的变化规律。研究结果表明:空心阴极放电产生的氮离子,在鞘层输运过程中,N2 是密度几乎不变的低能粒子;N 是密度逐渐减少的高能粒子。随着电压增加,N 密度减小,平均能量增加;N2 密度和平均能量变化不明显。能量及入射角的相对分布规律与平板电极氮直流辉光放电基本类似,但圆筒空心阴极放电更有利于氮离子的产生。     

射频辉光放电CH4等离子体一维流体动力学模拟

完整建立一个关于射频辉光放电CH₄等离子体的流体动力学模型.模型包括基于迁移-扩散近似的粒子平衡方程、电子能量平衡方程,共包含了20种粒子(环境气体粒子,激发态粒子,离子和电子)和49类化学反应(电子-中性环境粒子、离子-中性环境粒子、激发态粒子-激发态粒子(中性环境粒子)).结果表明,在强电场区域有较高的电子反应率系数;等离子体中除源气体CH₄外,H₂,C₂H₆,C₃H₈,C₂H₄和C₂H₂也有较高的密度含量;激发态粒子中,CH₃含量最高,密度约为10¹⁹m^-3;在较低放电压力时(如18 Pa),CH₅⁺在离子成分中密度含量最高,当放电压力较高时(如67Pa),C₂H₅⁺在离子成分中占主导地位;除C₂H₅⁺外,其它各离子和激发态粒子在极板上的粒子流量随功率的增大逐渐升高.     

带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

在刻蚀工艺中,通常会在感性耦合等离子体源的下极板上施加偏压源,以实现对离子能量和离子通量的独立调控.本文采用整体模型双向耦合一维流体鞘层模型,在Ar/O₂/Cl₂放电中,研究了偏压幅值和频率对等离子体特性及离子能量角度分布的影响.研究结果表明:当偏压频率为2.26 MHz时,随着偏压的增加,除了Cl^-离子和ClO⁺离子的密度先增加后降低最后再增加外,其余带电粒子、O原子和Cl原子的密度都是先增加后基本保持不变最后再增加.当偏压频率为13.56和27.12 MHz时,除了Cl^-离子和Cl₂⁺离子外,其余粒子密度随偏压的演化趋势与低频结果相似.随着偏压频率的提高,在低偏压范围内(<200 V),由于偏压源对等离子体加热显著增加,导致了带电粒子、O原子和Cl原子的密度增加;而在高偏压范围内(>300 V),由于偏压源对等离子体加热先减弱后增强,导致除了Cl₂⁺离子和Cl^-     

Numerical study on characteristics of nitrogen discharge at high pressure with induced plasma

Based on the fluid theory of plasma, a model is built to study the characteristics of nitrogen discharge at high pressure with induced argon plasma. In the model, the spices such as electron, N₂⁺, N₄⁺, Ar⁺, and two metastable states (N₂ (A³∑_u⁺), N₂ (a¹∑_u^-)) are taken into account. The model includes particle's continuity equations, electron's energy balance equation, and Poisson equation. The model is solved with a finite difference method. The numerical results are obtained and used to investigate the effect of time taken to add nitrogen gas and initially-induced argon plasma pressure. It is found that lower speeds of adding the nitrogen gas and varying the gas pressure can induce higher plasma density, and inversely lower electron temperature. At high-pressure discharge, the electron density increases when the proportion of nitrogen component is below 40%, while the electron density will keep constant as the nitrogen component further increases. It is also shown that with the increase of initially-induced argon plasma pressure, the density of charged particles increases, and the electron temperature as well as the electric field decrease.     

Electron Capture and Dissociative Excitation in Slow Collisions of Na+ and K+ Ions with Hydrogen and Nitrogen Molecules

Absolute cross sections of electron capture and dissociative excitation for the Na⁺-H₂, N₂ and K⁺-H₂, N₂ pairs are determined. The high intense hydrogen and nitrogen atomic lines HI (121.6 nm) NI (120.0 nm), have been observed. For the Na⁺-H₂ and K⁺-H₂ pairs the qualitative interpretation of experimental results in the framework of quasidiatomic approximation are carried out. This revised version was published online in July 2006 with corrections to the Cover Date.     

The behavior of nitrogen excited in an inductively coupled argon plasma

An inductively coupled argon plasma, working at atmospherique pressure, was used as an excitation source for nitrogen gas. Excitation of atomic lines of N and of molecular bands of N₂ and N⁺₂ were observed. Two lines (389.2 and 388.8 nm) which were not previously described, are attributed to atomic nitrogen. Using the first negative system of N⁺₂, several temperature-measurement methods were used according to the resolving power of the monochromator. Good agreement is found between the rotational (4500–5000 K) and excitation temperatures (4500–5100 K) of elements injected into the plasma.     

Production and loss of N2 + ions during the decay period of plasmas produced in helium-nitrogen mixtures

The time dependence of the number density of N₂ ⁺ ions during the decay period of plasmas produced in helium containing 0.05, 0.17 and 0.5 percent nitrogen was studied in the pressure range from about 0.3 to 7 Torr by means of mass spectrometer techniques. During the early part of the afterglow period the time dependence of N₂ ⁺ is controlled by ambipolar diffusion loss towards the plasma container walls. The product of the ambipolar diffusion coefficientD _a and the reduced pressurep ₀ wasD _ap₀=900± 50 cm² Torr/sec. The production of N₂ ⁺ by collisions between metastable nitrogen molecules determines the temporal behavior of the N₂ ⁺ density during the late afterglow for extremely pure discharge conditions. From the data it follows that the metastable molecules involved are de-excited by collisions with ground state helium atoms with a rate constant of 3.4 × 10^?15 cm³ sec^?1, while the radiative lifetime of these metastable molecules is at least 20 msec. The surface catalytic efficiency for de-excitation upon striking the molybdenum covered plasma container walls was estimated to be smaller than 10^?3. Energy and radiative lifetime requirements suggest that N₂ ⁺ is produced during the plasma decay period by the process N₂ (a′¹ Σ _u ^? )+N₂ (a′¹σ _u ^? →N₂ ⁺ (X²Σ _u ⁺ )+N₂(X)+e.     

Excitation of bands of the first negative system of the N 2 + ion in collisions of N+ and O+ ions with N2 molecules

Absolute values of the excitation cross sections of the (0,0) bands [for O⁺(⁴ S), O⁺(² P)-N₂ pairs] and the (0,0), (0,1), (1,2), and (2,3) bands [for N⁺(³ P)-N₂ pairs] of the first negative system of the N ₂ ⁺ ion have been measured in collisions with nitrogen molecules of nitrogen and oxygen ions in the ground state and in a metastable state in the interval of ion energies 1–10 keV. The process of excitation of the (0,0) band of the first negative system of the N ₂ ⁺ ion by oxygen ions in the metastable ² P state is of a quasi-resonant character. The presence in the beam of ions in metastable states was monitored by measuring the excitation efficiency of the (0,0) band λ3914 Å of the N ₂ ⁺ ion in different operating regimes of the highfrequency ion source. For N⁺ ions in the ³ P ground state, as the collision frequency is decreased the relative vibrational population of the v′=1 and v′=2 levels of the B ²Σ _u ⁺ state of the N ₂ ⁺ ion is observed to deviate strongly from the value calculated in the Franck-Condon model.     

Production and loss of N 2 + , Ne+ and Ne 2 + during the decay period of plasmas produced in neon-nitrogen mixtures

Studies of the time dependencies of the number density of N ₂ ⁺ , Ne⁺ and Ne ₂ ⁺ ions have been made during the decay period of plasmas produced in neon containing various concentrations of nitrogen molecules. Reaction rate constants were obtained for N ₂ ⁺ +N₂+Ne→N ₄ ⁺ +Ne((1.2±0.2)×10^?29 cm⁶ sec^?1) and Ne⁺+N₂→N ₂ ⁺ + Ne ((2.9±0.3) × 10^?12 cm³ sec^?1). The ambipolar diffusion coefficient of N ₂ ⁺ in neon was found to beD _a p _o =350±20 cm² sec^?1 Torr.     

Emission of cyan upon excitation of nitrogen,air, and N<Subscript>2</Subscript>-CH<Subscript>4</Subscript> mixture by discharge pulses in an inhomogeneous electric field

We have studied spectral and amplitude-time characteristics of the emission by nitrogen, air, and the N₂-CH₄ mixture upon excitation by nanosecond and microsecond high-voltage discharge pulses in an inhomogeneous electric field in the pressure range of 0.01–3 atm. In the pulsed and pulse-periodic discharge regimes, we have observed emission bands of the violet system of cyan, the transition B ²Σ⁺ → X ²Σ⁺, which were comparable in intensity with bands of the (2⁺) system of nitrogen. We show that, in the pulsed regime, the highest intensity of the violet system of cyan is observed in the N₂-CH₄ mixture. We show that, in the pulse-periodic discharge in nitrogen with a small amount of a carbon-containing admixture, upon contracting the discharge, the efficiencies of formation and emission of the violet system of cyan considerably increase. We confirm that admixtures of oxygen to nitrogen lead to suppression of the emission of the violet system of cyan molecules.     

Electron spin resonance detection and identification of nitrogen centers in nanodiamonds

Individual nitrogen centers N⁰ and nitrogen pairs N ₂ ⁺ have been detected and identified in natural diamond nanocrystals by means of the high-frequency electron spin resonance method. The N⁰ nitrogen centers have been observed in synthetic diamond nanocrystallites with a size of less than 10 nm produced by high-temperature high-pressure sintering of detonation nanodiamonds. Thus, the possibility of the stable state of impurity nitrogen atoms in diamond nanoparticles has been demonstrated.     

Dinitrogen Fixation of Microbe-Plant Associations as Affected by Nitrate and Ammonium Supply

Abstract

The dinitrogen fixation activity of Azospirillum sp., and Pantoea agglomerans strains was determined by ¹⁵N₂ incorporation after incubation with ¹⁵N₂ labeled air or/and by acetylene reduction. These bacterial strains were able to fix N₂ both in pure culture and in association with wheat plants in hydroponics. Nitrogenase activity of Azospirillum sp., in pure culture was more rapidly inhibited by the addition of NH₄ ⁺ than NO₃ ^?. The N₂ fixation of P. agglomerans decreased only by NH₄ ⁺ -addition, but was stimulated by NO₃ ^?. Nitrogen fixation in association with wheat plants remained unaffected by both N compounds. However, nitrogen derived from the atmosphere (N_dfa) contributed only very little to the overall nitrogen nutrition of the plants.